Kepler-Release/Venus/Venus_RT/Devices/JetVenusDEPM.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.OperationCenter;
using Aitex.Core.RT.SCCore;
using Aitex.Core.UI.Control;
using Aitex.Core.Util;
using Aitex.Core.RT.Fsm;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Windows.Media;
using Venus_Core;
using Venus_RT.Devices.IODevices;
using Venus_RT.Modules;
using IoMfc = Venus_RT.Devices.IODevices.IoMfc;

namespace Venus_RT.Devices
{
    class JetVenusDEPM : JetPMBase
    {
        #region io变量定义
        private readonly IoLid _Lid;

        private readonly IoCylinder _linerDoor;
        private readonly IoCylinder _LiftPin;

        private readonly IoValve _PVN21Valve;
        private readonly IoValve _PVN22Valve;
        private readonly IoValve _PV11Valve;
        private readonly IoValve _PV12Valve;
        private readonly IoValve _PV21Valve;
        private readonly IoValve _PV22Valve;
        private readonly IoValve _PV31Valve;
        private readonly IoValve _PV32Valve;
        private readonly IoValve _PV41Valve;
        private readonly IoValve _PV42Valve;
        private readonly IoValve _PV51Valve;//新增
        private readonly IoValve _PV52Valve;//新增
        private readonly IoValve _PV61Valve;//新增
        private readonly IoValve _PV62Valve;//新增
        private readonly IoValve _PV71Valve;//新增
        private readonly IoValve _PV72Valve;//新增
        private readonly IoValve _PV81Valve;//新增
        private readonly IoValve _PV82Valve;//新增
        private readonly IoValve _PV91Valve;//新增
        private readonly IoValve _PV92Valve;//新增
        private readonly IoValve _PVA1Valve;//新增
        private readonly IoValve _PVA2Valve;//新增
        private readonly IoValve _PVB1Valve;//新增
        private readonly IoValve _PVB2Valve;//新增
        private readonly IoValve _PVC1Valve;//新增
        private readonly IoValve _PVC2Valve;//新增
        private readonly IoValve _N2Valve;
        private readonly IoValve _Mfc1Valve;
        private readonly IoValve _Mfc2Valve;
        private readonly IoValve _Mfc3Valve;
        private readonly IoValve _Mfc4Valve;
        private readonly IoValve _Mfc5Valve;
        private readonly IoValve _Mfc6Valve;
        private readonly IoValve _Mfc7Valve;
        private readonly IoValve _Mfc8Valve;
        private readonly IoValve _Mfc9Valve; //新增
        private readonly IoValve _Mfc10Valve;//新增
        private readonly IoValve _Mfc11Valve;//新增 空的
        private readonly IoValve _Mfc12Valve;//新增
        private readonly IoValve _PVHe1Valve;
        private readonly IoValve _PVHe2Valve;
        private readonly IoValve _GasFinalValve;
        //private readonly IoValve _SoftPumpValve;
        private readonly IoValve _FastPumpValve;
        private readonly IoValve _TurboPumpPumpingValve;
        private readonly IoValve _TurboPumpPurgeValve;
        private readonly IoValve _GuageValve;
        private readonly IoValve _PVHe3Valve;
        private readonly IoValve _HeISOValve;
        private readonly IoValve _MainPurgeValve;//新增
        private readonly IoValve _SecondPurgeValve;//新增
        private readonly IoValve _PurgeValve;
        private readonly IoSensor _ATM_sw;
        private readonly IoSensor _CDAPressure;
        private readonly IoSensor _N2Pressure_sw;
        private readonly IoSensor _VAC_sw;
        private readonly IoSensor _WLK_sw;
        private readonly IoSensor _Water_Flow;
        private readonly IoSensor _RFG_Interlock;
        //private readonly IoSensor _PM_Lid_Closed;
        private readonly IoSensor _Source_RF_Fan;
        private readonly IoSensor _TurboPumpInterlock;
        private readonly IoSensor _GasBoxDoor;
        private readonly IoSensor _GasBoxPressure;
        private readonly PumpBase _MainPump;
        private readonly ESC5HighVoltage _ESCHV;
        private readonly AdixenTurboPump _TurboPump;
        private readonly PendulumValve _pendulumValve;

        private readonly ChillerBase _Chiller;
        private readonly ChillerBase _WallChiller;

        private readonly RfPowerBase _Generator;//srf=>AdTecGenerator
        private readonly RfPowerBase _GeneratorBias;//brf=>CometRF
        private readonly RfMatchBase _Match;
        private readonly RfMatchBase _BiasMatch;

        private readonly IoHeater _ForelineTC;
        private readonly IoHeater _WallTC;

        private readonly IoPressureControl _pressureController;

        private readonly IoGasStick[] _gasLines;
        private readonly IoGasStick _gasLineN2;
        private readonly IoBacksideHe _backsideHe;
        private readonly IoMagnet _Magnet;
        private readonly IoMfc _heMfc;

        private readonly double _foreline_interlock_pressure = 750;

