OverKepler2300ViewModel.cs 65 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverKepler2300ViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private List<string> m_CurrentModuleRecipes=new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. private bool m_MFC7ValveIsOpen;
  46. private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. private bool m_PVHe1ValveIsOpen;
  51. private bool m_PVHe2ValveIsOpen;
  52. private bool m_TurboPumpPumpingValveIsOpen;
  53. private bool m_TurboPumpPurgeValveIsOpen;
  54. private bool m_GuageValveIsOpen;
  55. private bool m_PendulumValveIsOpen;
  56. //private bool m_BRFIsOn;
  57. //private bool m_SRFIsOn;
  58. private double m_HeGasSetpoint;
  59. private int m_HePressureSetpoint;
  60. private float m_SRFFwdPowerSetpoint;
  61. private float m_BRFFwdPowerSetpoint;
  62. private float m_SRFMatchC1;
  63. private float m_SRFMatchC2;
  64. private float m_BRFMatchC1;
  65. private float m_BRFMatchC2;
  66. private double m_MFC1SetPoint;
  67. private double m_MFC2SetPoint;
  68. private double m_MFC3SetPoint;
  69. private double m_MFC4SetPoint;
  70. private double m_MFC5SetPoint;
  71. private double m_MFC6SetPoint;
  72. private double m_MFC7SetPoint;
  73. private double m_MFC8SetPoint;
  74. private double m_N2SetPoint;
  75. private AITMfcData m_MFC1Data;
  76. private AITMfcData m_MFC2Data;
  77. private AITMfcData m_MFC3Data;
  78. private AITMfcData m_MFC4Data;
  79. private AITMfcData m_MFC5Data;
  80. private AITMfcData m_MFC6Data;
  81. private AITMfcData m_MFC7Data;
  82. private AITMfcData m_MFC8Data;
  83. private AITMfcData m_MFCHeData;
  84. private AITMfcData m_MFCN2Data;
  85. private AITHeaterData m_ValveHeaterData;
  86. private AITHeaterData m_ForelineHeaterData;
  87. private AITHeaterData m_WallHeaterData;
  88. private AITRfData m_SRFData;
  89. private AITRfData m_BRFData;
  90. private AITPendulumValveData m_PendulumValveData;
  91. //private AITHVData m_ESCHVData;
  92. private PMState m_PMCurrentState;
  93. private bool m_SourceRFFanInterlock;
  94. private bool m_IsWLK;
  95. private bool m_IsWaterFlowOk;
  96. private bool m_IsTurboPumpInterlock;
  97. private bool m_IsCDAOK;
  98. private bool m_SensorGasBoxDoor;
  99. private bool m_SensorGasBoxPressure;
  100. private bool m_PumpIsOpen;
  101. private bool m_TurboIsOpen;
  102. private bool m_IsATM;
  103. private bool m_IsVAC;
  104. private List<string> m_RtDataKeys;
  105. private Dictionary<string, object> m_RtDataValues;
  106. private int m_PositionValue;
  107. private bool m_IsPositionMode;
  108. private int m_ESCVoltage;
  109. private bool m_GasIsFlowing;
  110. private bool m_IsProcessing;
  111. private bool m_IsAutoMode;
  112. private string m_SelectedRecipe;
  113. private float m_ChillerTempSetpoint;
  114. private float m_WallTempSetpoint;
  115. private bool m_HeIsPressureMode=true;
  116. private bool m_ChillerIsOn;
  117. private float m_ProcessHighPressure;
  118. private float m_ProcessLowPressure;
  119. private float m_ForelinePressurePressure;
  120. private float m_ESCHePressure;
  121. ButterflyValveView butterflyValveMessageBox;
  122. HeaterView heaterView;
  123. private int m_TurboPumpRotationalSpeed;
  124. private bool m_LiftPinIsUp;
  125. private bool m_IsSlitDoorClosed;
  126. private bool m_IsLidClosed;
  127. private float m_ChillerTemperature;
  128. //private float m_HVTemperature;
  129. private int m_ESCHVOutputVoltage;
  130. //private float m_SRfReflectPower;
  131. //private float m_SRfForwardPowerFeedBack;
  132. //private float m_BRfReflectPower;
  133. //private float m_BRfForwardPowerFeedBack;
  134. //private int m_MatchWorkMode;
  135. //private int m_BiasMatchWorkMode;
  136. private float m_MatchC1;
  137. private float m_MatchC2;
  138. private float m_BiasMatchC1;
  139. private float m_BiasMatchC2;
  140. private float m_PendulumValvePosition;
  141. private bool m_IsTurboPumpAtSpeed;
  142. private bool m_TurboPumpWaterFlowSwitch;
  143. private bool m_IsHasWafer;
  144. private Recipe m_CurrentRecipe=new Recipe ();
  145. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  146. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  147. private double m_ChamberPressureFeedBack;
  148. private string m_WaferID;
  149. #endregion
  150. #region 属性
  151. public List<string> CurrentModuleRecipes
  152. {
  153. get { return m_CurrentModuleRecipes; }
  154. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  155. }
  156. public Recipe CurrentRecipe
  157. {
  158. get { return m_CurrentRecipe; }
  159. set { SetProperty(ref m_CurrentRecipe, value); }
  160. }
  161. public RecipeResult CurrentRecipeResult
  162. {
  163. get { return m_CurrentRecipeResult; }
  164. set { SetProperty(ref m_CurrentRecipeResult, value); }
  165. }
  166. public RecipeStep CurrentRecipeStep
  167. {
  168. get { return m_CurrentRecipeStep; }
  169. set { SetProperty(ref m_CurrentRecipeStep, value); }
  170. }
  171. public bool IsHasWafer
  172. {
  173. get { return m_IsHasWafer; }
  174. set { SetProperty(ref m_IsHasWafer, value); }
  175. }
  176. public bool IsTurboPumpAtSpeed
  177. {
  178. get { return m_IsTurboPumpAtSpeed; }
  179. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  180. }
  181. public bool TurboPumpWaterFlowSwitch
  182. {
  183. get { return m_TurboPumpWaterFlowSwitch; }
  184. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  185. }
  186. public float PendulumValvePosition
  187. {
  188. get { return m_PendulumValvePosition; }
  189. set{SetProperty(ref m_PendulumValvePosition, value);}
  190. }
  191. public float BiasMatchC1
  192. {
  193. get { return m_BiasMatchC1; }
  194. set
  195. {
  196. SetProperty(ref m_BiasMatchC1, value);
  197. }
  198. }
  199. public float BiasMatchC2
  200. {
  201. get { return m_BiasMatchC2; }
  202. set
  203. {
  204. SetProperty(ref m_BiasMatchC2, value);
  205. }
  206. }
  207. public float MatchC1
  208. {
  209. get { return m_MatchC1; }
  210. set
  211. {
  212. SetProperty(ref m_MatchC1, value);
  213. }
  214. }
  215. public float MatchC2
  216. {
  217. get { return m_MatchC2; }
  218. set
  219. {
  220. SetProperty(ref m_MatchC2, value);
  221. }
  222. }
  223. public AITPendulumValveData PendulumValveData
  224. {
