Kepler-Release/Venus/Venus_RT/Devices/JetVenusPM.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;
using System;
using System.Collections.Generic;
using Venus_Core;
using Venus_RT.Devices.IODevices;
using Venus_RT.Devices.EPD;
using MECF.Framework.Common.SubstrateTrackings;
using IoMfc = Venus_RT.Devices.IODevices.IoMfc;
using System.Threading.Tasks;
using Aitex.Core.RT.DataCenter;
using Venus_RT.Modules;
using System.Windows.Media;
using System.Diagnostics;

namespace Venus_RT.Devices
{
    class JetVenusPM : JetPMBase
    {
        private readonly IoLid _Lid;
        private readonly IoLid _LidLoadlock;

        private readonly IoCylinder _slitDoor;
        private readonly IoCylinder _LiftPin;
        private readonly IoCylinder _LoadLockArm;

        private readonly IoValve _PVN21Valve;
        private readonly IoValve _PVN22Valve;
        private readonly IoValve _PV11Valve;
        private readonly IoValve _PV12Valve;
        private readonly IoValve _PV21Valve;
        private readonly IoValve _PV22Valve;
        private readonly IoValve _PV31Valve;
        private readonly IoValve _PV32Valve;
        private readonly IoValve _PV41Valve;
        private readonly IoValve _PV42Valve;
        private readonly IoValve _N2Valve;
        private readonly IoValve _Mfc1Valve;
        private readonly IoValve _Mfc2Valve;
        private readonly IoValve _Mfc3Valve;
        private readonly IoValve _Mfc4Valve;
        private readonly IoValve _Mfc5Valve;
        private readonly IoValve _Mfc6Valve;
        private readonly IoValve _Mfc7Valve;
        private readonly IoValve _Mfc8Valve;
        private readonly IoValve _PVHe1Valve;
        private readonly IoValve _PVHe2Valve;
        private readonly IoValve _GasFinalValve;
        private readonly IoValve _SoftPumpValve;
        private readonly IoValve _FastPumpValve;
        private readonly IoValve _TurboPumpPumpingValve;
        private readonly IoValve _TurboPumpPurgeValve;
        private readonly IoValve _GuageValve;
        private readonly IoValve _LoadlockVentValve;
        private readonly IoValve _LoadlockPumpingValve;
        private readonly IoValve _PVHe3Valve;
        private readonly IoValve _HeISOValve;



        private readonly IoSensor _ATM_sw;
        private readonly IoSensor _CDAPressure;
        private readonly IoSensor _ATM_Loadlock_sw;
        private readonly IoSensor _N2Pressure_sw;
        private readonly IoSensor _VAC_sw;
        private readonly IoSensor _WLK_sw;
        private readonly IoSensor _Water_Flow;
        private readonly IoSensor _RFG_Interlock;
        private readonly IoSensor _PM_Lid_Closed;
        private readonly IoSensor _Source_RF_Fan;
        private readonly IoSensor _PM_SlitDoor_Closed;
        private readonly IoSensor _TurboPumpInterlock;
        private readonly IoSensor _GasBoxDoor;
        private readonly IoSensor _GasBoxPressure;


        private readonly PumpBase _MainPump;
        private readonly ESC5HighVoltage _ESCHV;
        private readonly AdixenTurboPump _TurboPump;
        private readonly PendulumValve _pendulumValve;

        private readonly ChillerBase _Chiller;

        private readonly RfPowerBase _Generator;//srf=>AdTecGenerator
        private readonly RfPowerBase _GeneratorBias;//brf=>CometRF
        private readonly RfMatchBase _Match;
        private readonly RfMatchBase _BiasMatch;

        private readonly IoSignalTower _SignalTower;

        private readonly IoHeater _ForelineTC;
        private readonly IoHeater _WallTC;

        private readonly IoPressureControl _pressureController;

        private readonly IoGasStick[] _gasLines;
        private readonly IoGasStick _gasLineN2;
        private readonly IoBacksideHe _backsideHe;

        private readonly IoMfc _heMfc;

        private readonly double _foreline_interlock_pressure = 750;

        private Stopwatch _GasRFStopWatch = new Stopwatch();
        private bool _GasFlag = false;