        private readonly Dictionary<ValveType, IoValve> Valve2IO;
        #endregion

        #region 构造函数
        public JetVenusDEPM(ModuleName moduleName) : base(moduleName)
        {
            Module = moduleName;
            _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
            _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
            _linerDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LinerDoor}");
            _PVN21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN21}");
            _PVN22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN22}");
            _PV11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV11}");
            _PV12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV12}");
            _PV21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV21}");
            _PV22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV22}");
            _PV31Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV31}");
            _PV32Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV32}");
            _PV41Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV41}");
            _PV42Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV42}");
            _PV51Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV51}");
            _PV52Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV52}");
            _PV61Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV61}");
            _PV62Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV62}");
            _PV71Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV71}");
            _PV72Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV72}");
            _PV81Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV81}");
            _PV82Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV82}");
            _PV91Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV91}");
            _PV92Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV92}");
            _PVA1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVA1}");
            _PVA2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVA2}");
            _PVB1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVB1}");
            _PVB2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVB2}");
            _PVC1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVC1}");
            _PVC2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVC2}");
            _N2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveN2}");
            _Mfc1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc1}");
            _Mfc2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc3}");
            _Mfc4Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc4}");
            _Mfc5Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc5}");
            _Mfc6Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc6}");
            _Mfc7Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc7}");
            _Mfc8Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc8}");
            _Mfc9Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc9}");
            _Mfc10Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc10}");
            _Mfc11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc11}");
            _Mfc12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc12}");
            _PVHe1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe1}");
            _PVHe2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe2}");
            _GasFinalValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGasFinal}");
            _PurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePurge}");
            //_SoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSoftPump}");
            _FastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveFastPump}");
            _TurboPumpPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPumping}");
            _TurboPumpPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPurge}");
            _GuageValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGuage}");
            _PVHe3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe3}");
            _HeISOValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveHeISO}");
            _SecondPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSecondPurge}");
            _ATM_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
            _N2Pressure_sw = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
            _MainPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMainPurge}");
            _VAC_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
            _Water_Flow = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterFlowOk");
            _WLK_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
            _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _RFG_Interlock = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");

            //_PM_Lid_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorPMLidClosed");
            //_Source_RF_Fan = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSourceRFFan");
            _TurboPumpInterlock = DEVICE.GetDevice<IoSensor>($"{Module}.TurboPumpInterlock");
            _GasBoxDoor = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxDoorSW");
            _GasBoxPressure = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxPressureSW");

            _ForelineTC = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
            _WallTC = DEVICE.GetDevice<IoHeater>($"{Module}.WallHeater");


            _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _pressureController = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VenusDevice.PressureControl}");

            _gasLines = new IoGasStick[12];
            for (int index = 0; index < 12; index++)
            {
                _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
            }

            _gasLineN2 = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickN2");
            _backsideHe = DEVICE.GetDevice<IoBacksideHe>($"{Module}.BacksideHelium");

            _MainPump = DEVICE.GetDevice<PumpBase>($"{Module}.{VenusDevice.MainPump}");
            // RS232 Dry pump, SKY
            if (SC.GetValue<int>($"{Module}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
                }
            }

            _ESCHV = DEVICE.GetDevice<ESC5HighVoltage>($"{Module}.{VenusDevice.ESCHV}");
            _TurboPump = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
            _pendulumValve = DEVICE.GetDevice<PendulumValve>($"{Module}.{VenusDevice.PendulumValve}");

            if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") &&
                SC.GetValue<int>($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC)
                {
                    _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
                }
                else if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
                {
                    _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
                }
            }
            else
            if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") &&
                SC.GetValue<int>($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS485 &&
                SC.GetValue<bool>($"{Module}.Chiller.ShareCOM"))
            {
                if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC)
                {
                    _Chiller = DEVICE.GetDevice<SMCShareChiller>($"{Module}.{VenusDevice.Chiller}");
                }
                else if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
                {
                    _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
                }
            }

            if (SC.GetValue<bool>($"{Module}.WallChiller.EnableChiller") &&
                SC.GetValue<int>($"{Module}.WallChiller.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.SMC)
                {
                    _WallChiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.WallChiller}");
                }
                else if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.AIRSYS)
                {
                    _WallChiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.WallChiller}");
                }
            }
            else
            if (SC.GetValue<bool>($"{Module}.WallChiller.EnableChiller") &&
                SC.GetValue<int>($"{Module}.WallChiller.CommunicationType") == (int)CommunicationType.RS485 &&
                SC.GetValue<bool>($"{Module}.WallChiller.ShareCOM"))
            {
                if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.SMC)
                {
                    _WallChiller = DEVICE.GetDevice<SMCShareChiller>($"{Module}.{VenusDevice.WallChiller}");
                }
                else if (SC.GetValue<int>($"{Module}.WallChiller.MFG") == (int)ChillerMFG.AIRSYS)
                {
                    _WallChiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.WallChiller}");
                }
            }


            // RS232 AdTec Generator
            if (SC.GetValue<int>($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{Module}.Rf.MFG") == (int)GeneratorMFG.AdTec)
            {
                _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.Rf}");
            }

            // Ethernet & RS232  Generator Bias
            if (SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF"))
            {
                if (SC.GetValue<int>($"{Module}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
                    SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
                {
                    _GeneratorBias = DEVICE.GetDevice<CometRF>($"{Module}.{VenusDevice.BiasRf}");
                }
                else if (SC.GetValue<int>($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
                {
                    _GeneratorBias = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.BiasRf}");
                }
                else if (SC.GetValue<int>($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.Truplasma)
                {
                    _GeneratorBias = DEVICE.GetDevice<TruPlasmaRF>($"{Module}.{VenusDevice.BiasRf}");
                }
            }

            // RS232 AdTec match
            if (SC.GetValue<int>($"{Module}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{Module}.Match.MFG") == (int)MatchMFG.AdTec)
            {
                _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.Match}");
            }
            else if (SC.GetValue<int>($"{Module}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{Module}.Match.MFG") == (int)MatchMFG.Tru)
            {
                _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.Match}");
            }

            // Bias Match
            if (SC.GetValue<bool>($"{Module}.BiasMatch.EnableBiasMatch") &&
            SC.GetValue<int>($"{Module}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
            SC.GetValue<int>($"{Module}.BiasMatch.MFG") == (int)MatchMFG.Tru)
            {
                _BiasMatch = DEVICE.GetDevice<TruPlasmaMatch>($"{Module}.{VenusDevice.BiasMatch}");
            }