  225. get { return m_PendulumValveData; }
  226. set
  227. {
  228. SetProperty(ref m_PendulumValveData, value);
  229. }
  230. }
  231. //public AITHVData ESCHVData
  232. //{
  233. // get { return m_ESCHVData; }
  234. // set
  235. // {
  236. // SetProperty(ref m_ESCHVData, value);
  237. // }
  238. //}
  239. public int ESCHVOutputVoltage
  240. {
  241. get { return m_ESCHVOutputVoltage; }
  242. set
  243. {
  244. SetProperty(ref m_ESCHVOutputVoltage, value);
  245. }
  246. }
  247. public float ChillerTemperature
  248. {
  249. get { return m_ChillerTemperature; }
  250. set
  251. {
  252. SetProperty(ref m_ChillerTemperature, value);
  253. }
  254. }
  255. //public float HVTemperature
  256. //{
  257. // get { return m_HVTemperature; }
  258. // set
  259. // {
  260. // SetProperty(ref m_HVTemperature, value);
  261. // }
  262. //}
  263. public bool IsLidClosed
  264. {
  265. get { return m_IsLidClosed; }
  266. set
  267. {
  268. SetProperty(ref m_IsLidClosed, value);
  269. }
  270. }
  271. public bool IsSlitDoorClosed
  272. {
  273. get { return m_IsSlitDoorClosed; }
  274. set
  275. {
  276. SetProperty(ref m_IsSlitDoorClosed, value);
  277. }
  278. }
  279. public bool LiftPinIsUp
  280. {
  281. get { return m_LiftPinIsUp; }
  282. set
  283. {
  284. SetProperty(ref m_LiftPinIsUp, value);
  285. }
  286. }
  287. public int TurboPumpRotationalSpeed
  288. {
  289. get { return m_TurboPumpRotationalSpeed; }
  290. set
  291. {
  292. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  293. }
  294. }
  295. public float ESCHePressure
  296. {
  297. get { return m_ESCHePressure; }
  298. set
  299. {
  300. SetProperty(ref m_ESCHePressure, value);
  301. }
  302. }
  303. public float ProcessHighPressure
  304. {
  305. get { return m_ProcessHighPressure; }
  306. set
  307. {
  308. SetProperty(ref m_ProcessHighPressure, value);
  309. }
  310. }
  311. public float ProcessLowPressure
  312. {
  313. get { return m_ProcessLowPressure; }
  314. set
  315. {
  316. SetProperty(ref m_ProcessLowPressure, value);
  317. }
  318. }
  319. public float ForelinePressure
  320. {
  321. get { return m_ForelinePressurePressure; }
  322. set
  323. {
  324. SetProperty(ref m_ForelinePressurePressure, value);
  325. }
  326. }
  327. public bool SourceRFFanInterlock
  328. {
  329. get { return m_SourceRFFanInterlock; }
  330. set
  331. {
  332. SetProperty(ref m_SourceRFFanInterlock, value);
  333. }
  334. }
  335. public bool IsWLK
  336. {
  337. get { return m_IsWLK; }
  338. set
  339. {
  340. SetProperty(ref m_IsWLK, value);
  341. }
  342. }
  343. public bool IsWaterFlowOk
  344. {
  345. get { return m_IsWaterFlowOk; }
  346. set
  347. {
  348. SetProperty(ref m_IsWaterFlowOk, value);
  349. }
  350. }
  351. public bool IsCDAOK
  352. {
  353. get { return m_IsCDAOK; }
  354. set
  355. {
  356. SetProperty(ref m_IsCDAOK, value);
  357. }
  358. }
  359. public bool SensorGasBoxDoor
  360. {
  361. get { return m_SensorGasBoxDoor; }
  362. set
  363. {
  364. SetProperty(ref m_SensorGasBoxDoor, value);
  365. }
  366. }
  367. public bool SensorGasBoxPressure
  368. {
  369. get { return m_SensorGasBoxPressure; }
  370. set
  371. {
  372. SetProperty(ref m_SensorGasBoxPressure, value);
  373. }
  374. }
  375. public bool IsTurboPumpInterlock
  376. {
  377. get { return m_IsTurboPumpInterlock; }
  378. set
  379. {
  380. SetProperty(ref m_IsTurboPumpInterlock, value);
  381. }
  382. }
  383. public string ModuleName { get; set; }
  384. public double MFC1SetPoint
  385. {
  386. get { return m_MFC1SetPoint; }
  387. set { SetProperty(ref m_MFC1SetPoint, value); }
  388. }
  389. public double MFC2SetPoint
  390. {
  391. get { return m_MFC2SetPoint; }
  392. set { SetProperty(ref m_MFC2SetPoint, value); }
  393. }
  394. public double MFC3SetPoint
  395. {
  396. get { return m_MFC3SetPoint; }
  397. set { SetProperty(ref m_MFC3SetPoint, value); }
  398. }
  399. public double MFC4SetPoint
  400. {
  401. get { return m_MFC4SetPoint; }
  402. set { SetProperty(ref m_MFC4SetPoint, value); }
  403. }
  404. public double MFC5SetPoint
  405. {
  406. get { return m_MFC5SetPoint; }
  407. set { SetProperty(ref m_MFC5SetPoint, value); }
  408. }
  409. public double MFC6SetPoint
  410. {
  411. get { return m_MFC6SetPoint; }
  412. set { SetProperty(ref m_MFC6SetPoint, value); }
  413. }
  414. public double MFC7SetPoint
  415. {
  416. get { return m_MFC7SetPoint; }
  417. set { SetProperty(ref m_MFC7SetPoint, value); }
  418. }
  419. public double MFC8SetPoint
  420. {
  421. get { return m_MFC8SetPoint; }
  422. set { SetProperty(ref m_MFC8SetPoint, value); }
  423. }
  424. public double N2SetPoint
  425. {
  426. get { return m_N2SetPoint; }
  427. set { SetProperty(ref m_N2SetPoint, value); }
  428. }
  429. public AITMfcData MFC1Data
  430. {
  431. get { return m_MFC1Data; }
  432. set { SetProperty(ref m_MFC1Data, value); }
  433. }
  434. public AITMfcData MFC2Data
  435. {
  436. get { return m_MFC2Data; }
  437. set { SetProperty(ref m_MFC2Data, value); }
  438. }
  439. public AITMfcData MFC3Data
  440. {
  441. get { return m_MFC3Data; }
  442. set { SetProperty(ref m_MFC3Data, value); }
  443. }
  444. public AITMfcData MFC4Data
  445. {
  446. get { return m_MFC4Data; }
  447. set { SetProperty(ref m_MFC4Data, value); }
  448. }
  449. public AITMfcData MFC5Data
  450. {
  451. get { return m_MFC5Data; }
  452. set { SetProperty(ref m_MFC5Data, value); }
  453. }
  454. public AITMfcData MFC6Data
  455. {
  456. get { return m_MFC6Data; }
  457. set { SetProperty(ref m_MFC6Data, value); }
  458. }
  459. public AITMfcData MFC7Data
  460. {
  461. get { return m_MFC7Data; }
  462. set { SetProperty(ref m_MFC7Data, value); }
  463. }
  464. public AITMfcData MFC8Data
  465. {
  466. get { return m_MFC8Data; }
  467. set { SetProperty(ref m_MFC8Data, value); }
  468. }
  469. public AITMfcData MFCHeData
  470. {
  471. get { return m_MFCHeData; }
  472. set { SetProperty(ref m_MFCHeData, value); }
  473. }
  474. public AITMfcData MFCN2Data
  475. {
  476. get { return m_MFCN2Data; }
  477. set { SetProperty(ref m_MFCN2Data, value); }
  478. }
  479. public AITHeaterData ValveHeaterData
  480. {
  481. get { return m_ValveHeaterData; }
