SimulatorSystem.cs 142 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. namespace Venus_Simulator.Instances
  17. {
  18. public class SimulatorSystem : Singleton<SimulatorSystem>
  19. {
  20. private PeriodicJob _thread;
  21. private Random _rd = new Random();
  22. ConfigType type;
  23. private RD_TRIG _trigATM = new RD_TRIG();
  24. private RD_TRIG _trigVAC = new RD_TRIG();
  25. private R_TRIG _trigLLExtend = new R_TRIG();
  26. private R_TRIG _trigLLRetract = new R_TRIG();
  27. private static int count = 0;
  28. private readonly float ATM_THRESHOLD = 750000;
  29. private readonly float ATM_PRESSURE = 760000;
  30. private readonly float ATM_LoadLock_PRESSURE = 760000;
  31. private readonly uint VAC_SW_PRESSURE = 9500;
  32. private readonly uint PROCESS_GAUGE = 10000;
  33. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  34. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  35. public SimulatorSystem()
  36. {
  37. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  38. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  40. // TODO
  41. type = (ConfigType)QueryDataClient.Instance.Service.GetData("System.ConfigType");
  42. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  45. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  46. }
  47. ~SimulatorSystem()
  48. {
  49. _thread?.Stop();
  50. }
  51. public void Initialize()
  52. {
  53. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  54. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  55. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  56. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  57. if (type == ConfigType.Kepler2200)
  58. {
  59. SetKepler2200TMDefaultValue();
  60. }
  61. else if (type == ConfigType.Kepler2300)
  62. {
  63. SetKepler2300TMDefaultValue();
  64. }
  65. else if (type == ConfigType.VenusSE)
  66. {
  67. SetSETMDefaultValue();
  68. SetDETMDefaultValue();
  69. }
  70. else if (type == ConfigType.VenusDE)
  71. {
  72. SetDETMDefaultValue();
  73. }
  74. Singleton<DataManager>.Instance.Initialize(false);
  75. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  76. }
  77. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  78. {
  79. switch (jetChamber)
  80. {
  81. case JetChamber.VenusSE:
  82. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  83. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  84. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  85. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  86. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  87. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  88. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  90. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  91. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  92. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  93. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  94. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  102. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  103. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  107. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  108. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  122. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  128. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  129. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  134. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  137. //// pressure
  138. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  139. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  140. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  141. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  142. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  143. //// Temperature
  144. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  145. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  146. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  147. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  148. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  150. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  151. // Datetime
  152. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  153. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  154. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  155. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  156. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  157. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  158. break;
  159. case JetChamber.VenusDE:
  160. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  161. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  162. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  163. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  164. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  165. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  167. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  168. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  169. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  170. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  171. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  172. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  174. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  175. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  176. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  182. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  186. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  191. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  205. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  206. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  211. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  212. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  214. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  215. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  216. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  220. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  224. //// pressure
  225. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  226. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  227. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  228. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  229. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  230. //// Temperature
  231. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  232. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  233. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  234. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  235. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  236. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  238. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  240. // Datetime
  241. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  242. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  243. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  244. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  245. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  246. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  247. break;
  248. case JetChamber.Kepler2300:
  249. // chamber
  250. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  251. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  252. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  253. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  254. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  256. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  258. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  259. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  260. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  261. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  263. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  266. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  270. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  275. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  276. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  286. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  287. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  290. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  292. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  293. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  295. //// pressure
  296. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  297. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  298. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  299. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  300. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  301. //// Temperature
  302. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  303. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  306. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  307. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  308. // Datetime
  309. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  310. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  311. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  312. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  313. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  314. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  315. break;
  316. case JetChamber.Kepler2200A:
  317. case JetChamber.Kepler2200B:
  318. if (jetChamber == JetChamber.Kepler2200B)
  319. {
  320. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  321. }
