| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607 | using System;using System.Collections.Generic;using Venus_RT.Modules;using Venus_Core;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;using Aitex.Sorter.Common;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;using Aitex.Core.RT.Log;using System.Text.RegularExpressions;using MECF.Framework.Common.CommonData;namespace Venus_RT.Devices{    class SIASUNRobot : ITransferRobot    {        enum OPStep        {            Idle,            Home,            Goto,            MoveTo,            CheckLoad_ArmA,            CheckLoad_ArmB,            Pick,            Place,            PickExtend,            PickRetract,            PlaceExtent,            PlaceRetract,        }        private RState _status;        private bool _IsHomed;        public RState Status { get { return _status; } }        public bool IsHomed { get { return _IsHomed; } }        public RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }        private readonly AsyncSocket _socket;        private OPStep _currentOP = OPStep.Idle;        private Dictionary<ModuleName, int> _StationNumbers = new Dictionary<ModuleName, int>();        private readonly int _checkLoadStation = 1;        private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();        private string Hand2Arm(Hand hand) => hand == Hand.Blade1 ? "A" : "B";        private readonly Regex _rex_check_load = new Regex(@"LOAD\s+(A|B)\s+(\w+)\s*");        private readonly Regex _rex_error_code = new Regex(@"_ERR\s+(\d+)\s*");        public SIASUNRobot()        {            _socket = new AsyncSocket("");            _socket.Connect(SC.GetStringValue($"TM.IPAddress"));            _socket.OnDataChanged += OnReceiveMessage;            _socket.OnErrorHappened += OnErrorHappen;            _status = RState.Init;            _IsHomed = false;            _StationNumbers[ModuleName.LLA] = SC.GetValue<int>("TM.LLAStationNumber");            _StationNumbers[ModuleName.LLB] = SC.GetValue<int>("TM.LLBStationNumber");            _StationNumbers[ModuleName.PMA] = SC.GetValue<int>("TM.PMAStationNumber");            _StationNumbers[ModuleName.PMB] = SC.GetValue<int>("TM.PMBStationNumber");            _StationNumbers[ModuleName.PMC] = SC.GetValue<int>("TM.PMCStationNumber");            _StationNumbers[ModuleName.PMD] = SC.GetValue<int>("TM.PMDStationNumber");            _StationNumbers[ModuleName.PME] = SC.GetValue<int>("TM.PMEStationNumber");            _StationNumbers[ModuleName.PMF] = SC.GetValue<int>("TM.PMFStationNumber");            _checkLoadStation = SC.GetValue<int>("TM.CheckLoadStation");        }        public bool Home()        {            _status = RState.Running;            _currentOP = OPStep.Home;            return _SendCommand("HOME ALL\r");        }        public bool Halt()        {            return _SendCommand("HALT\r");        }        public bool CheckLoad(Hand hand = Hand.Blade1)        {            if (_currentOP != OPStep.Home && _currentOP != OPStep.CheckLoad_ArmA && CheckRobotStatus() == false)                return false;            _currentOP = hand == Hand.Blade2 ? OPStep.CheckLoad_ArmB : OPStep.CheckLoad_ArmA;            _status = RState.Running;            return _SendCommand($"CHECK LOAD {_checkLoadStation} ARM {Hand2Arm(hand)}\r");        }        public bool Goto(ModuleName station, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.Goto;            _status = RState.Running;            return _SendCommand($"GOTO N {_StationNumbers[station]} SLOT {slot} ARM {Hand2Arm(hand)}\r");        }        public bool MoveTo(ModuleName stnFrom, ModuleName stnTo, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.MoveTo;            _status = RState.Running;            return _SendCommand($"XFER ARM {Hand2Arm(hand)} {_StationNumbers[stnFrom]} {_StationNumbers[stnTo]}\r");        }        public bool PickExtend(ModuleName chamber, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.PickExtend;            _status = RState.Running;            SetRobotMovingInfo(RobotAction.Extending, hand, chamber);            return _SendCommand($"PICK {_StationNumbers[chamber]} SLOT {slot} ARM {Hand2Arm(hand)} ENRT\r");        }        public bool PickRetract(ModuleName chamber, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.PickRetract;            _status = RState.Running;            SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);            return _SendCommand($"PICK {_StationNumbers[chamber]} SLOT {slot} ARM {Hand2Arm(hand)} STRT\r");        }        public bool PlaceExtend(ModuleName