  482. set { SetProperty(ref m_ValveHeaterData, value); }
  483. }
  484. public AITHeaterData ForelineHeaterData
  485. {
  486. get { return m_ForelineHeaterData; }
  487. set { SetProperty(ref m_ForelineHeaterData, value); }
  488. }
  489. public AITHeaterData WallHeaterData
  490. {
  491. get { return m_WallHeaterData; }
  492. set { SetProperty(ref m_WallHeaterData, value); }
  493. }
  494. public AITRfData SRFData
  495. {
  496. get { return m_SRFData; }
  497. set { SetProperty(ref m_SRFData, value); }
  498. }
  499. public AITRfData BRFData
  500. {
  501. get { return m_BRFData; }
  502. set { SetProperty(ref m_BRFData, value); }
  503. }
  504. public PMState PMCurrentState
  505. {
  506. get { return m_PMCurrentState; }
  507. set { SetProperty(ref m_PMCurrentState, value); }
  508. }
  509. #region 阀
  510. public bool GasFinalValveIsOpen
  511. {
  512. get { return m_GasFinalValveIsOpen; }
  513. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  514. }
  515. public bool PVN21ValveIsOpen
  516. {
  517. get { return m_PVN21ValveIsOpen; }
  518. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  519. }
  520. public bool PVN22ValveIsOpen
  521. {
  522. get { return m_PVN22ValveIsOpen; }
  523. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  524. }
  525. public bool N2ValveIsOpen
  526. {
  527. get { return m_N2ValveIsOpen; }
  528. set { SetProperty(ref m_N2ValveIsOpen, value); }
  529. }
  530. public bool PV11ValveIsOpen
  531. {
  532. get { return m_PV11ValveIsOpen; }
  533. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  534. }
  535. public bool PV12ValveIsOpen
  536. {
  537. get { return m_PV12ValveIsOpen; }
  538. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  539. }
  540. public bool MFC1ValveIsOpen
  541. {
  542. get { return m_MFC1ValveIsOpen; }
  543. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  544. }
  545. public bool PV21ValveIsOpen
  546. {
  547. get { return m_PV21ValveIsOpen; }
  548. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  549. }
  550. public bool PV22ValveIsOpen
  551. {
  552. get { return m_PV22ValveIsOpen; }
  553. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  554. }
  555. public bool MFC2ValveIsOpen
  556. {
  557. get { return m_MFC2ValveIsOpen; }
  558. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  559. }
  560. public bool PV31ValveIsOpen
  561. {
  562. get { return m_PV31ValveIsOpen; }
  563. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  564. }
  565. public bool PV32ValveIsOpen
  566. {
  567. get { return m_PV32ValveIsOpen; }
  568. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  569. }
  570. public bool MFC3ValveIsOpen
  571. {
  572. get { return m_MFC3ValveIsOpen; }
  573. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  574. }
  575. public bool PV41ValveIsOpen
  576. {
  577. get { return m_PV41ValveIsOpen; }
  578. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  579. }
  580. public bool PV42ValveIsOpen
  581. {
  582. get { return m_PV42ValveIsOpen; }
  583. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  584. }
  585. public bool MFC4ValveIsOpen
  586. {
  587. get { return m_MFC4ValveIsOpen; }
  588. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  589. }
  590. public bool MFC5ValveIsOpen
  591. {
  592. get { return m_MFC5ValveIsOpen; }
  593. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  594. }
  595. public bool MFC6ValveIsOpen
  596. {
  597. get { return m_MFC6ValveIsOpen; }
  598. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  599. }
  600. public bool MFC7ValveIsOpen
  601. {
  602. get { return m_MFC7ValveIsOpen; }
  603. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  604. }
  605. public bool MFC8ValveIsOpen
  606. {
  607. get { return m_MFC8ValveIsOpen; }
  608. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  609. }
  610. public bool PVHe1ValveIsOpen
  611. {
  612. get { return m_PVHe1ValveIsOpen; }
  613. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  614. }
  615. public bool PVHe2ValveIsOpen
  616. {
  617. get { return m_PVHe2ValveIsOpen; }
  618. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  619. }
  620. public bool TurboPumpPumpingValveIsOpen
  621. {
  622. get { return m_TurboPumpPumpingValveIsOpen; }
  623. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  624. }
  625. public bool TurboPumpPurgeValveIsOpen
  626. {
  627. get { return m_TurboPumpPurgeValveIsOpen; }
  628. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  629. }
  630. public bool SoftPumpValveIsOpen
  631. {
  632. get { return m_SoftPumpValveIsOpen; }
  633. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  634. }
  635. public bool FastPumpValveIsOpen
  636. {
  637. get { return m_FastPumpValveIsOpen; }
  638. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  639. }
  640. public bool GuageValveIsOpen
  641. {
  642. get { return m_GuageValveIsOpen; }
  643. set { SetProperty(ref m_GuageValveIsOpen, value); }
  644. }
  645. #endregion
  646. public Dictionary<string, object> RtDataValues
  647. {
  648. get { return m_RtDataValues; }
  649. set { SetProperty(ref m_RtDataValues, value); }
  650. }
  651. public bool PumpIsOpen
  652. {
  653. get { return m_PumpIsOpen; }
  654. set { SetProperty(ref m_PumpIsOpen, value); }
  655. }
  656. public bool PendulumValveIsOpen
  657. {
  658. get { return m_PendulumValveIsOpen; }
  659. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  660. }
  661. public bool TurboIsOpen
  662. {
  663. get { return m_TurboIsOpen; }
  664. set { SetProperty(ref m_TurboIsOpen, value); }
  665. }
  666. public bool IsATM
  667. {
  668. get { return m_IsATM; }
  669. set { SetProperty(ref m_IsATM, value); }
  670. }
  671. public bool IsVAC
  672. {
  673. get { return m_IsVAC; }
  674. set { SetProperty(ref m_IsVAC, value); }
  675. }
  676. //public bool BRFIsOn
  677. //{
  678. // get { return m_BRFIsOn; }
  679. // set { SetProperty(ref m_BRFIsOn, value); }
  680. //}
  681. //public bool SRFIsOn
  682. //{
  683. // get { return m_SRFIsOn; }
  684. // set { SetProperty(ref m_SRFIsOn, value); }
  685. //}
  686. public int PositionValue
  687. {
  688. get { return m_PositionValue; }
  689. set { SetProperty(ref m_PositionValue, value); }