            _foreline_interlock_pressure = SC.GetValue<double>($"{Module}.ForelineInterlockPressure");
            _Magnet = DEVICE.GetDevice<IoMagnet>($"{Module}.AIoMagnet");
            Valve2IO = new Dictionary<ValveType, IoValve>()
            {
                { ValveType.PVN21, _PVN21Valve },
                { ValveType.PVN22, _PVN22Valve },
                { ValveType.PV11,  _PV11Valve  },
                { ValveType.PV12,  _PV12Valve  },
                { ValveType.PV21,  _PV21Valve  },
                { ValveType.PV22,  _PV22Valve  },
                { ValveType.PV31,  _PV31Valve  },
                { ValveType.PV32,  _PV32Valve  },
                { ValveType.PV41,  _PV41Valve  },
                { ValveType.PV42,  _PV42Valve  },
                { ValveType.PV51,  _PV51Valve  },
                { ValveType.PV52,  _PV52Valve  },
                { ValveType.PV61,  _PV61Valve  },
                { ValveType.PV62,  _PV62Valve  },
                { ValveType.PV71,  _PV71Valve  },
                { ValveType.PV72,  _PV72Valve  },
                { ValveType.PV81,  _PV81Valve  },
                { ValveType.PV82,  _PV82Valve  },
                { ValveType.PV91,  _PV91Valve  },
                { ValveType.PV92,  _PV92Valve  },
                { ValveType.PVA1,  _PVA1Valve  },
                { ValveType.PVA2,  _PVA2Valve  },
                { ValveType.PVB1,  _PVB1Valve  },
                { ValveType.PVB2,  _PVB2Valve  },
                { ValveType.PVC1,  _PVC1Valve  },
                { ValveType.PVC2,  _PVC2Valve  },
                { ValveType.N2,    _N2Valve    },
                { ValveType.Mfc1,  _Mfc1Valve  },
                { ValveType.Mfc2,  _Mfc2Valve  },
                { ValveType.Mfc3,  _Mfc3Valve  },
                { ValveType.Mfc4,  _Mfc4Valve  },
                { ValveType.Mfc5,  _Mfc5Valve  },
                { ValveType.Mfc6,  _Mfc6Valve  },
                { ValveType.Mfc7,  _Mfc7Valve  },
                { ValveType.Mfc8,  _Mfc8Valve  },
                { ValveType.Mfc9,  _Mfc9Valve  },
                { ValveType.Mfc10, _Mfc10Valve },
                { ValveType.Mfc11, _Mfc11Valve },
                { ValveType.Mfc12, _Mfc12Valve },
                { ValveType.PVHe1, _PVHe1Valve },
                { ValveType.PVHe3, _PVHe3Valve },
                { ValveType.PVHe2, _PVHe2Valve },
                { ValveType.GasFinal,  _GasFinalValve},
                { ValveType.Purge,  _PurgeValve},
                { ValveType.FastPump,  _FastPumpValve},
                { ValveType.TurboPumpPumping,  _TurboPumpPumpingValve},
                { ValveType.TurboPumpPurge,  _TurboPumpPurgeValve},
                { ValveType.Guage,  _GuageValve},
                { ValveType.HeISO,  _HeISOValve},
                { ValveType.MainPurge,_MainPurgeValve},
                { ValveType.SecondPurge,  _SecondPurgeValve},
            };
            SensorWithAlarm();
            DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);
            DATA.Subscribe($"{Name}.ESCHV.Temp", () => CoolantOutletTempFB);
            DATA.Subscribe($"{Name}.Chiller.Temp", () => CoolantInletTempFB);
        }
        #endregion

        #region 暴露变量
        public override bool IsLidClosed => _Lid.OFFFeedback;

        public override bool IsSlitDoorClosed
        {
            get
            {
                if (Singleton<RouteManager>.Instance.seTM != null)
                {
                    switch (Module)
                    {
                        case ModuleName.PMA:
                            return Singleton<RouteManager>.Instance.seTM.IsPMASlitDoorClosed;
                        case ModuleName.PMB:
                            return Singleton<RouteManager>.Instance.seTM.IsPMBSlitDoorClosed;
                        case ModuleName.PMC:
                            return Singleton<RouteManager>.Instance.seTM.IsPMCSlitDoorClosed;
                        case ModuleName.PMD:
                            return Singleton<RouteManager>.Instance.seTM.IsPMDSlitDoorClosed;
                        default:
                            return false;
                    }
                }
                else
                    return false;

            }
        }
        public override bool IsLinerDoorClosed => _linerDoor.State == CylinderState.Close;
        public override bool IsPumpRunning => _MainPump.IsRunning;

        public override bool IsISOOpen => _TurboPumpPumpingValve.Status;

        public override bool IsTurboPumpRunning => _TurboPump.IsRunning;
        public override bool IsPenVOpen => _pendulumValve.IsOpen;

        public override bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed;

        public override float TurboPumpSpeed => _TurboPump.Speed;

        public override bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;

        public override bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning;

        public override bool IsCDA_OK => _CDAPressure.Value;

        public override bool IsFastPumpOpened => _FastPumpValve.Status;

        public override bool IsSoftPumpOpened { get; }//_SoftPumpValve.Status

        public override bool IsMfc1ValveOpened => _Mfc1Valve.Status;

        public override bool IsMfc2ValveOpened => _Mfc2Valve.Status;

        public override bool IsMfc3ValveOpened => _Mfc3Valve.Status;