  322. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  323. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  324. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  325. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  326. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  327. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  328. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  329. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  330. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  331. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  332. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  333. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  334. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  335. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  336. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  337. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  348. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  349. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  350. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  351. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  352. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  353. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  354. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  355. //// pressure
  356. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  357. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  358. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  359. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  360. //// Temperature
  361. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  362. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  363. // Datetime
  364. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  365. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  366. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  367. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  368. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  369. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  370. break;
  371. }
  372. }
  373. private void SetKepler2200TMDefaultValue()
  374. {
  375. ModuleName mod = ModuleName.TM;
  376. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  377. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  378. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  379. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  381. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  385. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  386. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  387. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  388. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  389. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  390. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  391. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  392. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  394. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  395. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  396. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  397. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  398. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  399. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  400. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  401. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  402. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  403. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  404. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  405. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  406. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  407. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  408. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  409. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  410. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  411. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  412. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  413. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  414. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  415. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  416. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  417. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  418. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  419. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  420. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  421. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  422. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  423. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  424. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  425. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  426. // Datetime
  427. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  428. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  429. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  430. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  431. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  432. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  433. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  434. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  435. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  436. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  437. {
  438. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  439. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  440. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  441. }
  442. else
  443. {
  444. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  445. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  446. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  447. }
  448. }
  449. private void SetKepler2300TMDefaultValue()
  450. {
  451. ModuleName mod = ModuleName.TM;
  452. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  453. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  454. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  455. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  456. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  457. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  458. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  461. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  462. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  463. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  464. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  465. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  466. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  468. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  469. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  470. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  471. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  472. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  473. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  474. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  475. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  476. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  477. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  478. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  479. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  480. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  481. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  482. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  483. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  484. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  485. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  486. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  487. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  488. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  489. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  490. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  491. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  492. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  493. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  494. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  495. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  496. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  497. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  498. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  499. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  500. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  501. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  502. // Datetime
  503. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  504. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  505. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  506. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  507. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  508. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  509. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  510. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  511. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  512. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  513. {
  514. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  515. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  516. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  517. }
  518. else
  519. {
  520. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  521. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  522. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  523. }
  524. }
  525. private void SetSETMDefaultValue()
  526. {
  527. ModuleName mod = ModuleName.SETM;