chamber, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.PlaceExtent;            _status = RState.Running;            SetRobotMovingInfo(RobotAction.Extending, hand, chamber);            return _SendCommand($"PLACE {_StationNumbers[chamber]} SLOT {slot} ARM {Hand2Arm(hand)} ENRT\r");        }        public bool PlaceRetract(ModuleName chamber, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.PlaceExtent;            _status = RState.Running;            SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);            return _SendCommand($"PLACE {_StationNumbers[chamber]} SLOT {slot} ARM {Hand2Arm(hand)} STRT\r");        }        public bool Pick(ModuleName station, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.Pick;            _status = RState.Running;            SetRobotMovingInfo(RobotAction.Picking, hand, station);            return _SendCommand($"PICK {_StationNumbers[station]} SLOT {slot} ARM {Hand2Arm(hand)}\r");        }        public bool Place(ModuleName station, int slot, Hand hand)        {            if (CheckRobotStatus() == false)                return false;            _currentOP = OPStep.Place;            _status = RState.Running;            SetRobotMovingInfo(RobotAction.Placing, hand, station);            return _SendCommand($"PLACE {_StationNumbers[station]} SLOT {slot} ARM {Hand2Arm(hand)}\r");        }        private bool _SendCommand(string cmd)        {            LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TM, $"Send Command to SIASUN TM Robot: {cmd}");            return _socket.Write(cmd);        }        private bool CheckRobotStatus()        {            if(Status == RState.Init)            {                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, "TM Robot is not homed, please home first.");                return false;            }            else if(Status == RState.Running)            {                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, "TM Robot is busy, please wait a minute");                return false;            }            else if(Status == RState.Failed || Status == RState.Timeout)            {                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, "TM Robot has a error, please check and fix the hardware issue and home it");                return false;            }            return true;        }        private void OnReceiveMessage(string RevMsg)        {            if(_rex_error_code.IsMatch(RevMsg))            {                _IsHomed = false;                _status = RState.Failed;                var results = _rex_error_code.Match(RevMsg);                ErrorMessageHandler(results.Groups[1].Value);                return;            }            LOG.WriteSingeLine(eEvent.INFO_TM_ROBOT, ModuleName.TM, $"Receive message from SIASUN TM Robot: {RevMsg}, while {_currentOP}");            switch (_currentOP)            {                case OPStep.Goto:                case OPStep.MoveTo:                case OPStep.Pick:                case OPStep.PickExtend:                case OPStep.PickRetract:                case OPStep.Place:                case OPStep.PlaceExtent:                case OPStep.PlaceRetract:                    {                        if (RevMsg.Trim() == "_RDY")                        {                            _currentOP = OPStep.Idle;                            _status = RState.End;                        }                        else                            ReportWrongMsg(RevMsg);                        if (_currentOP != OPStep.PickExtend && _currentOP != OPStep.PlaceExtent)                            SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.TM);                    }                    break;                case OPStep.Home:                    {                        if(RevMsg.Trim() == "_RDY")                        {                            CheckLoad(Hand.Blade1);                        }                        else                            ReportWrongMsg(RevMsg);                    }                    break;                case OPStep.CheckLoad_ArmA:                    {                        if(_rex_check_load.IsMatch(RevMsg))                        {                            GetCheckLoadResult(RevMsg);                            CheckLoad(Hand.Blade2);                        }                        else                            ReportWrongMsg(RevMsg);                    }                    break;                case OPStep.CheckLoad_ArmB:                    {                        if (_rex_check_load.IsMatch(RevMsg))                        {                            