EfemEntity.cs 32 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using Aitex.Core.Common;
  4. using Aitex.Core.RT.DataCenter;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.Fsm;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.Utilities;
  10. using Aitex.Sorter.Common;
  11. using MECF.Framework.Common.Equipment;
  12. using MECF.Framework.Common.Schedulers;
  13. using MECF.Framework.Common.SubstrateTrackings;
  14. using Venus_Core;
  15. using Venus_RT;
  16. using Venus_RT.Devices;
  17. using Venus_RT.Devices.YASKAWA;
  18. using Venus_RT.Devices.EFEM;
  19. using Venus_RT.Modules.LPs;
  20. using Venus_RT.Modules.EFEM;
  21. namespace Venus_RT.Modules
  22. {
  23. class EfemEntity : Entity, IEntity, IModuleEntity
  24. {
  25. //private int _bigWafer = 0;
  26. //private int _midWafer = 0;
  27. //private int _smallWafer = 0;
  28. public enum STATE
  29. {
  30. Unknown, // 0
  31. Initializing, // 1
  32. Idle, // 2
  33. Error, // 3
  34. Picking, // 4
  35. Placing, // 5
  36. Aligning, // 6
  37. Mapping, // 7
  38. Init, // 8
  39. Orgshing, // 9
  40. Lifting, // 10
  41. InitingAL, // 11
  42. InitingRB, // 12
  43. Extending, // 13
  44. Retracting, // 14
  45. //SettingLamp, // 15
  46. Swapping,
  47. Gotoing,
  48. Gripping,
  49. Ungripping,
  50. Fliping,
  51. }
  52. public enum MSG
  53. {
  54. HomeAll, // 0
  55. Pick, // 1
  56. Place, // 2
  57. Align, // 3
  58. ActionDone, // 4
  59. MoveCmd, // 6
  60. Recover, // 8
  61. Goto, // 9
  62. Error, // 10
  63. Online, // 11
  64. CommReady, // 12
  65. Lift, // 13
  66. HomeAL, // 14
  67. HomeRB, // 15
  68. Extend, // 16
  69. Retract, // 17
  70. PMLiftPinUp, // 18
  71. PMLiftPinDown, // 19
  72. TurnOffBuzzer,
  73. Abort,
  74. Map,
  75. ToInit,
  76. Cool,
  77. Swap,
  78. Grip,
  79. Ungrip,
  80. Flip,
  81. LiftActionDone,
  82. }
  83. public enum EfemType
  84. {
  85. FutureEfem = 1,
  86. JetEfem = 2,
  87. BrooksEFEM = 3,
  88. }
  89. public bool IsIdle
  90. {
  91. get { return fsm.State == (int)STATE.Idle; }
  92. }
  93. public bool IsError
  94. {
  95. get { return fsm.State == (int)STATE.Error; }
  96. }
  97. public bool IsInit
  98. {
  99. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  100. }
  101. public bool IsBusy
  102. {
  103. get { return !IsInit && !IsError && !IsIdle; }
  104. }
  105. public bool IsOnline { get; internal set; }
  106. public bool Check(int msg, out string reason, params object[] args)
  107. {
  108. throw new NotImplementedException();
  109. }
  110. // Fields
  111. //
  112. private readonly string Name;
  113. private readonly EfemBase _efem;
  114. private readonly LoadPortModule[] _lpms = new LoadPortModule[3];
  115. private readonly EfemType _efemType;
  116. public EfemBase EfemDevice => _efem;
  117. public EfemType EFEMType => _efemType;
  118. // routine
  119. private readonly EfemPickRoutine _pickRoutine;
  120. private readonly EfemPlaceRoutine _placeRoutine;
  121. private readonly EfemSwapRoutine _swapRoutine;
  122. private readonly EfemHomeRoutine _homeRoutine;
  123. private string LiftMessage;
  124. // Constructor
  125. //
  126. public EfemEntity()
  127. {
  128. _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");
  129. _efem = new JetEfem();
  130. Name = ModuleName.EFEM.ToString();
  131. _homeRoutine = new EfemHomeRoutine(_efem);
  132. _pickRoutine = new EfemPickRoutine(_efem);
  133. _placeRoutine = new EfemPlaceRoutine(_efem);
  134. _swapRoutine = new EfemSwapRoutine(_efem);
  135. InitFsmMap();
  136. }
  137. public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg)
  138. {
  139. _lpms[mod - ModuleName.LP1].PostMsg(msg);
  140. }
  141. public void NotifyLPError(ModuleName mod )
  142. {
  143. _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone);
  144. //_lpms[mod - ModuleName.LP1]..OnError();
  145. }
  146. protected override bool Init()
  147. {
  148. _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);
  149. _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);
  150. _lpms[2] = new LoadPortModule(ModuleName.LP3, _efem);
  151. _lpms[0].Initialize();
  152. _lpms[1].Initialize();
  153. _lpms[2].Initialize();
