VenusDevice.cs 6.0 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValvePVHe3,
  27. ValveHeISO,
  28. ValveGasFinal,
  29. ValveSoftPump,
  30. ValveFastPump,
  31. ValveCHBPurge,
  32. ValveTurboPumpPumping,
  33. ValveTurboPumpPurge,
  34. ValveGuage,
  35. ValveLoadlockVent,
  36. ValveLoadlockPumping,
  37. MfcGas1,
  38. MfcGas2,
  39. MfcGas3,
  40. MfcGas4,
  41. MfcGas5,
  42. GasStick1,
  43. GasStick2,
  44. GasStick3,
  45. TemperatureControl,
  46. ChamberLid,
  47. ATM_SW,
  48. VAC_SW,
  49. WaterFlow_SW,
  50. N2_Pressure,
  51. ProcessGauge,
  52. PressureGauge,
  53. ForelineGauge,
  54. MainPump,
  55. Chiller,
  56. InnerChiller,
  57. OuterChiller,
  58. TopChiller,
  59. Rf,
  60. BiasRf,
  61. Match,
  62. BiasMatch,
  63. PressureControl,
  64. ThrottleValve,
  65. HeaterChamber,
  66. ForelineHeater,
  67. Heartbeat,
  68. ResetPlcSignal,
  69. LiftPin,
  70. SlitDoor,
  71. SmallPin,
  72. MediumPin,
  73. LoadLockArm,
  74. StatisticsRfOnTime,
  75. StatisticsPumpOnTime,
  76. PlcDateTime,
  77. Lid,
  78. LidLoadlock,
  79. LidLocker,
  80. ESCHV,
  81. PendulumValve,
  82. TurboPump,
  83. EndPoint,
  84. TMLid,
  85. LLALid,
  86. LLBLid,
  87. LLATSlitDoor,
  88. LLBTSlitDoor,
  89. LLAESlitDoor,
  90. LLBESlitDoor,
  91. TMValveN2,
  92. TMSoftPumpValve,
  93. TMFastPumpValve,
  94. TMPurgeValve,
  95. TMVentValve,
  96. //TMSoftVentValve,
  97. //TMFastVentValve,
  98. LLASoftPumpValve,
  99. LLAFastPumpValve,
  100. LLAPurgeValve,
  101. LLAVentValve,
  102. LLBSoftPumpValve,
  103. LLBFastPumpValve,
  104. LLBPurgeValve,
  105. LLBVentValve,
  106. ValveWaterRelay,
  107. TMPowerOn,
  108. TMInSafty,
  109. WaferLeakSensor,
  110. EFEMSideDoorClosed,
  111. TMPCWFlowSwitch,
  112. LLAPCWFlowSwitch,
  113. LLBPCWFlowSwitch,
  114. TMLidClosed,
  115. CDAPressureSwitch,
  116. VaccumPressureSwitch,
  117. N2PressureSwitch,
  118. TMPressureCtrl,
  119. TMRobotNotExtendPMA,
  120. TMRobotNotExtendPMB,
  121. TMRobotNotExtendPMC,
  122. TMRobotNotExtendPMD,
  123. TMRobotNotExtendLLA,
  124. TMRobotNotExtendLLB,
  125. EfemRobotNotExtendLLA,
  126. EfemRobotNotExtendLLB,
  127. TMVacSwitch,
  128. LLAVacSwitch,
  129. LLBVacSwitch,
  130. TMATMSwitch,
  131. LLAATMSwitch,
  132. LLBATMSwitch,
  133. LLAWaferSizeCheckSwitch,
  134. LLBWaferSizeCheckSwitch,
  135. PMAWaferSizeCheckSwitch,
  136. PMBWaferSizeCheckSwitch,
  137. PMCWaferSizeCheckSwitch,
  138. PMDWaferSizeCheckSwitch,
  139. LLASoftVentValve,
  140. LLAFastVentValve,
  141. LLBSoftVentValve,
  142. LLBFastVentValve,
  143. }
  144. public enum StateData
  145. {
  146. RecipeProcessTime,
  147. RecipeStepNo,
  148. RecipeStepMode,
  149. RecipeName,
  150. RecipeBaseName,
