HongHuVR.cs 27 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Core.Util;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.CommonData;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  9. using System;
  10. using System.Collections.Concurrent;
  11. using System.Collections.Generic;
  12. using System.ComponentModel;
  13. using System.Diagnostics.Tracing;
  14. using System.Linq;
  15. using System.Runtime.InteropServices;
  16. using System.Text;
  17. using System.Text.RegularExpressions;
  18. using System.Threading.Tasks;
  19. using Venus_Core;
  20. using Venus_RT.Modules;
  21. namespace Venus_RT.Devices.VCE
  22. {
  23. //泓浒
  24. enum VRStep
  25. {
  26. Idle,
  27. Home,
  28. Move,
  29. Halt,
  30. Release,
  31. Goto,
  32. Pick,
  33. PickExtend,
  34. PickRetract,
  35. Place,
  36. PlaceExtend,
  37. PlaceRetract,
  38. Xfer,
  39. CheckLoad_ArmA,
  40. CheckLoad_ArmB,
  41. SetLoad,
  42. ReQueryLoadA,
  43. ReQueryLoadB,
  44. SetSpeed,
  45. SaveSpeed,
  46. RQSpeed
  47. }
  48. public class HongHuVR : ITransferRobot
  49. {
  50. private readonly AsyncSocket _socket;
  51. private const string EOF = "\n";
  52. private RState _status;
  53. private bool _IsHomed;
  54. private VRStep _currentStep = VRStep.Idle;
  55. private Dictionary<string, int> _StationNumbers = new Dictionary<string, int>();
  56. public RState Status { get { return _status; } }
  57. public bool IsHomed { get { return _IsHomed; } }
  58. private string Hand2Arm(Hand hand) => hand == Hand.Blade2 ? "B" : "A";
  59. //private readonly Regex _rex_check_load = new Regex(@"LOAD\s+(A|B)\s+(\w+)\s*");
  60. private readonly Regex _rex_check_load = new Regex(@"CHECK LOAD\s*");
  61. private readonly Regex _rex_rq_load_A = new Regex(@"LOAD\sA\s.*");
  62. private readonly Regex _rex_rq_load_B = new Regex(@"LOAD\sB\s.*");
  63. private readonly Regex _rex_error_code = new Regex(@"_ERR\s+(\d+)\s*");
  64. private readonly Regex _rex_rq_speed = new Regex(@"MOTIONPARA.*");
  65. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  66. private string _WithWaferSpeed = "";
  67. private string _NoWaferSpeed = "";
  68. public string WithWaferSpeed => _WithWaferSpeed;
  69. public string NoWaferSpeed => _NoWaferSpeed;
  70. public RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  71. public double Offset_X => 0;
  72. public double Offset_Y => 0;
  73. public double Offset_D => 0;
  74. public Dictionary<string, string> _error2msg = new Dictionary<string, string>()
  75. {
  76. {"221" , "手臂选择无效,检查指令中的对应参数" },
  77. {"222" , "无效的 Pan 参数"},
  78. {"305" , "无法识别的命令,检查指令" },
  79. {"309" , "不支持的指令,检查指令" },
  80. {"350" , "解析器错误,堆栈溢出,检查指令" },
  81. {"402" , "槽位参数异常,检查指令中的对应参数" },
  82. {"403" , "Slot编号错误,指令的参数中指定的 Slot 编号超过了有效范围" },
  83. {"407" , "旋转轴超过限位,检查指令中的对应参数" },
  84. {"408" , "伸展轴超过限位,检查指令中的对应参数" },
  85. {"409" , "升降轴超过限位,检查指令中的对应参数" },
  86. {"416" , "无法执行 CheckLoad 操作,检查指令中的对应参数" },
  87. {"417" , "Offset 参数参数超限,检查指令中指定的 offset 值是否在允许范围内" },
  88. {"418" , "AWC 功能检测到误差过大,检查晶圆是否过偏或检查AWC传感器标定参数" },
  89. {"420" , "副臂没有在HOME位置,请检查副臂的位置,可以使用HOME ALL使得所有关节姿态回到HOME位置" },
  90. {"451" , "取片后 AWC校验异常,机械臂取片后缩回时,检测到晶圆偏心过大,或者 AWC 校验失败" },
  91. {"550" , "Station参数超出范围,检查站点配置参数" },
  92. {"551" , "ARM 不在站点,检查当前手臂实际位置与逻辑位置" },
  93. {"560" , "机械臂处于 HALT 状态,拒绝接受新的指令" },
  94. {"561" , "当前机械臂状态机与指令不匹配,当前状态机不满足执行该指令的条件" },