  154. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; });
  155. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; });
  156. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; });
  157. //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; });
  158. OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  159. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0]); return true; });
  160. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0]); return true; });
  161. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Swap}", (cmd, args) => { PostMsg(MSG.Swap, args[0]); return true; });
  162. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  163. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB); return true; });
  164. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>
  165. {
  166. bool isGrip = ((string)args[0]).ToLower() == "on";
  167. PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]);
  168. return true;
  169. });
  170. //OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });
  171. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });
  172. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; });
  173. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; });
  174. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; });
  175. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1); return true; });
  176. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2); return true; });
  177. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1); return true; });
  178. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2); return true; });
  179. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; });
  180. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; });
  181. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; });
  182. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; });
  183. DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString());
  184. DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  185. DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage);
  186. return true;
  187. }
  188. private void InitFsmMap()
  189. {
  190. fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);
  191. fsm.EnableRepeatedMsg(true);
  192. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  193. AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME);
  194. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  195. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  196. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  197. AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle);
  198. AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init);
  199. AnyStateTransition(MSG.CommReady, fnCommReady, STATE.Init);
  200. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  201. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  202. Transition(STATE.Error, FSM_MSG.TIMER, fnMonitor, STATE.Error);
  203. // Home
  204. Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  205. Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  206. Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  207. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
  208. // Home Robot
  209. Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
  210. Transition(STATE.InitingRB, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
  211. // Home Aligner
  212. Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL);
  213. Transition(STATE.InitingAL, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
  214. // Pick wafer
  215. Transition(STATE.Idle, MSG.Pick, FnStartPick, STATE.Picking);
  216. Transition(STATE.Picking, FSM_MSG.TIMER, FnPickTimeout, STATE.Idle);
  217. Transition(STATE.Picking, MSG.Abort, FnAbortPick, STATE.Idle);
  218. // Place wafer
  219. Transition(STATE.Idle, MSG.Place, FnStartPlace, STATE.Placing);
  220. Transition(STATE.Placing, FSM_MSG.TIMER, FnPlaceTimeout, STATE.Idle);
  221. Transition(STATE.Placing, MSG.Abort, FnAbortPlace, STATE.Idle);
  222. // Swap wafer with LL sequence
  223. Transition(STATE.Idle, MSG.Swap, FnStartSwap, STATE.Swapping);
  224. Transition(STATE.Swapping, FSM_MSG.TIMER, FnSwapTimeout, STATE.Idle);
