SimulatorSystem.cs 104 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  156. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  157. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  158. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  159. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  160. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  161. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  172. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  190. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. //// pressure
  206. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  207. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  209. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  210. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  211. //// Temperature
  212. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  213. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  214. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  215. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  216. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  217. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  218. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  219. // Datetime
  220. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  221. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  222. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  223. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  224. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  225. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  226. break;
  227. case JetChamber.Kepler2300:
  228. // chamber
  229. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  230. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  231. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  232. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  233. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  234. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  235. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  236. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  237. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  238. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  239. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  240. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  241. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  242. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  244. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  245. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  246. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  248. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  249. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  250. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  252. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  253. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  254. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  264. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  268. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  271. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  272. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  273. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  274. //// pressure
  275. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  276. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  277. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  278. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  279. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  280. //// Temperature
  281. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  282. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  283. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  284. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  285. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  286. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  287. // Datetime
  288. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  289. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  290. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  291. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  292. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  293. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  294. break;
  295. case JetChamber.Kepler2200A:
  296. case JetChamber.Kepler2200B:
  297. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  298. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  299. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  300. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  301. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  302. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  303. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  304. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  305. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  306. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  307. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  308. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  309. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  310. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  318. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  319. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  320. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  321. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  322. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  323. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  324. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  325. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  326. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  327. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  328. //// pressure
  329. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  330. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  331. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  332. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  333. //// Temperature
  334. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  335. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  336. // Datetime
  337. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  338. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  339. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  340. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  341. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  342. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  343. break;
  344. }
  345. }
  346. private void SetTMDefaultValue()
  347. {
  348. ModuleName mod = ModuleName.TM;
  349. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  351. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  354. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  355. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  356. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  357. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  358. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  359. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  360. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  361. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  362. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  363. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  364. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  366. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  367. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  372. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  373. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  374. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  375. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  376. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  377. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  378. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  381. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  382. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  383. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  385. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  386. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  387. // Datetime
  388. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  389. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  390. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  391. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  392. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  393. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  394. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  395. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  396. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  397. {
