SimulatorSystem.cs 115 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000.02F);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  156. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  157. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  158. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  159. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  160. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  161. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  172. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  190. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. //// pressure
  206. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  207. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  209. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  210. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  211. //// Temperature
  212. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  213. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  214. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  215. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  216. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  217. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  218. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  219. // Datetime
  220. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  221. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  222. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  223. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  224. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  225. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  226. break;
  227. case JetChamber.VenusDE:
  228. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  229. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  231. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  232. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  233. IO.DI[$"{mod}.DI_Lift_Pin_Up_Pos"].Value = false;
  234. IO.DI[$"{mod}.DI_Lift_Pin_Down_Pos"].Value = true;
  235. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  236. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  237. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  238. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  239. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  240. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = false;
  241. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = true;
  242. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  244. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  245. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  248. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  249. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  250. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  251. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  252. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  253. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  254. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  255. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  256. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  257. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  258. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  259. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  268. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  269. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  270. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  271. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  272. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  273. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  274. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  275. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  276. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  279. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  281. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  282. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  283. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  284. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  285. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  286. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  287. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  288. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  289. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  290. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  291. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  292. //// pressure
  293. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  294. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  295. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  296. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  297. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  298. //// Temperature
  299. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  300. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  301. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  302. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  303. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  304. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  306. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  307. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  308. // Datetime
  309. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  310. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  311. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  312. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  313. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  314. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  315. break;
  316. case JetChamber.Kepler2300:
  317. // chamber
  318. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  319. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  320. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  321. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  322. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  323. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  324. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  325. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  326. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  327. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  328. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  329. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  330. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  331. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  332. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  333. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  334. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  335. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  336. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  338. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  339. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  340. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  341. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  342. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  343. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  350. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  351. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  352. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  353. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  354. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  355. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  356. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  357. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  358. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  359. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  360. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  361. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  362. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  363. //// pressure
  364. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  365. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  366. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  367. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  368. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  369. //// Temperature
  370. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  371. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  372. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  373. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  374. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  375. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  376. // Datetime