        public override bool IsMfc4ValveOpened => _Mfc4Valve.Status;

        public override bool IsMfc5ValveOpened => _Mfc5Valve.Status;

        public override bool IsMfc6ValveOpened => _Mfc6Valve.Status;

        public override bool IsMfc7ValveOpened => _Mfc7Valve.Status;

        public override bool IsMfc8ValveOpened => _Mfc8Valve.Status;

        public override double MFC1FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas1").FeedBack;
        public override double MFC2FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas2").FeedBack;
        public override double MFC3FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas3").FeedBack;
        public override double MFC4FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas4").FeedBack;
        public override double MFC5FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas5").FeedBack;
        public override double MFC6FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas6").FeedBack;
        public override double MFC7FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas7").FeedBack;
        public override double MFC8FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas8").FeedBack;
        public override double MFC9FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas9").FeedBack;
        public override double MFC10FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas10").FeedBack;
        public override double MFC11FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas11").FeedBack;
        public override double MFC12FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas12").FeedBack;
        public override double HeliumFeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcHe").FeedBack;

        public bool IsMfc9ValveOpened => _Mfc9Valve.Status;

        public bool IsMfc10ValveOpened => _Mfc10Valve.Status;

        public bool IsMfc11ValveOpened => _Mfc11Valve.Status;

        public bool IsMfc12ValveOpened => _Mfc12Valve.Status;

        public override bool IsGuageValveOpened => _GuageValve.Status;

        public override bool IsATM => _ATM_sw.Value;

        public override bool PVN22ValveIsOpen => _PVN22Valve.Status;

        public override bool LiftPinIsDown => _LiftPin.OFFFeedback;

        public override bool LiftPinIsUp => _LiftPin.ONFeedback;

        public override bool IsVAC => _VAC_sw.Value;

        //public override bool IsWaterFlowOk => _Water_Flow.Value;
        public override bool IsWaterFlowOk => false;

        public override bool IsWLK => _WLK_sw.Value;

        public override bool IsRFGInterlockOn => _RFG_Interlock.Value;

        //public override bool PMLidClosed => _PM_Lid_Closed.Value;

        public override bool TurboPumpInterlock => _TurboPumpInterlock.Value;

        public override bool LinerDoorClosed => _linerDoor.State == CylinderState.Close;

        public override float PendulumPressure => _pendulumValve.Pressure;

        public override float PendulumPosition => _pendulumValve.Position;

        public override float BiasForwardPower => _GeneratorBias.ForwardPower;

        public override float MagnetIntensity => _Magnet.MagnetPowerIntensity;

        public override bool SlitDoorClosed
        {
            get
            {
                switch (Module)
                {
                    case ModuleName.PMA:
                        return Singleton<RouteManager>.Instance.seTM.IsPMASlitDoorClosed;
                    case ModuleName.PMB:
                        return Singleton<RouteManager>.Instance.seTM.IsPMBSlitDoorClosed;
                    case ModuleName.PMC:
                        return Singleton<RouteManager>.Instance.seTM.IsPMCSlitDoorClosed;
                    case ModuleName.PMD:
                        return Singleton<RouteManager>.Instance.seTM.IsPMDSlitDoorClosed;
                    default:
                        return true;
                }
            }
        }

        //public override double ProcessLowPressure => _pressureController.ProcessLow.Value;

        //public override double ProcessHighPressure => _pressureController.ProcessHigh.Value;

        public override double ProcessPressure => _pendulumValve.Pressure >= 950 ? 950 : _pendulumValve.Pressure;

        public override double ChamberPressure => _pressureController.PressureGauge.Value;

        public override double ForelinePressure => _pressureController.ForelineGauge.Value;

        public override double TargetPressure => _pressureController.TargetPressure;

        public override double ESCHePressure => _pressureController.ESCHeGauge.Value;

        public override int ESCOutputVoltage => _ESCHV.OutputVoltage;

        public override double ESCPositiveOutputCurrent => _ESCHV.PositiveOutputCurrent;

        public override double ESCNegativeOutputCurrent => _ESCHV.NegativeOutputCurrent;

        public override bool IsHVOn => _ESCHV.IsOn;

        public override float CoolantInletWallTempFB
        {
            get
            {
                switch (SC.GetValue<int>($"{Module}.WallChiller.CommunicationType"))
                {
                    case (int)CommunicationType.RS232:
                        return _WallChiller.ControlTcFeedback;
                    case (int)CommunicationType.RS485:
                        return _WallChiller.Temperature;
                    default:
                        return 0;
                }
            }
        }
        public override float CoolantInletTempFB
        {
            get
            {
                switch (SC.GetValue<int>($"{Module}.Chiller.CommunicationType"))
                {
                    case (int)CommunicationType.RS232:
                        return _Chiller.ControlTcFeedback;
                    case (int)CommunicationType.RS485:
                        return _Chiller.Temperature;
                    default:
                        return 0;
                }
            }
        }

        public override float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback;

        public override bool ChillerIsRunning => _Chiller.IsRunning;

        public override float ReflectPower => _Generator.ReflectPower;

        public override float BiasReflectPower => _GeneratorBias.ReflectPower;

        public override bool BackSideHeOutOfRange => _backsideHe.OutOfRange;

        public override MovementPosition LiftPinPosition
        {
            get
            {
                MovementPosition pos = MovementPosition.Unknown;
                if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Up;
                }
                else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Down;
                }
                return pos;
            }
        }

        public override double TotalGasSetpoint
        {
            get
            {
                double sum = 0;
                foreach (var gas in _gasLines)
                {
                    sum += gas.FlowSP;
                }
                return sum;
            }
        }

        public override bool HasGasOutOfRange
        {
            get
            {
                foreach (var gas in _gasLines)
                {
                    if (!gas.IsOutOfRange)
                        return false;
                }
                return true;
            }
        }

        public override bool IsLidLoadlockClosed
        {
            get
            {
                //LOG.Write(eEvent.ERR_PM,Module,"VenusSE PM is not exist Loadlock!");
                return false;
            }
        }

