OverVenusViewModel.cs 64 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using Aitex.Core.RT.Log;
  23. namespace Venus_MainPages.ViewModels
  24. {
  25. internal class OverVenusViewModel : BindableBase
  26. {
  27. #region 私有字段
  28. private List<string> m_CurrentModuleRecipes=new List<string>();
  29. private bool m_PVN21ValveIsOpen;
  30. private bool m_PVN22ValveIsOpen;
  31. private bool m_N2ValveIsOpen;
  32. private bool m_PV11ValveIsOpen;
  33. private bool m_PV12ValveIsOpen;
  34. private bool m_PV21ValveIsOpen;
  35. private bool m_PV22ValveIsOpen;
  36. private bool m_PV31ValveIsOpen;
  37. private bool m_PV32ValveIsOpen;
  38. private bool m_PV41ValveIsOpen;
  39. private bool m_PV42ValveIsOpen;
  40. private bool m_MFC1ValveIsOpen;
  41. private bool m_MFC2ValveIsOpen;
  42. private bool m_MFC3ValveIsOpen;
  43. private bool m_MFC4ValveIsOpen;
  44. private bool m_MFC5ValveIsOpen;
  45. private bool m_MFC6ValveIsOpen;
  46. private bool m_MFC7ValveIsOpen;
  47. private bool m_MFC8ValveIsOpen;
  48. private bool m_GasFinalValveIsOpen;
  49. private bool m_SoftPumpValveIsOpen;
  50. private bool m_FastPumpValveIsOpen;
  51. private bool m_PVHe1ValveIsOpen;
  52. private bool m_PVHe2ValveIsOpen;
  53. private bool m_PVHe3ValveIsOpen;
  54. private bool m_HeISOValveIsOpen;
  55. private bool m_TurboPumpPumpingValveIsOpen;
  56. private bool m_TurboPumpPurgeValveIsOpen;
  57. private bool m_GuageValveIsOpen;
  58. private bool m_PendulumValveIsOpen;
  59. //private bool m_BRFIsOn;
  60. //private bool m_SRFIsOn;
  61. private double m_HeGasSetpoint;
  62. private int m_HePressureSetpoint;
  63. private float m_SRFFwdPowerSetpoint;
  64. private float m_BRFFwdPowerSetpoint;
  65. private float m_SRFMatchC1;
  66. private float m_SRFMatchC2;
  67. private float m_BRFMatchC1;
  68. private float m_BRFMatchC2;
  69. private double m_MFC1SetPoint;
  70. private double m_MFC2SetPoint;
  71. private double m_MFC3SetPoint;
  72. private double m_MFC4SetPoint;
  73. private double m_MFC5SetPoint;
  74. private double m_MFC6SetPoint;
  75. private double m_MFC7SetPoint;
  76. private double m_MFC8SetPoint;
  77. private double m_N2SetPoint;
  78. private double m_TurboN2FlowSetPoint;
  79. private AITMfcData m_MFC1Data;
  80. private AITMfcData m_MFC2Data;
  81. private AITMfcData m_MFC3Data;
  82. private AITMfcData m_MFC4Data;
  83. private AITMfcData m_MFC5Data;
  84. private AITMfcData m_MFC6Data;
  85. private AITMfcData m_MFC7Data;
  86. private AITMfcData m_MFC8Data;
  87. private AITMfcData m_MFCHeData;
  88. private AITMfcData m_MFCN2Data;
  89. private AITHeaterData m_ValveHeaterData;
  90. private AITHeaterData m_ForelineHeaterData;
  91. private AITHeaterData m_WallHeaterData;
  92. private AITRfData m_SRFData;
  93. private AITRfData m_BRFData;
  94. private AITPendulumValveData m_PendulumValveData;
  95. private AITHVData m_ESCHVData;
  96. private PMState m_PMCurrentState;
  97. private bool m_SourceRFFanInterlock;
  98. private bool m_IsWLK;
  99. private bool m_IsWaterFlowOk;
  100. private bool m_IsTurboPumpInterlock;
  101. private bool m_IsCDAOK;
  102. private bool m_SensorGasBoxDoor;
  103. private bool m_SensorGasBoxPressure;
  104. private bool m_PumpIsOpen;
  105. private bool m_TurboIsOpen;
  106. private bool m_IsATM;
  107. private bool m_IsVAC;
  108. private List<string> m_RtDataKeys;
  109. private Dictionary<string, object> m_RtDataValues;
  110. private int m_PositionValue;
  111. private bool m_IsPositionMode;
  112. private int m_ESCVoltage;
  113. private bool m_GasIsFlowing;
  114. private bool m_IsProcessing;
  115. private bool m_IsAutoMode;
  116. private string m_SelectedRecipe;
  117. private float m_ChillerTempSetpoint;
  118. private float m_WallTempSetpoint;
  119. private bool m_HeIsPressureMode=true;
  120. private bool m_ChillerIsOn;
  121. private float m_ProcessHighPressure;
  122. private float m_ProcessLowPressure;
  123. private float m_ForelinePressurePressure;
  124. private float m_ESCHePressure;
  125. ButterflyValveView butterflyValveMessageBox;
  126. HeaterView heaterView;
  127. private int m_TurboPumpRotationalSpeed;
  128. private bool m_LiftPinIsUp;
  129. private bool m_IsSlitDoorClosed;
  130. private bool m_IsLidClosed;
  131. private float m_ChillerTemperature;
  132. private float m_HVTemperature;
  133. private int m_ESCHVOutputVoltage;
  134. //private float m_SRfReflectPower;
  135. //private float m_SRfForwardPowerFeedBack;
  136. //private float m_BRfReflectPower;
  137. //private float m_BRfForwardPowerFeedBack;
  138. //private int m_MatchWorkMode;
  139. //private int m_BiasMatchWorkMode;
  140. private float m_MatchC1;
  141. private float m_MatchC2;
  142. private float m_BiasMatchC1;
  143. private float m_BiasMatchC2;
  144. private float m_PendulumValvePosition;
  145. private bool m_IsTurboPumpAtSpeed;
  146. private bool m_TurboPumpWaterFlowSwitch;
  147. private bool m_IsHasWafer;
  148. private Recipe m_CurrentRecipe=new Recipe ();
  149. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  150. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  151. private double m_ChamberPressureFeedBack;
  152. private string m_WaferID;
  153. #endregion
  154. #region 属性
  155. public List<string> CurrentModuleRecipes
  156. {
  157. get { return m_CurrentModuleRecipes; }
  158. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  159. }
  160. public Recipe CurrentRecipe
  161. {
  162. get { return m_CurrentRecipe; }
  163. set { SetProperty(ref m_CurrentRecipe, value); }
  164. }
  165. public RecipeResult CurrentRecipeResult
  166. {
  167. get { return m_CurrentRecipeResult; }
  168. set { SetProperty(ref m_CurrentRecipeResult, value); }
  169. }
  170. public RecipeStep CurrentRecipeStep
  171. {
  172. get { return m_CurrentRecipeStep; }
  173. set { SetProperty(ref m_CurrentRecipeStep, value); }
  174. }
  175. public bool IsHasWafer
  176. {
  177. get { return m_IsHasWafer; }
  178. set { SetProperty(ref m_IsHasWafer, value); }
  179. }
  180. public bool IsTurboPumpAtSpeed
  181. {
  182. get { return m_IsTurboPumpAtSpeed; }
  183. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  184. }
  185. public bool TurboPumpWaterFlowSwitch
  186. {