  377. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  378. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  379. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  380. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  381. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  382. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  383. break;
  384. case JetChamber.Kepler2200A:
  385. case JetChamber.Kepler2200B:
  386. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  387. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  388. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  389. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  390. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  391. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  392. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  393. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  394. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  395. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  396. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  397. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  398. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  399. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  400. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  401. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  402. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  403. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  404. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  405. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  406. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  407. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  408. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  409. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  410. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  411. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  412. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  413. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  414. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  415. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  416. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  417. //// pressure
  418. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  419. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  420. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  421. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  422. //// Temperature
  423. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  424. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  425. // Datetime
  426. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  427. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  428. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  429. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  430. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  431. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  432. break;
  433. }
  434. }
  435. private void SetTMDefaultValue()
  436. {
  437. ModuleName mod = ModuleName.TM;
  438. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  439. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  440. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  441. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  442. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  443. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  444. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  445. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  446. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  447. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  448. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  449. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  450. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  451. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  452. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  453. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  454. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  455. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  456. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  457. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  458. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  459. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  460. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  461. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  462. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  463. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  464. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  465. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  466. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  468. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  469. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  470. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  471. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  473. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  474. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  475. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  476. // Datetime
  477. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  478. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  479. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  480. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  481. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  482. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  483. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  484. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  485. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  486. {
  487. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  488. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  489. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  490. }
  491. else
  492. {
  493. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  494. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  495. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  496. }
  497. }
  498. private void SetSETMDefaultValue()
  499. {
  500. ModuleName mod = ModuleName.SETM;
  501. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  502. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  503. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  504. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  505. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  506. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  507. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  508. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  509. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  510. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  511. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  512. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  513. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  514. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  515. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  516. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  517. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  518. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  519. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  520. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  521. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  522. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  523. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  524. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  525. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  526. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  527. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  528. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  529. SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
  530. SetAiValue($"{mod}.AI_VCE_Pipeline_Vacuum_Gauge", 3000);
  531. SetAiValue($"{mod}.AI_TM_Pipeline_Vacuum_Gauge", 3000);
  532. SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
  533. }
  534. private bool OnMonitor()
  535. {
  536. try
  537. {
  538. foreach (var item in jetChambers)
  539. {
  540. switch (item.Value)
  541. {
  542. case JetChamber.Venus:
  543. MonitorSlitDoor(item.Key);
  544. MonitorPin(item.Key);
  545. MonitorPressure(item.Key);
  546. MonitorExtendAndRetract(item.Key);
  547. MonitorGas(item.Key);
  548. this.SimulateHe(item.Key);
  549. //MonitorRF(item.Key);
  550. ChangeTime(item.Key);
  551. //MonitorIOPumpCtrl(item.Key);
  552. break;
  553. case JetChamber.Kepler2300:
  554. MonitorSlitDoor(item.Key);
  555. MonitorPin(item.Key);
  556. MonitorPressure_Kepler(item.Key);
  557. //MonitorTemperature(item.Key);
  558. MonitorGas(item.Key);
  559. this.SimulateHe(item.Key);
  560. //MonitorRF(item.Key);
