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Kepler-Release
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Kepler-Release
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Venus
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Venus_RT
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Config
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Interlock.Kepler.xml

Interlock.Kepler.xml 4.2 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   
    4. 

  4.  
    5. 

  5. 

  6. 	
    7. 

  7. 

  8. 	
    9. 

  9.    <!--TM-->
    10. 

  10. 	<Action do="TM.DO_LLA_Slit_Door_E_Open"					value="true" tip="Loadlock A EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-11" >
    11. 

  11. 		<Limit di="TM.DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
    12. 

  12. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    13. 

  13. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    14. 

  14. 	</Action>
    15. 

  15. 	
    16. 

  16. 	<Action do="TM.DO_LLA_Slit_Door_E_Close"				value="true" tip="Loadlock A EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
    17. 

  17. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    18. 

  18. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    19. 

  19. 	</Action>
    20. 

  20. 	
    21. 

  21. 	<Action do="TM.DO_LLB_Slit_Door_E_Open"					value="true" tip="Loadlock B EFEM Side Door Open"	tip.zh-CN="" tip.en-US="DO-21" >
    22. 

  22. 		<Limit di="TM.DI_LLB_T_Slit_Door_close_Position"	value="true" tip="LLB TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-30" />
    23. 

  23. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    24. 

  24. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
    25. 

  25. 	</Action>
    26. 

  26. 	
    27. 

  27. 	<Action do="TM.DO_LLB_Slit_Door_E_Close"				value="true" tip="Loadlock B EFEM Side Door Close"	tip.zh-CN="" tip.en-US="DO-12" >
    28. 

  28. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    29. 

  29. 		<Limit di="TM.DI_EFEM_RB_Not_Extend_LLB"			value="true" tip="EFEM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-12" />
    30. 

  30. 	</Action>
    31. 

  31. 

  32. 	<Action do="TM.DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
    33. 

  33. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    34. 

  34. 		<Limit di="TM.DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
    35. 

  35. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    36. 

  36. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    37. 

  37. 	</Action>
    38. 

  38. 	
    39. 

  39. 	<Action do="TM.DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
    40. 

  40. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    41. 

  41. 		<Limit di="TM.DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    42. 

  42. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    43. 

  43. 	</Action>
    44. 

  44. 	
    45. 

  45. 	<Action do="TM.DO_LLB_Slit_Door_T_Open"					value="true" tip="Loadlock B TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-23" >
    46. 

  46. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    47. 

  47. 		<Limit di="TM.DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    48. 

  48. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    49. 

  49. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    50. 

  50. 	</Action>
    51. 

  51. 	
    52. 

  52. 	<Action do="TM.DO_LLB_Slit_Door_T_Close"				value="true" tip="Loadlock B TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-24" >
    53. 

  53. 		<Limit di="TM.DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    54. 

  54. 		<Limit di="TM.DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    55. 

  55. 		<Limit di="TM.DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    56. 

  56. 	</Action>
    57. 

  57. 	
    58. 

  58. </Interlock>
    59.