  187. get { return m_TurboPumpWaterFlowSwitch; }
  188. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  189. }
  190. public float PendulumValvePosition
  191. {
  192. get { return m_PendulumValvePosition; }
  193. set{SetProperty(ref m_PendulumValvePosition, value);}
  194. }
  195. public float BiasMatchC1
  196. {
  197. get { return m_BiasMatchC1; }
  198. set
  199. {
  200. SetProperty(ref m_BiasMatchC1, value);
  201. }
  202. }
  203. public float BiasMatchC2
  204. {
  205. get { return m_BiasMatchC2; }
  206. set
  207. {
  208. SetProperty(ref m_BiasMatchC2, value);
  209. }
  210. }
  211. public float MatchC1
  212. {
  213. get { return m_MatchC1; }
  214. set
  215. {
  216. SetProperty(ref m_MatchC1, value);
  217. }
  218. }
  219. public float MatchC2
  220. {
  221. get { return m_MatchC2; }
  222. set
  223. {
  224. SetProperty(ref m_MatchC2, value);
  225. }
  226. }
  227. public AITPendulumValveData PendulumValveData
  228. {
  229. get { return m_PendulumValveData; }
  230. set
  231. {
  232. SetProperty(ref m_PendulumValveData, value);
  233. }
  234. }
  235. public AITHVData ESCHVData
  236. {
  237. get { return m_ESCHVData; }
  238. set
  239. {
  240. SetProperty(ref m_ESCHVData, value);
  241. }
  242. }
  243. public int ESCHVOutputVoltage
  244. {
  245. get { return m_ESCHVOutputVoltage; }
  246. set
  247. {
  248. SetProperty(ref m_ESCHVOutputVoltage, value);
  249. }
  250. }
  251. public float ChillerTemperature
  252. {
  253. get { return m_ChillerTemperature; }
  254. set
  255. {
  256. SetProperty(ref m_ChillerTemperature, value);
  257. }
  258. }
  259. public float HVTemperature
  260. {
  261. get { return m_HVTemperature; }
  262. set
  263. {
  264. SetProperty(ref m_HVTemperature, value);
  265. }
  266. }
  267. public bool IsLidClosed
  268. {
  269. get { return m_IsLidClosed; }
  270. set
  271. {
  272. SetProperty(ref m_IsLidClosed, value);
  273. }
  274. }
  275. public bool IsSlitDoorClosed
  276. {
  277. get { return m_IsSlitDoorClosed; }
  278. set
  279. {
  280. SetProperty(ref m_IsSlitDoorClosed, value);
  281. }
  282. }
  283. public bool LiftPinIsUp
  284. {
  285. get { return m_LiftPinIsUp; }
  286. set
  287. {
  288. SetProperty(ref m_LiftPinIsUp, value);
  289. }
  290. }
  291. public int TurboPumpRotationalSpeed
  292. {
  293. get { return m_TurboPumpRotationalSpeed; }
  294. set
  295. {
  296. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  297. }
  298. }
  299. public float ESCHePressure
  300. {
  301. get { return m_ESCHePressure; }
  302. set
  303. {
  304. SetProperty(ref m_ESCHePressure, value);
  305. }
  306. }
  307. public float ProcessHighPressure
  308. {
  309. get { return m_ProcessHighPressure; }
  310. set
  311. {
  312. SetProperty(ref m_ProcessHighPressure, value);
  313. }
  314. }
  315. public float ProcessLowPressure
  316. {
  317. get { return m_ProcessLowPressure; }
  318. set
  319. {
  320. SetProperty(ref m_ProcessLowPressure, value);
  321. }
  322. }
  323. public float ForelinePressure
  324. {
  325. get { return m_ForelinePressurePressure; }
  326. set
  327. {
  328. SetProperty(ref m_ForelinePressurePressure, value);
  329. }
  330. }
  331. public bool SourceRFFanInterlock
  332. {
  333. get { return m_SourceRFFanInterlock; }
  334. set
  335. {
  336. SetProperty(ref m_SourceRFFanInterlock, value);
  337. }
  338. }
  339. public bool IsWLK
  340. {
  341. get { return m_IsWLK; }
  342. set
  343. {
  344. SetProperty(ref m_IsWLK, value);
  345. }
  346. }
  347. public bool IsWaterFlowOk
  348. {
  349. get { return m_IsWaterFlowOk; }
  350. set
  351. {
  352. SetProperty(ref m_IsWaterFlowOk, value);
  353. }
  354. }
  355. public bool IsCDAOK
  356. {
  357. get { return m_IsCDAOK; }
  358. set
  359. {
  360. SetProperty(ref m_IsCDAOK, value);
  361. }
  362. }
  363. public bool SensorGasBoxDoor
  364. {
  365. get { return m_SensorGasBoxDoor; }
  366. set
  367. {
  368. SetProperty(ref m_SensorGasBoxDoor, value);
  369. }
  370. }
  371. public bool SensorGasBoxPressure
  372. {
  373. get { return m_SensorGasBoxPressure; }
  374. set
  375. {
  376. SetProperty(ref m_SensorGasBoxPressure, value);
  377. }
  378. }
  379. public bool IsTurboPumpInterlock
  380. {
  381. get { return m_IsTurboPumpInterlock; }
  382. set
  383. {
  384. SetProperty(ref m_IsTurboPumpInterlock, value);
  385. }
  386. }
  387. public string ModuleName { get; set; }
  388. public double MFC1SetPoint
  389. {
  390. get { return m_MFC1SetPoint; }
  391. set { SetProperty(ref m_MFC1SetPoint, value); }
  392. }
  393. public double MFC2SetPoint
  394. {
  395. get { return m_MFC2SetPoint; }
  396. set { SetProperty(ref m_MFC2SetPoint, value); }
  397. }
  398. public double MFC3SetPoint
  399. {
  400. get { return m_MFC3SetPoint; }
  401. set { SetProperty(ref m_MFC3SetPoint, value); }
  402. }
  403. public double MFC4SetPoint
  404. {
  405. get { return m_MFC4SetPoint; }
  406. set { SetProperty(ref m_MFC4SetPoint, value); }
  407. }
  408. public double MFC5SetPoint
  409. {
  410. get { return m_MFC5SetPoint; }
  411. set { SetProperty(ref m_MFC5SetPoint, value); }
  412. }
  413. public double MFC6SetPoint
  414. {
  415. get { return m_MFC6SetPoint; }
  416. set { SetProperty(ref m_MFC6SetPoint, value); }
  417. }
  418. public double MFC7SetPoint
  419. {
  420. get { return m_MFC7SetPoint; }
  421. set { SetProperty(ref m_MFC7SetPoint, value); }
  422. }
  423. public double MFC8SetPoint
  424. {
  425. get { return m_MFC8SetPoint; }
  426. set { SetProperty(ref m_MFC8SetPoint, value); }
  427. }
  428. public double N2SetPoint
  429. {
  430. get { return m_N2SetPoint; }
  431. set { SetProperty(ref m_N2SetPoint, value); }
  432. }
  433. public double TurboN2FlowSetPoint
  434. {
  435. get { return m_TurboN2FlowSetPoint; }
  436. set
  437. {
  438. if (value != m_TurboN2FlowSetPoint)
  439. {
  440. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  441. }
  442. SetProperty(ref m_TurboN2FlowSetPoint, value);
  443. }
  444. }
  445. public AITMfcData MFC1Data
  446. {
  447. get { return m_MFC1Data; }
  448. set { SetProperty(ref m_MFC1Data, value); }
  449. }
  450. public AITMfcData MFC2Data
  451. {
  452. get { return m_MFC2Data; }