  561. ChangeTime(item.Key);
  562. //MonitorIOPumpCtrl(item.Key);
  563. MonitorLid(item.Key);
  564. break;
  565. case JetChamber.Kepler2200A:
  566. case JetChamber.Kepler2200B:
  567. MonitorSlitDoor(item.Key);
  568. MonitorPressure_Kepler2200A(item.Key);
  569. //MonitorTemperature(item.Key);
  570. MonitorGas(item.Key);
  571. // MonitorRF(item.Key);
  572. ChangeTime(item.Key);
  573. //MonitorIOPumpCtrl(item.Key);
  574. MonitorLid(item.Key);
  575. MonitorIOHighTemperatureHeater(item.Key);
  576. break;
  577. case JetChamber.VenusSE:
  578. MonitorPin(item.Key);
  579. //MonitorVenuSESlitDoor(item.Key);
  580. MonitorSEPressure(item.Key);
  581. MonitorSEGas(item.Key);
  582. ChangeTime(item.Key);
  583. break;
  584. case JetChamber.VenusDE:
  585. MonitorPin(item.Key);
  586. //MonitorVenuDESlitDoor(item.Key);
  587. MonitorDEPressure(item.Key);
  588. ChangeTime(item.Key);
  589. break;
  590. }
  591. }
  592. ChangeTime(ModuleName.TM);
  593. MonitorMFSlitDoor();
  594. MonitorSEMFSlitDoor();
  595. MonitorMFPressure();
  596. MonitorSEMFPressure();
  597. }
  598. catch (Exception e)
  599. {
  600. LOG.WriteExeption(e);
  601. }
  602. return true;
  603. }
  604. private void ChangeTime(ModuleName mod)
  605. {
  606. // Heartbeat with PLC
  607. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  608. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  609. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  610. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  611. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  612. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  613. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  614. }
  615. //void MonitorVenuSESlitDoor(ModuleName mod)
  616. //{
  617. //}
  618. void MonitorSlitDoor(ModuleName mod)
  619. {
  620. // slit door open
  621. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  622. {
  623. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  624. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  625. }
  626. // slit door close
  627. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  628. {
  629. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  630. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  631. }
  632. }
  633. void MonitorMFSlitDoor()
  634. {
  635. ModuleName mod = ModuleName.TM;
  636. // LLA T door open
  637. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  638. {
  639. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  640. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  641. }
  642. // LLB T door open
  643. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  644. {
  645. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  646. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  647. }
  648. // LLA E door open
  649. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  650. {
  651. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  652. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  653. }
  654. // LLB E door open
  655. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  656. {
  657. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  658. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  659. }
  660. // LLA T door close
  661. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  662. {
  663. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  664. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  665. }
  666. // LLB T door close
  667. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  668. {
  669. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  670. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  671. }
  672. // LLA E door close
  673. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  674. {
  675. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  676. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  677. }
  678. // LLB E door close
  679. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  680. {
  681. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  682. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  683. }
  684. }
  685. void MonitorSEMFSlitDoor()
  686. {
  687. ModuleName mod = ModuleName.SETM;
  688. // VCE T door open
  689. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  690. {
  691. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  692. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  693. }
  694. // VCE T door Close
  695. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  696. {
  697. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  698. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  699. }
  700. //pma
  701. if (IO.DO[$"{mod}.DO_TM_PMA_OP"].Value)
  702. {
  703. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
  704. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = false;
  705. }
  706. if (IO.DO[$"{mod}.DO_TM_PMA_CL"].Value)
  707. {
  708. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  709. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  710. }
  711. //pmb
  712. if (IO.DO[$"{mod}.DO_TM_PMB_OP"].Value)
  713. {
  714. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
  715. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = false;
  716. }
  717. if (IO.DO[$"{mod}.DO_TM_PMB_CL"].Value)
  718. {
  719. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  720. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  721. }
  722. //pmc
  723. if (IO.DO[$"{mod}.DO_TM_PMC_OP"].Value)
  724. {
  725. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
  726. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = false;
  727. }
  728. if (IO.DO[$"{mod}.DO_TM_PMC_CL"].Value)
  729. {
  730. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  731. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  732. }
  733. //pmd
  734. if (IO.DO[$"{mod}.DO_TM_PMD_OP"].Value)
  735. {
  736. IO.DI[$"{mod}.DI_TM_PMD_OPS"].Value = true;
  737. IO.DI[$"{mod}.DI_TM_PMD_CLS"].Value = false;
  738. }
  739. if (IO.DO[$"{mod}.DO_TM_PMD_CL"].Value)
  740. {
  741. IO.DI[$"{mod}.DI_TM_PMD_OPS"].Value = false;
  742. IO.DI[$"{mod}.DI_TM_PMD_CLS"].Value = true;
  743. }
  744. }
  745. void MonitorPin(ModuleName mod)
  746. {
  747. // lift pin up
  748. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  749. {
  750. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  751. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  752. }
  753. }
  754. void MonitorLid(ModuleName mod)
  755. {
  756. // lift pin up
  757. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  758. {
  759. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  760. }
  761. }
  762. void MonitorExtendAndRetract(ModuleName mod)
  763. {
  764. // Extend
  765. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  766. if (_trigLLExtend.Q)
  767. {
  768. _trigLLRetract.RST = true;
  769. Thread.Sleep(500);
  770. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  771. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  772. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  773. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  774. }
  775. // Retract
  776. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  777. if (_trigLLRetract.Q)
  778. {
  779. count++;
  780. _trigLLExtend.RST = true;
  781. Thread.Sleep(500);
  782. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  783. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  784. if (count == 1)
  785. {
  786. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  787. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  788. }
  789. else if (count == 2)
  790. {
  791. count = 0;
  792. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  793. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  794. }
  795. }
  796. }
  797. void MonitorPressure(ModuleName mod)
  798. {
  799. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  800. // Loadlock pressure
  801. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  802. // Foreline
  803. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  804. {
  805. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  806. }
  807. else
  808. {
  809. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  810. }
  811. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  812. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  813. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  814. //float chamber_pressure = GetMockChamberPressure(mod);
  815. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  816. // soft pump & fast pump
  817. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  818. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  819. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  820. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  821. {
  822. //任意泵打开