  225. Transition(STATE.Swapping, MSG.Abort, FnAbortSwap, STATE.Idle);
  226. // Goto
  227. Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing);
  228. Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle);
  229. // Map
  230. Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping);
  231. Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle);
  232. // Grip
  233. Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping);
  234. Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  235. // Ungrip
  236. Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping);
  237. Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  238. // Aligner
  239. Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting);
  240. //Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle);
  241. Transition(STATE.Lifting, FSM_MSG.TIMER, fnLiftTimeout, STATE.Idle);
  242. Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning);
  243. Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle);
  244. EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  245. EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  246. Running = true;
  247. }
  248. private bool fnCommReady(object[] param)
  249. {
  250. return true;
  251. }
  252. private bool fnHomeAll(object[] param)
  253. {
  254. return _homeRoutine.Start(ModuleName.EFEM) == RState.Running;
  255. }
  256. private bool fnHomingTimeout(object[] param)
  257. {
  258. RState ret = _homeRoutine.Monitor();
  259. if (ret == RState.Failed || ret == RState.Timeout)
  260. {
  261. PostMsg(MSG.Error);
  262. return false;
  263. }
  264. return ret == RState.End;
  265. }
  266. private bool fnHomeRobot(object[] param)
  267. {
  268. return _homeRoutine.Start(ModuleName.EfemRobot) == RState.Running;
  269. }
  270. private bool fnHomeAligner(object[] param)
  271. {
  272. // module
  273. ModuleName unit = ModuleName.EFEM;
  274. if (param[0] is string s1)
  275. unit = ModuleNameString.ToEnum(s1);
  276. else if (param[0] is ModuleName mod)
  277. unit = mod;
  278. else
  279. throw new ArgumentException("Argument error");
  280. return _homeRoutine.Start(unit) == RState.Running;
  281. }
  282. private bool fnActionDone(object[] param)
  283. {
  284. return false;
  285. }
  286. public bool CheckToPostMessage(int msg, params object[] args)
  287. {
  288. if (!fsm.FindTransition(fsm.State, msg))
  289. {
  290. EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  291. return false;
  292. }
  293. Running = true;
  294. fsm.PostMsg(msg, args);
  295. return true;
  296. }
  297. private bool fnMonitor(object[] param)
  298. {
  299. _efem.Monitor();
  300. _debugRoutine();
  301. return true;
  302. }
  303. private bool fnOnline(object[] param)
  304. {
  305. bool bOnlineFlag = (bool)param[0];
  306. if (_efem is EfemBase efem)
  307. {
  308. efem.SetOnline(bOnlineFlag);
  309. }
  310. return true;
  311. }
  312. private string GetFsmLastMessage()
  313. {
  314. int msg = fsm.LastMsg;
  315. if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)
  316. return ((MSG)msg).ToString();
  317. if (msg == (int)FSM_MSG.TIMER)
  318. return "Timer";
  319. return msg.ToString();
  320. }
  321. private bool fnError(object[] param)
  322. {
  323. return true;
  324. }
  325. private bool fnToInit(object[] param)
  326. {
  327. return true;
  328. }
  329. private bool fnRecover(object[] param)
  330. {
  331. _efem.ClearError();
  332. //_efem.ExecuteAction();
  333. return true;
  334. }
  335. private bool fnAbortRobot(object[] param)
  336. {
  337. //_efem.ExecuteAction();
  338. return true;
  339. }
  340. private bool fnSetLED(object[] param)
  341. {
  342. LightType light = (LightType)param[0];
  343. LightStatus st = (LightStatus)param[1];
  344. _efem.SetLamp(light, st);
  345. return true;
  346. }
  347. private bool fnTurnOffBuzzer(object[] param)
  348. {
  349. return false;
  350. }
  351. private bool FnStartPick(object[] param)
  352. {
  353. return _pickRoutine.Start(param) == RState.Running;
  354. }
  355. private bool FnPickTimeout(object[] param)
  356. {
  357. RState ret = _pickRoutine.Monitor();
  358. if (ret == RState.Failed || ret == RState.Timeout)