  453. set { SetProperty(ref m_MFC2Data, value); }
  454. }
  455. public AITMfcData MFC3Data
  456. {
  457. get { return m_MFC3Data; }
  458. set { SetProperty(ref m_MFC3Data, value); }
  459. }
  460. public AITMfcData MFC4Data
  461. {
  462. get { return m_MFC4Data; }
  463. set { SetProperty(ref m_MFC4Data, value); }
  464. }
  465. public AITMfcData MFC5Data
  466. {
  467. get { return m_MFC5Data; }
  468. set { SetProperty(ref m_MFC5Data, value); }
  469. }
  470. public AITMfcData MFC6Data
  471. {
  472. get { return m_MFC6Data; }
  473. set { SetProperty(ref m_MFC6Data, value); }
  474. }
  475. public AITMfcData MFC7Data
  476. {
  477. get { return m_MFC7Data; }
  478. set { SetProperty(ref m_MFC7Data, value); }
  479. }
  480. public AITMfcData MFC8Data
  481. {
  482. get { return m_MFC8Data; }
  483. set { SetProperty(ref m_MFC8Data, value); }
  484. }
  485. public AITMfcData MFCHeData
  486. {
  487. get { return m_MFCHeData; }
  488. set { SetProperty(ref m_MFCHeData, value); }
  489. }
  490. public AITMfcData MFCN2Data
  491. {
  492. get { return m_MFCN2Data; }
  493. set { SetProperty(ref m_MFCN2Data, value); }
  494. }
  495. public AITHeaterData ValveHeaterData
  496. {
  497. get { return m_ValveHeaterData; }
  498. set { SetProperty(ref m_ValveHeaterData, value); }
  499. }
  500. public AITHeaterData ForelineHeaterData
  501. {
  502. get { return m_ForelineHeaterData; }
  503. set { SetProperty(ref m_ForelineHeaterData, value); }
  504. }
  505. public AITHeaterData WallHeaterData
  506. {
  507. get { return m_WallHeaterData; }
  508. set { SetProperty(ref m_WallHeaterData, value); }
  509. }
  510. public AITRfData SRFData
  511. {
  512. get { return m_SRFData; }
  513. set { SetProperty(ref m_SRFData, value); }
  514. }
  515. public AITRfData BRFData
  516. {
  517. get { return m_BRFData; }
  518. set { SetProperty(ref m_BRFData, value); }
  519. }
  520. public PMState PMCurrentState
  521. {
  522. get { return m_PMCurrentState; }
  523. set { SetProperty(ref m_PMCurrentState, value); }
  524. }
  525. #region 阀
  526. public bool GasFinalValveIsOpen
  527. {
  528. get { return m_GasFinalValveIsOpen; }
  529. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  530. }
  531. public bool PVN21ValveIsOpen
  532. {
  533. get { return m_PVN21ValveIsOpen; }
  534. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  535. }
  536. public bool PVN22ValveIsOpen
  537. {
  538. get { return m_PVN22ValveIsOpen; }
  539. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  540. }
  541. public bool N2ValveIsOpen
  542. {
  543. get { return m_N2ValveIsOpen; }
  544. set { SetProperty(ref m_N2ValveIsOpen, value); }
  545. }
  546. public bool PV11ValveIsOpen
  547. {
  548. get { return m_PV11ValveIsOpen; }
  549. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  550. }
  551. public bool PV12ValveIsOpen
  552. {
  553. get { return m_PV12ValveIsOpen; }
  554. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  555. }
  556. public bool MFC1ValveIsOpen
  557. {
  558. get { return m_MFC1ValveIsOpen; }
  559. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  560. }
  561. public bool PV21ValveIsOpen
  562. {
  563. get { return m_PV21ValveIsOpen; }
  564. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  565. }
  566. public bool PV22ValveIsOpen
  567. {
  568. get { return m_PV22ValveIsOpen; }
  569. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  570. }
  571. public bool MFC2ValveIsOpen
  572. {
  573. get { return m_MFC2ValveIsOpen; }
  574. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  575. }
  576. public bool PV31ValveIsOpen
  577. {
  578. get { return m_PV31ValveIsOpen; }
  579. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  580. }
  581. public bool PV32ValveIsOpen
  582. {
  583. get { return m_PV32ValveIsOpen; }
  584. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  585. }
  586. public bool MFC3ValveIsOpen
  587. {
  588. get { return m_MFC3ValveIsOpen; }
  589. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  590. }
  591. public bool PV41ValveIsOpen
  592. {
  593. get { return m_PV41ValveIsOpen; }
  594. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  595. }
  596. public bool PV42ValveIsOpen
  597. {
  598. get { return m_PV42ValveIsOpen; }
  599. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  600. }
  601. public bool MFC4ValveIsOpen
  602. {
  603. get { return m_MFC4ValveIsOpen; }
  604. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  605. }
  606. public bool MFC5ValveIsOpen
  607. {
  608. get { return m_MFC5ValveIsOpen; }
  609. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  610. }
  611. public bool MFC6ValveIsOpen
  612. {
  613. get { return m_MFC6ValveIsOpen; }
  614. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  615. }
  616. public bool MFC7ValveIsOpen
  617. {
  618. get { return m_MFC7ValveIsOpen; }
  619. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  620. }
  621. public bool MFC8ValveIsOpen
  622. {
  623. get { return m_MFC8ValveIsOpen; }
  624. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  625. }
  626. public bool PVHe1ValveIsOpen
  627. {
  628. get { return m_PVHe1ValveIsOpen; }
  629. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  630. }
  631. public bool PVHe2ValveIsOpen
  632. {
  633. get { return m_PVHe2ValveIsOpen; }
  634. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  635. }
  636. public bool PVHe3ValveIsOpen
  637. {
  638. get { return m_PVHe3ValveIsOpen; }
  639. set { SetProperty(ref m_PVHe3ValveIsOpen, value); }
  640. }
  641. public bool HeISOValveIsOpen
  642. {
  643. get { return m_HeISOValveIsOpen; }
  644. set { SetProperty(ref m_HeISOValveIsOpen, value); }
  645. }
  646. public bool TurboPumpPumpingValveIsOpen
  647. {
  648. get { return m_TurboPumpPumpingValveIsOpen; }
  649. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  650. }
  651. public bool TurboPumpPurgeValveIsOpen
  652. {
  653. get { return m_TurboPumpPurgeValveIsOpen; }
  654. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  655. }
  656. public bool SoftPumpValveIsOpen
  657. {
  658. get { return m_SoftPumpValveIsOpen; }
  659. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  660. }