  95. {"600" , "PAligner通讯异常,检查与 PA 的通讯电缆,上电情况等" },
  96. {"603" , "收到急停指令" },
  97. {"608" , "机械臂急停中" },
  98. {"610" , "手持示教器急停按钮按下" },
  99. {"692" , "检测左 PAN 上有片,与逻辑状态不匹配" },
  100. {"693" , "检测右 PAN 上有片,与逻辑状态不匹配" },
  101. {"694" , "检测左 PAN 上无片,与逻辑状态不匹配" },
  102. {"695" , "检测右 PAN 上有片,与逻辑状态不匹配" },
  103. {"700" , "当前手臂有晶圆 ,检查指令动作要求的晶圆状态,与手臂内部存储的晶圆状态是否匹配" },
  104. {"701" , "当前手臂无晶圆,检查指令动作要求的晶圆状态,与手臂内部存储的晶圆状态是否匹配"},
  105. {"711" , "站点互锁错误,检查站点的“允许机械臂进入信号”是否就绪"},
  106. {"721" , "取片失败,检查手臂晶圆状态,或者晶圆检测传感器状态"},
  107. {"722" , "放片失败,检查手臂晶圆状态,或者晶圆检测传感器状态"},
  108. {"771" , "取片时 AWC 传感器检测失败,检查 AWC 传感器状态,或者 AWC 配置相关是否正确"},
  109. {"791" , "查询 AWC 数据失败,未曾执行过 AWC 相关功能的操作"},
  110. {"792" , "AWC 传感器检测失败,检查AWC传感器状态,或者AWC配置相关是否正确"},
  111. {"799" , "放片失败,检查手臂晶圆状态,或者晶圆检测传感器状态"},
  112. {"802" , "伺服报错,伺服提示异常,目前暂时无法读取伺服错误。开机盖可以读到伺服信息。一般整机断电重启。"},
  113. {"803" , "机械臂上电失败,HOME ALL 指令,或者其他上电操作,驱动器未能正常响应上电"},
  114. {"805" , "第1个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  115. {"806" , "第2个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  116. {"807" , "第3个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  117. {"808" , "第4个伺服收敛异常,伺服没有在规定时间内运动到位置,或者停稳。"},
  118. {"1100" , "无法安全回 HOME 操作,检查机械臂是否在安全 HOME 半径内,常见于双臂机械臂,双臂同时伸出超过安全位"},
  119. {"1805" , "当前处于示教器模式,检查示教器档位,一般此时处于 Teach 档位"},
  120. {"13004" , "PA报错,检查 PA 运行状态,PA 扫片结果等"},
  121. };
  122. private BlockingCollection<RobotAnimationData> blockingCollection = new BlockingCollection<RobotAnimationData>();
  123. private ModuleName _module;
  124. public HongHuVR(ModuleName module)
  125. {
  126. _module = module;
  127. _socket = new AsyncSocket("", EOF);
  128. _socket.Connect(SC.GetStringValue($"{_module}.IPAddress"));
  129. _socket.OnDataChanged += OnReceiveMessage;
  130. _socket.OnErrorHappened += OnErrorHappen;
  131. _status = RState.Init;
  132. _IsHomed = false;
  133. _StationNumbers[ModuleName.VCE1.ToString()] = SC.GetValue<int>($"{_module}.VCE1StationNumber");
  134. _StationNumbers[ModuleName.VCEA.ToString()] = SC.GetValue<int>($"{_module}.VCEAStationNumber");
  135. _StationNumbers[ModuleName.VCEB.ToString()] = SC.GetValue<int>($"{_module}.VCEBStationNumber");
  136. _StationNumbers[ModuleName.Aligner1.ToString()] = SC.GetValue<int>($"{_module}.Aligner1StationNumber");
  137. _StationNumbers[ModuleName.PMA.ToString()] = SC.GetValue<int>($"{_module}.PMAStationNumber");
  138. _StationNumbers[ModuleName.PMB.ToString()] = SC.GetValue<int>($"{_module}.PMBStationNumber");
  139. _StationNumbers[ModuleName.PMC.ToString()] = SC.GetValue<int>($"{_module}.PMCStationNumber");
  140. _StationNumbers[ModuleName.PMD.ToString()] = SC.GetValue<int>($"{_module}.PMDStationNumber");
  141. _StationNumbers["CheckLoad"] = SC.GetValue<int>($"{_module}.CheckStationNumber");
  142. WaferManager.Instance.SubscribeLocation(ModuleName.TMRobot, 2);
  143. Task.Run(() =>
  144. {
  145. foreach (var data in blockingCollection.GetConsumingEnumerable())
  146. {
  147. _robotMoveInfo.Action = data.Action;
  148. _robotMoveInfo.ArmTarget = data.Hand == Hand.Blade1 ? RobotArm.ArmA : (data.Hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  149. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{data.Target}";
  150. System.Threading.Thread.Sleep(600);
  151. }
  152. });
  153. }
  154. //初始化某个轴
  155. //1.清错
  156. //2.设备上电