  398. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  399. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  400. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  401. }
  402. else
  403. {
  404. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  405. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  406. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  407. }
  408. }
  409. private void SetSETMDefaultValue()
  410. {
  411. ModuleName mod = ModuleName.SETM;
  412. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  413. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  414. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  415. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  418. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  419. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  420. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  421. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  422. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  423. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  424. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  425. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  426. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  427. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  428. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  429. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  430. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  431. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  432. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  433. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  434. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  435. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  436. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  437. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  438. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  439. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  440. SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
  441. SetAiValue($"{mod}.AI_VCE_Pipeline_Vacuum_Gauge", 3000);
  442. SetAiValue($"{mod}.AI_TM_Pipeline_Vacuum_Gauge", 3000);
  443. SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
  444. }
  445. private bool OnMonitor()
  446. {
  447. try
  448. {
  449. foreach (var item in jetChambers)
  450. {
  451. switch (item.Value)
  452. {
  453. case JetChamber.Venus:
  454. MonitorSlitDoor(item.Key);
  455. MonitorPin(item.Key);
  456. MonitorPressure(item.Key);
  457. MonitorExtendAndRetract(item.Key);
  458. MonitorGas(item.Key);
  459. this.SimulateHe(item.Key);
  460. //MonitorRF(item.Key);
  461. ChangeTime(item.Key);
  462. //MonitorIOPumpCtrl(item.Key);
  463. break;
  464. case JetChamber.Kepler2300:
  465. MonitorSlitDoor(item.Key);
  466. MonitorPin(item.Key);
  467. MonitorPressure_Kepler(item.Key);
  468. //MonitorTemperature(item.Key);
  469. MonitorGas(item.Key);
  470. this.SimulateHe(item.Key);
  471. //MonitorRF(item.Key);
  472. ChangeTime(item.Key);
  473. //MonitorIOPumpCtrl(item.Key);
  474. MonitorLid(item.Key);
  475. break;
  476. case JetChamber.Kepler2200A:
  477. case JetChamber.Kepler2200B:
  478. MonitorSlitDoor(item.Key);
  479. MonitorPressure_Kepler2200A(item.Key);
  480. //MonitorTemperature(item.Key);
  481. MonitorGas(item.Key);
  482. // MonitorRF(item.Key);
  483. ChangeTime(item.Key);
  484. //MonitorIOPumpCtrl(item.Key);
  485. MonitorLid(item.Key);
  486. MonitorIOHighTemperatureHeater(item.Key);
  487. break;
  488. case JetChamber.VenusSE:
  489. MonitorPin(item.Key);
  490. //MonitorVenuSESlitDoor(item.Key);
  491. MonitorSEPressure(item.Key);
  492. MonitorSEGas(item.Key);
  493. break;
  494. }
  495. }
  496. ChangeTime(ModuleName.TM);
  497. MonitorMFSlitDoor();
  498. MonitorSEMFSlitDoor();
  499. MonitorMFPressure();
  500. MonitorSEMFPressure();
  501. }
  502. catch (Exception e)
  503. {
  504. LOG.WriteExeption(e);
  505. }
  506. return true;
  507. }
  508. private void ChangeTime(ModuleName mod)
  509. {
  510. // Heartbeat with PLC
  511. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  512. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  513. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  514. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  515. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  516. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  517. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  518. }
  519. //void MonitorVenuSESlitDoor(ModuleName mod)
  520. //{
  521. //}
  522. void MonitorSlitDoor(ModuleName mod)
  523. {
  524. // slit door open
  525. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  526. {
  527. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  528. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  529. }
  530. // slit door close
  531. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  532. {
  533. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  534. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  535. }
  536. }
  537. void MonitorMFSlitDoor()
  538. {
  539. ModuleName mod = ModuleName.TM;
  540. // LLA T door open
  541. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  542. {
  543. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  544. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  545. }
  546. // LLB T door open
  547. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  548. {
  549. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  550. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  551. }
  552. // LLA E door open
  553. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  554. {
  555. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  556. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  557. }
  558. // LLB E door open
  559. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  560. {
  561. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  562. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  563. }
  564. // LLA T door close
  565. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  566. {
  567. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  568. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  569. }
  570. // LLB T door close
  571. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  572. {
  573. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  574. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  575. }
  576. // LLA E door close
  577. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  578. {
  579. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  580. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  581. }
  582. // LLB E door close
  583. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  584. {
  585. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  586. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  587. }
  588. }
  589. void MonitorSEMFSlitDoor()
  590. {
  591. ModuleName mod = ModuleName.SETM;
  592. // VCE T door open
  593. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  594. {
  595. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  596. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  597. }
  598. // VCE T door Close
  599. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  600. {
  601. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  602. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  603. }
  604. //pma
  605. if (IO.DO[$"{mod}.DO_TM_PMA_OP"].Value)
  606. {
  607. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
  608. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = false;
  609. }
  610. if (IO.DO[$"{mod}.DO_TM_PMA_CL"].Value)
  611. {
  612. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  613. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  614. }
  615. //pmb
  616. if (IO.DO[$"{mod}.DO_TM_PMB_OP"].Value)
  617. {
  618. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
  619. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = false;
  620. }
  621. if (IO.DO[$"{mod}.DO_TM_PMB_CL"].Value)
  622. {
  623. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  624. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  625. }
  626. //pmc
  627. if (IO.DO[$"{mod}.DO_TM_PMC_OP"].Value)
  628. {
  629. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
  630. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = false;
  631. }
  632. if (IO.DO[$"{mod}.DO_TM_PMC_CL"].Value)
  633. {
  634. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  635. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  636. }