  690. }
  691. public bool IsPositionMode
  692. {
  693. get { return m_IsPositionMode; }
  694. set { SetProperty(ref m_IsPositionMode, value); }
  695. }
  696. public double HeGasSetpoint
  697. {
  698. get { return m_HeGasSetpoint; }
  699. set
  700. {
  701. SetProperty(ref m_HeGasSetpoint, value);
  702. }
  703. }
  704. public int HePressureSetpoint
  705. {
  706. get { return m_HePressureSetpoint; }
  707. set
  708. {
  709. SetProperty(ref m_HePressureSetpoint, value);
  710. }
  711. }
  712. public float SRFFwdPowerSetpoint
  713. {
  714. get { return m_SRFFwdPowerSetpoint; }
  715. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  716. }
  717. public float BRFFwdPowerSetpoint
  718. {
  719. get { return m_BRFFwdPowerSetpoint; }
  720. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  721. }
  722. public int ESCVoltage
  723. {
  724. get { return m_ESCVoltage; }
  725. set { SetProperty(ref m_ESCVoltage, value); }
  726. }
  727. public float SRFMatchC1
  728. {
  729. get { return m_SRFMatchC1; }
  730. set { SetProperty(ref m_SRFMatchC1, value); }
  731. }
  732. public float SRFMatchC2
  733. {
  734. get { return m_SRFMatchC2; }
  735. set { SetProperty(ref m_SRFMatchC2, value); }
  736. }
  737. public float BRFMatchC1
  738. {
  739. get { return m_BRFMatchC1; }
  740. set { SetProperty(ref m_BRFMatchC1, value); }
  741. }
  742. public float BRFMatchC2
  743. {
  744. get { return m_BRFMatchC2; }
  745. set { SetProperty(ref m_BRFMatchC2, value); }
  746. }
  747. public bool GasIsFlowing
  748. {
  749. get { return m_GasIsFlowing; }
  750. set { SetProperty(ref m_GasIsFlowing, value); }
  751. }
  752. public bool IsProcessing
  753. {
  754. get { return m_IsProcessing; }
  755. set { SetProperty(ref m_IsProcessing, value); }
  756. }
  757. public bool IsAutoMode
  758. {
  759. get { return m_IsAutoMode; }
  760. set { SetProperty(ref m_IsAutoMode, value); }
  761. }
  762. public string SelectedRecipe
  763. {
  764. get { return m_SelectedRecipe; }
  765. set { SetProperty(ref m_SelectedRecipe, value); }
  766. }
  767. public float ChillerTempSetpoint
  768. {
  769. get { return m_ChillerTempSetpoint; }
  770. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  771. }
  772. public float WallTempSetpoint
  773. {
  774. get { return m_WallTempSetpoint; }
  775. set { SetProperty(ref m_WallTempSetpoint, value); }
  776. }
  777. public bool HeIsPressureMode
  778. {
  779. get { return m_HeIsPressureMode; }
  780. set { SetProperty(ref m_HeIsPressureMode, value); }
  781. }
  782. public bool ChillerIsOn
  783. {
  784. get { return m_ChillerIsOn; }
  785. set { SetProperty(ref m_ChillerIsOn, value); }
  786. }
  787. public bool InnerChillerIsOn
  788. {
  789. get { return m_InnerChillerIsOn; }
  790. set { SetProperty(ref m_InnerChillerIsOn, value); }
  791. }
  792. public bool OuterChillerIsOn
  793. {
  794. get { return m_OuterChillerIsOn; }
  795. set { SetProperty(ref m_OuterChillerIsOn, value); }
  796. }
  797. public bool TopChillerIsOn
  798. {
  799. get { return m_TopChillerIsOn; }
  800. set { SetProperty(ref m_TopChillerIsOn, value); }
  801. }
  802. public double ChamberPressureFeedBack
  803. {
  804. get { return m_ChamberPressureFeedBack; }
  805. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  806. }
  807. public string WaferID
  808. {
  809. get { return m_WaferID; }
  810. set { SetProperty(ref m_WaferID, value); }
  811. }
  812. #endregion
  813. #region 命令
  814. private DelegateCommand _PMInitCommnad;
  815. public DelegateCommand PMInitCommnad =>
  816. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  817. private DelegateCommand _PMAbortCommnad;
  818. public DelegateCommand PMAbortCommnad =>
  819. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  820. private DelegateCommand _GasCommand;
  821. public DelegateCommand GasCommand =>
  822. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  823. private DelegateCommand _HeCommand;
  824. public DelegateCommand HeCommand =>
  825. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  826. private DelegateCommand _RfCommand;
  827. public DelegateCommand RfCommand =>
  828. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  829. private DelegateCommand _PurgeCommand;
  830. public DelegateCommand PurgeCommand =>
  831. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  832. private DelegateCommand _VentCommand;
  833. public DelegateCommand VentCommand =>
  834. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  835. private DelegateCommand _PumpCommand;
  836. public DelegateCommand PumpCommand =>
  837. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  838. private DelegateCommand _OpenPumpCommand;
  839. public DelegateCommand OpenPumpCommand =>
  840. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  841. private DelegateCommand _ClosePumpCommand;
  842. public DelegateCommand ClosePumpCommand =>
  843. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  844. private DelegateCommand _OpenTurboPumpCommand;
  845. public DelegateCommand OpenTurboPumpCommand =>
  846. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  847. private DelegateCommand _CloseTurboPumpCommand;
  848. public DelegateCommand CloseTurboPumpCommand =>
  849. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  850. private DelegateCommand _OpenPendulumValveCommand;
  851. public DelegateCommand OpenPendulumValveCommand =>
  852. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  853. private DelegateCommand _ClosePendulumValveCommand;
  854. public DelegateCommand ClosePendulumValveCommand =>
  855. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  856. private DelegateCommand<object> _PinUpDownCommand;
  857. public DelegateCommand<object> PinUpDownCommand =>
  858. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  859. private DelegateCommand<object> _LidUpDownCommand;
  860. public DelegateCommand<object> LidUpDownCommand =>
  861. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  862. private DelegateCommand _SetSRfCommand;
  863. public DelegateCommand SetSRfCommand =>
  864. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  865. private DelegateCommand _SetBRfCommand;
  866. public DelegateCommand SetBRfCommand =>
