MFLeakCheckRoutine.cs 4.9 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using MECF.Framework.Common.Equipment;
  6. using Venus_Core;
  7. using MECF.Framework.Common.DBCore;
  8. using System;
  9. namespace Venus_RT.Modules.TM
  10. {
  11. class MFLeakCheckRoutine : ModuleRoutineBase, IRoutine
  12. {
  13. private enum LeakCheckStep
  14. {
  15. kCloseValves,
  16. kPumpToCrossing,
  17. kPumpToBasePressure,
  18. kPumpingDelay,
  19. kLeakCheckDelay,
  20. kLeakCheckCalc,
  21. kPumpToCrossing_2,
  22. kPumpToBasePressure_2,
  23. kEnd,
  24. }
  25. public double LeakRate { get; private set; }
  26. private double _basePressure = 100;
  27. private double _CrossingPressure = 2000;
  28. private int _leakcheckPumpTime = 180;
  29. private int _leakcheckWaitTime = 300;
  30. private double _startPressure = 0;
  31. private double _endPressure = 0;
  32. private double _leakRate = 30.0;
  33. private readonly JetTM _JetTM;
  34. //public string CurrentStep;
  35. public MFLeakCheckRoutine(JetTM tm, ModuleName mod) : base(mod)
  36. {
  37. Name = $"{Module} Leakcheck";
  38. _JetTM = tm;
  39. }
  40. public RState Start(params object[] objs)
  41. {
  42. if (_JetTM.CheckLidClosed(Module) &&
  43. _JetTM.CheckVentValveClosed(Module) &&
  44. _JetTM.CheckPurgeValveClosed(Module) &&
  45. _JetTM.CheckPumpValveClosed(Module))
  46. {
  47. Reset();
  48. _JetTM.CloseModuleAllValves(Module);
  49. _basePressure = SC.GetValue<double>($"{Module}.PumpBasePressure");
  50. _CrossingPressure = SC.GetValue<double>($"{Module}.PumpCrossingPressure");
  51. _leakcheckPumpTime = SC.GetValue<int>($"{Module}.LeakCheckPumpTime");
  52. _leakcheckWaitTime = SC.GetValue<int>($"{Module}.LeakCheckWaitTime");
  53. _leakRate = SC.GetValue<double>($"{Module}.LeakRate");
  54. return Runner.Start(Module, Name);
  55. }
  56. return RState.Failed;
  57. }
  58. public RState Monitor()
  59. {
  60. Runner.Delay(LeakCheckStep.kCloseValves, _delay_1s)
  61. .Run(LeakCheckStep.kPumpToCrossing, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
  62. .Run(LeakCheckStep.kPumpToBasePressure, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
  63. .Delay(LeakCheckStep.kPumpingDelay, _leakcheckPumpTime * 1000)
  64. .Run(LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckWaitTime * 1000)
  65. .Run(LeakCheckStep.kLeakCheckCalc, CalcLeakCheckResult, _delay_50ms)
  66. .Run(LeakCheckStep.kPumpToCrossing_2, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
  67. .Run(LeakCheckStep.kPumpToBasePressure_2, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
  68. .End(LeakCheckStep.kEnd, LeakCheckEnd, _delay_50ms);
  69. return Runner.Status;
  70. }
  71. public void Abort()
  72. {
  73. _JetTM.CloseModuleAllValves(Module);
  74. }
  75. bool StartLeakCheck()
  76. {
  77. _JetTM.TurnFastPumpValve(Module, false);
  78. _startPressure = _JetTM.GetModulePressure(Module);
  79. Notify($"{Module} 压力开始值 {_startPressure} mt");
  80. return true;
  81. }
  82. bool CalcLeakCheckResult()
  83. {
  84. _endPressure = _JetTM.GetModulePressure(Module);
  85. LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckWaitTime;
  86. if (LeakRate < _leakRate)
  87. {
  88. Notify($"{Module} Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
  89. }
  90. else
  91. {
  92. Stop($"{Module} Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
  93. }
  94. return true;
  95. }
  96. bool LeakCheckEnd()
  97. {
  98. _JetTM.CloseModuleAllValves(Module);
  99. //LeakCheckDataRecorder.Add(_leakcheckHoldTime, Math.Round(_startPressure, 1), Math.Round(_endPressure, 1), LeakRate, pMLeakCheckResult.Result, pMLeakCheckResult.CheckMode, _chamber.Name, gasLines.ToString());
  100. return true;
  101. }
  102. private bool SwitchFastPump()
  103. {
  104. _JetTM.TurnSoftPumpValve(Module, false);
  105. _JetTM.TurnFastPumpValve(Module, true);
  106. return true;
  107. }
  108. }
  109. }