IoPressureControl.cs 9.7 KB

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  1. using System;
  2. using System.Xml;
  3. using Aitex.Core.Common.DeviceData;
  4. using Aitex.Core.RT.Device;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.IOCore;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.RT.Tolerance;
  10. using Aitex.Core.Util;
  11. using Venus_RT.Devices.IODevices;
  12. using Aitex.Core.RT.Log;
  13. using Venus_Core;
  14. using Venus_RT.Modules;
  15. namespace Venus_RT.Devices
  16. {
  17. public class IoPressureControl : BaseDevice, IDevice
  18. {
  19. private bool _enableTolerance;
  20. public bool EnableTolerance
  21. {
  22. get
  23. {
  24. return _enableTolerance;
  25. }
  26. set
  27. {
  28. if (_enableTolerance != value)
  29. {
  30. LOG.Write(eEvent.EV_DEVICE_INFO, Module, value ? "Start monitor pressure stability" : "Stop monitor pressure stability");
  31. if (value)
  32. {
  33. _tolerance.Reset(_scAlarmTime.DoubleValue);
  34. }
  35. }
  36. _enableTolerance = value;
  37. }
  38. }
  39. public bool IsIndependentControl
  40. {
  41. get
  42. {
  43. if (_scIsIndependentControl != null)
  44. return _scIsIndependentControl.BoolValue;
  45. return false;
  46. }
  47. }
  48. public bool IsTvInstalled
  49. {
  50. get
  51. {
  52. if (_scTvInstalled != null)
  53. return _scTvInstalled.BoolValue;
  54. return false;
  55. }
  56. }
  57. public bool IsBoostPumpInstalled
  58. {
  59. get
  60. {
  61. if (_scIsBoostPumpInstalled != null)
  62. return _scIsBoostPumpInstalled.BoolValue;
  63. return false;
  64. }
  65. }
  66. public bool EnableBoostControl
  67. {
  68. get
  69. {
  70. return _diLogicProcessGasFlowing == null || _diLogicProcessGasFlowing.Value;
  71. }
  72. }
  73. //public readonly IoThrottleValve ThrottleValve;
  74. public readonly IoPressureMeter PressureGauge;
  75. public readonly IoPressureMeter ProcessGauge;
  76. public readonly IoPressureMeter ForelineGauge;
  77. public readonly IoPressureMeter LoadLockGauge;
  78. public readonly IoPressureMeter ESCHeGauge;
  79. //public readonly IoPressureMeter ProcessHigh;
  80. //public readonly IoPressureMeter ProcessLow;
  81. public readonly IoPressureMeter PenningGauge;
  82. //public readonly IoBoostPump _boost;
  83. //public readonly IoPump DryPump;
  84. private readonly ToleranceChecker _tolerance = new ToleranceChecker();
  85. private readonly SCConfigItem _scAlarmRange;
  86. private readonly SCConfigItem _scAlarmTime;
  87. private readonly SCConfigItem _scIsIndependentControl;
  88. private readonly SCConfigItem _scIsBoostPumpInstalled;
  89. private readonly SCConfigItem _scTvInstalled;
  90. private readonly DIAccessor _diLogicProcessGasFlowing;
  91. private readonly R_TRIG _trigPressureGauge = new R_TRIG();
  92. private readonly R_TRIG _trigProcessGauge = new R_TRIG();
  93. private readonly R_TRIG _trigForelineGauge = new R_TRIG();
  94. //private readonly R_TRIG _trigProcessHighGauge = new R_TRIG();
  95. //private readonly R_TRIG _trigProcessLowGauge = new R_TRIG();
  96. private readonly R_TRIG _trigESCHePressureGauge = new R_TRIG();
  97. private readonly R_TRIG _trigLoadLockGaugePressureGauge = new R_TRIG();
  98. private readonly AOAccessor _aoMFPressureSP;
  99. // Properties
  100. //
  101. public double TargetPressure { get; set; }
  102. private string PressureOutOfTolerance = "PressureOutOfTolerance";
  103. // Constructor
  104. //
  105. public IoPressureControl(string module, XmlElement node, string ioModule = "")
  106. {
  107. base.Module = module;
  108. base.Name = node.GetAttribute("id");
  109. base.Display = node.GetAttribute("display");
  110. base.DeviceID = node.GetAttribute("schematicId");
  111. _diLogicProcessGasFlowing = ParseDiNode("diLogicProcessGasFlowing", node, ioModule);
  112. _scAlarmRange = SC.GetConfigItem($"{Module}.GasFlowPressureAlarmRange");
  113. _scAlarmTime = SC.GetConfigItem($"{Module}.GasFlowPressureAlarmTime");
  114. _scIsIndependentControl = SC.GetConfigItem($"{Module}.IsIndependentControl");
  115. _scIsBoostPumpInstalled = SC.GetConfigItem($"{Module}.EnableBoosterPump");
  116. _scTvInstalled = SC.GetConfigItem($"{Module}.EnableThrottleValve");
  117. //_enableTolerance = true;
  118. PressureGauge = ParseDeviceNode<IoPressureMeter>(Module, "pressureMeter", node);
  119. ProcessGauge = ParseDeviceNode<IoPressureMeter>(Module, "processMeter", node);