  823. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  824. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  825. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  826. {//开双泵
  827. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  828. {
  829. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  830. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  831. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  832. }
  833. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  834. {
  835. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  836. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  837. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  838. }
  839. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  840. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  841. }
  842. else if (fast_pump_vlv.Value)//开
  843. {
  844. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  845. {
  846. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  847. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  848. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  849. }
  850. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  851. {
  852. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  853. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  854. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  855. }
  856. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  857. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  858. }
  859. else if (soft_pump_vlv.Value)
  860. {
  861. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  862. {
  863. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  864. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  865. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  866. }
  867. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  868. {
  869. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  870. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  871. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  872. }
  873. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  874. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  875. }
  876. else if (turbo_pump_vlv.Value)
  877. {
  878. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  879. if ((getAiValue_ChamberPressure - 500) >= 0)
  880. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  881. else
  882. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  883. if ((getAiValue_ProcessPressure - 500) >= 0)
  884. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  885. else
  886. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  887. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  888. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  889. }
  890. }
  891. // fast vent & purge
  892. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  893. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  894. //if (vent_vlv.Value || purge_vlv.Value)
  895. //{
  896. // if (vent_vlv.Value && purge_vlv.Value)
  897. // {
  898. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  899. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  900. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  901. // {
  902. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  903. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  904. // }
  905. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  906. // {
  907. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  908. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  909. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  910. // }
  911. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  912. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  913. // }
  914. // else
  915. //
  916. if (vent_vlv.Value)
  917. {
  918. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  919. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  920. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  921. {
  922. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  923. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  924. }
  925. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  926. {
  927. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  928. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  929. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  930. }
  931. else
  932. {
  933. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  934. }
  935. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  936. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  937. }
  938. // Loadlock Pumping Valve
  939. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  940. if (Loadlock_pump_vlv.Value)
  941. {
  942. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  943. }
  944. // Loadlock vent
  945. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  946. if (Loadlock_vent_vlv.Value)
  947. {
  948. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  949. }
  950. // 压力值越界,复位
  951. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  952. if (chamber_pressure1 > ATM_PRESSURE)
  953. {
  954. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  955. }
  956. else if (chamber_pressure1 < 20)
  957. {
  958. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  959. }
  960. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  961. if (process_pressure1 > PROCESS_GAUGE)
  962. {
  963. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  964. }
  965. else if (process_pressure1 < 20)
  966. {
  967. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  968. }
  969. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  970. if (foreline_pressure > 10000)
  971. {
  972. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  973. }
  974. else if (foreline_pressure < 150)
  975. {
  976. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  977. }
  978. // 模拟压力计漂移
  979. //int p1 = (int)GetMockChamberPressure(mod);
  980. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  981. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  982. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  983. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  984. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  985. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  986. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  987. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  988. // 根据当前压力值设定信号
  989. //float chamber_pressure2 = GetMockChamberPressure(mod);
  990. // ATM switch
  991. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  992. // VAC switch
  993. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  994. // Throttle valve
  995. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  996. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  997. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  998. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  999. // 压力值
  1000. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1001. //{
  1002. // short increase = (short)_rd.Next(20, 30);
  1003. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1004. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1005. // {
  1006. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1007. // }
  1008. //}
  1009. //else
  1010. //{
  1011. // short increase = (short)_rd.Next(20, 30);
  1012. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1013. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1014. // {
  1015. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1016. // }
  1017. //}
  1018. //// 位置值
  1019. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1020. //{
  1021. // short increase = (short)_rd.Next(20, 30);
  1022. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1023. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1024. // {
  1025. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1026. // }
  1027. //}
  1028. //else
  1029. //{
  1030. // short increase = (short)_rd.Next(20, 30);
  1031. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1032. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1033. // {
  1034. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1035. // }
  1036. //}
  1037. }
  1038. void MonitorSEPressure(ModuleName mod)
  1039. {
  1040. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1041. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1042. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1043. // Foreline
  1044. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1045. {
  1046. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1047. }
  1048. else
  1049. {
  1050. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1051. }
  1052. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1053. // soft pump & fast pump
  1054. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1055. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1056. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1057. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1058. {