GetCheckLoadResult(RevMsg);                            _currentOP = OPStep.Idle;                            _status = RState.End;                            _IsHomed = true;                        }                    }                    break;                default:                    ReportWrongMsg(RevMsg);                    break;            }        }        private void GetCheckLoadResult(string strRev)        {            Match result = _rex_check_load.Match(strRev);            string Arm = result.Groups[1].Value;            string WaferStatus = result.Groups[2].Value;            if(WaferStatus == "ON")            {                WaferManager.Instance.CreateWafer(ModuleName.TM, Arm == "A" ? 0 : 1, Aitex.Core.Common.WaferStatus.Unknown);            }        }        private void OnErrorHappen(ErrorEventArgs args)        {            Singleton<RouteManager>.Instance.TM.PostMsg(TMEntity.MSG.Error);            LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, $"SIASUN TM Robot Error: {args.Reason} while {_currentOP}");        }        private void ReportWrongMsg(string revMsg)        {            LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, $"Receive wrong message:{revMsg} while {_currentOP}");        }        private void ErrorMessageHandler(string errCode)        {            int ErrCode;            string ErrorInfo;            if(int.TryParse(errCode, out ErrCode))            {                switch (ErrCode)                {                    // 系统及硬件错误信息                    case 901:                        ErrorInfo = $"_Err {errCode}: 主电柜急停启动";                        break;                    case 902:                        ErrorInfo = $"_Err {errCode}: 示教盒急停启动";                        break;                    case 862:                        ErrorInfo = $"_Err {errCode}: 驱动器 RDY 信号断开";                        break;                    // 执行错误信息                    case 3001:                        ErrorInfo = $"_Err {errCode}: 系统发生碰撞,按取消恢复";                        break;                    case 7300:                        ErrorInfo = $"_Err {errCode}: 旋转信号不允许";                        break;                    case 7301:                        ErrorInfo = $"_Err {errCode}: 伸缩信号不允许";                        break;                    case 2200:                        ErrorInfo = $"_Err {errCode}: 输出端口 NO.不存在";                        break;                    case 3100:                        ErrorInfo = $"_Err {errCode}: 关节 N 位置超界";                        break;                    case 3120:                        ErrorInfo = $"_Err {errCode}: 关节 N 速度超界";                        break;                    case 100:                        ErrorInfo = $"_Err {errCode}: 手臂电源上电失败(手臂电源未打开)";                        break;                    // 通信错误信息                    case 7307:                        ErrorInfo = $"_Err {errCode}: GOTO 工位号超范围";                        break;                    case 7308:                        ErrorInfo = $"_Err {errCode}: 不支持的传感器类型";                        break;                    case 7312:                        ErrorInfo = $"_Err {errCode}: PICK工位号超范围";                        break;                    case 7313:                        ErrorInfo = $"_Err {errCode}: PLACE工位号超范围";                        break;                    case 7314:                        ErrorInfo = $"_Err {errCode}: XFER工位号超范围";                        break;                    case 7315:                        ErrorInfo = $"_Err {errCode}: REMOVE不支持的IO类型";                        break;                    case 7316:                        ErrorInfo = $"_Err {errCode}: RQ INTLCK不识别的参数";                        break;                    case 7317:                        ErrorInfo = $"_Err {errCode}: RQ IO不识别的参数";                        break;                    case 7319:                        ErrorInfo = $"_Err {errCode}: RQ STN工位号超范围";                        break;                    case 7320:                        ErrorInfo = $"_Err {errCode}: wafre(WAF_SEN)参数未设置";                        break;                    case 7321:                        ErrorInfo = $"_Err {errCode}: wafex(RETRACT_PIN)参数未设置";                        break;                    case 7322:                        ErrorInfo = $"_Err {errCode}: svlv(SBIT_SVLV_SEN)参数未设置";                        break;                    case 7323:                        ErrorInfo = $"_Err {errCode}: ens(EX_ENABLE)参数未设置";                        break;                    case 7324:                        ErrorInfo = $"_Err {errCode}: RQ命令不支持的参数";                        