  157. //3.各轴按顺序运动
  158. public bool Home()
  159. {
  160. _status = RState.Running;
  161. _currentStep = VRStep.Home;
  162. return _SendCommand("HOME ALL");
  163. }
  164. public bool Halt()
  165. {
  166. _status = RState.Running;
  167. _currentStep = VRStep.Halt;
  168. return _SendCommand("HALT");
  169. }
  170. public bool Release()
  171. {
  172. _status = RState.Running;
  173. _currentStep = VRStep.Release;
  174. return _SendCommand("RELEASE");
  175. }
  176. //public bool MOVE()
  177. //{
  178. //}
  179. public bool Pick(ModuleName station, int slot, Hand hand)
  180. {
  181. if (!CheckRobotStatus())
  182. return false;
  183. _currentStep = VRStep.Pick;
  184. _status = RState.Running;
  185. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  186. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)}");
  187. }
  188. public bool PickExtend(ModuleName station, int slot, Hand hand)
  189. {
  190. if (!CheckRobotStatus())
  191. return false;
  192. _currentStep = VRStep.PickExtend;
  193. _status = RState.Running;
  194. SetRobotMovingInfo(RobotAction.Extending, hand, station);
  195. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} ENRT NR");
  196. }
  197. public bool PickRetract(ModuleName station, int slot, Hand hand)
  198. {
  199. if (!CheckRobotStatus())
  200. return false;
  201. _currentStep = VRStep.PickRetract;
  202. _status = RState.Running;
  203. SetRobotMovingInfo(RobotAction.Retracting, hand, station);
  204. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} STRT NR");
  205. }
  206. public bool Place(ModuleName station, int slot, Hand hand)
  207. {
  208. if (!CheckRobotStatus())
  209. return false;
  210. _currentStep = VRStep.Place;
  211. _status = RState.Running;
  212. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  213. return _SendCommand($"PLACE {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)}");
  214. }
  215. public bool PlaceExtend(ModuleName station, int slot, Hand hand)
  216. {
  217. if (!CheckRobotStatus())
  218. return false;
  219. _currentStep = VRStep.Place;
  220. _status = RState.Running;
  221. SetRobotMovingInfo(RobotAction.Extending, hand, station);
  222. return _SendCommand($"PLACE {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} ENRT NR");
  223. }
  224. public bool PlaceRetract(ModuleName station, int slot, Hand hand)
  225. {
  226. if (!CheckRobotStatus())
  227. return false;
  228. _currentStep = VRStep.Place;
  229. _status = RState.Running;
  230. SetRobotMovingInfo(RobotAction.Retracting, hand, station);
  231. return _SendCommand($"PLACE {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} STRT NR");
  232. }
  233. public bool Transfer(ModuleName fromstation, ModuleName tostation, Hand hand)
  234. {
  235. if (!CheckRobotStatus())
  236. return false;
  237. _currentStep = VRStep.Xfer;
  238. _status = RState.Running;
  239. return _SendCommand($"XFER ARM {Hand2Arm(hand)} {_StationNumbers[fromstation.ToString()]} {_StationNumbers[tostation.ToString()]}");
  240. }
  241. public bool CheckLoad(Hand hand = Hand.Blade1)
  242. {
  243. if (_currentStep != VRStep.Home && _currentStep != VRStep.CheckLoad_ArmA && !CheckRobotStatus())
  244. return false;
  245. _currentStep = hand == Hand.Blade2 ? VRStep.CheckLoad_ArmB : VRStep.CheckLoad_ArmA;
  246. _status = RState.Running;
