SEMFPickRoutine.cs 15 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Devices.TM;
  18. using Venus_RT.Modules.VCE;
  19. namespace Venus_RT.Modules.TM.VenusEntity
  20. {
  21. public class SEMFPickRoutine : ModuleRoutineBase, IRoutine
  22. {
  23. private enum PickStep
  24. {
  25. seWaitModuleReady,
  26. sePrepareModule,
  27. seCheckStatus,
  28. seDoorOpen,
  29. sePAQuery,
  30. sePALoopStart,
  31. sePALoopAlign,
  32. sePALoopPick,
  33. sePALoopPlace,
  34. sePALoopEnd,
  35. sePicking,
  36. seNotifyDone,
  37. }
  38. private TMBase _tm;
  39. private IPreAlign _vpa;
  40. private ITransferRobot _robot;
  41. private VceEntity _vceModule;
  42. private ModuleName _targetModule;
  43. private int _targetSlot;
  44. private int _pickingTimeout;
  45. public int currentStepNo;
  46. Hand _hand;
  47. /// <summary>
  48. /// 完整pick动作仅可vce vpa取片
  49. /// </summary>
  50. /// <param name="tm"></param>
  51. /// <param name="robot"></param>
  52. /// <param name="vpa"></param>
  53. public SEMFPickRoutine(TMBase tm, ITransferRobot robot, IPreAlign vpa, ModuleName module) : base(module)
  54. {
  55. _tm = tm;
  56. _robot = robot;
  57. _vpa = vpa;
  58. }
  59. public RState Start(params object[] objs)
  60. {
  61. if (!_robot.IsHomed)
  62. {
  63. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  64. return RState.Failed;
  65. }
  66. //MoveItem pickItem = new MoveItem() { SourceModule = , };
  67. var pickItem = (Queue<MoveItem>)objs[0];
  68. _targetModule = pickItem.Peek().SourceModule;
  69. _targetSlot = pickItem.Peek().SourceSlot;
  70. _hand = pickItem.Peek().RobotHand;
  71. //如果目标是Vce 否则是vpa
  72. if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  73. {
  74. if (ModuleHelper.IsVCE(VCE2LP.QueryLP2VCE(_targetModule)))
  75. {
  76. _vceModule = Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(_targetModule));
  77. }
  78. else
  79. {
  80. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} ,which cannot find VCE2LP");
  81. return RState.Failed;
  82. }
  83. //如果vce有错误 报错
  84. if (_vceModule.IsError)
  85. {
  86. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  87. return RState.Failed;
  88. }
  89. if (_targetSlot < 0)
  90. {
  91. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  92. return RState.Failed;
  93. }
  94. //if (_tm.VCESlitDoorClosed)
  95. //{
  96. // LOG.Write(eEvent.ERR_TM, Module, $"cannot pick cause vce slitdoor not open.");
  97. // return RState.Failed;
  98. //}
  99. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  100. //if (_tm.VCESlitDoorClosed)
  101. //{
  102. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  103. // return RState.Failed;
  104. //}
  105. }
  106. //如果目标又不是VPA 报错
  107. else if (!ModuleHelper.IsAligner(_targetModule))
  108. {
  109. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for pick action");
  110. return RState.Failed;
  111. }
  112. //检查目标手臂上没有wafer
  113. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  114. {
  115. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  116. return RState.Failed;
  117. }
  118. //检查目标槽位上有wafer
  119. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  120. {
  121. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  122. return RState.Failed;
  123. }
  124. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  125. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  126. //{
  127. // if (!_tm.IsVCEATM)
  128. // {
  129. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  130. // return RState.Failed;
  131. // }
  132. //
  133. // if (!_tm.IsTMATM)
  134. // {
  135. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  136. // return RState.Failed;
  137. // }
  138. //}
  139. //else
  140. //{
  141. // if (_tm.IsVCEATM)
  142. // {
  143. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  144. // return RState.Failed;