        //public override bool IsATMLoadlock
        //{
        //    get
        //    {
        //        //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
        //        return false;
        //    }
        //}

        //public override bool IsVACLoadLock
        //{
        //    get
        //    {
        //        //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
        //        return false;
        //    }
        //}

        public override bool IsLoadlockArmRetract
        {
            get
            {
                //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
                return false;
            }
        }

        public override bool IsLoadlockArmExtend
        {
            get
            {
                //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
                return false;
            }
        }

        public override bool LoadlockArmRetract
        {
            get
            {
                //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
                return false;
            }
        }
        public override bool LoadlockArmExtend
        {
            get
            {
                //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
                return false;
            }
        }
        public override float RFMatchC1 => _Match != null ? _Match.TunePosition1 : 0;

        public override float RFMatchC2 => _Match != null ? _Match.TunePosition1 : 0;

        public override float BiasRFMatchC1 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0;

        public override float BiasRFMatchC2 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0;

        //public override double LoadlockPressure
        //{
        //    get
        //    {
        //        //LOG.Write(eEvent.ERR_PM, Module, "VenusSE PM is not exist Loadlock!");
        //        return -100;
        //    }
        //}
        public override void Monitor()
        {
            CheckPermanentInterlock();
        }

        public override void BuzzerBlinking(double time)
        {
            LOG.Write(eEvent.ERR_PM, Module, "VenusDE PM is not exist SignalTower!");
        }
        #endregion

        #region 公共方法
        //public override bool CheckAtm()
        //{
        //    //检查是否是ATM模式
        //    return _ATM_sw.Value && ChamberPressure > 700000;
        //}
        public override void RTCloseEvent()
        {
            if (_GeneratorBias.IsPowerOn)
            {
                GeneratorBiasPowerOn(false);
            }
            if (PendulumValveIsOpen())
            {
                TurnPendulumValve(false);
            }
        }
        public override bool CheckChillerStatus()
        {
            return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError;
        }

        public override bool CheckGeneratorAndHVInterlock(VenusDevice device)
        {
            eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV;
            if (!IsLidClosed)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as PM Lid is Open.");
                return false;
            }

            if (!IsVAC)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as PM is not Vacuum.");
                return false;
            }

            //if (!IsWaterFlowOk)
            //{
            //    LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF.");
            //    return false;
            //}

            if (!IsRFGInterlockOn)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF.");
                return false;
            }

            //if (!SourceRFFanInterlock)
            //{
            //    LOG.Write(evt, Module, $"Cannot Power ON {device} as Source RF Fan is OFF.");
            //    return false;
            //}

            if (!SlitDoorClosed)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Slit Door is open.");
                return false;
            }

            if (!LinerDoorClosed)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Liner Door is open.");
                return false;
            }
            if ((device == VenusDevice.ESCHV || device == VenusDevice.BiasRf) && WaferManager.Instance.CheckNoWafer(Module, 0))
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as {Module} has no wafer");
                return false;
            }

            return true;
        }


        public override bool SetBiasMatchWorkMode(MatchWorkMode matchWorkMode)
        {
            if (_BiasMatch == null) return false;
            if (matchWorkMode == MatchWorkMode.Auto)
            {
                return _BiasMatch.SetMatchMode(EnumRfMatchTuneMode.Auto, out _);
            }
            else if (matchWorkMode == MatchWorkMode.Manual)
            {
                return _BiasMatch.SetMatchMode(EnumRfMatchTuneMode.Manual, out _);
            }
            return false;
        }
        public override bool IsRFAble()
        {
            return false;

        }
        public override bool StartControlPressure(int pressureSetpoint, int flowSetpoint)
        {
            OpenValve(ValveType.TurboPumpPumping, true);
            if (_TurboPumpPumpingValve.Status)
            {
                OpenValve(ValveType.Purge, true);
                OpenValve(ValveType.GasFinal, false);
                //OpenValve(ValveType.N2, true);
                OpenValve(ValveType.PVN22, true);
                TurnPendulumValve(true);
                SetPVPressure(pressureSetpoint);
                return true;
            }
            else
            {
                LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"cannot control pressure,cause Turbo Pump Pumping Valve is Close");
                return true;
            }
        }
        public async override void AbortControlPressure()
        {
            OpenValve(ValveType.PVN22, false);
            OpenValve(ValveType.N2, false);
            await Task.Delay(2000);
            OpenValve(ValveType.GasFinal, false);
            OpenValve(ValveType.Purge, false);
            //return true;
        }
        public override void CheckIdleInterlock(int delaytime)
        {
            if (ForelinePressure > _foreline_interlock_pressure)
            {
                if (_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen)
                {
                    _pendulumValve.TurnValve(false);
                    _TurboPumpPurgeValve.TurnValve(false, out _);
                    _TurboPumpPumpingValve.TurnValve(false, out _);