break;                    case 7325:                        ErrorInfo = $"_Err {errCode}: SET INTLOCK WAF_SEN参数错";                        break;                    case 7326:                        ErrorInfo = $"_Err {errCode}: SET INTLOCK RZ参数错";                        break;                    case 7327:                        ErrorInfo = $"_Err {errCode}: SET INTLOCK参数错";                        break;                    case 7328:                        ErrorInfo = $"_Err {errCode}: SET IO ECHO参数错";                        break;                    case 7329:                        ErrorInfo = $"_Err {errCode}: SET IO STATE不支持";                        break;                    case 7330:                        ErrorInfo = $"_Err {errCode}: SET IO不支持的参数";                        break;                    case 7331:                        ErrorInfo = $"_Err {errCode}: SET STN工位号超范围";                        break;                    case 7332:                        ErrorInfo = $"_Err {errCode}: 手臂参数读取错误";                        break;                    case 7333:                        ErrorInfo = $"_Err {errCode}: WAF_SEN不识别的参数";                        break;                    case 7334:                        ErrorInfo = $"_Err {errCode}: SET不支持的传感器类型";                        break;                    case 7335:                        ErrorInfo = $"_Err {errCode}: SET 指令输入不完整";                        break;                    case 7336:                        ErrorInfo = $"_Err {errCode}: STORE IO命令不支持该参数";                        break;                    case 7337:                        ErrorInfo = $"_Err {errCode}: STORE LOAD命令不支持该参数";                        break;                    case 7338:                        ErrorInfo = $"_Err {errCode}: STORE STN指令工位号大于20";                        break;                    case 7339:                        ErrorInfo = $"_Err {errCode}: STORE STN命令手臂参数错误";                        break;                    case 7340:                        ErrorInfo = $"_Err {errCode}: STORE不支持的传感器类型";                        break;                    case 7341:                        ErrorInfo = $"_Err {errCode}: STORE指令输入不完整";                        break;                    case 7342:                        ErrorInfo = $"_Err {errCode}: 无法识别的命令";                        break;                    case 7343:                        ErrorInfo = $"_Err {errCode}: HOME参数未指定";                        break;                    case 7344:                        ErrorInfo = $"_Err {errCode}: GOTO指令R轴参数未指定";                        break;                    case 7345:                        ErrorInfo = $"_Err {errCode}: GOTO指令Z轴参数未指定";                        break;                    case 7346:                        ErrorInfo = $"_Err {errCode}: ARM参数错误";                        break;                    case 7347:                        ErrorInfo = $"_Err {errCode}: GOTO指令未指定参数";                        break;                    case 7349:                        ErrorInfo = $"_Err {errCode}: MOVE指令未指定模式或轴";                        break;                    case 7350:                        ErrorInfo = $"_Err {errCode}: MOVE 指令中字段名字错";                        break;                    case 7351:                        ErrorInfo = $"_Err {errCode}: PICK未指定参数";                        break;                    case 7352:                        ErrorInfo = $"_Err {errCode}: PLACE未指定参数";                        break;                    case 7353:                        ErrorInfo = $"_Err {errCode}: REMOVE未指定参数";                        break;                    case 7354:                        ErrorInfo = $"_Err {errCode}: 指令执行未结束";                        break;                    case 7355:                        ErrorInfo = $"_Err {errCode}: GOTO指令未指定工位号";                        break;                    case 7356:                        ErrorInfo = $"_Err {errCode}: PICK指令未指定工位号";                        break;                    case 7357:                        ErrorInfo = $"_Err {errCode}: PLACE指令未指定工位号";                        break;                    case 7358:                        ErrorInfo = $"_Err {errCode}: ABS未指定数值";                        break;                    case 7359:                        ErrorInfo = $"_Err {errCode}: REL未指定数值";                        break;                    case 7360:                        ErrorInfo = $"_Err {errCode}: 没有指定主程序";                        break;                    case 7361:                        ErrorInfo = $"_Err {errCode}: 