  637. //pmd
  638. if (IO.DO[$"{mod}.DO_TM_PMD_OP"].Value)
  639. {
  640. IO.DI[$"{mod}.DI_TM_PMD_OPS"].Value = true;
  641. IO.DI[$"{mod}.DI_TM_PMD_CLS"].Value = false;
  642. }
  643. if (IO.DO[$"{mod}.DO_TM_PMD_CL"].Value)
  644. {
  645. IO.DI[$"{mod}.DI_TM_PMD_OPS"].Value = false;
  646. IO.DI[$"{mod}.DI_TM_PMD_CLS"].Value = true;
  647. }
  648. }
  649. void MonitorPin(ModuleName mod)
  650. {
  651. // lift pin up
  652. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  653. {
  654. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  655. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  656. }
  657. }
  658. void MonitorLid(ModuleName mod)
  659. {
  660. // lift pin up
  661. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  662. {
  663. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  664. }
  665. }
  666. void MonitorExtendAndRetract(ModuleName mod)
  667. {
  668. // Extend
  669. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  670. if (_trigLLExtend.Q)
  671. {
  672. _trigLLRetract.RST = true;
  673. Thread.Sleep(500);
  674. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  675. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  676. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  677. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  678. }
  679. // Retract
  680. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  681. if (_trigLLRetract.Q)
  682. {
  683. count++;
  684. _trigLLExtend.RST = true;
  685. Thread.Sleep(500);
  686. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  687. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  688. if (count == 1)
  689. {
  690. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  691. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  692. }
  693. else if (count == 2)
  694. {
  695. count = 0;
  696. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  697. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  698. }
  699. }
  700. }
  701. void MonitorPressure(ModuleName mod)
  702. {
  703. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  704. // Loadlock pressure
  705. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  706. // Foreline
  707. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  708. {
  709. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  710. }
  711. else
  712. {
  713. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  714. }
  715. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  716. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  717. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  718. //float chamber_pressure = GetMockChamberPressure(mod);
  719. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  720. // soft pump & fast pump
  721. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  722. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  723. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  724. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  725. {
  726. //任意泵打开
  727. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  728. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  729. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  730. {//开双泵
  731. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  732. {
  733. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  734. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  735. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  736. }
  737. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  738. {
  739. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  740. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  741. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  742. }
  743. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  744. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  745. }
  746. else if (fast_pump_vlv.Value)//开
  747. {
  748. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  749. {
  750. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  751. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  752. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  753. }
  754. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  755. {
  756. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  757. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  758. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  759. }
  760. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  761. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  762. }
  763. else if (soft_pump_vlv.Value)
  764. {
  765. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  766. {
  767. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  768. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  769. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  770. }
  771. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  772. {
  773. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  774. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  775. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  776. }
  777. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  778. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  779. }
  780. else if (turbo_pump_vlv.Value)
  781. {
  782. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  783. if ((getAiValue_ChamberPressure - 500) >= 0)
  784. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  785. else
  786. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  787. if ((getAiValue_ProcessPressure - 500) >= 0)
  788. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  789. else
  790. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  791. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  792. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  793. }
  794. }
  795. // fast vent & purge
  796. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  797. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  798. //if (vent_vlv.Value || purge_vlv.Value)
  799. //{
  800. // if (vent_vlv.Value && purge_vlv.Value)
  801. // {
  802. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  803. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  804. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  805. // {
  806. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  807. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  808. // }
  809. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  810. // {
  811. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  812. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  813. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  814. // }
  815. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  816. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  817. // }
  818. // else
  819. //
  820. if (vent_vlv.Value)
  821. {
  822. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  823. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  824. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  825. {
  826. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  827. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  828. }
  829. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  830. {
  831. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  832. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  833. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  834. }
  835. else
  836. {
  837. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  838. }
  839. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  840. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  841. }
  842. // Loadlock Pumping Valve
  843. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  844. if (Loadlock_pump_vlv.Value)
  845. {
  846. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  847. }
  848. // Loadlock vent
  849. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  850. if (Loadlock_vent_vlv.Value)
  851. {
  852. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  853. }
  854. // 压力值越界,复位
  855. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  856. if (chamber_pressure1 > ATM_PRESSURE)
  857. {
  858. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  859. }
  860. else if (chamber_pressure1 < 20)
  861. {
  862. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  863. }
  864. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  865. if (process_pressure1 > PROCESS_GAUGE)
  866. {
  867. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  868. }
  869. else if (process_pressure1 < 20)
  870. {
  871. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  872. }
  873. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  874. if (foreline_pressure > 10000)