  867. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  868. private DelegateCommand _OpenButterflyValveViewCommand;
  869. public DelegateCommand OpenButterflyValveViewCommand =>
  870. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  871. //private DelegateCommand _HVCommand;
  872. //public DelegateCommand HVCommand =>
  873. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  874. private DelegateCommand _HVSetCommand;
  875. public DelegateCommand HVSetCommand =>
  876. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  877. private DelegateCommand _LoadRecipeCommand;
  878. public DelegateCommand LoadRecipeCommand =>
  879. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  880. private DelegateCommand<object> _ControlValveCommand;
  881. public DelegateCommand<object> ControlValveCommand =>
  882. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  883. private DelegateCommand<object> _RunRecipeCommand;
  884. public DelegateCommand<object> RunRecipeCommand =>
  885. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  886. private DelegateCommand<object> _SetChillerTempCommand;
  887. public DelegateCommand<object> SetChillerTempCommand =>
  888. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  889. private DelegateCommand<object> _OnOffChillerCommand;
  890. public DelegateCommand<object> OnOffChillerCommand =>
  891. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  892. private DelegateCommand<object> _HeaterCommand;
  893. public DelegateCommand<object> HeaterCommand =>
  894. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  895. private DelegateCommand _EndStepCommand;
  896. public DelegateCommand EndStepCommand =>
  897. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  898. #endregion
  899. #region 构造函数
  900. public OverKepler2300ViewModel()
  901. {
  902. m_RtDataKeys = new List<string>();
  903. m_IsATM = true;
  904. ModuleName = "PMA";
  905. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  906. DispatcherTimer timer = new DispatcherTimer();
  907. timer.Interval = TimeSpan.FromSeconds(0.5);
  908. timer.Tick += timer_Tick;
  909. timer.Start();
  910. }
  911. #endregion
  912. #region 命令方法
  913. private void OnControlValve(object obj)
  914. {
  915. CommonValveControl commonValveControl = (CommonValveControl)obj;
  916. if (commonValveControl.IsCanEdit == true)
  917. {
  918. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  919. }
  920. }
  921. private void OnPMInit()
  922. {
  923. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  924. }
  925. private async void OnGas()
  926. {
  927. await Task.Run(async () =>
  928. {
  929. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  930. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  931. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  932. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  933. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  934. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  935. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  936. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  937. await Task.Delay(1000);
  938. object[] mfc = new object[8];
  939. string[] mfcSetPoint = new string[8];
  940. mfc[0] = MFC1Data.SetPoint;
  941. mfc[1] = MFC2Data.SetPoint;
  942. mfc[2] = MFC3Data.SetPoint;
  943. mfc[3] = MFC4Data.SetPoint;
  944. mfc[4] = MFC5Data.SetPoint;
  945. mfc[5] = MFC6Data.SetPoint;
  946. mfc[6] = MFC7Data.SetPoint;
  947. mfc[7] = MFC8Data.SetPoint;
  948. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  949. });
  950. }
  951. private void OnHe()
  952. {
  953. if (PVHe1ValveIsOpen == true)
  954. {
  955. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  956. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  957. }
  958. else
  959. {
  960. if (HeIsPressureMode)
  961. {
  962. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  963. }
  964. else
  965. {
  966. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  967. }
  968. }
  969. }
  970. private void OnRf()
  971. {
  972. if (PMCurrentState == PMState.RfPowering)
  973. {
  974. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  975. }
  976. else
  977. {
  978. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  979. }
  980. }
  981. private void OnPurge()
  982. {
  983. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  984. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  985. //{
  986. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  987. // await Task.Delay(1000);
  988. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  989. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  990. //}
  991. //else
  992. //{
  993. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  994. // await Task.Delay(1000);
  995. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  996. //}
  997. if (PMCurrentState == PMState.Purging)
  998. {
  999. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1000. //await Task.Delay(1000);
  1001. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1002. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1003. }
  1004. else
  1005. {
  1006. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1007. //await Task.Delay(1000);
  1008. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1009. }
  1010. }
  1011. private void OnVent()
  1012. {
  1013. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1014. if (PMCurrentState == PMState.Venting)
  1015. {
  1016. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1017. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1018. }
  1019. else
  1020. {
  1021. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1022. }
  1023. }
  1024. private void OnPump()
  1025. {
  1026. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1027. if (PMCurrentState==PMState.Pumping)
  1028. {
  1029. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1030. return;
  1031. }
  1032. //if (PMCurrentState == PMState.pum)
  1033. //{
  1034. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1035. // return;
  1036. //}
  1037. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1038. //{
  1039. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1040. //}
  1041. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1042. //{