  1059. //任意泵打开
  1060. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1061. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1062. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1063. {//开双泵
  1064. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1065. {
  1066. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1067. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1068. }
  1069. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1070. {
  1071. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1072. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1073. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1074. }
  1075. }
  1076. else if (fast_pump_vlv.Value)//开
  1077. {
  1078. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1079. {
  1080. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1081. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1082. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1083. }
  1084. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1085. {
  1086. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1087. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1088. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1089. }
  1090. }
  1091. else if (soft_pump_vlv.Value)
  1092. {
  1093. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1094. {
  1095. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1096. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1097. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1098. }
  1099. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1100. {
  1101. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1102. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1103. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1104. }
  1105. }
  1106. else if (turbo_pump_vlv.Value)
  1107. {
  1108. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1109. if ((getAiValue_ChamberPressure - 500) >= 0)
  1110. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1111. else
  1112. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1113. if ((getAiValue_ProcessPressure - 500) >= 0)
  1114. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1115. else
  1116. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1117. }
  1118. }
  1119. // fast vent & purge
  1120. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1121. if (vent_vlv.Value)
  1122. {
  1123. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1124. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1125. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1126. {
  1127. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1128. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1129. }
  1130. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1131. {
  1132. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1133. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1134. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1135. }
  1136. else
  1137. {
  1138. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1139. }
  1140. }
  1141. // Loadlock Pumping Valve
  1142. // 压力值越界,复位
  1143. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1144. if (chamber_pressure1 > ATM_PRESSURE)
  1145. {
  1146. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1147. }
  1148. else if (chamber_pressure1 < 20)
  1149. {
  1150. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1151. }
  1152. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1153. if (process_pressure1 > PROCESS_GAUGE)
  1154. {
  1155. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1156. }
  1157. else if (process_pressure1 < 20)
  1158. {
  1159. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1160. }
  1161. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1162. if (foreline_pressure > 10000)
  1163. {
  1164. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1165. }
  1166. else if (foreline_pressure < 150)
  1167. {
  1168. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1169. }
  1170. // ATM switch
  1171. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1172. // VAC switch
  1173. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1174. }
  1175. void MonitorDEPressure(ModuleName mod)
  1176. {
  1177. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1178. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1179. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1180. // Foreline
  1181. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1182. {
  1183. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1184. }
  1185. else
  1186. {
  1187. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1188. }
  1189. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1190. // soft pump & fast pump
  1191. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1192. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1193. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1194. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1195. {
  1196. //任意泵打开
  1197. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1198. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1199. if (fast_pump_vlv.Value)
  1200. {//开双泵
  1201. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1202. {
  1203. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1204. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1205. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1206. }
  1207. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1208. {
  1209. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1210. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1211. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1212. }
  1213. }
  1214. else if (turbo_pump_vlv.Value)
  1215. {
  1216. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1217. if ((getAiValue_ChamberPressure - 500) >= 0)
  1218. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1219. else
  1220. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1221. if ((getAiValue_ProcessPressure - 500) >= 0)
  1222. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1223. else
  1224. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1225. }
  1226. }
  1227. // fast vent & purge
  1228. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1229. if (vent_vlv.Value)
  1230. {
  1231. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1232. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1233. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1234. {
  1235. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1236. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1237. }
  1238. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1239. {
  1240. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1241. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1242. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1243. }
  1244. else
  1245. {
  1246. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1247. }
  1248. }
  1249. // Loadlock Pumping Valve
  1250. // 压力值越界,复位
  1251. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1252. if (chamber_pressure1 > ATM_PRESSURE)
  1253. {
  1254. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1255. }
  1256. else if (chamber_pressure1 < 20)
  1257. {
  1258. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1259. }
  1260. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1261. if (process_pressure1 > PROCESS_GAUGE)
  1262. {
  1263. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1264. }
  1265. else if (process_pressure1 < 20)
  1266. {
  1267. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1268. }
  1269. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1270. if (foreline_pressure > 10000)
  1271. {
  1272. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1273. }
  1274. else if (foreline_pressure < 150)
  1275. {
  1276. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1277. }
  1278. // ATM switch
  1279. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1280. // VAC switch
  1281. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1282. }
  1283. void MonitorPressure_Kepler(ModuleName mod)
  1284. {
  1285. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1286. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1287. {
  1288. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1289. }
  1290. else
  1291. {
  1292. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1293. }
  1294. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1295. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1296. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1297. //float chamber_pressure = GetMockChamberPressure(mod);
  1298. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1299. // soft pump & fast pump