  247. string arm = hand == Hand.Blade2 ? "B" : "A";
  248. return _SendCommand($"CHECK LOAD {_StationNumbers["CheckLoad"]} {arm}");
  249. }
  250. public bool QueryAwc()
  251. {
  252. return true;
  253. }
  254. public bool Goto(ModuleName station, int slot, Hand hand)
  255. {
  256. if (!CheckRobotStatus())
  257. return false;
  258. _currentStep = VRStep.Goto;
  259. _status = RState.Running;
  260. SetRobotMovingInfo(RobotAction.Rotating, hand, station);
  261. return _SendCommand($"Goto {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)}");
  262. }
  263. public bool MoveTo(ModuleName stnFrom, ModuleName stnTo, Hand hand)
  264. {
  265. _currentStep = VRStep.Move;
  266. _status = RState.Running;
  267. return _SendCommand($"MOVE R ABS 100 ARM {Hand2Arm(hand)}"); ;
  268. }
  269. public bool PickWithOffset(ModuleName station, int slot, Hand hand, int Roffset, int Toffset)
  270. {
  271. _currentStep = VRStep.Pick;
  272. _status = RState.Running;
  273. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  274. return _SendCommand($"PICK {_StationNumbers[station.ToString()]} ARM {Hand2Arm(hand)} RO {Roffset} TO {Toffset}"); ;
  275. }
  276. public bool ReQueryLoadA()
  277. {
  278. _currentStep = VRStep.ReQueryLoadA;
  279. _status = RState.Running;
  280. return _SendCommand($"RQ LOAD ARM A");
  281. }
  282. public bool ReQueryLoadB()
  283. {
  284. _currentStep = VRStep.ReQueryLoadB;
  285. _status = RState.Running;
  286. return _SendCommand($"RQ LOAD ARM B");
  287. }
  288. public bool SetSpeed(string withwafer, float speed)
  289. {
  290. if (!CheckRobotStatus())
  291. return false;
  292. _currentStep = VRStep.SetSpeed;
  293. _status = RState.Running;
  294. int setspeed = (int)Math.Floor(speed * 10);
  295. return _SendCommand($"SET MOTIONPARA {withwafer} SPDPCT ALL {setspeed.ToString().PadLeft(4, '0')}");
  296. }
  297. public bool SaveSpeed(string withwafer)
  298. {
  299. if (!CheckRobotStatus())
  300. return false;
  301. _currentStep = VRStep.SaveSpeed;
  302. _status = RState.Running;
  303. return _SendCommand($"STORE MOTIONPARA {withwafer} SPDPCT ALL");
  304. }
  305. public bool QuerySpeed(string withwafer)
  306. {
  307. if (!CheckRobotStatus())
  308. return false;
  309. _currentStep = VRStep.RQSpeed;
  310. _status = RState.Running;
  311. //MOTIONPARA {} SPDPCT all x t z
  312. return _SendCommand($"RQ MOTIONPARA {withwafer} SPDPCT ALL");
  313. }
  314. private bool _SendCommand(string cmd)
  315. {
  316. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Send Command to TMRobot: {cmd},Connect:{_socket.IsConnected}");
  317. return _socket.Write(cmd + EOF);
  318. }
  319. private bool CheckRobotStatus()
  320. {
  321. if (Status == RState.Init)
  322. {
  323. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, "TMRobot is not homed, please home first.");
  324. return false;
  325. }
  326. else if (Status == RState.Running)
  327. {
  328. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, "TMRobot is busy, please wait a minute");
  329. return false;
  330. }
  331. else if (Status == RState.Failed || Status == RState.Timeout)
  332. {
  333. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, "TMRobot has a error, please check and fix the hardware issue and home it");
  334. return false;
  335. }
  336. return true;
  337. }