        // 盖子的状态
        public override bool IsLidClosed => _Lid.OFFFeedback;
        public override bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback;

        public override bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;

        public override bool IsPumpRunning => _MainPump.IsRunning;
        public override bool IsTurboPumpRunning => _TurboPump.IsRunning;
        public override bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed;
        public override float TurboPumpSpeed => _TurboPump.Speed;
        public override bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;

        public override bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning;

        public override bool IsCDA_OK => _CDAPressure.Value;

        public override bool IsFastPumpOpened => _FastPumpValve.Status;
        public override bool IsSoftPumpOpened => _SoftPumpValve.Status;
        public override bool IsMfc1ValveOpened => _Mfc1Valve.Status;
        public override bool IsMfc2ValveOpened => _Mfc2Valve.Status;
        public override bool IsMfc3ValveOpened => _Mfc3Valve.Status;
        public override bool IsMfc4ValveOpened => _Mfc4Valve.Status;
        public override bool IsMfc5ValveOpened => _Mfc5Valve.Status;
        public override bool IsMfc6ValveOpened => _Mfc6Valve.Status;
        public override bool IsMfc7ValveOpened => _Mfc7Valve.Status;
        public override bool IsMfc8ValveOpened => _Mfc8Valve.Status;

        public override bool IsGuageValveOpened => _GuageValve.Status;

        // 压力信号
        public override bool IsATM => _ATM_sw.Value;

        public override bool PVN22ValveIsOpen => _PVN22Valve.Status;
        public override bool LiftPinIsDown => _LiftPin.OFFFeedback;
        public override bool LiftPinIsUp => _LiftPin.ONFeedback;

        public override bool IsATMLoadlock => _ATM_Loadlock_sw.Value;
        public override bool IsVACLoadLock => LoadlockPressure <= 1000;
        public override bool IsVAC => _VAC_sw.Value;
        public override bool IsWaterFlowOk => _Water_Flow.Value;
        public override bool IsWLK => _WLK_sw.Value;
        public override bool IsRFGInterlockOn => _RFG_Interlock.Value;

        public override bool PMLidClosed => _PM_Lid_Closed.Value;
        public override bool TurboPumpInterlock => _TurboPumpInterlock.Value;
        public override bool SourceRFFanInterlock => _Source_RF_Fan.Value;
        public override bool SlitDoorClosed => _PM_SlitDoor_Closed.Value;

        //public override double ProcessLowPressure => _pressureController.ProcessLow.Value;
        //public override double ProcessHighPressure => _pressureController.ProcessHigh.Value;
        public override double CalculationPressure
        {
            get
            {
                if (ProcessPressure < 100)
                {
                    return ProcessPressure;
                }
                else
                {
                    return ChamberPressure;
                }
            }
        }
        public override double ProcessPressure => _pressureController.ProcessGauge.Value;
        public override double ChamberPressure => _pressureController.PressureGauge.Value;
        public override double ForelinePressure => _pressureController.ForelineGauge.Value;
        public override double TargetPressure => _pressureController.TargetPressure;
        public override double LoadlockPressure => _pressureController.LoadLockGauge.Value;
        public override double ESCHePressure => _pressureController.ESCHeGauge.Value;

        public override int ESCOutputVoltage => _ESCHV.OutputVoltage;
        public override double ESCPositiveOutputCurrent => _ESCHV.PositiveOutputCurrent;

        public override double ESCNegativeOutputCurrent => _ESCHV.NegativeOutputCurrent;

        public override bool IsHVOn => _ESCHV.IsOn;

        public override float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback;
        public override float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback;

        public override bool ChillerIsRunning => _Chiller.IsRunning;

        //Loadlock_Arm
        public override bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback;
        public override bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback;
        //Loadlock_Arm DO
        public override bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint;
        public override bool LoadlockArmExtend => _LoadLockArm.ONSetPoint;

        public override float ReflectPower => _Generator.ReflectPower;
        public override float BiasReflectPower => _GeneratorBias.ReflectPower;

        public override float ForwardPower => _Generator.ForwardPower;
        public override float BiasForwardPower => _GeneratorBias.ForwardPower;