  1300. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1301. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1302. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1303. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1304. {
  1305. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1306. {
  1307. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1308. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1309. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1310. {
  1311. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1312. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1313. }
  1314. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1315. {
  1316. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1317. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1318. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1319. }
  1320. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1321. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1322. }
  1323. else if (fast_pump_vlv.Value)
  1324. {
  1325. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1326. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1327. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1328. {
  1329. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  1330. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  1331. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1332. }
  1333. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1334. {
  1335. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1336. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1337. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1338. }
  1339. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1340. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1341. }
  1342. else if (soft_pump_vlv.Value)
  1343. {
  1344. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1345. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1346. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1347. {
  1348. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  1349. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  1350. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1351. }
  1352. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1353. {
  1354. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1355. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1356. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1357. }
  1358. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1359. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1360. }
  1361. else if (turbo_pump_vlv.Value)
  1362. {
  1363. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1364. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1365. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1366. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1367. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1368. }
  1369. }
  1370. // fast vent & purge
  1371. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1372. if (vent_vlv.Value)
  1373. {
  1374. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1375. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1376. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1377. {
  1378. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1379. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1380. }
  1381. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1382. {
  1383. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1384. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1385. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1386. }
  1387. else
  1388. {
  1389. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1390. }
  1391. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1392. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1393. }
  1394. // Loadlock Pumping Valve
  1395. // 压力值越界,复位
  1396. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1397. if (chamber_pressure1 > ATM_PRESSURE)
  1398. {
  1399. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1400. }
  1401. else if (chamber_pressure1 < 20)
  1402. {
  1403. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1404. }
  1405. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1406. if (process_pressure1 > PROCESS_GAUGE)
  1407. {
  1408. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1409. }
  1410. else if (process_pressure1 < 20)
  1411. {
  1412. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1413. }
  1414. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1415. if (foreline_pressure > 10000)
  1416. {
  1417. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1418. }
  1419. else if (foreline_pressure < 150)
  1420. {
  1421. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1422. }
  1423. // ATM switch
  1424. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1425. // VAC switch
  1426. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1427. }
  1428. void MonitorPressure_Kepler2200A(ModuleName mod)
  1429. {
  1430. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1431. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1432. {
  1433. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1434. }
  1435. else
  1436. {
  1437. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1438. }
  1439. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1440. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1441. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1442. //float chamber_pressure = GetMockChamberPressure(mod);
  1443. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1444. // soft pump & fast pump
  1445. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1446. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1447. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1448. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1449. {
  1450. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1451. {
  1452. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1453. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1454. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1455. {
  1456. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1457. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1458. }
  1459. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1460. {
  1461. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1462. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1463. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1464. }
  1465. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1466. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1467. }
  1468. else if (fast_pump_vlv.Value)
  1469. {
  1470. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1471. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1472. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1473. {
  1474. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1475. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1476. }
  1477. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1478. {
  1479. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1480. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1481. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1482. }
  1483. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1484. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1485. }
  1486. else if (soft_pump_vlv.Value)
  1487. {
  1488. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1489. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1490. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1491. {
  1492. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1493. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1494. }
  1495. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1496. {
  1497. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1498. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1499. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1500. }
  1501. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1502. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1503. }
  1504. else if (turbo_pump_vlv.Value)
  1505. {
  1506. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1507. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1508. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1509. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1510. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1511. }
  1512. }
  1513. // fast vent & purge
  1514. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1515. if (vent_vlv.Value)
  1516. {
  1517. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1518. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1519. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1520. {
  1521. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1522. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1523. }
  1524. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1525. {