  359. {
  360. PostMsg(MSG.Error);
  361. return false;
  362. }
  363. return ret == RState.End;
  364. }
  365. private bool FnAbortPick(object[] param)
  366. {
  367. _pickRoutine.Abort();
  368. return true;
  369. }
  370. private bool FnStartPlace(object[] param)
  371. {
  372. return _placeRoutine.Start(param) == RState.Running;
  373. }
  374. private bool FnPlaceTimeout(object[] param)
  375. {
  376. RState ret = _placeRoutine.Monitor();
  377. if (ret == RState.Failed || ret == RState.Timeout)
  378. {
  379. PostMsg(MSG.Error);
  380. return false;
  381. }
  382. return ret == RState.End;
  383. }
  384. private bool FnAbortPlace(object[] param)
  385. {
  386. _placeRoutine.Abort();
  387. return true;
  388. }
  389. private bool FnStartSwap(object[] param)
  390. {
  391. return _swapRoutine.Start(param) == RState.Running;
  392. }
  393. private bool FnSwapTimeout(object[] param)
  394. {
  395. RState ret = _swapRoutine.Monitor();
  396. if (ret == RState.Failed || ret == RState.Timeout)
  397. {
  398. PostMsg(MSG.Error);
  399. return false;
  400. }
  401. return ret == RState.End;
  402. }
  403. private bool FnAbortSwap(object[] param)
  404. {
  405. _swapRoutine.Abort();
  406. return true;
  407. }
  408. private bool fnGoto(object[] param)
  409. {
  410. // module
  411. ModuleName unit = ModuleName.EFEM;
  412. if (param[0] is string s1)
  413. unit = ModuleNameString.ToEnum(s1);
  414. else if (param[0] is ModuleName mod)
  415. unit = mod;
  416. else
  417. throw new ArgumentException("Argument error");
  418. _efem.Goto(unit, Hand.Blade1);
  419. return true;
  420. }
  421. private bool fnLift(object[] param)
  422. {
  423. // module
  424. ModuleName unit = ModuleName.EFEM;
  425. if (param[0] is string s1)
  426. unit = ModuleNameString.ToEnum(s1);
  427. else if (param[0] is ModuleName mod)
  428. unit = mod;
  429. else
  430. throw new ArgumentException("Argument error");
  431. bool isUp = true;
  432. if (param.Length > 1)
  433. {
  434. isUp = (bool) param[1];
  435. }
  436. if (isUp)
  437. {
  438. if (!_efem.SetPinUp(unit))
  439. return false;
  440. }
  441. else
  442. {
  443. if (!_efem.SetPinDown(unit))
  444. return false;
  445. }
  446. LiftMessage = isUp ? "Up" : "Down";
  447. return true;
  448. }
  449. private bool fnLiftTimeout(object[] param)
  450. {
  451. if (LiftMessage == "Up")
  452. {
  453. return _efem.LiftIsDown == false && _efem.LiftIsUp == true;
  454. }
  455. else if (LiftMessage == "Down")
  456. {
  457. return _efem.LiftIsDown == true && _efem.LiftIsUp == false;
  458. }
  459. return false;
  460. }
  461. private bool fnAlign(object[] param)
  462. {
  463. // module
  464. ModuleName unit = ModuleName.EFEM;
  465. if (param[0] is string s1)
  466. unit = ModuleNameString.ToEnum(s1);
  467. else if (param[0] is ModuleName mod)
  468. unit = mod;
  469. else
  470. throw new ArgumentException("Argument error");
  471. // wafer size
  472. WaferSize ws1 = WaferSize.WS0;
  473. if (param[1] is string s2)
  474. {
  475. if (Enum.TryParse(s2, out WaferSize p5))
  476. ws1 = p5;
  477. }
  478. else if (param[1] is WaferSize p6)
  479. {
  480. ws1 = p6;
  481. }
  482. if (!_efem.Align(unit, 1000, ws1))
  483. return false;
  484. return true;
  485. }
  486. private bool fnMap(object[] param)
  487. {
  488. // module
  489. ModuleName unit = ModuleName.EFEM;
  490. if (param[0] is string s1)
  491. unit = ModuleNameString.ToEnum(s1);
  492. else if (param[0] is ModuleName mod)
  493. unit = mod;
  494. else
  495. throw new ArgumentException("Argument error");
  496. if (!_efem.Map(unit))
  497. return false;
  498. return true;
  499. }
  500. private bool fnGrip(object[] param)
  501. {
  502. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  503. if (!_efem.Grip(arm, true))
  504. return false;
  505. return true;
  506. }
  507. private bool fnUngrip(object[] param)
  508. {
  509. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  510. if (!_efem.Grip(arm, false))
  511. return false;
  512. return true;
  513. }
  514. public int Invoke(string function, params object[] args)
  515. {
  516. switch (function)
  517. {
  518. case "Home":