        public override bool BackSideHeOutOfRange => _backsideHe.OutOfRange;
        public override float RFMatchC1 => _Match != null ? _Match.TunePosition1 : 0;
        public override float RFMatchC2 => _Match != null ? _Match.TunePosition2 : 0;
        public override float BiasRFMatchC1 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0;
        public override float BiasRFMatchC2 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0;
        public override double MFC1FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas1").FeedBack;
        public override double MFC2FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas2").FeedBack;
        public override double MFC3FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas3").FeedBack;
        public override double MFC4FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas4").FeedBack;
        public override double MFC5FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas5").FeedBack;
        public override double MFC6FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas6").FeedBack;
        public override double MFC7FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas7").FeedBack;
        public override double MFC8FeedBack => DEVICE.GetDevice<IoMfc>($"{Module}.MfcGas8").FeedBack;

        public new ModuleName Module { get; }

        public override MovementPosition LiftPinPosition
        {
            get
            {
                MovementPosition pos = MovementPosition.Unknown;
                if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Up;
                }
                else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
                {
                    pos = MovementPosition.Down;
                }
                return pos;
            }
        }

        public override bool CheckAtm()
        {
            return _ATM_sw.Value && ChamberPressure > 700000;
        }
        public override bool CheckSlitDoorOpen()
        {
            return _slitDoor.State == CylinderState.Open;
        }

        public override bool CheckSlitDoorClose()
        {
            return _slitDoor.State == CylinderState.Close;
        }

        public override bool CheckLiftUp()
        {
            return _LiftPin.State == CylinderState.Open;
        }

        public override bool CheckLiftDown()
        {
            return _LiftPin.State == CylinderState.Close;
        }
        public override double TotalGasSetpoint
        {
            get
            {
                double sum = 0;
                foreach (var gas in _gasLines)
                {
                    sum += gas.FlowSP;
                }
                return sum;
            }
        }

        public override bool HasGasOutOfRange
        {
            get
            {
                foreach (var gas in _gasLines)
                {
                    if (!gas.IsOutOfRange)
                        return false;
                }
                return true;
            }
        }
        public override bool PendulumValveIsOpen()
        {
            return _pendulumValve.IsOpen;
        }

        #region 构造函数
        public JetVenusPM(ModuleName moduleName) : base(moduleName)
        {
            Module = moduleName;
            _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
            _LidLoadlock = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.LidLoadlock}");

            _slitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.SlitDoor}");
            _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
            _LoadLockArm = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LoadLockArm}");

            _PVN21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN21}");
            _PVN22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN22}");
            _PV11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV11}");
            _PV12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV12}");
            _PV21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV21}");
            _PV22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV22}");
            _PV31Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV31}");
            _PV32Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV32}");
            _PV41Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV41}");
            _PV42Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV42}");
            _N2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveN2}");
            _Mfc1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc1}");
            _Mfc2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
            _Mfc3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc3}");
            _Mfc4Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc4}");
            _Mfc5Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc5}");
            _Mfc6Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc6}");
            _Mfc7Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc7}");
            _Mfc8Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc8}");
            _PVHe1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe1}");
            _PVHe2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe2}");
            _GasFinalValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGasFinal}");
            _SoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSoftPump}");
            _FastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveFastPump}");
            _TurboPumpPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPumping}");
            _TurboPumpPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPurge}");
            _GuageValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGuage}");
            _LoadlockVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockVent}");
            _LoadlockPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockPumping}");
            _PVHe3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe3}");
            _HeISOValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveHeISO}");

            _heMfc = DEVICE.GetDevice<IoMfc>($"{Module}.MfcHe");
            _ATM_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
            _ATM_Loadlock_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorLoadlockATMSwitch");
            _N2Pressure_sw = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
            _VAC_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
            _Water_Flow = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterFlowOk");
            _WLK_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
            _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _RFG_Interlock = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");

            _PM_Lid_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorPMLidClosed");
            _Source_RF_Fan = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSourceRFFan");
            _PM_SlitDoor_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSlitDoorClosed");
            _TurboPumpInterlock = DEVICE.GetDevice<IoSensor>($"{Module}.TurboPumpInterlock");
            _GasBoxDoor = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxDoorSW");
            _GasBoxPressure = DEVICE.GetDevice<IoSensor>($"{Module}.GasBoxPressureSW");


            _ForelineTC = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
            _WallTC = DEVICE.GetDevice<IoHeater>($"{Module}.WallHeater");