                    LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} mtorr, Pendulum valve & PV6 & PV7 closed automaticlly.");
                }
            }
        }

        public override bool CheckLiftDown()
        {
            return _LiftPin.State == CylinderState.Close;
        }

        public override bool CheckLiftUp()
        {
            return _LiftPin.State == CylinderState.Open;
        }
        public override bool CheckLinerDoorOpen()
        {
            return _linerDoor.State == CylinderState.Open;
        }

        public override bool CheckLinerDoorClose()
        {
            return IsLinerDoorClosed;
        }
        public override bool CheckSlitDoorClose()
        => IsSlitDoorClosed;

        public override bool CheckSlitDoorOpen()
        => !IsSlitDoorClosed;// !IsLinerDoorClosed

        public async override void CloseValves(int? delayTime = null)
        {

            _PVN21Valve.TurnValve(false, out _);
            //_PVN22Valve.TurnValve(false, out _);
            _PV11Valve.TurnValve(false, out _);
            _PV12Valve.TurnValve(false, out _);
            _PV21Valve.TurnValve(false, out _);
            _PV22Valve.TurnValve(false, out _);
            _PV31Valve.TurnValve(false, out _);
            _PV32Valve.TurnValve(false, out _);
            _PV41Valve.TurnValve(false, out _);
            _PV42Valve.TurnValve(false, out _);

            _PVHe1Valve.TurnValve(false, out _);
            _PVHe2Valve.TurnValve(false, out _);
            _GasFinalValve.TurnValve(false, out _);
            //_SoftPumpValve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);
            //_TurboPumpPumpingValve.TurnValve(false, out _);
            //_TurboPumpPurgeValve.TurnValve(false, out _);
            _GuageValve.TurnValve(false, out _);
            _PurgeValve.TurnValve(false, out _);
            _N2Valve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);

            _PVHe3Valve.TurnValve(false, out _);
            _HeISOValve.TurnValve(false, out _);
            _MainPurgeValve.TurnValve(false, out _);
            _SecondPurgeValve.TurnValve(false, out _);

            //新增
            _Mfc1Valve.TurnValve(false, out _);
            _Mfc2Valve.TurnValve(false, out _);
            _Mfc3Valve.TurnValve(false, out _);
            _Mfc4Valve.TurnValve(false, out _);
            _Mfc5Valve.TurnValve(false, out _);
            _Mfc6Valve.TurnValve(false, out _);
            _Mfc7Valve.TurnValve(false, out _);
            _Mfc8Valve.TurnValve(false, out _);
            _Mfc9Valve.TurnValve(false, out _);
            _Mfc10Valve.TurnValve(false, out _);
            _Mfc11Valve.TurnValve(false, out _);
            _Mfc12Valve.TurnValve(false, out _);
            _PV51Valve.TurnValve(false, out _);
            _PV52Valve.TurnValve(false, out _);
            _PV61Valve.TurnValve(false, out _);
            _PV62Valve.TurnValve(false, out _);
            _PV71Valve.TurnValve(false, out _);
            _PV72Valve.TurnValve(false, out _);
            _PV81Valve.TurnValve(false, out _);
            _PV82Valve.TurnValve(false, out _);
            _PV91Valve.TurnValve(false, out _);
            _PV92Valve.TurnValve(false, out _);
            _PVA1Valve.TurnValve(false, out _);
            _PVA2Valve.TurnValve(false, out _);
            _PVB1Valve.TurnValve(false, out _);
            _PVB2Valve.TurnValve(false, out _);
            _PVC1Valve.TurnValve(false, out _);
            _PVC2Valve.TurnValve(false, out _);

            foreach (var stick in _gasLines)
            {
                stick.Stop();
            }
            if (delayTime != null)
            {
                await Task.Delay((int)delayTime);
            }
        }

        public override bool ExtendWafer()
        {
            throw new NotImplementedException();
        }

        public override bool FlowGas(int gasNum, double val)
        {
            if (_gasLines.Length <= gasNum)
                return false;


            _gasLines[gasNum].Flow(val);
            return true;
        }

        public override bool FlowN2(double val)
        {
            _gasLineN2.Flow(val);
            return true;
        }

        public override bool GeneratorBiasPowerOn(bool on)
        {
            if (_GeneratorBias == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足");
                return false;
            }

            return _GeneratorBias.SetPowerOnOff(on, out _);
        }
        //public override bool MagnetPowerOn(bool on)
        //{
        //    if (_Magnet == null) return false;

        //    return _Magnet.SetMagnetOnOff(on, out _);
        //}
        public override bool GeneratorBiasSetMatchMode(bool val)
        {
            if (_GeneratorBias == null) return false;
            string reason = string.Empty;
            _GeneratorBias.SetMatchingAutoMode(val, out reason);
            return true;
        }

        public override bool GeneratorBiasSetpower(float val)
        {
            if (_GeneratorBias == null) return false;

            _GeneratorBias.SetPower((ushort)val);

            return true;
        }

        public override bool GeneratorPowerOn(bool on)
        {
            if (_Generator == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足");
                return false;
            }

            return _Generator.SetPowerOnOff(on, out _);
        }

        public override bool GeneratorSetpower(float val)
        {
            if (_Generator == null) return false;

            if (Math.Abs(val) > 0.01)
                _Generator.SetPower((ushort)val);
            return true;
        }
        public override bool MagnetSetpower(float val)
        {
            if (_Magnet == null) return false;

            if (Math.Abs(val) >= 0)
                _Magnet.SetMagnetPower(val);
            return true;
        }

        public override bool SetFieldRatio(float val)
        {
            if (_Magnet == null) return false;

            _Magnet.SetFieldRatio(val);
            return true;
        }

        public override bool SetWaveform(int val)
        {
            if (_Magnet == null) return false;