  1043. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1044. //}
  1045. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1046. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1047. // 设置底压
  1048. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1049. if (basePressure <= 0.01 || basePressure >= 1000)
  1050. {
  1051. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1052. return;
  1053. }
  1054. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1055. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1056. {
  1057. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1058. return;
  1059. }
  1060. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1061. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1062. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1063. }
  1064. private void OnOpenPump()
  1065. {
  1066. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1067. if (PMCurrentState==PMState.LaunchingPump)
  1068. {
  1069. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1070. return;
  1071. }
  1072. //if (PumpIsOpen == true)
  1073. //{
  1074. // return;
  1075. //}
  1076. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1077. }
  1078. private void OnClosePump()
  1079. {
  1080. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1081. }
  1082. private void OnOpenTurboPump()
  1083. {
  1084. //TurboIsOpen = true;
  1085. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1086. if (PMCurrentState == PMState.LaunchingTurboPump)
  1087. {
  1088. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1089. return;
  1090. }
  1091. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1092. }
  1093. private void OnCloseTurboPump()
  1094. {
  1095. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1096. }
  1097. private void OnOpenPendulumValve()
  1098. {
  1099. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1100. }
  1101. private void OnClosePendulumValve()
  1102. {
  1103. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1104. }
  1105. private void OnPinUpDown(object upDown)
  1106. {
  1107. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1108. }
  1109. private void OnLidUpDown(object upDown)
  1110. {
  1111. //var value = (bool)upDown;
  1112. if (upDown.ToString()== "Up")
  1113. {
  1114. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1115. }
  1116. else
  1117. {
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1119. }
  1120. }
  1121. private async void OnSetSRf()
  1122. {
  1123. if (SRFData.IsRfOn == true)
  1124. {
  1125. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1126. }
  1127. else
  1128. {
  1129. if (GasIsFlowing == true)
  1130. {
  1131. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1132. await Task.Delay(100);
  1133. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1134. }
  1135. }
  1136. }
  1137. private async void OnSetBRf()
  1138. {
  1139. if (BRFData.IsRfOn == true)
  1140. {
  1141. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1142. }
  1143. else
  1144. {
  1145. if (GasIsFlowing == true)
  1146. {
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1148. await Task.Delay(100);
  1149. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1150. }
  1151. }
  1152. }
  1153. private void OnPMAbort()
  1154. {
  1155. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1156. }
  1157. private void OnOpenButterflyValveView()
  1158. {
  1159. //if (butterflyValveMessageBox == null)
  1160. //{
  1161. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1162. butterflyValveMessageBox = new ButterflyValveView();
  1163. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1164. butterflyValveMessageBox.Left = 700;
  1165. butterflyValveMessageBox.Top = 600;
  1166. butterflyValveMessageBox.Show();
  1167. butterflyValveMessageBox.Owner = _mainWindow;
  1168. //}
  1169. }
  1170. private void OnLoadRecipe()
  1171. {
  1172. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1173. }
  1174. //private async void OnHV()
  1175. //{
  1176. // if (ESCHVData.IsOn == true)
  1177. // {
  1178. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1179. // }
  1180. // else
  1181. // {
  1182. // await Task.Run(async () =>
  1183. // {
  1184. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1185. // await Task.Delay(1000);
  1186. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1187. // });
  1188. // }
  1189. //}
  1190. private void OnHVSet()
  1191. {
  1192. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1193. }
  1194. private void OnRunRecipe(object obj)
  1195. {
  1196. string recipeName = SelectedRecipe;
  1197. if (recipeName == null)
  1198. {
  1199. return;
  1200. }
  1201. ClearData();
  1202. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1203. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1205. }
  1206. private void OnSetChillerTemp(object obj)
  1207. {
  1208. float offset;
  1209. float setPoint;
  1210. var chillerType= (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1211. switch (chillerType)
  1212. {
  1213. case ChillerType.Chiller:
  1214. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1215. float.TryParse(value, out offset);
  1216. setPoint = ChillerTempSetpoint;
  1217. break;
  1218. case ChillerType.InnerChiller:
  1219. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1220. float.TryParse(Innervalue, out offset);
  1221. setPoint = InnerChillerTempSetpoint;
  1222. break;
  1223. case ChillerType.OuterChiller:
  1224. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1225. float.TryParse(Outervalue, out offset);
  1226. setPoint = OuterChillerTempSetpoint;
  1227. break;
  1228. case ChillerType.TopChiller:
  1229. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1230. float.TryParse(Topvalue, out offset);
  1231. setPoint = TopChillerTempSetpoint;
  1232. break;
  1233. default:
  1234. return;
  1235. }
  1236. //var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1237. //float x;
  1238. //float.TryParse(value, out x);
  1239. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(),setPoint, offset);
  1240. }
  1241. private void OnOffChiller(object obj)
  1242. {
  1243. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1244. switch (chillerType)