  528. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  529. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  530. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  531. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  532. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  533. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  534. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  535. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  536. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  537. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  538. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  539. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  540. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  541. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  542. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  543. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  544. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  545. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  546. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  547. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  548. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  549. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  550. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  551. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  552. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  553. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  554. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  555. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  556. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  558. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  559. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  560. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  561. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  562. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  563. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  564. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  565. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  566. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  567. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  568. }
  569. private void SetDETMDefaultValue()
  570. {
  571. ModuleName mod = ModuleName.DETM;
  572. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  573. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  574. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  575. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  576. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  577. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  578. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  579. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  580. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  581. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  582. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  583. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  584. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  585. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  586. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  587. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  588. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  589. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  590. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  591. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  592. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  593. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  594. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  595. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  596. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  597. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  598. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  599. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  600. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  601. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  603. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  604. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  605. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  606. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  607. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  608. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  609. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  610. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  611. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  612. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  613. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  614. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  615. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  616. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  617. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  618. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  619. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  620. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  621. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  622. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  623. IO.DI[$"{mod}.DI_Safty_Alarm"].Value = false;
  624. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  625. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  626. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  627. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  628. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  629. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  630. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  631. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  632. }
  633. private bool OnMonitor()
  634. {
  635. try
  636. {
  637. foreach (var item in jetChambers)
  638. {
  639. switch (item.Value)
  640. {
  641. case JetChamber.Kepler2300:
  642. MonitorSlitDoorInTM(item.Key);
  643. MonitorPin(item.Key);
  644. MonitorPressure_Kepler(item.Key);
  645. //MonitorTemperature(item.Key);
  646. MonitorGas(item.Key);
  647. this.SimulateHe(item.Key);
  648. //MonitorRF(item.Key);
  649. ChangeTime(item.Key);
  650. //MonitorIOPumpCtrl(item.Key);
  651. MonitorLid(item.Key);
  652. break;
  653. case JetChamber.Kepler2200A:
  654. case JetChamber.Kepler2200B:
  655. MonitorSlitDoorInTM(item.Key);
  656. MonitorPressure_Kepler2200(item.Key);
  657. //MonitorTemperature(item.Key);
  658. MonitorGas(item.Key);
  659. // MonitorRF(item.Key);
  660. ChangeTime(item.Key);
  661. //MonitorIOPumpCtrl(item.Key);
  662. MonitorLid(item.Key);
  663. MonitorIOHighTemperatureHeater(item.Key);
  664. MonitorKepler2200Heater(item.Key);
  665. break;
  666. case JetChamber.VenusSE:
  667. MonitorPin(item.Key);
  668. //MonitorVenuSESlitDoor(item.Key);
  669. MonitorSEPressure(item.Key);
  670. MonitorSEGas(item.Key);
  671. ChangeTime(item.Key);
  672. this.SimulateSEHe(item.Key);
  673. break;
  674. case JetChamber.VenusDE:
  675. MonitorPin(item.Key);
  676. MonitorDEGas(item.Key);
  677. //MonitorVenuDESlitDoor(item.Key);
  678. MonitorDEPressure(item.Key);
  679. ChangeTime(item.Key);
  680. MonitorLinerDoor(item.Key);
  681. this.SimulateDEHe(item.Key);
  682. break;
  683. }
  684. }
  685. ChangeTime(ModuleName.TM);
  686. if (type == ConfigType.Kepler2200)
  687. {
  688. MonitorMFSlitDoor();
  689. MonitorMFKepler2200Pressure();
  690. }
  691. else if (type == ConfigType.Kepler2300)
  692. {
  693. MonitorMFSlitDoor();
  694. MonitorMFKepler2300Pressure();
  695. }
  696. else if (type == ConfigType.VenusSE)
  697. {
  698. MonitorSEMFSlitDoor();
  699. MonitorSEMFPressure();
  700. MonitorDEMFSlitDoor();
  701. MonitorDEMFPressure();
  702. }
  703. else if (type == ConfigType.VenusDE)
  704. {
  705. MonitorDEMFSlitDoor();
  706. MonitorDEMFPressure();
  707. }
  708. }
  709. catch (Exception e)
  710. {
  711. LOG.WriteExeption(e);
  712. }
  713. return true;
  714. }
  715. private void ChangeTime(ModuleName mod)
  716. {
  717. // Heartbeat with PLC
  718. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  719. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  720. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  721. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  722. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  723. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  724. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  725. }
  726. //void MonitorVenuSESlitDoor(ModuleName mod)
  727. //{
  728. //}
  729. void MonitorSlitDoorInPM(ModuleName mod)
  730. {
  731. // slit door open
  732. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  733. {
  734. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  735. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  736. }
  737. // slit door close
  738. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  739. {
  740. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  741. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  742. }
  743. }
  744. void MonitorLinerDoor(ModuleName mod)
  745. {
  746. // slit door open
  747. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  748. {
  749. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  750. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  751. }
  752. // slit door close
  753. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  754. {
  755. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  756. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  757. }
  758. }
  759. void MonitorSlitDoorInTM(ModuleName mod)
  760. {
  761. // slit door open
  762. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  763. {
  764. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  765. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  766. }
  767. // slit door close
  768. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  769. {
  770. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  771. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  772. }
  773. }
  774. void MonitorMFSlitDoor()
  775. {
  776. ModuleName mod = ModuleName.TM;
  777. // LLA T door open
  778. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  779. {
  780. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  781. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  782. }
  783. // LLB T door open
  784. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  785. {
  786. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  787. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  788. }
  789. // LLA E door open
