RtState.cs 3.6 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. SETMCycle,
  33. SERunning,
  34. ReturnWafer,
  35. }
  36. public enum PMState
  37. {
  38. Init,
  39. Idle,
  40. Homing,
  41. GasFlowing,
  42. RfPowering,
  43. Heating,
  44. LaunchingPump,
  45. LaunchingTurboPump,
  46. Pumping,
  47. Venting,
  48. Purging,
  49. GasLinePurge,
  50. PumpingLoadLock,
  51. VentingLoadLock,
  52. PurgingLoadLock,
  53. LoadLockLeakCheck,
  54. MoveLift,
  55. Purge,
  56. // transfer
  57. LLPlacing,
  58. LLPicking,
  59. Transfer,
  60. Error,
  61. PrepareTransfer,
  62. PostTransfer,
  63. TransferHandoff,
  64. //Process,
  65. LeakCheck,
  66. GasBoxLeakCheck,
  67. LiftpinMoving,
  68. LiftpinWaiting,
  69. GuidePinMoving,
  70. Clean,
  71. LoadProcessRecipe,
  72. PreProcess,
  73. Processing,
  74. PostProcess,
  75. OpeningLid,
  76. ClosingLid,
  77. MFCVerification,
  78. AllMFCVerification,
  79. // exchange wafer with TM
  80. PreparePick,
  81. PreparePlace,
  82. ReadyForPick,
  83. ReadyForPlace,
  84. DropDownWafer,
  85. LiftUpWafer,
  86. DropDownReady,
  87. LiftUpReady,
  88. FinishPick,
  89. FinishPlace,
  90. PartialPressureTesting,
  91. VATPerformanceTesting
  92. }
  93. public enum TMState
  94. {
  95. Unknown,
  96. Init,
  97. Initializing,
  98. InitializingRB,
  99. Idle,
  100. Error,
  101. Pumping,
  102. Venting,
  103. Purging,
  104. Leakchecking,
  105. Picking,
  106. Placing,
  107. Swaping,
  108. PMPicking,
  109. PMPlacing,
  110. PMSwaping,
  111. Aligning,
  112. Mapping,
  113. Extending,
  114. Retracting,
  115. Swapping,
  116. Gotoing,
  117. ControllingPressure
  118. }
  119. public enum LLState
  120. {
  121. //Unknown,
  122. //Init,
  123. //Initializing,
  124. //Idle,
  125. //Error,
  126. //Pumping,
  127. //Venting,
  128. //Purging,
  129. //Leakchecking,
  130. //Picking,
  131. //Placing,
  132. //Swaping,
  133. //PMPicking,
  134. //PMPlacing,
  135. //PMSwaping,
  136. //Aligning,
  137. //Mapping,
  138. //Extending,
  139. //Retracting,
  140. //Swapping,
  141. //Gotoing,
  142. Unknown,
  143. Init,
  144. Initializing,
  145. Idle,
  146. Error,
  147. Pumping,
  148. Venting,
  149. Purging,
  150. LeakCheck,
  151. Prepare_For_TM,
  152. Prepare_For_EFEM,
  153. Ready_For_TM,
  154. Ready_For_EFEM,
  155. }
  156. public enum EFEMSTATE
  157. {
  158. Unknown, // 0
  159. Initializing, // 1
  160. Idle, // 2
  161. Error, // 3
  162. Picking, // 4
  163. Placing, // 5
  164. Aligning, // 6
  165. Mapping, // 7
  166. Init, // 8
  167. Orgshing, // 9
  168. Lifting, // 10
  169. InitingAL, // 11
  170. InitingRB, // 12
  171. Extending, // 13
  172. Retracting, // 14
  173. //SettingLamp, // 15
  174. Swapping,
  175. Gotoing,
  176. Gripping,
  177. Ungripping,
  178. Fliping,
  179. }
  180. }