  661. public bool FastPumpValveIsOpen
  662. {
  663. get { return m_FastPumpValveIsOpen; }
  664. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  665. }
  666. public bool GuageValveIsOpen
  667. {
  668. get { return m_GuageValveIsOpen; }
  669. set { SetProperty(ref m_GuageValveIsOpen, value); }
  670. }
  671. #endregion
  672. public Dictionary<string, object> RtDataValues
  673. {
  674. get { return m_RtDataValues; }
  675. set { SetProperty(ref m_RtDataValues, value); }
  676. }
  677. public bool PumpIsOpen
  678. {
  679. get { return m_PumpIsOpen; }
  680. set { SetProperty(ref m_PumpIsOpen, value); }
  681. }
  682. public bool PendulumValveIsOpen
  683. {
  684. get { return m_PendulumValveIsOpen; }
  685. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  686. }
  687. public bool TurboIsOpen
  688. {
  689. get { return m_TurboIsOpen; }
  690. set { SetProperty(ref m_TurboIsOpen, value); }
  691. }
  692. public bool IsATM
  693. {
  694. get { return m_IsATM; }
  695. set { SetProperty(ref m_IsATM, value); }
  696. }
  697. public bool IsVAC
  698. {
  699. get { return m_IsVAC; }
  700. set { SetProperty(ref m_IsVAC, value); }
  701. }
  702. //public bool BRFIsOn
  703. //{
  704. // get { return m_BRFIsOn; }
  705. // set { SetProperty(ref m_BRFIsOn, value); }
  706. //}
  707. //public bool SRFIsOn
  708. //{
  709. // get { return m_SRFIsOn; }
  710. // set { SetProperty(ref m_SRFIsOn, value); }
  711. //}
  712. public int PositionValue
  713. {
  714. get { return m_PositionValue; }
  715. set { SetProperty(ref m_PositionValue, value); }
  716. }
  717. public bool IsPositionMode
  718. {
  719. get { return m_IsPositionMode; }
  720. set { SetProperty(ref m_IsPositionMode, value); }
  721. }
  722. public double HeGasSetpoint
  723. {
  724. get { return m_HeGasSetpoint; }
  725. set
  726. {
  727. SetProperty(ref m_HeGasSetpoint, value);
  728. }
  729. }
  730. public int HePressureSetpoint
  731. {
  732. get { return m_HePressureSetpoint; }
  733. set
  734. {
  735. SetProperty(ref m_HePressureSetpoint, value);
  736. }
  737. }
  738. public float SRFFwdPowerSetpoint
  739. {
  740. get { return m_SRFFwdPowerSetpoint; }
  741. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  742. }
  743. public float BRFFwdPowerSetpoint
  744. {
  745. get { return m_BRFFwdPowerSetpoint; }
  746. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  747. }
  748. public int ESCVoltage
  749. {
  750. get { return m_ESCVoltage; }
  751. set { SetProperty(ref m_ESCVoltage, value); }
  752. }
  753. public float SRFMatchC1
  754. {
  755. get { return m_SRFMatchC1; }
  756. set { SetProperty(ref m_SRFMatchC1, value); }
  757. }
  758. public float SRFMatchC2
  759. {
  760. get { return m_SRFMatchC2; }
  761. set { SetProperty(ref m_SRFMatchC2, value); }
  762. }
  763. public float BRFMatchC1
  764. {
  765. get { return m_BRFMatchC1; }
  766. set { SetProperty(ref m_BRFMatchC1, value); }
  767. }
  768. public float BRFMatchC2
  769. {
  770. get { return m_BRFMatchC2; }
  771. set { SetProperty(ref m_BRFMatchC2, value); }
  772. }
  773. public bool GasIsFlowing
  774. {
  775. get { return m_GasIsFlowing; }
  776. set { SetProperty(ref m_GasIsFlowing, value); }
  777. }
  778. public bool IsProcessing
  779. {
  780. get { return m_IsProcessing; }
  781. set { SetProperty(ref m_IsProcessing, value); }
  782. }
  783. public bool IsAutoMode
  784. {
  785. get { return m_IsAutoMode; }
  786. set { SetProperty(ref m_IsAutoMode, value); }
  787. }
  788. public string SelectedRecipe
  789. {
  790. get { return m_SelectedRecipe; }
  791. set { SetProperty(ref m_SelectedRecipe, value); }
  792. }
  793. public float ChillerTempSetpoint
  794. {
  795. get { return m_ChillerTempSetpoint; }
  796. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  797. }
  798. public float WallTempSetpoint
  799. {
  800. get { return m_WallTempSetpoint; }
  801. set { SetProperty(ref m_WallTempSetpoint, value); }
  802. }
  803. public bool HeIsPressureMode
  804. {
  805. get { return m_HeIsPressureMode; }
  806. set { SetProperty(ref m_HeIsPressureMode, value); }
  807. }
  808. public bool ChillerIsOn
  809. {
  810. get { return m_ChillerIsOn; }
  811. set { SetProperty(ref m_ChillerIsOn, value); }
  812. }
  813. public double ChamberPressureFeedBack
  814. {
  815. get { return m_ChamberPressureFeedBack; }
  816. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  817. }
  818. public string WaferID
  819. {
  820. get { return m_WaferID; }
  821. set { SetProperty(ref m_WaferID, value); }
  822. }
  823. #endregion
  824. #region 命令
  825. private DelegateCommand _PMInitCommnad;
  826. public DelegateCommand PMInitCommnad =>
  827. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  828. private DelegateCommand _PMAbortCommnad;
  829. public DelegateCommand PMAbortCommnad =>
  830. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  831. private DelegateCommand _GasCommand;
  832. public DelegateCommand GasCommand =>
  833. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  834. private DelegateCommand _HeCommand;
  835. public DelegateCommand HeCommand =>
  836. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  837. private DelegateCommand _RfCommand;
  838. public DelegateCommand RfCommand =>
  839. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  840. private DelegateCommand _PurgeCommand;
  841. public DelegateCommand PurgeCommand =>
  842. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  843. private DelegateCommand _VentCommand;
  844. public DelegateCommand VentCommand =>
  845. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  846. private DelegateCommand _PumpCommand;
  847. public DelegateCommand PumpCommand =>
  848. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  849. private DelegateCommand _OpenPumpCommand;
  850. public DelegateCommand OpenPumpCommand =>
  851. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  852. private DelegateCommand _ClosePumpCommand;
  853. public DelegateCommand ClosePumpCommand =>
  854. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  855. private DelegateCommand _OpenTurboPumpCommand;
  856. public DelegateCommand OpenTurboPumpCommand =>