  1526. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1527. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1528. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1529. }
  1530. else
  1531. {
  1532. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1533. }
  1534. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1535. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1536. }
  1537. // Loadlock Pumping Valve
  1538. // 压力值越界,复位
  1539. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1540. if (chamber_pressure1 > ATM_PRESSURE)
  1541. {
  1542. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1543. }
  1544. else if (chamber_pressure1 < 20)
  1545. {
  1546. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1547. }
  1548. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1549. if (process_pressure1 > PROCESS_GAUGE)
  1550. {
  1551. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1552. }
  1553. else if (process_pressure1 < 20)
  1554. {
  1555. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1556. }
  1557. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1558. if (foreline_pressure > 10000)
  1559. {
  1560. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1561. }
  1562. else if (foreline_pressure < 150)
  1563. {
  1564. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1565. }
  1566. // ATM switch
  1567. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1568. // VAC switch
  1569. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1570. }
  1571. void MonitorSEMFPressure()
  1572. {
  1573. ModuleName mod = ModuleName.SETM;
  1574. string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
  1575. string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
  1576. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
  1577. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
  1578. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
  1579. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
  1580. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
  1581. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
  1582. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
  1583. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
  1584. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1585. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1586. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1587. {
  1588. if (getAiValue_TM_ChamberPressure > 10000)
  1589. {
  1590. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1591. }
  1592. else if (getAiValue_TM_ChamberPressure <= 10000)
  1593. {
  1594. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1595. }
  1596. }
  1597. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1598. {
  1599. if (getAiValue_TM_ChamberPressure > 10000)
  1600. {
  1601. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1602. }
  1603. else if (getAiValue_TM_ChamberPressure <= 10000)
  1604. {
  1605. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1606. }
  1607. }
  1608. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1609. {
  1610. if (getAiValue_VCE_ChamberPressure > 10000)
  1611. {
  1612. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1613. }
  1614. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1615. {
  1616. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1617. }
  1618. }
  1619. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1620. {
  1621. if (getAiValue_VCE_ChamberPressure > 10000)
  1622. {
  1623. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1624. }
  1625. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1626. {
  1627. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1628. }
  1629. }
  1630. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1631. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1632. {
  1633. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1634. }
  1635. else if (getAiValue_VCE_ChamberPressure < 20)
  1636. {
  1637. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1638. }
  1639. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1640. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1641. {
  1642. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1643. }
  1644. else if (getAiValue_TM_ChamberPressure < 20)
  1645. {
  1646. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1647. }
  1648. IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1649. // VAC switch
  1650. IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1651. }
  1652. void MonitorMFPressure()
  1653. {
  1654. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1655. //{
  1656. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1657. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1658. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1659. ModuleName mod = ModuleName.TM;
  1660. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1661. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1662. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1663. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1664. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1665. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1666. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1667. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1668. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1669. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1670. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1671. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1672. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1673. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1674. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1675. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1676. {
  1677. if (getAiValue_LLA_ChamberPressure > 10000)
  1678. {
  1679. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1680. }
  1681. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1682. {
  1683. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1684. }
  1685. }
  1686. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1687. {
  1688. if (getAiValue_LLB_ChamberPressure > 10000)
  1689. {
  1690. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1691. }
  1692. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1693. {
  1694. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1695. }
  1696. }
  1697. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1698. {
  1699. if (getAiValue_TM_ChamberPressure > 10000)
  1700. {
  1701. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1702. }
  1703. else if (getAiValue_TM_ChamberPressure <= 10000)
  1704. {
  1705. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1706. }
  1707. }
  1708. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1709. {
  1710. if (getAiValue_LLA_ChamberPressure > 10000)
  1711. {
  1712. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1713. }
  1714. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1715. {
  1716. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1717. }
  1718. }
  1719. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1720. {
  1721. if (getAiValue_LLB_ChamberPressure > 10000)
  1722. {
  1723. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1724. }
  1725. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1726. {
  1727. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1728. }
  1729. }
  1730. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1731. {
  1732. if (getAiValue_TM_ChamberPressure > 10000)
  1733. {
  1734. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1735. }
  1736. else if (getAiValue_TM_ChamberPressure <= 10000)
  1737. {
  1738. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1739. }
  1740. }
  1741. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1742. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1743. {
  1744. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1745. }
  1746. else if (getAiValue_LLA_ChamberPressure < 20)
  1747. {
  1748. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1749. }
  1750. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1751. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1752. {
  1753. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1754. }
  1755. else if (getAiValue_LLB_ChamberPressure < 20)
  1756. {
  1757. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1758. }
  1759. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1760. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1761. {
  1762. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1763. }
  1764. else if (getAiValue_TM_ChamberPressure < 20)
  1765. {
  1766. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1767. }
  1768. // ATM switch
  1769. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1770. // VAC switch
  1771. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1772. // ATM switch