  145. // }
  146. //
  147. // if (_tm.IsTMATM)
  148. // {
  149. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  150. // return RState.Failed;
  151. // }
  152. //}
  153. Reset();
  154. _pickingTimeout = SC.GetValue<int>($"{Module}.PickTimeout") * 1000;
  155. return Runner.Start(Module, $"Pick from {_targetModule}");
  156. }
  157. public RState Monitor()
  158. {
  159. //if (ModuleHelper.IsAligner(_targetModule) && Singleton<RouteManager>.Instance.IsAutoRunning)
  160. //{
  161. // Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, 10 * 60 * 1000)
  162. // .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
  163. // .LoopStart(PickStep.sePALoopStart, "PA Loop Pick", 2, QueryOffset, Aligner1IsIdle, _pickingTimeout)
  164. // .LoopRunIf(PickStep.sePALoopPick, _vpa.IsOverRange, Picking, WaitPickDone, _pickingTimeout)
  165. // .LoopRunIf(PickStep.sePALoopPlace, _vpa.IsOverRange, Placing, WaitPlaceDone, _pickingTimeout)
  166. // .LoopRunIf(PickStep.sePALoopAlign, _vpa.IsOverRange, AlignWafer, Aligner1IsIdle, _pickingTimeout)
  167. // .LoopEnd(PickStep.sePALoopEnd, QueryOffset, Aligner1IsIdle, _pickingTimeout)
  168. // .Run(PickStep.sePicking, LastPAPick, WaitPickDone, _pickingTimeout)
  169. // .End(PickStep.seNotifyDone, NullFun, 500);
  170. //}
  171. //else
  172. {
  173. Runner.Wait(PickStep.seWaitModuleReady, CheckModuleReady, 10 * 60 * 1000)
  174. .Run(PickStep.sePrepareModule, PrepareModule, CheckModuleReady)
  175. .RunIf(PickStep.seDoorOpen, ModuleHelper.IsLoadPort(_targetModule), VCEDoorOpen, CheckVCEDoorOpen)
  176. .RunIf(PickStep.sePAQuery, ModuleHelper.IsAligner(_targetModule), QueryOffset, Aligner1IsIdle, _pickingTimeout)
  177. .RunIf(PickStep.seCheckStatus, ModuleHelper.IsLoadPort(_targetModule), VCECheckStatus, CheckStatusIsOk)
  178. .Run(PickStep.sePicking, Picking, WaitPickDone, _pickingTimeout)
  179. .End(PickStep.seNotifyDone, NullFun, 500);
  180. }
  181. return Runner.Status;
  182. }
  183. private bool VCECheckStatus()
  184. {
  185. return _vceModule.CheckToPostMessage((int)VceMSG.CheckStatus);
  186. }
  187. private bool CheckStatusIsOk()
  188. {
  189. return _vceModule.CurrentSlot == (_targetSlot + 1);
  190. }
  191. private bool PrepareModule()
  192. {
  193. switch (_targetModule)
  194. {
  195. case ModuleName.LP1:
  196. case ModuleName.LP2:
  197. return _vceModule.CheckToPostMessage((int)VceMSG.Goto, _targetSlot);//移动到目标槽位
  198. case ModuleName.Aligner1:
  199. case ModuleName.Aligner2:
  200. return true;//10/17暂时为true 后可能要求旋转到0
  201. default:
  202. return false;
  203. }
  204. }
  205. private bool WaitPlaceDone()
  206. {
  207. if (_robot.Status == RState.Running)
  208. {
  209. return false;
  210. }
  211. else if (_robot.Status == RState.End)
  212. {
  213. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
  214. return true;
  215. }
  216. else
  217. {
  218. Runner.Stop($"TM Robot Placing failed, {_robot.Status}");
  219. return true;
  220. }
  221. }
  222. //private bool P
  223. private bool WaitPickDone()
  224. {
  225. if (_robot.Status == RState.Running)
  226. {
  227. return false;
  228. }
  229. else if (_robot.Status == RState.End)
  230. {
  231. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  232. return true;
  233. }
  234. else
  235. {
  236. Runner.Stop($"TM Robot Picking failed, {_robot.Status}");
  237. return true;
  238. }
  239. }
  240. private bool VCEDoorOpen()
  241. {
  242. return _tm.TurnSlitDoor(VCE2LP.QueryLP2VCE(_targetModule), true);
  243. }
  244. private bool CheckVCEDoorOpen()
  245. {
  246. return _tm.CheckSlitValveOpen(VCE2LP.QueryLP2VCE(_targetModule));
  247. }
  248. private bool AlignWafer()
  249. {
  250. return _vpa.Align();
  251. }
  252. private bool QueryOffset()
  253. {
  254. return _vpa.QueryOffset();
  255. }
  256. private bool Aligner1IsIdleAndInRange()