            _SignalTower = DEVICE.GetDevice<IoSignalTower>($"{Module}.SignalTower");

            _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
            _pressureController = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VenusDevice.PressureControl}");

            _gasLines = new IoGasStick[8];
            for (int index = 0; index < 8; index++)
            {
                _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
            }

            _gasLineN2 = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickN2");
            _backsideHe = DEVICE.GetDevice<IoBacksideHe>($"{Module}.BacksideHelium");

            _MainPump = DEVICE.GetDevice<PumpBase>($"{Module}.{VenusDevice.MainPump}");
            // RS232 Dry pump, SKY
            if (SC.GetValue<int>($"{Module}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.SKY)
                {
                    _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
                }
                else if (SC.GetValue<int>($"{Module}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
                {
                    _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
                }
            }

            _ESCHV = DEVICE.GetDevice<ESC5HighVoltage>($"{Module}.{VenusDevice.ESCHV}");
            _TurboPump = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
            _pendulumValve = DEVICE.GetDevice<PendulumValve>($"{Module}.{VenusDevice.PendulumValve}");

            if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller") &&
                SC.GetValue<int>($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
            {
                if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC)
                {
                    _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
                }
                else if (SC.GetValue<int>($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
                {
                    _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
                }
            }


            // RS223 AdTec Generator
            if (SC.GetValue<int>($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{Module}.Rf.MFG") == (int)GeneratorMFG.AdTec)
            {
                _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.Rf}");
            }

            // Ethernet Comet Generator Bias
            if (SC.GetValue<bool>($"{Module}.BiasRf.EnableBiasRF"))
            {
                if (SC.GetValue<int>($"{Module}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
                    SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
                {
                    _GeneratorBias = DEVICE.GetDevice<CometRF>($"{Module}.{VenusDevice.BiasRf}");
                }
                else if (SC.GetValue<int>($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.AdTec)
                {
                    _GeneratorBias = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.BiasRf}");
                }
            }


            if (SC.GetValue<int>($"{Module}.Match.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{Module}.Match.MFG") == (int)MatchMFG.AdTec)
            {
                _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.Match}");
            }
            else if (SC.GetValue<int>($"{Module}.Match.CommunicationType") == (int)CommunicationType.Ethernet &&
                SC.GetValue<int>($"{Module}.Match.MFG") == (int)MatchMFG.Revtech)
            {
                _Match = DEVICE.GetDevice<RevtechMatch>($"{Module}.{VenusDevice.BiasMatch}");
            }


            if (SC.GetValue<bool>($"{Module}.BiasMatch.EnableBiasMatch") &&
                SC.GetValue<int>($"{Module}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 &&
                SC.GetValue<int>($"{Module}.BiasMatch.MFG") == (int)MatchMFG.AdTec)
            {
                _BiasMatch = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.BiasMatch}");
            }
            else if (SC.GetValue<bool>($"{Module}.BiasMatch.EnableBiasMatch") &&
                SC.GetValue<int>($"{Module}.BiasMatch.MFG") == (int)MatchMFG.Revtech)
            {
                _BiasMatch = DEVICE.GetDevice<RevtechMatch>($"{Module}.{VenusDevice.BiasMatch}");
            }


            _foreline_interlock_pressure = SC.GetValue<double>($"{Module}.ForelineInterlockPressure");

        }

        #endregion

        public async override void CloseValves(int? delayTime = null)
        {
            _PVN21Valve.TurnValve(false, out _);
            // _PVN22Valve.TurnValve(false, out _);
            _PV11Valve.TurnValve(false, out _);
            _PV12Valve.TurnValve(false, out _);
            _PV21Valve.TurnValve(false, out _);
            _PV22Valve.TurnValve(false, out _);
            _PV31Valve.TurnValve(false, out _);
            _PV32Valve.TurnValve(false, out _);
            _PV41Valve.TurnValve(false, out _);
            _PV42Valve.TurnValve(false, out _);

            _PVHe1Valve.TurnValve(false, out _);
            _PVHe2Valve.TurnValve(false, out _);
            _SoftPumpValve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);
            _TurboPumpPumpingValve.TurnValve(false, out _);
            _TurboPumpPurgeValve.TurnValve(false, out _);
            _GuageValve.TurnValve(false, out _);
            _LoadlockVentValve.TurnValve(false, out _);
            _LoadlockPumpingValve.TurnValve(false, out _);