  519. CheckToPostMessage((int)MSG.HomeAll);
  520. return (int)MSG.HomeAll;
  521. }
  522. return (int)FSM_MSG.NONE;
  523. }
  524. public bool CheckAcked(int msg)
  525. {
  526. return fsm.CheckExecuted(msg);
  527. }
  528. internal void InvokeReset()
  529. {
  530. if (fsm.State == (int) STATE.Error)
  531. {
  532. PostMsg((int)MSG.Recover);
  533. }
  534. }
  535. public int InvokeAlign(string module, float time)
  536. {
  537. if (CheckToPostMessage((int)MSG.Align, module, time))
  538. return (int)MSG.Align;
  539. return (int)FSM_MSG.NONE;
  540. }
  541. public int InvokeLiftDown(string module)
  542. {
  543. if (CheckToPostMessage((int)MSG.Lift, module, false))
  544. return (int)MSG.Lift;
  545. return (int)FSM_MSG.NONE;
  546. }
  547. public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)
  548. {
  549. if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))
  550. return (int)MSG.Pick;
  551. return (int)FSM_MSG.NONE;
  552. }
  553. public int InvokeGoto(ModuleName source, int slot)
  554. {
  555. if (CheckToPostMessage((int)MSG.Goto, source, slot))
  556. return (int)MSG.Goto;
  557. return (int)FSM_MSG.NONE;
  558. }
  559. public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)
  560. {
  561. if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))
  562. return (int)MSG.Place;
  563. return (int)FSM_MSG.NONE;
  564. }
  565. public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size)
  566. {
  567. if (CheckToPostMessage((int)MSG.Swap, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))
  568. return (int)MSG.Swap;
  569. return (int)FSM_MSG.NONE;
  570. }
  571. public int InvokeMap(string target )
  572. {
  573. if (CheckToPostMessage((int)MSG.Map, target ))
  574. return (int)MSG.Map;
  575. return (int)FSM_MSG.NONE;
  576. }
  577. public int InvokeFlip(Hand hand)
  578. {
  579. if (CheckToPostMessage((int)MSG.Flip, hand))
  580. return (int)MSG.Flip;
  581. return (int)FSM_MSG.NONE;
  582. }
  583. public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
  584. {
  585. //if (type == EnumTransferType.Pick)
  586. //{
  587. // //需要补充:判断LP 放好了,而且已经map过。
  588. // return _efem[module].HasCassette && _efem[module].IsMapped;
  589. //}
  590. //else if (type == EnumTransferType.Place)
  591. //{
  592. // //需要补充:判断LP 放好了,而且已经map过。
  593. // return _efem[module].HasCassette && _efem[module].IsMapped;
  594. //}
  595. return false;
  596. }
  597. internal bool CheckReadyRunNewJob(ModuleName module)
  598. {
  599. //???
  600. return true;
  601. }
  602. internal bool CheckReadyTransfer(ModuleName module)
  603. {
  604. //return _efem[module].HasCassette && _efem[module].IsMapped;
  605. return true;
  606. }
  607. internal bool CheckPlaced(ModuleName module)
  608. {
  609. //return _efem[module].HasCassette;
  610. return true;
  611. }
  612. internal void NoteJobStart(ModuleName module)
  613. {
  614. //_efem[module].NoteJobStart();
  615. }
  616. internal void NoteJobComplete(ModuleName module)
  617. {
  618. //_efem[module].NoteJobComplete();
  619. }
  620. private void _debugRoutine()
  621. {
  622. int flag = 0;
  623. // Test Home routine
  624. if (flag == 1)
  625. {
  626. PostMsg(MSG.HomeAll);
  627. }
  628. else if (flag == 2)
  629. {
  630. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  631. WaferManager.Instance.DeleteWafer(ModuleName.EfemRobot, 0);
  632. var item = new MoveItem(ModuleName.Aligner1, 0, ModuleName.EfemRobot, 0, Hand.Blade1);
  633. var items = new Queue<MoveItem>();
  634. items.Enqueue(item);
  635. PostMsg(MSG.Pick, items);
  636. }
  637. else if (flag == 3)
  638. {
  639. var item = new MoveItem( ModuleName.EfemRobot, 0, ModuleName.Aligner1, 0, Hand.Blade1);
  640. var items = new Queue<MoveItem>();
  641. items.Enqueue(item);
  642. PostMsg(MSG.Place, items);
  643. }
  644. else if (flag == 4)
  645. {
  646. WaferManager.Instance.CreateWafer(ModuleName.LLA, 0, WaferStatus.Normal);
  647. WaferManager.Instance.CreateWafer(ModuleName.LLA, 1, WaferStatus.Normal);
  648. WaferManager.Instance.DeleteWafer(ModuleName.LLA, 2);
  649. WaferManager.Instance.DeleteWafer(ModuleName.LLA, 3);
