SEMFPMPickRoutine.cs 12 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using System.Windows;
  19. using System.Windows.Interop;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Devices.IODevices;
  23. using Venus_RT.Devices.TM;
  24. using Venus_RT.Modules.PMs;
  25. namespace Venus_RT.Modules.TM.VenusEntity
  26. {
  27. public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
  28. {
  29. private enum PickStep
  30. {
  31. WaitPMReady,
  32. WaitforControlPressure,
  33. PMPrepare,
  34. ArmExtend,
  35. QueryAWC,
  36. DropDownWafer,
  37. PickDelay,
  38. PickDelay1,
  39. PickDelay2,
  40. ArmRetract,
  41. SavePickeData,
  42. NotifyDone,
  43. CloseSlitDoor,
  44. CloseLinerDoor,
  45. EndDelay
  46. }
  47. private readonly TMBase _tm;
  48. private readonly ITransferRobot _robot;
  49. private int _pickdelay = 0;
  50. private ModuleName _targetModule;
  51. private Hand _hand;
  52. private int _targetSlot;
  53. private PMEntity _pmModule;
  54. private int _ExtendTimeout = 120 * 1000;
  55. private int _RetractTimeout = 120 * 1000;
  56. private JetPMBase _chamber;
  57. private bool NeedControlPressure;
  58. private int _controlPressureSetPoint = 90;
  59. private int _controlFlowSetPoint = 10;
  60. //private DateTime _starttime;
  61. private bool _queryAwc;
  62. private bool havelinerdoor;
  63. public SEMFPMPickRoutine(TMBase honghutm, ITransferRobot robot,ModuleName module) : base(module)
  64. {
  65. _tm = honghutm;
  66. _robot = robot;
  67. _queryAwc = false;
  68. }
  69. public RState Start(params object[] objs)
  70. {
  71. //_starttime = DateTime.Now;
  72. if (!_robot.IsHomed)
  73. {
  74. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  75. return RState.Failed;
  76. }
  77. var pickItem = (Queue<MoveItem>)objs[0];
  78. _targetModule = pickItem.Peek().SourceModule;
  79. _targetSlot = pickItem.Peek().SourceSlot;
  80. _hand = pickItem.Peek().RobotHand;
  81. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());//(JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
  82. if ( _chamber.ChamberType== JetChamber.VenusDE)
  83. {
  84. havelinerdoor = true;
  85. }
  86. else
  87. {
  88. havelinerdoor = false;
  89. }
  90. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  91. {
  92. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  93. }
  94. else
  95. {
  96. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
  97. return RState.Failed;
  98. }
  99. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  100. {
  101. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  102. return RState.Failed;
  103. }
  104. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  105. {
  106. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  107. return RState.Failed;
  108. }
  109. var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
  110. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
  111. _ExtendTimeout = SC.GetValue<int>($"{Module}.ExtendTimeout") * 1000;
  112. _RetractTimeout = SC.GetValue<int>($"{Module}.RetractTimeout") * 1000;
  113. _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  114. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  115. {
  116. NeedControlPressure = true;
  117. }
  118. else
  119. {
  120. NeedControlPressure = false;
  121. }
  122. Reset();
  123. return Runner.Start(Module, $"Pick from {_targetModule}");
  124. }
  125. public RState Monitor()
  126. {
  127. Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
  128. .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
  129. .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady,_delay_60s)
  130. .Delay(PickStep.PickDelay, _pickdelay)
  131. .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
  132. .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
  133. .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  134. .Delay(PickStep.PickDelay1, _pickdelay)
  135. .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
  136. .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
  137. .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
  138. .Delay(PickStep.PickDelay2, _delay_50ms)
  139. .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
  140. .RunIf(PickStep.CloseLinerDoor, havelinerdoor, PMLinerDoorClose, WaitPMLinerDoorClose)
  141. .End(PickStep.EndDelay, NullFun, _delay_50ms);
  142. return Runner.Status;
  143. }
  144. private bool ModulePrepare()
  145. {
  146. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  147. //_tm.TurnSlitDoor(_targetModule, true);
  148. return true;
  149. }
  150. private bool IsModulePrepareReady()
  151. {
  152. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  153. }
  154. private bool ArmExtend()
  155. {
  156. if (!_pmModule.IsSlitDoorOpen)
  157. {
  158. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
  159. return false;
  160. }
  161. return _robot.PickExtend(_targetModule, _targetSlot, _hand);
  162. }
  163. private bool ArmRetract()
  164. {
  165. return _robot.PickRetract(_targetModule, _targetSlot, _hand);
  166. }
  167. private bool WaitRobotExtendDone()
  168. {
  169. if (_robot.Status == RState.Running)
  170. {
  171. return false;
  172. }
  173. else if (_robot.Status == RState.End)
  174. {
  175. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  176. return true;
  177. }
  178. else
  179. {
  180. Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
  181. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  182. return true;
  183. }
  184. }
  185. private bool IsPressureReady()
  186. {
  187. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  188. //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
  189. double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
  190. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  191. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  192. {
  193. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
  194. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
  195. //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
  196. //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  197. return true;
  198. }
  199. else return false;
  200. }
  201. private bool StartControlPressure()
  202. {
  203. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
  204. _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  205. _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
  206. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  207. return true;
  208. }
  209. private bool QueryAWC()
  210. {
  211. if (!_queryAwc)
  212. return true;
  213. else
  214. return _robot.QueryAwc(); ;
  215. }
  216. private bool WaitRobotQueryDone()
  217. {
  218. if (!_queryAwc)
  219. return true;
  220. if (_robot.Status == RState.Running)
  221. {
  222. return false;
  223. }
  224. else if (_robot.Status == RState.End)
  225. {
  226. return true;
  227. }
  228. else
  229. {
  230. Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
  231. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  232. return true;
  233. }
  234. }
  235. private bool RecordAWCData()
  236. {
  237. if (!_queryAwc)
  238. return true;
  239. return true;
  240. }
  241. private bool NotifyPMPickWafer()
  242. {
  243. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  244. return true;
  245. }
  246. private bool WaitPMWaferDropDown()
  247. {
  248. return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
  249. }
  250. private bool WaitRobotRetractDone()
  251. {
  252. if (_robot.Status == RState.Running)
  253. {
  254. return false;
  255. }
  256. else if (_robot.Status == RState.End)
  257. {
  258. return true;
  259. }
  260. else
  261. {
  262. Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
  263. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  264. return true;
  265. }
  266. }
  267. private bool NotifyPMDone()
  268. {
  269. _pmModule.PostMsg(PMEntity.MSG.PickReady);
  270. return true;
  271. }
  272. private bool PMDoorClose()
  273. {
  274. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
  275. return _tm.TurnSlitDoor(_targetModule, false);
  276. }
  277. private bool PMLinerDoorClose()
  278. {
  279. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Liner Door Again");
  280. return _chamber.SetLinerDoor(false, out _);
  281. }
  282. private bool WaitPMDoorClose()
  283. {
  284. if (_tm.CheckSlitValveClose(_targetModule))
  285. {
  286. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
  287. return true;
  288. }
  289. else
  290. {
  291. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
  292. return false;
  293. }
  294. }
  295. private bool WaitPMLinerDoorClose()
  296. {
  297. if (_chamber.CheckLinerDoorClose())
  298. {
  299. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check LinerDoor Close");
  300. return true;
  301. }
  302. else
  303. {
  304. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close LinerDoor");
  305. return false;
  306. }
  307. }
  308. public void Abort()
  309. {
  310. _robot.Halt();
  311. }
  312. }
  313. }