            _N2Valve.TurnValve(false, out _);
            _FastPumpValve.TurnValve(false, out _);

            _Mfc1Valve.TurnValve(false, out _);
            _Mfc2Valve.TurnValve(false, out _);
            _Mfc3Valve.TurnValve(false, out _);
            _Mfc4Valve.TurnValve(false, out _);
            _Mfc5Valve.TurnValve(false, out _);
            _Mfc6Valve.TurnValve(false, out _);
            _Mfc7Valve.TurnValve(false, out _);
            _Mfc8Valve.TurnValve(false, out _);
            _PVHe3Valve.TurnValve(false, out _);
            _HeISOValve.TurnValve(false, out _);
            foreach (var stick in _gasLines)
            {
                stick.Stop();
            }

            if (delayTime != null)
            {
                await Task.Delay((int)delayTime);
            }
            _GasFinalValve.TurnValve(false, out _);

           
        }

        public override void TurnDryPump(bool on)
        {
            //_pressureController.StartPump(on);
            _MainPump?.SetPumpOnOff(on);
        }

        public override void TurnTurboPump(bool on)
        {
            _TurboPump?.SetPumpOnOff(on);
        }

        public override void OpenValve(ValveType vlvType, bool on)
        {
            switch (vlvType)
            {
                case ValveType.PVN21:
                    _PVN21Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVN22:
                    _PVN22Valve.TurnValve(on, out _);
                    LOG.Write(eEvent.EV_DEVICE_INFO, Module, $"{(on ? "打开" : "关闭")} 阀 {vlvType.ToString()}");

                    break;
                case ValveType.PV11:
                    _PV11Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV12:
                    _PV12Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV21:
                    _PV21Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV22:
                    _PV22Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV31:
                    _PV31Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV32:
                    _PV32Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV41:
                    _PV41Valve.TurnValve(on, out _);
                    break;
                case ValveType.PV42:
                    _PV42Valve.TurnValve(on, out _);
                    break;
                case ValveType.N2:
                    _N2Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVHe1:
                    _PVHe1Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVHe2:
                    _PVHe2Valve.TurnValve(on, out _);
                    break;
                case ValveType.GasFinal:
                    _GasFinalValve.TurnValve(on, out _);
                    break;
                case ValveType.SoftPump:
                    _SoftPumpValve.TurnValve(on, out _);
                    break;
                case ValveType.FastPump:
                    _FastPumpValve.TurnValve(on, out _);
                    break;
                case ValveType.TurboPumpPumping:
                    _TurboPumpPumpingValve.TurnValve(on, out _);
                    break;
                case ValveType.TurboPumpPurge:
                    _TurboPumpPurgeValve.TurnValve(on, out _);
                    break;
                case ValveType.Guage:
                    _GuageValve.TurnValve(on, out _);
                    break;
                case ValveType.LoadlockVent:
                    _LoadlockVentValve.TurnValve(on, out _);
                    break;
                case ValveType.LoadlockPumping:
                    _LoadlockPumpingValve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc1:
                    _Mfc1Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc2:
                    _Mfc2Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc3:
                    _Mfc3Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc4:
                    _Mfc4Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc5:
                    _Mfc5Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc6:
                    _Mfc6Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc7:
                    _Mfc7Valve.TurnValve(on, out _);
                    break;
                case ValveType.Mfc8:
                    _Mfc8Valve.TurnValve(on, out _);
                    break;
                case ValveType.PVHe3:
                    _PVHe3Valve.TurnValve(on, out _);
                    break;
                case ValveType.HeISO:
                    _HeISOValve.TurnValve(on, out _);
                    break;

                default:
                    throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");

            }
        }

        public override void Monitor()
        {
            foreach (var gas in _gasLines)
            {
                gas.Monitor();
            }