  120. ForelineGauge = ParseDeviceNode<IoPressureMeter>(Module, "forelineMeter", node);
  121. LoadLockGauge = ParseDeviceNode<IoPressureMeter>(Module, "loadlockMeter", node);
  122. ESCHeGauge = ParseDeviceNode<IoPressureMeter>(Module, "escHeGauge", node);
  123. //ProcessHigh = ParseDeviceNode<IoPressureMeter>(Module, "processPressureHigh", node);
  124. //ProcessLow = ParseDeviceNode<IoPressureMeter>(Module, "processPressureLow", node);
  125. _aoMFPressureSP = ParseAoNode("tmPressureSetPoint", node, ioModule);
  126. //DryPump = ParseDeviceNode<IoPump>(Module, "drypump", node);
  127. PenningGauge = ParseDeviceNode<IoPressureMeter>(Module, "penningMeter", node);
  128. }
  129. public bool Initialize()
  130. {
  131. //DEVICE.Register($"{Module}.{Name}.{AITPressureControlOperation.SetBoostPressure}", _setBoostPressure);
  132. DEVICE.Register($"{Module}.{Name}.{AITPressureControlOperation.SetChamberPressure}", _setChamberPressure);
  133. OP.Subscribe($"{Module}.{Name}.{AITPressureControlOperation.SetChamberPressure}", (out string reason, int time, object[] param) =>
  134. {
  135. _setChamberPressure(out reason, 0, param);
  136. return true;
  137. });
  138. EV.Subscribe(new EventItem("Event", PressureOutOfTolerance, "Pressure Out Of Tolerance", EventLevel.Alarm, EventType.HostNotification));
  139. return true;
  140. }
  141. //public void StartPump(bool on)
  142. //{
  143. // this.DryPump?.Start(on);
  144. //}
  145. private bool? _setChamberPressure(out string reason, int time, object[] param)
  146. {
  147. double setpoint = Convert.ToDouble((string)param[0]);
  148. TargetPressure = setpoint;
  149. reason = $"Chamber pressure set to {setpoint} mTorr";
  150. return true;
  151. }
  152. public void Terminate()
  153. {
  154. }
  155. public void Monitor()
  156. {
  157. CheckTolerance();
  158. //JetChamber jetChamber = (JetChamber)(SC.GetValue<int>("System.ChamberSelect"));//Venus or Kepler
  159. //if (RtInstance.CurrentChamber == JetChamber.Venus)
  160. //{
  161. // _trigPressureGauge.CLK = PressureGauge.GaugeAlarm;
  162. // if (_trigPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Chamber pressure gauge Alarm");
  163. // _trigLoadLockGaugePressureGauge.CLK = LoadLockGauge.GaugeAlarm;
  164. // if (_trigLoadLockGaugePressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "LoadLock Pressure Gauge Alarm");
  165. //}
  166. _trigProcessGauge.CLK = ProcessGauge.GaugeAlarm;
  167. if (_trigProcessGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process pressure gauge Alarm");
  168. _trigForelineGauge.CLK = ForelineGauge.GaugeAlarm;
  169. if (_trigForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Foreline pressure gauge Alarm");
  170. //_trigProcessHighGauge.CLK = ProcessHigh.GaugeAlarm;
  171. //if (_trigProcessHighGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process High Gauge Alarm");
  172. //_trigProcessLowGauge.CLK = ProcessLow.GaugeAlarm;
  173. //if (_trigProcessLowGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process Low Gauge Alarm");
  174. if (ESCHeGauge != null)
  175. {
  176. _trigESCHePressureGauge.CLK = ESCHeGauge.GaugeAlarm;
  177. if (_trigESCHePressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "ESC He Pressure Gauge Alarm");
  178. }
  179. //MFPressureWrite();
  180. }
  181. public void CheckTolerance()
  182. {
  183. if (!EnableTolerance)
  184. return;
  185. //if (ThrottleValve != null && IsTvInstalled && ThrottleValve.PressureMode == PressureCtrlMode.TVPositionCtrl)
  186. // return;
  187. _tolerance.Monitor(PressureGauge.Value,
  188. TargetPressure - Math.Abs(_scAlarmRange.DoubleValue),
  189. TargetPressure + Math.Abs(_scAlarmRange.DoubleValue), _scAlarmTime.DoubleValue);
  190. if (_tolerance.Trig)
  191. {
  192. EV.Notify(PressureOutOfTolerance);
  193. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, $"Gas Flow Pressure Alarm Out of range in {_scAlarmTime.Value:0} seconds");
  194. }
  195. }
  196. public void Reset()
  197. {
  198. _trigProcessGauge.RST = true;
  199. _trigPressureGauge.RST = true;
  200. _trigForelineGauge.RST = true;
  201. if (_scAlarmTime != null)
  202. {
  203. _tolerance.Reset(_scAlarmTime.DoubleValue);
  204. }
  205. }
  206. //private void MFPressureWrite()
  207. //{
  208. // if (_aoMFPressureSP == null)
  209. // return;
  210. // _SetRealFloat(_aoMFPressureSP, 100);
  211. //}
  212. }
  213. }