  338. private void OnReceiveMessage(string revMsg)
  339. {
  340. string[] ResMsgs = revMsg.Split('\n');
  341. foreach (string revRawMsg in ResMsgs)
  342. {
  343. if (string.IsNullOrWhiteSpace(revRawMsg)) continue;
  344. string RevMsg = revRawMsg.Trim();
  345. LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"Receive message from TMRobot: {RevMsg}, while {_currentStep}");
  346. if (_rex_error_code.IsMatch(RevMsg))
  347. {
  348. _IsHomed = false;
  349. _status = RState.Failed;
  350. var results = _rex_error_code.Match(RevMsg);
  351. ErrorMessageHandler(results.Groups[1].Value);
  352. return;
  353. }
  354. switch (_currentStep)
  355. {
  356. case VRStep.Goto:
  357. case VRStep.Halt:
  358. case VRStep.Move:
  359. case VRStep.Xfer:
  360. case VRStep.SetSpeed:
  361. case VRStep.SaveSpeed:
  362. case VRStep.Pick:
  363. case VRStep.PickExtend:
  364. case VRStep.PickRetract:
  365. case VRStep.Place:
  366. case VRStep.PlaceExtend:
  367. case VRStep.PlaceRetract:
  368. {
  369. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  370. {
  371. _currentStep = VRStep.Idle;
  372. _status = RState.End;
  373. }
  374. else
  375. {
  376. ReportWrongMsg(RevMsg);
  377. }
  378. if (_currentStep != VRStep.PickExtend && _currentStep != VRStep.PlaceExtend)
  379. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.TMRobot);
  380. }
  381. break;
  382. case VRStep.Home:
  383. {
  384. if (RevMsg.Trim() == "_RDY")
  385. {
  386. //CheckLoad(Hand.Blade1);
  387. _currentStep = VRStep.Idle;
  388. _status = RState.End;
  389. _IsHomed = true;
  390. SetRobotMovingInfo(RobotAction.Homing, Hand.Both, ModuleName.TMRobot);
  391. }
  392. else
  393. ReportWrongMsg(RevMsg);
  394. }
  395. break;
  396. case VRStep.CheckLoad_ArmA:
  397. {
  398. if (_rex_check_load.IsMatch(RevMsg))
  399. {
  400. GetCheckLoadResult(RevMsg);
  401. //CheckLoad(Hand.Blade2);
  402. }
  403. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  404. {
  405. _currentStep = VRStep.Idle;
  406. _status = RState.End;
  407. }
  408. }
  409. break;
  410. case VRStep.CheckLoad_ArmB:
  411. {
  412. if (_rex_check_load.IsMatch(RevMsg))
  413. {
  414. GetCheckLoadResult(RevMsg);
  415. //_currentStep = VRStep.Idle;
  416. //_status = RState.End;
  417. //_IsHomed = true;
  418. }
  419. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  420. {
  421. _currentStep = VRStep.Idle;
  422. _status = RState.End;
  423. }
  424. }
  425. break;
  426. case VRStep.ReQueryLoadA:
  427. if (_rex_rq_load_A.IsMatch(RevMsg))
  428. {
  429. string WaferStatus = RevMsg.Split(' ')[2];
  430. //LOG.Write(eEvent.WARN_DEFAULT_WARN, ModuleName.TMRobot, WaferStatus);
  431. if (WaferStatus.Contains("ON") && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0))
  432. {
  433. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, 0, Aitex.Core.Common.WaferStatus.Normal);
  434. }
  435. if (WaferStatus.Contains("OFF"))
  436. {
  437. //LOG.Write(eEvent.WARN_DEFAULT_WARN, ModuleName.TMRobot, "contains off");
  438. WaferManager.Instance.DeleteWafer(ModuleName.TMRobot, 0);
  439. }
  440. }
  441. else
  442. {
  443. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  444. {
  445. _currentStep = VRStep.Idle;
  446. _status = RState.End;
  447. }
  448. else
  449. {
  450. ReportWrongMsg(RevMsg);
  451. }