  1245. {
  1246. case ChillerType.Chiller:
  1247. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1248. break;
  1249. case ChillerType.InnerChiller:
  1250. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1251. break;
  1252. case ChillerType.OuterChiller:
  1253. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1254. break;
  1255. case ChillerType.TopChiller:
  1256. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1257. break;
  1258. default:
  1259. return;
  1260. }
  1261. }
  1262. private void OnHeater(object obj)
  1263. {
  1264. AITHeaterData heaterData = obj as AITHeaterData;
  1265. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1266. heaterView = new HeaterView(heaterData);
  1267. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1268. heaterView.Owner = _mainWindow;
  1269. heaterView.Show();
  1270. }
  1271. private void OnEndStep()
  1272. {
  1273. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1274. {
  1275. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1276. }
  1277. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1278. {
  1279. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1280. }
  1281. }
  1282. #endregion
  1283. #region 私有方法
  1284. private void ClearData()
  1285. {
  1286. ESCVoltage = 0;
  1287. SRFFwdPowerSetpoint = 0;
  1288. SRFMatchC1 = 0;
  1289. SRFMatchC2 = 0;
  1290. BRFFwdPowerSetpoint = 0;
  1291. BRFMatchC1 = 0;
  1292. BRFMatchC2 = 0;
  1293. HeGasSetpoint = 0;
  1294. MFC1SetPoint = 0;
  1295. MFC2SetPoint = 0;
  1296. MFC3SetPoint = 0;
  1297. MFC4SetPoint = 0;
  1298. MFC5SetPoint = 0;
  1299. MFC6SetPoint = 0;
  1300. MFC7SetPoint = 0;
  1301. MFC8SetPoint = 0;
  1302. }
  1303. private IEnumerable<string> GetFilesNames(string path)
  1304. {
  1305. return Directory.GetFiles(path, "*.rcp")
  1306. .Select(Path.GetFileNameWithoutExtension);
  1307. }
  1308. void timer_Tick(object sender, EventArgs e)
  1309. {
  1310. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1311. if (RtDataValues==null)
  1312. {
  1313. return;
  1314. }
  1315. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1316. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1317. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1318. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1319. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1320. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1321. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1322. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1323. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1324. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1325. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1326. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1327. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1328. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1329. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1330. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1331. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1332. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1333. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1334. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1335. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1336. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1337. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1338. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1339. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1340. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1341. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1342. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1343. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1344. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1345. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1346. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1347. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1348. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1349. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1350. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1351. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1352. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1353. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1354. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1355. IsProcessing=PMCurrentState == PMState.Processing;
  1356. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1357. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1358. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1359. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1360. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1361. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1362. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1363. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1364. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1365. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1366. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1367. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1368. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1369. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1370. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1371. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1372. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1373. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1374. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1375. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1376. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1377. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1378. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1379. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1380. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1381. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1382. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1383. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1384. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1385. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1386. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1387. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1388. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1389. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1390. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1391. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1392. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1393. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1394. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1395. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1396. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1397. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1398. if (PMCurrentState == PMState.Processing)
