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- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Venus_Core;
- using Venus_RT.Devices;
- using Venus_RT.Devices.PreAligner;
- using Venus_RT.Devices.TM;
- using Venus_RT.Modules.VCE;
- namespace Venus_RT.Modules.TM.VenusEntity
- {
- public class SEMFPickRoutine : ModuleRoutineBase, IRoutine
- {
- private enum PickStep
- {
- seWaitModuleReady,
- sePrepareModule,
- seCheckStatus,
- seDoorOpen,
- sePAQuery,
- sePALoopStart,
- sePALoopAlign,
- sePALoopPick,
- sePALoopPlace,
- sePALoopEnd,
- sePicking,
- seNotifyDone,
- }
- private TMBase _tm;
- private IPreAlign _vpa;
- private ITransferRobot _robot;
- private VceEntity _vceModule;
- private ModuleName _targetModule;
- private int _targetSlot;
- private int _pickingTimeout;
- public int currentStepNo;
- Hand _hand;
- /// <summary>
- /// 完整pick动作仅可vce vpa取片
- /// </summary>
- /// <param name="tm"></param>
- /// <param name="robot"></param>
- /// <param name="vpa"></param>
- public SEMFPickRoutine(TMBase tm, ITransferRobot robot, IPreAlign vpa, ModuleName module) : base(module)
- {
- _tm = tm;
- _robot = robot;
- _vpa = vpa;
- }
- public RState Start(params object[] objs)
- {
- if (!_robot.IsHomed)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
- return RState.Failed;
- }
- //MoveItem pickItem = new MoveItem() { SourceModule = , };
- var pickItem = (Queue<MoveItem>)objs[0];
- _targetModule = pickItem.Peek().SourceModule;
- _targetSlot = pickItem.Peek().SourceSlot;
- _hand = pickItem.Peek().RobotHand;
- //如果目标是Vce 否则是vpa
- if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
- {
- if (ModuleHelper.IsVCE(VCE2LP.QueryLP2VCE(_targetModule)))
- {
- _vceModule = Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(_targetModule));
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} ,which cannot find VCE2LP");
- return RState.Failed;
- }
- //如果vce有错误 报错
- if (_vceModule.IsError)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
- return RState.Failed;
- }
- if (_targetSlot < 0)
- {
- LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
- return RState.Failed;
- }
- //if (_tm.VCESlitDoorClosed)
- //{
- // LOG.Write(eEvent.ERR_TM, Module, $"cannot pick cause vce slitdoor not open.");
- // return RState.Failed;
- //}
- //如果VCE门是关闭的 说明还未进行pump 无法取片等
- //if (_tm.VCESlitDoorClosed)
- //{
- // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
- // return RState.Failed;
- //}
- }
- //如果目标又不是VPA 报错
- else if (!ModuleHelper.IsAligner(_targetModule))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for pick action");
- return RState.Failed;
- }
- //检查目标手臂上没有wafer
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
- return RState.Failed;
- }
- //检查目标槽位上有wafer
- if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
- {
- LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
- return RState.Failed;
- }
- //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
- //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
- //{
- // if (!_tm.IsVCEATM)
- // {
- // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
- // return RState.Failed;
- // }
- //
- // if (!_tm.IsTMATM)
- // {
- // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
- // return RState.Failed;
- // }
- //}
- //else
- //{
- // if (_tm.IsVCEATM)
- // {
- // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
- // return RState.Failed;
- // }
- //
- // if (_tm.IsTMATM)
- // {
- // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
- // return RState.Failed;
- // }
- //}
- Reset();
- _pickingTimeout = SC.GetValue<int>($"{Module}.PickTimeout") * 1000;
- return Runner.Start(Module, $"Pick from {_targetModule}");
- }
- public RState Monitor()
- {
- //if (ModuleHelper.IsAligner(_targetModule) && Singleton<RouteManager>.Instance.IsAutoRunning)
- //{
- // Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, 10 * 60 * 1000)
- // .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
- // .LoopStart(PickStep.sePALoopStart, "PA Loop Pick", 2, QueryOffset, Aligner1IsIdle, _pickingTimeout)
- // .LoopRunIf(PickStep.sePALoopPick, _vpa.IsOverRange, Picking, WaitPickDone, _pickingTimeout)
- // .LoopRunIf(PickStep.sePALoopPlace, _vpa.IsOverRange, Placing, WaitPlaceDone, _pickingTimeout)
- // .LoopRunIf(PickStep.sePALoopAlign, _vpa.IsOverRange, AlignWafer, Aligner1IsIdle, _pickingTimeout)
- // .LoopEnd(PickStep.sePALoopEnd, QueryOffset, Aligner1IsIdle, _pickingTimeout)
- // .Run(PickStep.sePicking, LastPAPick, WaitPickDone, _pickingTimeout)
- // .End(PickStep.seNotifyDone, NullFun, 500);
- //}
- //else
- {
- Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, 10 * 60 * 1000)
- .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
