PumpDownRoutine.cs 4.2 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class PumpDownRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum PumpStep
  12. {
  13. kDelay_2s,
  14. kCloseISOValve,
  15. kSoftPump,
  16. kFastPump,
  17. kPVHe2,
  18. kISOValve,
  19. kTurboN2Purge,
  20. kVATValve,
  21. kFinalStep,
  22. kEnd,
  23. }
  24. //private int _ventTime;
  25. private int _pump_delay = 5000;
  26. private int _roughPumpPressure = 75000;
  27. private int _vHe2FlowPressure = 200;
  28. private int _basePressure = 10;
  29. public PumpDownRoutine(JetPM chamber) : base(chamber)
  30. {
  31. Name = "PumpDown";
  32. }
  33. public RState Start(params object[] objs)
  34. {
  35. if (CheckLid() &&
  36. CheckSlitDoor())
  37. {
  38. Reset();
  39. _chamber.CloseValves();
  40. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.RoughPumpDownPressure") * 1000;
  41. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  42. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  43. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  44. _chamber.OpenValve(ValveType.PVN22, true);
  45. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  46. _chamber.TurnPendulumValve(false);
  47. return Runner.Start(Module, Name);
  48. }
  49. return RState.Failed;
  50. }
  51. public RState Monitor()
  52. {
  53. Runner.Delay((int)PumpStep.kDelay_2s, _delay_2s)
  54. .Run((int)PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  55. .Run((int)PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  56. .Run((int)PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  57. .Run((int)PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  58. .Run((int)PumpStep.kISOValve, OpenISOValve, _delay_2s)
  59. .Run((int)PumpStep.kVATValve, OpenVATValve, _delay_5s)
  60. .Run((int)PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  61. .End((int)PumpStep.kEnd, NullFun, _delay_1s);
  62. return Runner.Status;
  63. }
  64. private bool OpenFastPump()
  65. {
  66. _chamber.OpenValve(ValveType.SoftPump, false);
  67. _chamber.OpenValve(ValveType.FastPump, true);
  68. return true;
  69. }
  70. private bool OpenHe2Valve()
  71. {
  72. _chamber.OpenValve(ValveType.FastPump, false);
  73. _chamber.OpenValve(ValveType.PVHe2, true);
  74. return true;
  75. }
  76. private bool OpenISOValve()
  77. {
  78. _chamber.OpenValve(ValveType.PVHe2, false);
  79. // ISO Valve
  80. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  81. _chamber.OpenValve(ValveType.Guage, true);
  82. return true;
  83. }
  84. private bool OpenVATValve()
  85. {
  86. return _chamber.TurnPendulumValve(true);
  87. }
  88. private bool FinalStep()
  89. {
  90. _chamber.OpenValve(ValveType.Guage, true);
  91. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  92. _chamber.OpenValve(ValveType.GasFinal, true);
  93. return true;
  94. }
  95. public void Abort()
  96. {
  97. CloseAllValves();
  98. }
  99. }
  100. }