  875. {
  876. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  877. }
  878. else if (foreline_pressure < 150)
  879. {
  880. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  881. }
  882. // 模拟压力计漂移
  883. //int p1 = (int)GetMockChamberPressure(mod);
  884. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  885. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  886. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  887. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  888. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  889. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  890. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  891. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  892. // 根据当前压力值设定信号
  893. //float chamber_pressure2 = GetMockChamberPressure(mod);
  894. // ATM switch
  895. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  896. // VAC switch
  897. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  898. // Throttle valve
  899. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  900. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  901. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  902. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  903. // 压力值
  904. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  905. //{
  906. // short increase = (short)_rd.Next(20, 30);
  907. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  908. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  909. // {
  910. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  911. // }
  912. //}
  913. //else
  914. //{
  915. // short increase = (short)_rd.Next(20, 30);
  916. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  917. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  918. // {
  919. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  920. // }
  921. //}
  922. //// 位置值
  923. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  924. //{
  925. // short increase = (short)_rd.Next(20, 30);
  926. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  927. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  928. // {
  929. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  930. // }
  931. //}
  932. //else
  933. //{
  934. // short increase = (short)_rd.Next(20, 30);
  935. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  936. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  937. // {
  938. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  939. // }
  940. //}
  941. }
  942. void MonitorSEPressure(ModuleName mod)
  943. {
  944. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  945. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  946. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  947. // Foreline
  948. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  949. {
  950. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  951. }
  952. else
  953. {
  954. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  955. }
  956. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  957. // soft pump & fast pump
  958. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  959. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  960. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  961. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  962. {
  963. //任意泵打开
  964. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  965. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  966. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  967. {//开双泵
  968. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  969. {
  970. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  971. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  972. }
  973. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  974. {
  975. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  976. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  977. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  978. }
  979. }
  980. else if (fast_pump_vlv.Value)//开
  981. {
  982. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  983. {
  984. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  985. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  986. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  987. }
  988. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  989. {
  990. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  991. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  992. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  993. }
  994. }
  995. else if (soft_pump_vlv.Value)
  996. {
  997. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  998. {
  999. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1000. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1001. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1002. }
  1003. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1004. {
  1005. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1006. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1007. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1008. }
  1009. }
  1010. else if (turbo_pump_vlv.Value)
  1011. {
  1012. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1013. if ((getAiValue_ChamberPressure - 500) >= 0)
  1014. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1015. else
  1016. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1017. if ((getAiValue_ProcessPressure - 500) >= 0)
  1018. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1019. else
  1020. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1021. }
  1022. }
  1023. // fast vent & purge
  1024. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1025. if (vent_vlv.Value)
  1026. {
  1027. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1028. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1029. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1030. {
  1031. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1032. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1033. }
  1034. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1035. {
  1036. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1037. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1038. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1039. }
  1040. else
  1041. {
  1042. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1043. }
  1044. }
  1045. // Loadlock Pumping Valve
  1046. // 压力值越界,复位
  1047. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1048. if (chamber_pressure1 > ATM_PRESSURE)
  1049. {
  1050. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1051. }
  1052. else if (chamber_pressure1 < 20)
  1053. {
  1054. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1055. }
  1056. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1057. if (process_pressure1 > PROCESS_GAUGE)
  1058. {
  1059. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1060. }
  1061. else if (process_pressure1 < 20)
  1062. {
  1063. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1064. }
  1065. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1066. if (foreline_pressure > 10000)
  1067. {
  1068. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1069. }
  1070. else if (foreline_pressure < 150)
  1071. {
  1072. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1073. }
  1074. // ATM switch
  1075. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1076. // VAC switch
  1077. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1078. }
  1079. void MonitorPressure_Kepler(ModuleName mod)
  1080. {
  1081. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1082. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1083. {
  1084. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1085. }
  1086. else
  1087. {
  1088. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1089. }
  1090. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1091. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1092. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1093. //float chamber_pressure = GetMockChamberPressure(mod);
  1094. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1095. // soft pump & fast pump
  1096. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1097. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1098. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1099. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1100. {
  1101. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1102. {
  1103. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1104. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1105. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1106. {