  1399. {
  1400. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1401. if (CurrentRecipeResult.RecipeStepNumber != null)
  1402. {
  1403. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1404. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1405. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
  1406. }
  1407. }
  1408. else
  1409. {
  1410. CurrentRecipeResult = null;
  1411. CurrentRecipeStep = null;
  1412. }
  1413. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1414. {
  1415. ChamberPressureFeedBack = ProcessLowPressure;
  1416. }
  1417. else
  1418. {
  1419. ChamberPressureFeedBack = ProcessHighPressure;
  1420. }
  1421. }
  1422. public void addDataKeys()
  1423. {
  1424. m_RtDataKeys.Clear();
  1425. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1426. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1427. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1428. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1429. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1430. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1431. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1432. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1433. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1434. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1435. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1436. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1437. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1438. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1439. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1440. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1441. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1442. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1443. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1444. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1445. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1446. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1447. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1448. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1449. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1450. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1451. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1452. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1453. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1454. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1455. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1456. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1457. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1458. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1459. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1460. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1461. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1462. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1463. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1464. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1465. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1466. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1467. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1468. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1469. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1470. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1471. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1472. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1473. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1474. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1475. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1476. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1477. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1478. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1479. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1480. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1481. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1482. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1483. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1484. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1485. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1486. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1487. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1488. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1489. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1490. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1491. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1492. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1493. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1494. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1495. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1496. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1497. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1498. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1499. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1500. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1501. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1502. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1503. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1504. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1505. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1506. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1507. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1508. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1509. }
  1510. #endregion
  1511. }
  1512. }