  452. }
  453. break;
  454. case VRStep.ReQueryLoadB:
  455. if (_rex_rq_load_B.IsMatch(RevMsg))
  456. {
  457. string WaferStatus = RevMsg.Split(' ')[2];
  458. //LOG.Write(eEvent.WARN_DEFAULT_WARN, ModuleName.TMRobot, WaferStatus);
  459. if (WaferStatus.Contains("ON") && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
  460. {
  461. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, 1, Aitex.Core.Common.WaferStatus.Normal);
  462. }
  463. if (WaferStatus.Contains("OFF"))
  464. {
  465. WaferManager.Instance.DeleteWafer(ModuleName.TMRobot, 1);
  466. }
  467. }
  468. else
  469. {
  470. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  471. {
  472. _currentStep = VRStep.Idle;
  473. _status = RState.End;
  474. }
  475. else
  476. {
  477. ReportWrongMsg(RevMsg);
  478. }
  479. }
  480. break;
  481. case VRStep.RQSpeed:
  482. //MOTIONPARA {} SPDPCT all r t z
  483. if (_rex_rq_speed.IsMatch(RevMsg))
  484. {
  485. string[] _msgs = RevMsg.Split(' ');
  486. if (_msgs[1] == "WITHWAFER")
  487. {
  488. _WithWaferSpeed = _msgs[4];
  489. }
  490. if (_msgs[1] == "NOWAFER")
  491. {
  492. _NoWaferSpeed = _msgs[4];
  493. }
  494. if (_msgs[1] == "MIDDLE")
  495. {
  496. _WithWaferSpeed = _msgs[4];
  497. }
  498. }
  499. else
  500. {
  501. if (RevMsg.Trim() == "_RDY" || (RevMsg.Contains("_RDY") && !RevMsg.Contains("_ERR")))
  502. {
  503. _currentStep = VRStep.Idle;
  504. _status = RState.End;
  505. }
  506. else
  507. {
  508. ReportWrongMsg(RevMsg);
  509. }
  510. }
  511. break;
  512. default:
  513. if (!RevMsg.Contains("_EVENT"))
  514. ReportWrongMsg(RevMsg);
  515. break;
  516. }
  517. }
  518. }
  519. private void GetCheckLoadResult(string revMsg)
  520. {
  521. Match result = _rex_check_load.Match(revMsg);
  522. string Arm = result.Groups[1].Value;
  523. string WaferStatus = result.Groups[2].Value;
  524. if (WaferStatus == "ON")
  525. {
  526. WaferManager.Instance.CreateWafer(ModuleName.TMRobot, Arm == "A" ? 0 : 1, Aitex.Core.Common.WaferStatus.Unknown);
  527. }
  528. }
  529. private void ErrorMessageHandler(string errorcode)
  530. {
  531. _status = RState.Failed;
  532. string ErrorInfo;
  533. if (_error2msg.ContainsKey(errorcode))
  534. {
  535. ErrorInfo = _error2msg[errorcode];
  536. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, ErrorInfo);
  537. }
  538. else
  539. {
  540. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, $"Dictionary Not Contains error code:{errorcode}");
  541. }
  542. _IsHomed = false;
  543. }
  544. private void OnErrorHappen(ErrorEventArgs args)
  545. {
  546. //Singleton<RouteManager>.Instance.SETM.PostMsg(SETMEntity.MSG.Error);
  547. LOG.Write(eEvent.ERR_DEVICE_INFO, ModuleName.TMRobot, $"HongHu TMRobot Error: {args.Reason} while {_currentStep}");
  548. }
  549. private void ReportWrongMsg(string revMsg)
  550. {
  551. LOG.Write(eEvent.WARN_DEVICE_INFO, ModuleName.TMRobot, $"Receive wrong message:{revMsg} while {_currentStep}");
  552. }
  553. public void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  554. {
  555. //_robotMoveInfo.Action = action;
  556. //_robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  557. //_robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";
  558. blockingCollection.Add(new RobotAnimationData(action, hand, target));
  559. }
  560. }
  561. }