当前没有打开作业";                        break;                    case 7362:                        ErrorInfo = $"_Err {errCode}: 当前作业不是主作业";                        break;                    case 7363:                        ErrorInfo = $"_Err {errCode}: ex_ena(EX_ENABLE_SEN)参数未设置";                        break;                    case 7364:                        ErrorInfo = $"_Err {errCode}: stable(STABLE_ SIGNAL)参数未设置";                        break;                    case 7365:                        ErrorInfo = $"_Err {errCode}: VIA参数设置有误";                        break;                    case 7366:                        ErrorInfo = $"_Err {errCode}: 系统处于非启动状态";                        break;                    case 7367:                        ErrorInfo = $"_Err {errCode}: extend(EX_SIGNAL)参数未设置";                        break;                    case 7368:                        ErrorInfo = $"_Err {errCode}: retract(RE_ SIGNAL)参数未设置";                        break;                    case 7371:                        ErrorInfo = $"_Err {errCode}: place动作前:未检测到晶圆";                        break;                    case 7372:                        ErrorInfo = $"_Err {errCode}: pick动作前:检测到晶圆";                        break;                    case 7373:                        ErrorInfo = $"_Err {errCode}: place动作后:检测到晶圆";                        break;                    case 7374:                        ErrorInfo = $"_Err {errCode}: pick动作后:未检测到晶圆";                        break;                    case 7375:                        ErrorInfo = $"_Err {errCode}: 系统未上电或当前不是执行模式";                        break;                    case 7376:                        ErrorInfo = $"_Err {errCode}: 参数中存在非数字";                        break;                    case 7385:                        ErrorInfo = $"_Err {errCode}: 驱动器异常停止";                        break;                    case 7387:                        ErrorInfo = $"_Err {errCode}: 驱动器ID1报警";                        break;                    case 7388:                        ErrorInfo = $"_Err {errCode}: 驱动器ID2报警";                        break;                    case 7389:                        ErrorInfo = $"_Err {errCode}: 驱动器ID3报警";                        break;                    case 7391:                        ErrorInfo = $"_Err {errCode}: AWC工位号超范围";                        break;                    case 7392:                        ErrorInfo = $"_Err {errCode}: 偏差过大AWC报警";                        break;                    case 7393:                        ErrorInfo = $"_Err {errCode}: 标定失败,请重新标定";                        break;                    case 7398:                        ErrorInfo = $"_Err {errCode}: 触发点计算半径有误";                        break;                    case 7399:                        ErrorInfo = $"_Err {errCode}: 驱动器锁存AWC数据个数有误";                        break;                    case 7401:                        ErrorInfo = $"_Err {errCode}: 手指上可能有晶圆";                        break;                    case 7402:                        ErrorInfo = $"_Err {errCode}: 手指上可能无晶圆";                        break;                    case 7403:                        ErrorInfo = $"_Err {errCode}: load当前状态为ON,不正确";                        break;                    case 7404:                        ErrorInfo = $"_Err {errCode}: load当前状态为OFF,不正确";                        break;                    case 7405:                        ErrorInfo = $"_Err {errCode}: 当前slot不存在!";                        break;                    case 7495:                        ErrorInfo = $"_Err {errCode}: ID1码盘反馈错误";                        break;                    case 7496:                        ErrorInfo = $"_Err {errCode}: ID2码盘反馈错误";                        break;                    case 7497:                        ErrorInfo = $"_Err {errCode}: ID3码盘反馈错误";                        break;                    default:                        ErrorInfo = $"_Err {errCode}: 不能识别的错误码";                        break;                }                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, ErrorInfo);            }            else            {                LOG.Write(eEvent.ERR_TM_ROBOT, ModuleName.TM, $"Try Parse the receive error code faild:{errCode}");            }        }        public void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)        {            _robotMoveInfo.Action = action;            _robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);            _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";        }    }}
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