            CheckPermanentInterlock();
        }


        protected override void CheckPermanentInterlock()
        {
            if (ProcessPressure > 100 && _GuageValve.SetPoint)
            {
                _GuageValve.TurnValve(false, out _);
                LOG.Write(eEvent.ERR_DEVICE_INFO, Module, $"Process pressure:{ProcessPressure} exceed 100 mtorr, Guage Valve (DO-31) closed automaticlly.");
            }
        }

        public override void CheckIdleInterlock()
        {
            if (ForelinePressure > _foreline_interlock_pressure)
            {
                if (_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen)
                {
                    _pendulumValve.TurnValve(false);
                    _TurboPumpPurgeValve.TurnValve(false, out _);
                    _TurboPumpPumpingValve.TurnValve(false, out _);

                    LOG.Write(eEvent.ERR_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} mtorr, Pendulum valve & PV6 & PV7 closed automaticlly.");
                }
            }
        }

        public override void BuzzerBlinking(double time)
        {
            _SignalTower.BuzzerBlinking(time);
        }

        public override void SwitchOnBuzzerAndRed()
        {
            _SignalTower.SwitchOnBuzzerAndRed("", null);
        }

        public override void Home()
        {
            // 与yp讨论过，PM 初始化不需要

            SetLiftPin(MovementPosition.Down, out _);

            if (_slitDoor.State == CylinderState.Open)
            {
                SetSlitDoor(true, out _);
            }
            else
            {
                SetSlitDoor(false, out _);
            }

            SetSlitDoor(false, out _);
            //2023/03/08添加
            OpenValve(ValveType.PVN22, true);
            //2023/04/25临时添加
            //RetractWafer();


        }

        public override bool SetLiftPin(MovementPosition dirt, out string reason)
        {
            reason = string.Empty;

            switch (dirt)
            {
                case MovementPosition.Down:
                    return _LiftPin.SetCylinder(false, out reason);
                case MovementPosition.Up:
                    return _LiftPin.SetCylinder(true, out reason);
                case MovementPosition.Left:
                case MovementPosition.Right:
                case MovementPosition.Middle:
                    throw new ArgumentException("Movement argument error");
            }

            return true;
        }

        public override bool SetSlitDoor(bool open, out string reason)
        {
            //2023/09/05 Venus无TM，暂时注释
            //if (open)
            //{
            //    if (RouteManager.IsATMMode)
            //    {
            //        if (!IsATM)
            //        {
            //            reason = $"{Module} is not ATM, can not open slit door";
            //            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            //            return false;
            //        }

            //        if (!IsTMATM)
            //        {
            //            reason = $"LoadLock is not ATM, can not open slit door";
            //            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            //            return false;
            //        }
            //    }
            //    else
            //    {

            //        double maxPressureDifference = SC.GetValue<double>("System.PMTMMaxPressureDifference");
            //        if (Math.Abs(TMPressure - ChamberPressure) > maxPressureDifference)
            //        {
            //            reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{ChamberPressure}";
            //            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            //            return false;
            //        }
            //    }

            //}

            return _slitDoor.SetCylinder(open, out reason);
        }

        public override bool RetractWafer()
        {
            return _LoadLockArm.SetCylinder(false, out _);
        }

        public override bool ExtendWafer()
        {
            return _LoadLockArm.SetCylinder(true, out _);
        }
        public override bool FlowGas(int gasNum, double val)
        {
            if (_gasLines.Length <= gasNum)
                return false;


            _gasLines[gasNum].Flow(val);
            return true;
        }

        public override bool StopGas(int gasNum)
        {
            if (_gasLines.Length <= gasNum)
                return false;

            _gasLines[gasNum].Stop();
            return true;
        }

        public override bool FlowN2(double val)
        {
            _gasLineN2.Flow(val);
            return true;
        }

        public override bool StopN2()
        {
            _gasLineN2.Stop();
            return true;
        }

        public override void StopAllGases()
        {
            foreach (var line in _gasLines)
            {
                line.Stop();
            }
        }

        public override bool TurnPendulumValve(bool on)
        {
            return _pendulumValve.TurnValve(on);
        }

        public override bool SetPVPressure(float pressure)
        {
            return _pendulumValve.SetPressure(pressure);
        }

        public override bool SetPVPostion(int position)
        {
            return _pendulumValve.SetPosition(position);
        }

        public override int GetPVPosition()
        {
            return _pendulumValve.Position;
        }