- .RunIf(PickStep.seDoorOpen, ModuleHelper.IsLoadPort(_targetModule), VCEDoorOpen, CheckVCEDoorOpen)
- .RunIf(PickStep.sePAQuery, ModuleHelper.IsAligner(_targetModule), QueryOffset, Aligner1IsIdle, _pickingTimeout)
- .RunIf(PickStep.seCheckStatus, ModuleHelper.IsLoadPort(_targetModule), VCECheckStatus, CheckStatusIsOk)
- .Run(PickStep.sePicking, Picking, WaitPickDone, _pickingTimeout)
- .End(PickStep.seNotifyDone, NullFun, 500);
- }
- return Runner.Status;
- }
- private bool VCECheckStatus()
- {
- return _vceModule.CheckToPostMessage((int)VceMSG.CheckStatus);
- }
- private bool CheckStatusIsOk()
- {
- return _vceModule.CurrentSlot == (_targetSlot + 1);
- }
- private bool PrepareModule()
- {
- switch (_targetModule)
- {
- case ModuleName.LP1:
- case ModuleName.LP2:
- return _vceModule.CheckToPostMessage((int)VceMSG.Goto, _targetSlot);//移动到目标槽位
- case ModuleName.Aligner1:
- case ModuleName.Aligner2:
- return true;//10/17暂时为true 后可能要求旋转到0
- default:
- return false;
- }
- }
- private bool WaitPlaceDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Placing failed, {_robot.Status}");
- return true;
- }
- }
- //private bool P
- private bool WaitPickDone()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
- return true;
- }
- }
- private bool VCEDoorOpen()
- {
- return _tm.TurnSlitDoor(VCE2LP.QueryLP2VCE(_targetModule), true);
- }
- private bool CheckVCEDoorOpen()
- {
- return _tm.CheckSlitValveOpen(VCE2LP.QueryLP2VCE(_targetModule));
- }
- private bool AlignWafer()
- {
- return _vpa.Align();
- }
- private bool QueryOffset()
- {
- return _vpa.QueryOffset();
- }
- private bool Aligner1IsIdleAndInRange()
- {
- if (_vpa.Status == RState.Running)
- {
- return false;
- }
- else if (_vpa.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"VPA Query Offset failed, {_vpa.Status}");
- return true;
- }
- }
- private bool Aligner1IsIdle()
- {
- if (_vpa.Status == RState.Running)
- {
- return false;
- }
- else if (_vpa.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"VPA Query Offset failed, {_vpa.Status}");
- return true;
- }
- }
- private bool WaitRobotIsIdle()
- {
- if (_robot.Status == RState.Running)
- {
- return false;
- }
- else if (_robot.Status == RState.End)
- {
- return true;
- }
- else
- {
- Runner.Stop($"TM Robot QueryOffset failed, {_robot.Status}");
- return true;
- }
- }
- private bool LastPAPick()
- {
- if (_vpa.IsOverRange)
- {
- Runner.Stop($"VPA is Over Range in 3 times,Pick Failed");
- return false;
- }
- else
- {
- if ((_vpa.ROffset != 0 || _vpa.TOffset != 0))
- {
- int[] RT = calculateRT(_vpa.ROffset, _vpa.TOffset);
- LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"will pick from PA with R:{RT[1]} D:{RT[0]}");
- return _robot.PickWithOffset(_targetModule, 0, _hand, RT[1], RT[0]);
- }
- else
- return _robot.Pick(_targetModule, 0, _hand);
- }
- }
- private bool Picking()
- {
- //到达目标点位 pick固定槽位点的wafer
- if (ModuleHelper.IsAligner(_targetModule))
- {
- if ((_vpa.ROffset != 0 || _vpa.TOffset != 0))
- {
- int[] RT = calculateRT(_vpa.ROffset, _vpa.TOffset);
- LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"will pick from PA with R:{RT[1]} D:{RT[0]}");
- return _robot.PickWithOffset(_targetModule, 0, _hand, RT[1], RT[0]);
- }
- else
- return _robot.Pick(_targetModule, 0, _hand);
- }
- else
- return _robot.Pick(VCE2LP.QueryLP2VCE(_targetModule), 0, _hand);
- }
- private bool Placing()
- {
- return _robot.Place(_targetModule, 0, _hand);
- }
- private int[] calculateRT(int OriginR, int OriginS)
- {
- int[] RT = new int[2];
- try
- {
- bool desflag = false;
- double angle = 0;
- if (OriginR / 10 < 90)
- angle = OriginR / 10;
- if (OriginR / 10 < 270 && OriginR / 10 > 90)
- {
- desflag = true;
- angle = OriginR / 10 - 90;
- }
- if (OriginR / 10 > 270)
- angle = 450 - OriginR / 10;
- double angleInRadians = angle * Math.PI / 180;
- //OriginS * 25.4 inch 转化为 mm
- double Robot2PA = OriginS * 25.4 / 10000;
- double Robot2Wafer = Math.Sqrt(Robot2PA * Robot2PA + 402.5 * 402.5 - 2 * Robot2PA * 402.5 * Math.Cos(angleInRadians));
- //距离(mm)
- double distance = Robot2Wafer - 402.5;
- //角度(度)
- double angleA = Math.Asin(Robot2PA * Math.Sin(angleInRadians) / Robot2Wafer) * 180 / Math.PI;
- if (desflag)
- angleA = -angleA;
- RT[0] = (int)(angleA * 1000);
- RT[1] = (int)(distance * 1000);
- }
- catch
- {
- LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "错误纠偏计算");
- RT[0] = 0;
- RT[1] = 0;
- }
- return RT;
- }
- private bool CheckModuleReady()
- {
- switch (_targetModule)
- {
- case ModuleName.LP1:
- case ModuleName.LP2:
- return _vceModule.IsIdle;
- case ModuleName.Aligner1:
- case ModuleName.Aligner2:
- return _vpa.Status == RState.End;
- default:
- return false;
- }
- }
- public void Abort()
- {
- //_robot.Halt();
- }
- }
- }
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