  650. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  651. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  652. var item = new MoveItem(ModuleName.EfemRobot, 0, ModuleName.LLA, 2, Hand.Blade1);
  653. var items = new Queue<MoveItem>();
  654. items.Enqueue(item);
  655. item = new MoveItem(ModuleName.EfemRobot, 1, ModuleName.LLA, 3, Hand.Blade2);
  656. items.Enqueue(item);
  657. item = new MoveItem(ModuleName.LLA, 0, ModuleName.EfemRobot, 0, Hand.Blade1);
  658. items.Enqueue(item);
  659. item = new MoveItem(ModuleName.LLA, 1, ModuleName.EfemRobot, 1, Hand.Blade2);
  660. items.Enqueue(item);
  661. PostMsg(MSG.Swap, items);
  662. }
  663. else if (flag == 5)
  664. {
  665. PostMsg(MSG.HomeRB);
  666. }
  667. else if (flag == 6)
  668. {
  669. PostMsg(MSG.HomeAL, ModuleName.Aligner1);
  670. }
  671. else if (flag == 8)
  672. {
  673. OP.DoOperation("LP1.Load");
  674. }
  675. else if(flag == 9)
  676. {
  677. OP.DoOperation("LP1.Unload");
  678. }
  679. }
  680. }
  681. /// <summary>
  682. /// LP entity
  683. /// </summary>
  684. class LoadportEntity : Entity, IEntity
  685. {
  686. private enum STATE
  687. {
  688. Unknown,
  689. Idle, // 1
  690. Initializing, // 2
  691. Initialized, // 3
  692. Mapping, // 4
  693. Mapped, // 5
  694. }
  695. public enum MSG
  696. {
  697. Home, // 0
  698. Map, // 1
  699. ActionDone, // 2
  700. RecHwMsg, // 3
  701. Recover, // 4
  702. Abort, // 5
  703. Online, // 6
  704. Error // 7
  705. }
  706. private readonly EfemBase _efem;
  707. private ModuleName Module { get; }
  708. public LoadportEntity(ModuleName mod, EfemBase efem)
  709. {
  710. this.Module = mod;
  711. _efem = efem;
  712. InitFsmMap();
  713. OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
  714. OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  715. //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; });
  716. OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  717. DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString());
  718. DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString());
  719. DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  720. DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage);
  721. }
  722. private string GetFsmLastMessage()
  723. {
  724. int msg = fsm.LastMsg;
  725. if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
  726. return ((MSG)msg).ToString();
  727. if (msg == (int)FSM_MSG.TIMER)
  728. return "Timer";
  729. return msg.ToString();
  730. }
  731. private void InitFsmMap()
  732. {
  733. fsm = new StateMachine<LoadportEntity>($"LPM_{Module}", (int)STATE.Idle, 500);
  734. AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  735. //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
  736. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  737. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  738. AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle);
  739. EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  740. // Home
  741. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  742. Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle);
  743. }
  744. private bool fnOnline(object[] param)
  745. {
  746. bool online = (bool)param[0];
  747. //_efem.SetOnline(Module, online);
  748. return true;
  749. }
  750. private bool fnRecover(object[] param)
  751. {
  752. return true;
  753. }
  754. private bool fnMonitor(object[] param)
  755. {
  756. STATE curSt = (STATE)fsm.State;
  757. if (curSt == STATE.Initializing || curSt == STATE.Mapping)
  758. {
  759. if (fsm.ElapsedTime > 20 * 1000)
  760. {
  761. PostMsg(MSG.Recover);
  762. }
  763. }
  764. return true;
  765. }
  766. private bool fnEnterExecute(object[] param)
  767. {
  768. return true;
  769. }
  770. private bool fnExitExecute(object[] param)
  771. {
  772. return true;
  773. }
  774. private bool fnActionDone(object[] param)
  775. {
  776. return true;
  777. }
  778. private bool fnHome(object[] param)
  779. {
  780. _efem.Home(Module);
  781. return true;
  782. }
  783. public bool Check(int msg, out string reason, params object[] args)
  784. {
  785. throw new NotImplementedException();
  786. }
  787. }
  788. }