        public override async void HeatChiller(ChillerType chillerType, double value, double offset)
        {
            //_Chiller?.SetChillerTemp((float)value, (float)offset);
            //await Task.Delay(1000);
            //_Chiller?.SetChillerOnOff(true);
            if (!ChillerIsRunning)
            {
                _Chiller?.SetChillerOnOff(true);
                await Task.Delay(1000);
            }
            _Chiller?.SetChillerTemp((float)value, (float)offset);
        }

        public override void OnOffChiller(ChillerType chillerType, bool onoff)
        {
            _Chiller?.SetChillerOnOff(onoff);
        }

        public override bool CheckChillerStatus()
        {
            return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError;
        }


        public override void SetGeneratorCommunicationMode(int mode)
        {
            _Generator?.SetCommunicationMode(mode);
        }

        public override bool GeneratorPowerOn(bool on)
        {
            if (_Generator == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足");
                return false;
            }

            return _Generator.SetPowerOnOff(on, out _);
        }

        public override bool GeneratorSetpower(float val)
        {
            if (_Generator == null) return false;

            if (Math.Abs(val) > 0.01)
                _Generator.SetPower((ushort)val);
            return true;
        }

        public override bool GeneratorBiasPowerOn(bool on)
        {
            if (_GeneratorBias == null) return false;

            if (on && !IsRFGInterlockOn)
            {
                LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足");
                return false;
            }

            return _GeneratorBias.SetPowerOnOff(on, out _);
        }

        public override bool GeneratorBiasSetpower(float val)
        {
            if (_GeneratorBias == null) return false;

            if (Math.Abs(val) > 0.01)
                _GeneratorBias.SetPower((ushort)val);
            return true;
        }

        public override bool OnOffSetESCHV(bool val)
        {
            _ESCHV?.SetPowerOnOff(val);
            return true;
        }

        public override bool SetWallTCTemperature(float value)
        {
            return _WallTC.RampTemp(value);
        }
        public override bool GeneratorBiasSetMatchMode(bool val)
        {
            if (_GeneratorBias == null) return false;
            string reason = string.Empty;
            _GeneratorBias.SetMatchingAutoMode(val, out reason);
            return true;
        }

        public override bool SetMatchPosition(float c1, float c2)
        {
            if (_Match == null) return false;
            string reason = string.Empty;
            _Match.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public override bool SetBiasMatchPosition(float c1, float c2)
        {
            if (_BiasMatch == null) return false;
            string reason = string.Empty;
            _BiasMatch.SetMatchPosition(c1, c2, out reason);
            return true;
        }

        public override bool SetMatchWorkMode(MatchWorkMode matchWorkMode)
        {
            if (_Match == null) return false;
            if (matchWorkMode == MatchWorkMode.Auto)
            {
                return _Match.SetMatchMode(EnumRfMatchTuneMode.Auto, out _);
            }
            else
            {
                return _Match.SetMatchMode(EnumRfMatchTuneMode.Manual, out _);
            }
        }

        public override bool SetBiasMatchWorkMode(MatchWorkMode matchWorkMode)
        {
            if (_BiasMatch == null) return false;
            if (matchWorkMode == MatchWorkMode.Auto)
            {
                return _BiasMatch.SetMatchMode(EnumRfMatchTuneMode.Auto, out _);
            }
            else
            {
                return _BiasMatch.SetMatchMode(EnumRfMatchTuneMode.Manual, out _);
            }
        }
        public override bool SetBiasPulseMode(bool on)
        {
            if (_GeneratorBias == null) return false;
            _GeneratorBias.SetPulseMode(on);
            return true;
        }
        public override bool SetBiasPulseRateFreq(int nFreq)
        {
            if (_GeneratorBias == null) return false;
            _GeneratorBias.SetPulseRateFreq(nFreq);
            return true;
        }

        public override bool SetDiasPulseDutyCycle(int percentage)
        {
            if (_GeneratorBias == null) return false;
            _GeneratorBias.SetPulseDutyCycle(percentage);
            return true;
        }

        public override bool SetESCClampVoltage(int nVoltage)
        {
            if (_ESCHV == null) return false;

            return _ESCHV.SetOutputVoltage(nVoltage);
        }

        public override bool CheckGeneratorAndHVInterlock(VenusDevice device)
        {
            eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV;
            if (!PMLidClosed)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as PM Lid is Open.");
                return false;
            }