  1773. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1774. // VAC switch
  1775. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1776. // ATM switch
  1777. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1778. // VAC switch
  1779. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1780. // }
  1781. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1782. //{
  1783. // ModuleName mod = ModuleName.TM;
  1784. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1785. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1786. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1787. //}
  1788. }
  1789. void SetAiValue(string name, float value)
  1790. {
  1791. byte[] flow = BitConverter.GetBytes(value);
  1792. short high1 = BitConverter.ToInt16(flow, 0);
  1793. short low1 = BitConverter.ToInt16(flow, 2);
  1794. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1795. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1796. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1797. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1798. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1799. }
  1800. float GetAiValue(string name)
  1801. {
  1802. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1803. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1804. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1805. return flow;
  1806. }
  1807. float GetAoValue(string name)
  1808. {
  1809. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1810. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1811. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1812. return flow;
  1813. }
  1814. void MonitorTemperature(ModuleName mod)
  1815. {
  1816. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1817. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1818. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1819. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1820. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1821. // 底座
  1822. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1823. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1824. //{
  1825. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1826. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1827. //}
  1828. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1829. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1830. //{
  1831. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1832. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1833. //}
  1834. // Foreline
  1835. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1836. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1837. {
  1838. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1839. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1840. }
  1841. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1842. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1843. {
  1844. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1845. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1846. }
  1847. // Wall
  1848. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1849. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1850. {
  1851. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1852. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1853. }
  1854. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1855. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1856. {
  1857. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1858. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1859. }
  1860. }
  1861. void MonitorGas(ModuleName mod)
  1862. {
  1863. // gas
  1864. this.SimulateMFC(mod, 1);
  1865. this.SimulateMFC(mod, 2);
  1866. this.SimulateMFC(mod, 3);
  1867. this.SimulateMFC(mod, 4);
  1868. this.SimulateMFC(mod, 5);
  1869. this.SimulateMFC(mod, 6);
  1870. this.SimulateMFC(mod, 7);
  1871. this.SimulateMFC(mod, 8);
  1872. this.SimulateN2(mod);
  1873. }
  1874. void MonitorSEGas(ModuleName mod)
  1875. {
  1876. SimulateMFC(mod, 1);
  1877. SimulateMFC(mod, 2);
  1878. SimulateMFC(mod, 3);
  1879. SimulateMFC(mod, 4);
  1880. SimulateMFC(mod, 5);
  1881. SimulateMFC(mod, 6);
  1882. SimulateMFC(mod, 7);
  1883. SimulateMFC(mod, 8);
  1884. SimulateMFC(mod, 9);
  1885. SimulateMFC(mod, 10);
  1886. SimulateMFC(mod, 11);
  1887. SimulateMFC(mod, 12);
  1888. }
  1889. private void SimulateMFC(ModuleName mod, byte gasNum)
  1890. {
  1891. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1892. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1893. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  1894. }
  1895. private void SimulateN2(ModuleName mod)
  1896. {
  1897. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1898. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1899. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  1900. }
  1901. private void SimulateHe(ModuleName mod)
  1902. {
  1903. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1904. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1905. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1906. }
  1907. void MonitorRF(ModuleName mod)
  1908. {
  1909. // RF generator
  1910. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1911. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1912. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1913. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1914. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1915. }
  1916. void MonitorIOPumpCtrl(ModuleName mod)
  1917. {
  1918. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1919. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1920. }
  1921. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1922. {
  1923. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1924. {
  1925. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1926. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1927. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1928. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1929. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1930. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1931. }
  1932. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1933. {
  1934. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1935. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1936. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1937. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1938. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1939. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1940. }
  1941. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1942. {
  1943. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1944. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1945. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1946. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1947. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1948. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1949. }
  1950. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  1951. {
  1952. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1953. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1954. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1955. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  1956. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1957. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1958. }
  1959. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  1960. {
  1961. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1962. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1963. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1964. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1965. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  1966. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1967. }
  1968. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1969. {
  1970. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1971. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1972. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1973. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1974. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1975. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1976. }
  1977. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  1978. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  1979. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1980. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1981. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  1982. }
  1983. public void Terminate()
  1984. {
  1985. _thread.Stop();
  1986. }
  1987. public void SetCoolantOutletTemp(string module, int Temp)
  1988. {
  1989. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1990. //{
  1991. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1992. //}
  1993. }
  1994. }
  1995. }