  151. RecipeStepTimeElapsed,
  152. RecipeStepTimeSetPoint,
  153. RecipeStepRfTimeSetPoint,
  154. RecipeStepElectrodeTemp,
  155. SmallWafer,
  156. MidWafer,
  157. BigWafer,
  158. RfTimeElapsed,
  159. PumpTime,
  160. PMState,
  161. TMState,
  162. IsAutoMode,
  163. IsPmOnline,
  164. IsTmOnline,
  165. PMJobState,
  166. TMJobState,
  167. PmPlatformState,
  168. JobState,
  169. JobTmRecipe,
  170. JobPmRecipe,
  171. JobStartTime,
  172. JobStopTime,
  173. JobProcessCount,
  174. IsPumpingOkForProcess,
  175. IsCoolingOkForProcess,
  176. IsGasFlowingOkForProcess,
  177. IsRfPowering,
  178. TotalCycle,
  179. ProcessStatus,
  180. AlarmEvent,
  181. LeakCheckElapseTime,
  182. DataLogName,
  183. LotName,
  184. CurrentMagazineType,
  185. SchedulerRecipe,
  186. SchedulerState,
  187. SchedulerLoadStationInSubstrate,
  188. SchedulerRailInSubstrate,
  189. SchedulerPmSubstrate,
  190. SchedulerRailOutSubstrate,
  191. SchedulerLoadStationOutSubstrate,
  192. }
  193. public enum RtOperation
  194. {
  195. DeviceOperation,
  196. LockLid,
  197. UnlockLid,
  198. StartPump,
  199. StartTurboPump,
  200. Pump,
  201. PumpLoadLock,
  202. StopPump,
  203. GasFlow,
  204. StopGasFlow,
  205. Cooling,
  206. StopCooling,
  207. /// <summary>
  208. ///
  209. /// 0:Step mode
  210. /// 1:Power on time
  211. /// 2:Electrode temperature
  212. /// 3:Electrode Critical temperature
  213. /// </summary>
  214. RfPower,
  215. Vent,
  216. VentLoadLock,
  217. Purge,
  218. PurgeLoadLock,
  219. Abort,
  220. Heat,
  221. SetConfig,
  222. SetPMBChillerState,
  223. SetHardwareConfig,
  224. LLPlace,
  225. LLPick,
  226. PMPick,
  227. PMPlace,
  228. Extend,
  229. Retract,
  230. RunRecipe,
  231. SkipCurrentStep,
  232. ResumeRecipe,
  233. AbortRecipe,
  234. Reset,
  235. LeakCheck,
  236. GasLeakCheck,
  237. DeleteLeakCheck,
  238. MFCVerification,
  239. AllMFCVerification,
  240. SwitchOffBuzzer,
  241. // Lift pin & Guide pin
  242. MoveLiftPin,
  243. MoveGuidePin,
  244. StartAutoRun,
  245. StopAutoRun,
  246. PauseAutoRun,
  247. ResumeAutoRun,
  248. InitAll,
  249. AckError,
  250. TmRun,
  251. TmStop,
  252. PmAuto,
  253. PmManual,
  254. PmOnline,
  255. PmOffline,
  256. JobAuto,
  257. JobManual,
  258. JobRun,
  259. JobStop,
  260. JobAbort,
  261. JobPmLoadRecipe,
  262. JobTmLoadRecipe,
  263. JobTmRun,
  264. JobTmStop,
  265. JobPmOnline,
  266. JobPmOffline,
  267. JobPmProcessDone,
  268. JobTmRecovered,
  269. Cycle
  270. }
  271. public enum MovementPosition
  272. {
  273. Down, Up, Left, Right, Middle, Unknown
  274. }
  275. public enum RState
  276. {
  277. Init,
  278. Running,
  279. End,
  280. Failed,
  281. Timeout,
  282. }
  283. }