            if (!IsVAC)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as PM is not Vacuum.");
                return false;
            }

            if (!IsWaterFlowOk)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF.");
                return false;
            }

            if (!IsRFGInterlockOn)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF.");
                return false;
            }

            if (!SourceRFFanInterlock)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Source RF Fan is OFF.");
                return false;
            }

            if (!SlitDoorClosed)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Slit Door is open.");
                return false;
            }

            if ((device == VenusDevice.ESCHV || device == VenusDevice.BiasRf) && WaferManager.Instance.CheckNoWafer(Module, 0))
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as {Module} has no wafer");
                return false;
            }

            return true;
        }

        public override void SetBacksideHeFlow(double flow)
        {
            if (_backsideHe == null) return;
            _backsideHe.Flow(flow);
        }

        public override bool SetBacksideHePressure(float mTorr)
        {
            if (_backsideHe == null) return false;
            return _backsideHe.SetBacksideHelium(mTorr);
        }

        public override bool SetBacksideHeThreshold(int nMin, int nMax)
        {
            if (_backsideHe == null) return false;
            return _backsideHe.SetFlowThreshold(nMin, nMax);
        }
        public override bool PreparePlace()
        {
            if (!SetSlitDoor(true, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Open failed:{reason}");
                return false;
            }
            if (!SetLiftPin(MovementPosition.Down, out reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin down failed:{reason}");
                return false;
            }
            return true;
        }
        public override bool PreparePick()
        {
            if (!SetSlitDoor(true, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Open failed:{reason}");
                return false;
            }
            if (!SetLiftPin(MovementPosition.Up, out reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Up failed:{reason}");
                return false;
            }
            return true;
        }
        public override bool PreparePlaceIsOK()
        {
            return CheckSlitDoorOpen() && LiftPinIsDown;
        }
        public override bool PreparePickIsOK()
        {
            return CheckSlitDoorOpen() && LiftPinIsUp;
        }
        public override bool EndPlace()
        {
            if (!SetLiftPin(MovementPosition.Down, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Down failed:{reason}");
                return false;
            }

            if (!SetSlitDoor(false, out reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}");
                return false;
            }

            return true;
        }

        public override bool EndPick()
        {
            if (!SetSlitDoor(false, out string reason))
            {
                LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}");
                return false;
            }
            return true;
        }
        public override bool EndPlaceIsOK()
        {
            return CheckSlitDoorClose() && LiftPinIsDown;
        }
        public override bool EndPickIsOK()
        {
            return CheckSlitDoorClose();
        }
        public override void RTCloseEvent()
        {
            if (_Generator.IsPowerOn)
            {
                GeneratorPowerOn(false);
            }
            if (_GeneratorBias.IsPowerOn)
            {
                GeneratorBiasPowerOn(false);
            }
            if (PendulumValveIsOpen())
            {
                TurnPendulumValve(false);
            }
        }
        public override bool RFInterlock(VenusDevice device)
        {
            eEvent evt = eEvent.ERR_RF;

            if (!IsWaterFlowOk)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF.");
                return false;
            }

            if (!IsRFGInterlockOn)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF.");
                return false;
            }

            if (!SourceRFFanInterlock)
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Source RF Fan is OFF.");
                return false;
            }
            if (GasIsOff())
            {
                LOG.Write(evt, Module, $"Cannot Power ON {device} as Gas is OFF.");
                return false;
            }
            return true;
        }
        private bool GasIsOff()
        {
            if (IsMfc1ValveOpened == false && IsMfc2ValveOpened == false && IsMfc3ValveOpened == false && IsMfc4ValveOpened == false && IsMfc5ValveOpened == false && IsMfc6ValveOpened == false && IsMfc7ValveOpened == false && IsMfc8ValveOpened == false)
            {
                if (_GasRFStopWatch.IsRunning == false)
                {
                    _GasRFStopWatch.Start();
                }
                if (_GasRFStopWatch.ElapsedMilliseconds > 1000)
                {
                    _GasRFStopWatch.Reset();
                    _GasFlag = true;
                    return true;
                }
            }
            else
            {
                _GasRFStopWatch.Reset();
                _GasFlag = false;
            }
            return false;
        }
    }
}