  257. {
  258. if (_vpa.Status == RState.Running)
  259. {
  260. return false;
  261. }
  262. else if (_vpa.Status == RState.End)
  263. {
  264. return true;
  265. }
  266. else
  267. {
  268. Runner.Stop($"VPA Query Offset failed, {_vpa.Status}");
  269. return true;
  270. }
  271. }
  272. private bool Aligner1IsIdle()
  273. {
  274. if (_vpa.Status == RState.Running)
  275. {
  276. return false;
  277. }
  278. else if (_vpa.Status == RState.End)
  279. {
  280. return true;
  281. }
  282. else
  283. {
  284. Runner.Stop($"VPA Query Offset failed, {_vpa.Status}");
  285. return true;
  286. }
  287. }
  288. private bool WaitRobotIsIdle()
  289. {
  290. if (_robot.Status == RState.Running)
  291. {
  292. return false;
  293. }
  294. else if (_robot.Status == RState.End)
  295. {
  296. return true;
  297. }
  298. else
  299. {
  300. Runner.Stop($"TM Robot QueryOffset failed, {_robot.Status}");
  301. return true;
  302. }
  303. }
  304. private bool LastPAPick()
  305. {
  306. if (_vpa.IsOverRange)
  307. {
  308. Runner.Stop($"VPA is Over Range in 3 times,Pick Failed");
  309. return false;
  310. }
  311. else
  312. {
  313. if ((_vpa.ROffset != 0 || _vpa.TOffset != 0))
  314. {
  315. int[] RT = calculateRT(_vpa.ROffset, _vpa.TOffset);
  316. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"will pick from PA with R:{RT[1]} D:{RT[0]}");
  317. return _robot.PickWithOffset(_targetModule, 0, _hand, RT[1], RT[0]);
  318. }
  319. else
  320. return _robot.Pick(_targetModule, 0, _hand);
  321. }
  322. }
  323. private bool Picking()
  324. {
  325. //到达目标点位 pick固定槽位点的wafer
  326. if (ModuleHelper.IsAligner(_targetModule))
  327. {
  328. if ((_vpa.ROffset != 0 || _vpa.TOffset != 0))
  329. {
  330. int[] RT = calculateRT(_vpa.ROffset, _vpa.TOffset);
  331. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"will pick from PA with R:{RT[1]} D:{RT[0]}");
  332. return _robot.PickWithOffset(_targetModule, 0, _hand, RT[1], RT[0]);
  333. }
  334. else
  335. return _robot.Pick(_targetModule, 0, _hand);
  336. }
  337. else
  338. return _robot.Pick(VCE2LP.QueryLP2VCE(_targetModule), 0, _hand);
  339. }
  340. private bool Placing()
  341. {
  342. return _robot.Place(_targetModule, 0, _hand);
  343. }
  344. private int[] calculateRT(int OriginR, int OriginS)
  345. {
  346. int[] RT = new int[2];
  347. try
  348. {
  349. bool desflag = false;
  350. double angle = 0;
  351. if (OriginR / 10 < 90)
  352. angle = OriginR / 10;
  353. if (OriginR / 10 < 270 && OriginR / 10 > 90)
  354. {
  355. desflag = true;
  356. angle = OriginR / 10 - 90;
  357. }
  358. if (OriginR / 10 > 270)
  359. angle = 450 - OriginR / 10;
  360. double angleInRadians = angle * Math.PI / 180;
  361. //OriginS * 25.4 inch 转化为 mm
  362. double Robot2PA = OriginS * 25.4 / 10000;
  363. double Robot2Wafer = Math.Sqrt(Robot2PA * Robot2PA + 402.5 * 402.5 - 2 * Robot2PA * 402.5 * Math.Cos(angleInRadians));
  364. //距离(mm)
  365. double distance = Robot2Wafer - 402.5;
  366. //角度(度)
  367. double angleA = Math.Asin(Robot2PA * Math.Sin(angleInRadians) / Robot2Wafer) * 180 / Math.PI;
  368. if (desflag)
  369. angleA = -angleA;
  370. RT[0] = (int)(angleA * 1000);
  371. RT[1] = (int)(distance * 1000);
  372. }
  373. catch
  374. {
  375. LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TMRobot, "错误纠偏计算");
  376. RT[0] = 0;
  377. RT[1] = 0;
  378. }
  379. return RT;
  380. }
  381. private bool CheckModuleReady()
  382. {
  383. switch (_targetModule)
  384. {
  385. case ModuleName.LP1:
  386. case ModuleName.LP2:
  387. return _vceModule.IsIdle;
  388. case ModuleName.Aligner1:
  389. case ModuleName.Aligner2:
  390. return _vpa.Status == RState.End;
  391. default:
  392. return false;
  393. }
  394. }
  395. public void Abort()
  396. {
  397. //_robot.Halt();
  398. }
  399. }
  400. }