  857. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  858. private DelegateCommand _CloseTurboPumpCommand;
  859. public DelegateCommand CloseTurboPumpCommand =>
  860. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  861. private DelegateCommand _OpenPendulumValveCommand;
  862. public DelegateCommand OpenPendulumValveCommand =>
  863. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  864. private DelegateCommand _ClosePendulumValveCommand;
  865. public DelegateCommand ClosePendulumValveCommand =>
  866. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  867. private DelegateCommand<object> _PinUpDownCommand;
  868. public DelegateCommand<object> PinUpDownCommand =>
  869. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  870. private DelegateCommand _SetSRfCommand;
  871. public DelegateCommand SetSRfCommand =>
  872. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  873. private DelegateCommand _SetBRfCommand;
  874. public DelegateCommand SetBRfCommand =>
  875. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  876. private DelegateCommand _OpenButterflyValveViewCommand;
  877. public DelegateCommand OpenButterflyValveViewCommand =>
  878. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  879. private DelegateCommand _HVCommand;
  880. public DelegateCommand HVCommand =>
  881. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  882. private DelegateCommand _HVSetCommand;
  883. public DelegateCommand HVSetCommand =>
  884. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  885. private DelegateCommand _LoadRecipeCommand;
  886. public DelegateCommand LoadRecipeCommand =>
  887. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  888. private DelegateCommand<object> _ControlValveCommand;
  889. public DelegateCommand<object> ControlValveCommand =>
  890. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  891. private DelegateCommand<object> _RunRecipeCommand;
  892. public DelegateCommand<object> RunRecipeCommand =>
  893. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  894. private DelegateCommand _SetChillerTempCommand;
  895. public DelegateCommand SetChillerTempCommand =>
  896. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  897. private DelegateCommand _OnOffChillerCommand;
  898. public DelegateCommand OnOffChillerCommand =>
  899. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  900. private DelegateCommand<object> _HeaterCommand;
  901. public DelegateCommand<object> HeaterCommand =>
  902. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  903. private DelegateCommand _EndStepCommand;
  904. public DelegateCommand EndStepCommand =>
  905. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  906. #endregion
  907. #region 构造函数
  908. public OverVenusViewModel()
  909. {
  910. m_RtDataKeys = new List<string>();
  911. m_IsATM = true;
  912. ModuleName = "PMA";
  913. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  914. DispatcherTimer timer = new DispatcherTimer();
  915. timer.Interval = TimeSpan.FromSeconds(0.5);
  916. timer.Tick += timer_Tick;
  917. timer.Start();
  918. }
  919. #endregion
  920. #region 命令方法
  921. private void OnControlValve(object obj)
  922. {
  923. CommonValveControl commonValveControl = (CommonValveControl)obj;
  924. if (commonValveControl.IsCanEdit == true)
  925. {
  926. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  927. }
  928. }
  929. private void OnPMInit()
  930. {
  931. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  932. }
  933. private async void OnGas()
  934. {
  935. await Task.Run(async () =>
  936. {
  937. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  938. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  939. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  940. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  941. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  942. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  943. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  944. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  945. await Task.Delay(1000);
  946. object[] mfc = new object[8];
  947. string[] mfcSetPoint = new string[8];
  948. mfc[0] = MFC1Data.SetPoint;
  949. mfc[1] = MFC2Data.SetPoint;
  950. mfc[2] = MFC3Data.SetPoint;
  951. mfc[3] = MFC4Data.SetPoint;
  952. mfc[4] = MFC5Data.SetPoint;
  953. mfc[5] = MFC6Data.SetPoint;
  954. mfc[6] = MFC7Data.SetPoint;
  955. mfc[7] = MFC8Data.SetPoint;
  956. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  957. });
  958. }
  959. private void OnHe()
  960. {
  961. if (PVHe1ValveIsOpen == true)
  962. {
  963. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  964. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  965. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, false);
  966. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, false);
  967. }
  968. else
  969. {
  970. if (HeIsPressureMode)
  971. {
  972. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  973. }
  974. else
  975. {
  976. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  977. }
  978. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, true);
  979. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, true);
  980. }
  981. }
  982. private void OnRf()
  983. {
  984. if (PMCurrentState == PMState.RfPowering)
  985. {
  986. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  987. }
  988. else
  989. {
  990. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  991. }
  992. }
  993. private void OnPurge()
  994. {
  995. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  996. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  997. //{
  998. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  999. // await Task.Delay(1000);
  1000. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1001. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1002. //}
  1003. //else
  1004. //{
  1005. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1006. // await Task.Delay(1000);
  1007. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1008. //}
  1009. if (PMCurrentState == PMState.Purging)
  1010. {
  1011. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1012. //await Task.Delay(1000);