            _Magnet.SetWaveform(val);
            return true;
        }
        public override float GetPVPosition()
        {
            return _pendulumValve.Position;
        }

        public override async void HeatChiller(ChillerType chillerType, double value, double offset)
        {
			SC.SetItemValue($"{Module}.{chillerType}.LastTemp", value);
            switch (chillerType)
            {
                case ChillerType.Chiller:
                    _Chiller?.SetChillerTemp((float)value, (float)offset);
                    await Task.Delay(1000);
                    _Chiller?.SetChillerOnOff(true);
                    break;
                case ChillerType.WallChiller:
                    _WallChiller?.SetChillerTemp((float)value, (float)offset);
                    await Task.Delay(1000);
                    _WallChiller?.SetChillerOnOff(true);
                    break;
            }
        }

        public override void Home()
        {
            SetLiftPin(MovementPosition.Down, out _);
            //转交TM
            if (!IsSlitDoorClosed)
            {
                SetSlitDoor(false, out _);
            }

            if (!IsLinerDoorClosed) //
            {
                SetLinerDoor(false, out _);
            }
            SetLinerDoor(false, out _);
            OpenValve(ValveType.PVN22, false);
            _GeneratorBias?.ReConnect();
            _ESCHV?.ReConnect();
            _BiasMatch?.ReConnect();
            _MainPump?.ReConnect();
            _TurboPump?.ReConnect();
            _pendulumValve?.ReConnect();
            _GeneratorBias?.Reset();
            _BiasMatch?.Reset();
            _Magnet?.Reset();
        }

        public override void OnOffChiller(ChillerType chillerType, bool onoff)
        {
            switch (chillerType)
            {
                case ChillerType.Chiller:
                    _Chiller?.SetChillerOnOff(onoff);
                    break;
                case ChillerType.WallChiller:
                    _WallChiller?.SetChillerOnOff(onoff);
                    break;
            }
        }
        
        public override bool OnOffSetESCHV(bool on)
        => _ESCHV.SetPowerOnOff(on);

        public override void OpenValve(ValveType vlvType, bool on)
        {
            if (vlvType != ValveType.SoftPump)
            {
                if (Valve2IO.ContainsKey(vlvType))
                {
                    if (vlvType == ValveType.TurboPumpPurge && on)
                    {
                        if (!IsISOOpen)
                        {
                            LOG.Write(eEvent.WARN_DEFAULT_WARN, Module, $"Chamber TurboPumpPumping valve is not open, can not turn on TurboPumpPurge valve.");
                            return;
                        }
                    }
                    else if (vlvType == ValveType.TurboPumpPumping && !on)
                    {
                        if (IsTurboPumpRunning)
                        {
                            if (IsPenVOpen)
                            {
                                LOG.Write(eEvent.WARN_DEFAULT_WARN, Module, $"Chamber TurboPump is open but Pendulum Valve is open, can not turn off TurboPumpPumping valve.");
                                return;
                            }
                        }

                    }

                    if (vlvType == ValveType.TurboPumpPurge && !_TurboPumpPumpingValve.Status && on)
                    {
                        LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"cannot open Turbo Pump Purge, cause Turbo Pump Valve not open");
                        return;
                    }

                    if (vlvType == ValveType.TurboPumpPumping && on)
                    {
                        if (!_MainPump.IsRunning)
                        {
                            LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"cannot open Turbo Pump Pump, cause Dry Pump Valve is not open");
                            return;
                        }

                        if (ForelinePressure > SC.GetValue<int>($"{Module}.TurboPumpPumpingValveMinForelinePressure"))
                        {
                            LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"cannot open Turbo Pump Pump, cause forelinePressure:{ForelinePressure}");
                            return;
                        }
                    }
                    Valve2IO[vlvType].TurnValve(on, out _);
                    LOG.Write(eEvent.EV_DEVICE_INFO, Module, $"{(on ? "打开" : "关闭")} 阀 {vlvType.ToString()}");
                }
                else
                {
                    throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
                }
            }

        }

        public override bool PendulumValveIsOpen()
        {
            return _pendulumValve.IsOpen;
        }

        public override bool RetractWafer()
        {
            throw new NotImplementedException();
        }

        public override void SetBacksideHeFlow(double flow)
        {
            if (_backsideHe == null) return;
            _backsideHe.Flow(flow);
        }

        public override bool SetBacksideHePressure(float mTorr)
        {
            if (_backsideHe == null) return false;
            return _backsideHe.SetBacksideHelium(mTorr);
        }

        public override bool SetBacksideHeThreshold(float nMin, float nMax)
        {
            if (_backsideHe == null) return false;
            return _backsideHe.SetFlowThreshold(nMin, nMax);
        }

        public override bool SetBiasMatchPosition(float c1, float c2)
        {
            if (_BiasMatch == null) return false;
            string reason = string.Empty;
            _BiasMatch.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public override bool SetBiasPulseMode(bool on)
        {
            if (_GeneratorBias == null) return false;
            _GeneratorBias.SetPulseMode(on);
            return true;
        }

        public override bool SetBiasPulseRateFreq(int nFreq)
        {
            if (_GeneratorBias == null) return false;
            _GeneratorBias.SetPulseRateFreq(nFreq);
            return true;
        }

        public override bool SetDiasPulseDutyCycle(int percentage)
        {
            if (_GeneratorBias == null) return false;
            _GeneratorBias.SetPulseDutyCycle(percentage);
            return true;
        }

        public override bool SetESCClampVoltage(int nVoltage)
        {
            if (_ESCHV == null) return false;
            return _ESCHV.SetOutputVoltage(nVoltage);
        }

        public override void SetGeneratorCommunicationMode(int mode)
        => _Generator?.SetCommunicationMode(mode);

        public override bool SetLiftPin(MovementPosition dirt, out string reason)
        {
            reason = string.Empty;

