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Account
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2b930e56b9
Log output for exception.
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2 years ago |
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Backend
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896c7407de
优化log功能
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2 years ago |
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CommonData
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
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Communications
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99d939492e
1.加登出界面
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1 year ago |
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Config
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56cd0ab611
add framework
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2 years ago |
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ControlDataContext
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caba8d94c6
Duplicated Wafer UI显示
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1 year ago |
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DBCore
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5ce110574e
1，添加cooling功能
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1 year ago |
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DataCenter
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5ce110574e
1，添加cooling功能
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1 year ago |
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DataCollection
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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Device
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99d939492e
1.加登出界面
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1 year ago |
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Event
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5ce110574e
1，添加cooling功能
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1 year ago |
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FAServices
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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Fsm
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5687e44ebc
Enhance routing algorithm.
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1 year ago |
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IOCore
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
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Jobs
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99d939492e
1.加登出界面
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1 year ago |
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Key
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2b930e56b9
Log output for exception.
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2 years ago |
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Log
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99d939492e
1.加登出界面
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1 year ago |
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MVVM
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022b90d66b
1、fixed simulator memory overflow bug
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1 year ago |
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NotifyTrayIcons
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56cd0ab611
add framework
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2 years ago |
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OperationCenter
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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PLC
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2b930e56b9
Log output for exception.
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2 years ago |
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Platform
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56cd0ab611
add framework
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2 years ago |
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Properties
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56cd0ab611
add framework
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2 years ago |
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RecipeCenter
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4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
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Resources
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5b037046f9
Add TM/LL modules.
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2 years ago |
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Routine
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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1 year ago |
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SCCore
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e2836bfbda
1.Chamber DE process enhance
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1 year ago |
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Simulator
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2b930e56b9
Log output for exception.
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2 years ago |
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StylableWindow
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56cd0ab611
add framework
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2 years ago |
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SubstrateTrackings
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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1 year ago |
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Tolerance
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99d939492e
1.加登出界面
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1 year ago |
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Utilities
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a80b5af3fd
enhance manual return wafer algorithm.
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1 year ago |
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WCF
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2b930e56b9
Log output for exception.
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2 years ago |
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Common.csproj
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25954d684c
update EquipmentVariables.xml and Secsgem dll
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1 year ago |
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Common.csproj.user
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
lixiang
99d939492e
1.加登出界面