JetPlasma/Kepler-Release: Kepler2200软件出货版本 @ 0f905564d0a4fdd19c632e7115b633c7006cdbbf

chenkui 587ffe27b5 1、配置文件中增加了FA.Encoding		пре 1 година
..
EFEMAlignRoutine.cs	c5ba2fb197 Transfer align angel from sequence to system configure and enable angle increasement by wafer.	пре 1 година
EfemEntity.cs	587ffe27b5 1、配置文件中增加了FA.Encoding	пре 1 година
EfemHomeRoutine.cs	03063bae6a Enhance the routine framework.	пре 2 година
EfemPickRoutine.cs	03063bae6a Enhance the routine framework.	пре 2 година
EfemPlaceRoutine.cs	96661cadab 修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug	пре 1 година
EfemSwapRoutine.cs	e61f018b66 Manual Return wafer while running cycle.	пре 1 година