  1107. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1108. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1109. }
  1110. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1111. {
  1112. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1113. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1114. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1115. }
  1116. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1117. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1118. }
  1119. else if (fast_pump_vlv.Value)
  1120. {
  1121. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1122. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1123. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1124. {
  1125. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  1126. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  1127. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1128. }
  1129. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1130. {
  1131. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1132. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1133. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1134. }
  1135. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1136. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1137. }
  1138. else if (soft_pump_vlv.Value)
  1139. {
  1140. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1141. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1142. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1143. {
  1144. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  1145. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  1146. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1147. }
  1148. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1149. {
  1150. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1151. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1152. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1153. }
  1154. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1155. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1156. }
  1157. else if (turbo_pump_vlv.Value)
  1158. {
  1159. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1160. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1161. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1162. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1163. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1164. }
  1165. }
  1166. // fast vent & purge
  1167. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1168. if (vent_vlv.Value)
  1169. {
  1170. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1171. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1172. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1173. {
  1174. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1175. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1176. }
  1177. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1178. {
  1179. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1180. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1181. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1182. }
  1183. else
  1184. {
  1185. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1186. }
  1187. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1188. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1189. }
  1190. // Loadlock Pumping Valve
  1191. // 压力值越界,复位
  1192. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1193. if (chamber_pressure1 > ATM_PRESSURE)
  1194. {
  1195. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1196. }
  1197. else if (chamber_pressure1 < 20)
  1198. {
  1199. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1200. }
  1201. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1202. if (process_pressure1 > PROCESS_GAUGE)
  1203. {
  1204. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1205. }
  1206. else if (process_pressure1 < 20)
  1207. {
  1208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1209. }
  1210. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1211. if (foreline_pressure > 10000)
  1212. {
  1213. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1214. }
  1215. else if (foreline_pressure < 150)
  1216. {
  1217. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1218. }
  1219. // ATM switch
  1220. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1221. // VAC switch
  1222. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1223. }
  1224. void MonitorPressure_Kepler2200A(ModuleName mod)
  1225. {
  1226. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1227. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1228. {
  1229. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1230. }
  1231. else
  1232. {
  1233. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1234. }
  1235. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1236. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1237. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1238. //float chamber_pressure = GetMockChamberPressure(mod);
  1239. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1240. // soft pump & fast pump
  1241. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1242. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1243. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1244. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1245. {
  1246. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1247. {
  1248. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1249. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1250. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1251. {
  1252. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1253. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1254. }
  1255. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1256. {
  1257. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1258. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1259. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1260. }
  1261. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1262. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1263. }
  1264. else if (fast_pump_vlv.Value)
  1265. {
  1266. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1267. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1268. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1269. {
  1270. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1271. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1272. }
  1273. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1274. {
  1275. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1276. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1277. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1278. }
  1279. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1280. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1281. }
  1282. else if (soft_pump_vlv.Value)
  1283. {
  1284. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1285. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1286. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1287. {
  1288. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1289. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1290. }
  1291. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1292. {
  1293. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1294. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1295. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1296. }
  1297. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1298. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1299. }
  1300. else if (turbo_pump_vlv.Value)
  1301. {
  1302. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1303. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1304. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1305. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1306. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1307. }
  1308. }
  1309. // fast vent & purge
  1310. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1311. if (vent_vlv.Value)
  1312. {
  1313. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1314. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1315. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1316. {
  1317. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1318. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1319. }
  1320. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1321. {
  1322. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1323. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1324. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1325. }
  1326. else
  1327. {
  1328. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1329. }