  1013. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1014. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1015. }
  1016. else
  1017. {
  1018. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1019. //await Task.Delay(1000);
  1020. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1021. }
  1022. }
  1023. private void OnVent()
  1024. {
  1025. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1026. if (PMCurrentState == PMState.Venting)
  1027. {
  1028. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1029. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1030. }
  1031. else
  1032. {
  1033. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1034. }
  1035. }
  1036. private void OnPump()
  1037. {
  1038. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1039. if (PMCurrentState==PMState.Pumping)
  1040. {
  1041. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1042. return;
  1043. }
  1044. //if (PMCurrentState == PMState.pum)
  1045. //{
  1046. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1047. // return;
  1048. //}
  1049. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1050. //{
  1051. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1052. //}
  1053. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1054. //{
  1055. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1056. //}
  1057. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1058. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1059. // 设置底压
  1060. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1061. if (basePressure <= 0.01 || basePressure >= 1000)
  1062. {
  1063. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1064. return;
  1065. }
  1066. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1067. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1068. {
  1069. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1070. return;
  1071. }
  1072. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1073. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1074. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1075. }
  1076. private void OnOpenPump()
  1077. {
  1078. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1079. if (PMCurrentState==PMState.LaunchingPump)
  1080. {
  1081. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1082. return;
  1083. }
  1084. //if (PumpIsOpen == true)
  1085. //{
  1086. // return;
  1087. //}
  1088. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1089. }
  1090. private void OnClosePump()
  1091. {
  1092. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1093. }
  1094. private void OnOpenTurboPump()
  1095. {
  1096. //TurboIsOpen = true;
  1097. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1098. if (PMCurrentState == PMState.LaunchingTurboPump)
  1099. {
  1100. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1101. return;
  1102. }
  1103. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1104. }
  1105. private void OnCloseTurboPump()
  1106. {
  1107. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1108. }
  1109. private void OnOpenPendulumValve()
  1110. {
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1112. }
  1113. private void OnClosePendulumValve()
  1114. {
  1115. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1116. }
  1117. private void OnPinUpDown(object upDown)
  1118. {
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1120. }
  1121. private async void OnSetSRf()
  1122. {
  1123. if (SRFData.IsRfOn == true)
  1124. {
  1125. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1126. }
  1127. else
  1128. {
  1129. if (GasIsFlowing == true)
  1130. {
  1131. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1132. await Task.Delay(100);
  1133. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1134. }
  1135. }
  1136. }
  1137. private async void OnSetBRf()
  1138. {
  1139. if (BRFData.IsRfOn == true)
  1140. {
  1141. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1142. }
  1143. else
  1144. {
  1145. if (GasIsFlowing == true)
  1146. {
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1148. await Task.Delay(100);
  1149. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1150. }
  1151. }
  1152. }
  1153. private void OnPMAbort()
  1154. {
  1155. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1156. }
  1157. private void OnOpenButterflyValveView()
  1158. {
  1159. //if (butterflyValveMessageBox == null)
  1160. //{
  1161. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1162. butterflyValveMessageBox = new ButterflyValveView();
  1163. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1164. butterflyValveMessageBox.Left = 700;
  1165. butterflyValveMessageBox.Top = 600;
  1166. butterflyValveMessageBox.Show();
  1167. butterflyValveMessageBox.Owner = _mainWindow;
  1168. //}
  1169. }
  1170. private void OnLoadRecipe()
  1171. {
  1172. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1173. }
  1174. private void OnHV()
  1175. {
  1176. if (ESCHVData.IsOn == true)
  1177. {
  1178. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1179. }
  1180. else
  1181. {
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1183. //await Task.Run(async () =>
  1184. //{
  1185. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1186. // //await Task.Delay(1000);
  1187. //});
  1188. }
  1189. }
  1190. private void OnHVSet()
  1191. {
  1192. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1193. }
  1194. private void OnRunRecipe(object obj)
  1195. {
  1196. string recipeName = SelectedRecipe;
  1197. if (recipeName == null)
  1198. {
  1199. return;
  1200. }
  1201. ClearData();
  1202. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1203. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1205. }
  1206. private void OnSetChillerTemp()
  1207. {
  1208. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1209. float x;
  1210. float.TryParse(value, out x);
  1211. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerType.Chiller.ToString(),ChillerTempSetpoint, x);
  1212. }
  1213. private void OnOffChiller()
  1214. {
  1215. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1216. }
  1217. private void OnHeater(object obj)
  1218. {
