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EFEM
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99d939492e
1.加登出界面
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11 months ago |
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LLs
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9d0da84ad2
added cooling safety check.
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11 months ago |
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LPs
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9e9459c927
efem界面按钮功能优化
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1 year ago |
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PMs
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99d939492e
1.加登出界面
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11 months ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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5687e44ebc
Enhance routing algorithm.
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11 months ago |
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TM
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13b51bff63
提交TM Vent配置文件报错gug
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11 months ago |
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VCE
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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1 year ago |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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1 year ago |
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Autotransfer_LP_FA.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 year ago |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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1 year ago |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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RouteManager.cs
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652daaa81a
cycle uncheck bug修复
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1 year ago |
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SEManualTransfer.cs
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 year ago |
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SETMCycle.cs
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 year ago |
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SystemDispatcher.cs
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99d939492e
1.加登出界面
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11 months ago |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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VenusDispatcher.cs
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5687e44ebc
Enhance routing algorithm.
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11 months ago |
lixiang
13b51bff63
提交TM Vent配置文件报错gug