  1330. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1331. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1332. }
  1333. // Loadlock Pumping Valve
  1334. // 压力值越界,复位
  1335. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1336. if (chamber_pressure1 > ATM_PRESSURE)
  1337. {
  1338. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1339. }
  1340. else if (chamber_pressure1 < 20)
  1341. {
  1342. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1343. }
  1344. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1345. if (process_pressure1 > PROCESS_GAUGE)
  1346. {
  1347. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1348. }
  1349. else if (process_pressure1 < 20)
  1350. {
  1351. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1352. }
  1353. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1354. if (foreline_pressure > 10000)
  1355. {
  1356. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1357. }
  1358. else if (foreline_pressure < 150)
  1359. {
  1360. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1361. }
  1362. // ATM switch
  1363. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1364. // VAC switch
  1365. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1366. }
  1367. void MonitorSEMFPressure()
  1368. {
  1369. ModuleName mod = ModuleName.SETM;
  1370. string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
  1371. string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
  1372. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
  1373. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
  1374. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
  1375. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
  1376. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
  1377. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
  1378. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
  1379. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
  1380. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1381. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1382. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1383. {
  1384. if (getAiValue_TM_ChamberPressure > 10000)
  1385. {
  1386. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1387. }
  1388. else if (getAiValue_TM_ChamberPressure <= 10000)
  1389. {
  1390. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1391. }
  1392. }
  1393. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1394. {
  1395. if (getAiValue_TM_ChamberPressure > 10000)
  1396. {
  1397. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1398. }
  1399. else if (getAiValue_TM_ChamberPressure <= 10000)
  1400. {
  1401. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1402. }
  1403. }
  1404. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1405. {
  1406. if (getAiValue_VCE_ChamberPressure > 10000)
  1407. {
  1408. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1409. }
  1410. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1411. {
  1412. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1413. }
  1414. }
  1415. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1416. {
  1417. if (getAiValue_VCE_ChamberPressure > 10000)
  1418. {
  1419. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1420. }
  1421. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1422. {
  1423. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1424. }
  1425. }
  1426. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1427. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1428. {
  1429. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1430. }
  1431. else if (getAiValue_VCE_ChamberPressure < 20)
  1432. {
  1433. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1434. }
  1435. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1436. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1437. {
  1438. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1439. }
  1440. else if (getAiValue_TM_ChamberPressure < 20)
  1441. {
  1442. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1443. }
  1444. IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1445. // VAC switch
  1446. IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1447. }
  1448. void MonitorMFPressure()
  1449. {
  1450. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1451. //{
  1452. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1453. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1454. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1455. ModuleName mod = ModuleName.TM;
  1456. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1457. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1458. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1459. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1460. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1461. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1462. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1463. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1464. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1465. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1466. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1467. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1468. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1469. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1470. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1471. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1472. {
  1473. if (getAiValue_LLA_ChamberPressure > 10000)
  1474. {
  1475. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1476. }
  1477. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1478. {
  1479. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1480. }
  1481. }
  1482. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1483. {
  1484. if (getAiValue_LLB_ChamberPressure > 10000)
  1485. {
  1486. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1487. }
  1488. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1489. {
  1490. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1491. }
  1492. }
  1493. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1494. {
  1495. if (getAiValue_TM_ChamberPressure > 10000)
  1496. {
  1497. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1498. }
  1499. else if (getAiValue_TM_ChamberPressure <= 10000)
  1500. {
  1501. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1502. }
  1503. }
  1504. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1505. {
  1506. if (getAiValue_LLA_ChamberPressure > 10000)
  1507. {
  1508. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1509. }
  1510. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1511. {
  1512. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1513. }
  1514. }
  1515. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1516. {
  1517. if (getAiValue_LLB_ChamberPressure > 10000)
  1518. {
  1519. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1520. }
  1521. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1522. {
  1523. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1524. }
  1525. }
  1526. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1527. {
  1528. if (getAiValue_TM_ChamberPressure > 10000)
  1529. {
  1530. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1531. }
  1532. else if (getAiValue_TM_ChamberPressure <= 10000)
  1533. {
  1534. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1535. }
  1536. }
  1537. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1538. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1539. {
  1540. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1541. }
  1542. else if (getAiValue_LLA_ChamberPressure < 20)
  1543. {
  1544. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1545. }
  1546. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1547. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1548. {
  1549. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1550. }
  1551. else if (getAiValue_LLB_ChamberPressure < 20)
  1552. {
  1553. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1554. }
  1555. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1556. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1557. {
  1558. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1559. }
  1560. else if (getAiValue_TM_ChamberPressure < 20)
  1561. {
  1562. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1563. }
  1564. // ATM switch
  1565. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1566. // VAC switch
  1567. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1568. // ATM switch
  1569. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1570. // VAC switch
  1571. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1572. // ATM switch