  1219. AITHeaterData heaterData = obj as AITHeaterData;
  1220. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1221. heaterView = new HeaterView(heaterData);
  1222. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1223. heaterView.Owner = _mainWindow;
  1224. heaterView.Show();
  1225. }
  1226. private void OnEndStep()
  1227. {
  1228. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1229. {
  1230. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1231. }
  1232. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1233. {
  1234. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1235. }
  1236. }
  1237. #endregion
  1238. #region 私有方法
  1239. private void ClearData()
  1240. {
  1241. ESCVoltage = 0;
  1242. SRFFwdPowerSetpoint = 0;
  1243. SRFMatchC1 = 0;
  1244. SRFMatchC2 = 0;
  1245. BRFFwdPowerSetpoint = 0;
  1246. BRFMatchC1 = 0;
  1247. BRFMatchC2 = 0;
  1248. HeGasSetpoint = 0;
  1249. MFC1SetPoint = 0;
  1250. MFC2SetPoint = 0;
  1251. MFC3SetPoint = 0;
  1252. MFC4SetPoint = 0;
  1253. MFC5SetPoint = 0;
  1254. MFC6SetPoint = 0;
  1255. MFC7SetPoint = 0;
  1256. MFC8SetPoint = 0;
  1257. }
  1258. private IEnumerable<string> GetFilesNames(string path)
  1259. {
  1260. return Directory.GetFiles(path, "*.rcp")
  1261. .Select(Path.GetFileNameWithoutExtension);
  1262. }
  1263. void timer_Tick(object sender, EventArgs e)
  1264. {
  1265. try
  1266. {
  1267. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1268. if (RtDataValues == null)
  1269. {
  1270. return;
  1271. }
  1272. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1273. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1274. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1275. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1276. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1277. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1278. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1279. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1280. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1281. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1282. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1283. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1284. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1285. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1286. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1287. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1288. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1289. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1290. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1291. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1292. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1293. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1294. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1295. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1296. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1297. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1298. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1299. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1300. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1301. PVHe3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
  1302. HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
  1303. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1304. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1305. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1306. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1307. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1308. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1309. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1310. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1311. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1312. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1313. IsProcessing = PMCurrentState == PMState.Processing;
  1314. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1315. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1316. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1317. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1318. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1319. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1320. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1321. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1322. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1323. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1324. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1325. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1326. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1327. ESCHVData = CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1328. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1329. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1330. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1331. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1332. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1333. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1334. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1335. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1336. HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1337. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1338. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1339. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1340. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1341. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1342. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1343. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1344. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1345. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1346. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1347. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1348. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1349. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1350. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1351. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1352. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1353. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1354. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1355. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1356. if (PMCurrentState == PMState.Processing)