            switch (dirt)
            {
                case MovementPosition.Down:
                    return _LiftPin.SetCylinder(false, out reason);
                case MovementPosition.Up:
                    return _LiftPin.SetCylinder(true, out reason);
                case MovementPosition.Left:
                case MovementPosition.Right:
                case MovementPosition.Middle:
                    throw new ArgumentException("Movement argument error");
            }

            return true;
        }

        public override bool SetMatchPosition(float c1, float c2)
        {
            if (_Match == null) return false;
            string reason = string.Empty;
            _Match.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public override bool SetPVPostion(float position)
        => _pendulumValve.SetPosition(position);

        public override bool SetPVPressure(float pressure)
        => _pendulumValve.SetPressure(pressure);

        public override bool SetSlitDoor(bool open, out string reason)
        {
            reason = string.Empty;
            //OP.DoOperation($"{Singleton<RouteManager>.Instance.seTM.Module}.SetSlitDoor", Module, open);
            return true;
        }
        public override bool SetLinerDoor(bool open, out string reason)
        {
            return _linerDoor.SetCylinder(open, out reason);
        }

        public override bool SetWallTCTemperature(float value)
        => _WallTC.RampTemp(value);

        public override void StopAllGases()
        {
            foreach (var line in _gasLines)
            {
                line.Stop();
            }
        }

        public override bool StopGas(int gasNum)
        {
            if (_gasLines.Length <= gasNum)
                return false;

            _gasLines[gasNum].Stop();
            return true;
        }

        public override bool StopN2()
        {
            _gasLineN2.Stop();
            return true;
        }

        public override void SwitchOnBuzzerAndRed()
        {
            throw new NotImplementedException();
        }

        public override void TurnDryPump(bool on)
        => _MainPump?.SetPumpOnOff(on);

        public override bool TurnPendulumValve(bool on)
        {
			if (on && (!TurboPumpInterlock || !IsCDA_OK || !IsTurboPumpAtSpeed || !IsWLK))
            {
                LOG.Write(eEvent.ERR_PENDULUM_VALVE, Module, "Cannot open PendulumValve, as Interlock not arrival");
                return false;
            }
            return _pendulumValve.TurnValve(on);
        }

        public override void TurnTurboPump(bool on)
        {
            _TurboPump?.SetPumpOnOff(on);
        }

        public override bool PreparePlace()
        {

            if (!SetLinerDoor(true, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Liner Door Open failed:{reason}");
                return false;

            }
            //
            if (!SetLiftPin(MovementPosition.Down, out reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin down failed:{reason}");
                return false;
            }
            return true;
        }
        public override bool PreparePick()
        {
            if (!SetLinerDoor(true, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Liner Door Open failed:{reason}");
                return false;
            }
            if (!SetLiftPin(MovementPosition.Up, out reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Up failed:{reason}");
                return false;
            }
            return true;
        }
        public override bool PreparePlaceIsOK()
        {
            return LiftPinIsDown && CheckLinerDoorOpen();
        }
        public override bool PreparePickIsOK()
        {
            return LiftPinIsUp && CheckLinerDoorOpen();
        }
        public override bool EndPlace()
        {
            if (!SetLiftPin(MovementPosition.Down, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Down failed:{reason}");
                return false;
            }

            if (!SetLinerDoor(false, out reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Liner Door Close failed:{reason}");
                return false;
            }

            return true;
        }

        public override bool EndPick()
        {
            if (!SetLinerDoor(false, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Liner Door Close failed:{reason}");
                return false;
            }
            return true;
        }
        private void ALARM_Notify()
        {
            if (Singleton<RouteManager>.Instance.GetPM(Module).IsProcessing)
                Singleton<RouteManager>.Instance.GetPM(Module).PostMsg(FSM_MSG.ALARM);
        }

        private void SensorWithAlarm()
        {
            _WLK_sw.WarningAction += ALARM_Notify;
            //_PM_Lid_Closed.WarningAction += ALARM_Notify;
            _RFG_Interlock.WarningAction += ALARM_Notify;
            _TurboPumpInterlock.WarningAction += ALARM_Notify;
            _GasBoxDoor.WarningAction += ALARM_Notify;
            _GasBoxPressure.WarningAction += ALARM_Notify;
        }
        public override bool EndPlaceIsOK()
        {
            return CheckSlitDoorClose() && LiftPinIsDown && CheckLinerDoorClose();
        }
        public override bool EndPickIsOK()
        {
            return CheckSlitDoorClose() && CheckLinerDoorClose();
        }

        #endregion

        protected override void CheckPermanentInterlock()
        {
            if (ChamberPressure > 950 && _GuageValve.SetPoint)
            {
                _GuageValve.TurnValve(false, out _);
                LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ChamberPressure} exceed 950 mtorr, Guage Valve (DO-31) closed automaticlly.");
            }
            if (ChamberPressure < 950 && !_GuageValve.SetPoint)
            {
                _GuageValve.TurnValve(true, out _);
                LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ChamberPressure} exceed 950 mtorr, Guage Valve (DO-31) closed automaticlly.");
            }
        }
        public override void PMInError()
        {
            CloseValves(2000);
            GeneratorPowerOn(false);
            GeneratorBiasPowerOn(false);
            OpenValve(ValveType.TurboPumpPumping, true);
            OpenValve(ValveType.TurboPumpPurge, true);
            _Magnet.SetMagnetPower(0);
            if (IsTurboPumpAtSpeed)
            {
                OpenValve(ValveType.TurboPumpPumping, true);
                _pendulumValve.SetPosition(1000);
            }           
            OnOffSetESCHV(false);
            SetBacksideHeThreshold(0, 0);
        }

    }
}