  1573. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1574. // VAC switch
  1575. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1576. // }
  1577. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1578. //{
  1579. // ModuleName mod = ModuleName.TM;
  1580. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1581. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1582. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1583. //}
  1584. }
  1585. void SetAiValue(string name, float value)
  1586. {
  1587. byte[] flow = BitConverter.GetBytes(value);
  1588. short high1 = BitConverter.ToInt16(flow, 0);
  1589. short low1 = BitConverter.ToInt16(flow, 2);
  1590. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1591. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1592. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1593. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1594. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1595. }
  1596. float GetAiValue(string name)
  1597. {
  1598. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1599. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1600. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1601. return flow;
  1602. }
  1603. float GetAoValue(string name)
  1604. {
  1605. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1606. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1607. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1608. return flow;
  1609. }
  1610. void MonitorTemperature(ModuleName mod)
  1611. {
  1612. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1613. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1614. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1615. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1616. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1617. // 底座
  1618. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1619. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1620. //{
  1621. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1622. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1623. //}
  1624. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1625. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1626. //{
  1627. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1628. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1629. //}
  1630. // Foreline
  1631. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1632. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1633. {
  1634. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1635. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1636. }
  1637. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1638. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1639. {
  1640. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1641. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1642. }
  1643. // Wall
  1644. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1645. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1646. {
  1647. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1648. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1649. }
  1650. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1651. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1652. {
  1653. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1654. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1655. }
  1656. }
  1657. void MonitorGas(ModuleName mod)
  1658. {
  1659. // gas
  1660. this.SimulateMFC(mod, 1);
  1661. this.SimulateMFC(mod, 2);
  1662. this.SimulateMFC(mod, 3);
  1663. this.SimulateMFC(mod, 4);
  1664. this.SimulateMFC(mod, 5);
  1665. this.SimulateMFC(mod, 6);
  1666. this.SimulateMFC(mod, 7);
  1667. this.SimulateMFC(mod, 8);
  1668. this.SimulateN2(mod);
  1669. }
  1670. void MonitorSEGas(ModuleName mod)
  1671. {
  1672. SimulateMFC(mod, 1);
  1673. SimulateMFC(mod, 2);
  1674. SimulateMFC(mod, 3);
  1675. SimulateMFC(mod, 4);
  1676. SimulateMFC(mod, 5);
  1677. SimulateMFC(mod, 6);
  1678. SimulateMFC(mod, 7);
  1679. SimulateMFC(mod, 8);
  1680. SimulateMFC(mod, 9);
  1681. SimulateMFC(mod, 10);
  1682. SimulateMFC(mod, 11);
  1683. SimulateMFC(mod, 12);
  1684. }
  1685. private void SimulateMFC(ModuleName mod, byte gasNum)
  1686. {
  1687. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1688. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1689. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  1690. }
  1691. private void SimulateN2(ModuleName mod)
  1692. {
  1693. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1694. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1695. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  1696. }
  1697. private void SimulateHe(ModuleName mod)
  1698. {
  1699. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1700. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1701. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1702. }
  1703. void MonitorRF(ModuleName mod)
  1704. {
  1705. // RF generator
  1706. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1707. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1708. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1709. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1710. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1711. }
  1712. void MonitorIOPumpCtrl(ModuleName mod)
  1713. {
  1714. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1715. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1716. }
  1717. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1718. {
  1719. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1720. {
  1721. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1722. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1723. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1724. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1725. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1726. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1727. }
  1728. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1729. {
  1730. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1731. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1732. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1733. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1734. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1735. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1736. }
  1737. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1738. {
  1739. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1740. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1741. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1742. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1743. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1744. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1745. }
  1746. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  1747. {
  1748. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1749. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1750. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1751. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  1752. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1753. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1754. }
  1755. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  1756. {
  1757. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1758. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1759. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1760. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1761. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  1762. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1763. }
  1764. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1765. {
  1766. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1767. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1768. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1769. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1770. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1771. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1772. }
  1773. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  1774. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  1775. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1776. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1777. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  1778. }
  1779. public void Terminate()
  1780. {
  1781. _thread.Stop();
  1782. }
  1783. public void SetCoolantOutletTemp(string module, int Temp)
  1784. {
  1785. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1786. //{
  1787. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1788. //}
  1789. }
  1790. }
  1791. }