  1357. {
  1358. //var cr= CommonFunction.GetValue<Recipe>(RtDataValues, $"{ModuleName}.CurrentRecipe");
  1359. //if (cr == null)
  1360. //{
  1361. // return;
  1362. //}
  1363. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1364. if (CurrentRecipeResult.RecipeStepNumber != null)
  1365. {
  1366. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1367. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1368. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1369. }
  1370. }
  1371. else
  1372. {
  1373. CurrentRecipeResult = null;
  1374. CurrentRecipeStep = null;
  1375. }
  1376. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1377. {
  1378. ChamberPressureFeedBack = ProcessLowPressure;
  1379. }
  1380. else
  1381. {
  1382. ChamberPressureFeedBack = ProcessHighPressure;
  1383. }
  1384. }
  1385. catch (Exception ex)
  1386. {
  1387. LOG.WriteExeption(ex.Message, ex);
  1388. }
  1389. }
  1390. public void addDataKeys()
  1391. {
  1392. m_RtDataKeys.Clear();
  1393. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1394. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1395. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1396. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1397. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1398. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1399. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1400. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1401. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1402. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1403. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1404. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1405. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1406. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1407. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1408. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1409. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1410. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1411. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1412. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1413. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1414. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1415. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1416. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1417. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1418. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1419. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1420. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1421. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1422. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1423. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1424. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1425. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1426. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1427. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1428. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1429. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1430. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1431. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1432. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1433. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1434. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1435. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1436. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1437. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1438. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1439. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1440. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1441. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe3.IsOpen");
  1442. m_RtDataKeys.Add($"{ModuleName}.ValveHeISO.IsOpen");
  1443. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1444. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1445. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1446. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1447. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1448. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1449. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1450. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1451. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1452. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1453. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1454. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1455. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1456. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1457. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1458. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1459. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1460. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1461. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1462. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1463. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1464. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1465. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1466. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1467. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1468. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1469. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1470. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1471. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1472. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1473. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1474. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1475. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1476. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1477. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1478. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1479. }
  1480. #endregion
  1481. }
  1482. }