  790. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  791. {
  792. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  793. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  794. }
  795. // LLB E door open
  796. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  797. {
  798. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  799. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  800. }
  801. // LLA T door close
  802. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  803. {
  804. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  805. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  806. }
  807. // LLB T door close
  808. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  809. {
  810. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  811. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  812. }
  813. // LLA E door close
  814. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  815. {
  816. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  817. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  818. }
  819. // LLB E door close
  820. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  821. {
  822. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  823. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  824. }
  825. // PMA slitdoor door close/open
  826. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  827. {
  828. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  829. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  830. }
  831. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  832. {
  833. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  834. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  835. }
  836. // PMB slitdoor door close/open
  837. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  838. {
  839. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  840. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  841. }
  842. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  843. {
  844. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  845. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  846. }
  847. // PMC slitdoor door close/open
  848. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  849. {
  850. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  851. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  852. }
  853. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  854. {
  855. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  856. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  857. }
  858. // PMD slitdoor door close/open
  859. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  860. {
  861. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  862. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  863. }
  864. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  865. {
  866. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  867. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  868. }
  869. }
  870. void MonitorSEMFSlitDoor()
  871. {
  872. ModuleName mod = ModuleName.SETM;
  873. // VCE T door open
  874. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  875. {
  876. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  877. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  878. }
  879. // VCE T door Close
  880. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  881. {
  882. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  883. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  884. }
  885. //pma
  886. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  887. {
  888. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  889. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  890. }
  891. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  892. {
  893. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  894. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  895. }
  896. //pmb
  897. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  898. {
  899. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  900. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  901. }
  902. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  903. {
  904. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  905. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  906. }
  907. //pmc
  908. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  909. {
  910. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  911. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  912. }
  913. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  914. {
  915. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  916. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  917. }
  918. }
  919. void MonitorDEMFSlitDoor()
  920. {
  921. ModuleName mod = ModuleName.DETM;
  922. // VCE L door open
  923. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  924. {
  925. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  926. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  927. }
  928. // VCE R door open
  929. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  930. {
  931. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  932. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  933. }
  934. // VCE L door Close
  935. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  936. {
  937. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  938. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  939. }
  940. // VCE R door Close
  941. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  942. {
  943. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  944. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  945. }
  946. //pma
  947. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  948. {
  949. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  950. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  951. }
  952. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  953. {
  954. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  955. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  956. }
  957. //pmb
  958. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  959. {
  960. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  961. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  962. }
  963. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  964. {
  965. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  966. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  967. }
  968. //pmc
  969. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  970. {
  971. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  972. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  973. }
  974. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  975. {
  976. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  977. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  978. }
  979. }
  980. void MonitorPin(ModuleName mod)
  981. {
  982. // lift pin up
  983. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  984. {
  985. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  986. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  987. }
  988. }
  989. void MonitorLid(ModuleName mod)
  990. {
  991. // lift pin up
  992. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  993. {
  994. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  995. }
  996. }
  997. void MonitorExtendAndRetract(ModuleName mod)
  998. {
  999. // Extend
  1000. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1001. if (_trigLLExtend.Q)
  1002. {
  1003. _trigLLRetract.RST = true;
  1004. Thread.Sleep(500);
  1005. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1006. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1007. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1008. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1009. }
  1010. // Retract
  1011. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1012. if (_trigLLRetract.Q)
  1013. {
  1014. count++;
  1015. _trigLLExtend.RST = true;
  1016. Thread.Sleep(500);
  1017. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1018. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1019. if (count == 1)
  1020. {
  1021. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1022. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1023. }
  1024. else if (count == 2)
  1025. {
  1026. count = 0;
  1027. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1028. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1029. }
  1030. }
  1031. }
  1032. void MonitorPressure(ModuleName mod)
  1033. {
  1034. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1035. // Loadlock pressure
  1036. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1037. // Foreline
  1038. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1039. {
  1040. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1041. }
  1042. else
  1043. {
  1044. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1045. }
  1046. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1047. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1048. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1049. //float chamber_pressure = GetMockChamberPressure(mod);
  1050. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1051. // soft pump & fast pump
  1052. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1053. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1054. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1055. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1056. {
  1057. //任意泵打开
  1058. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1059. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1060. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1061. {//开双泵
  1062. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1063. {
  1064. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1065. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1066. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1067. }
  1068. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1069. {
  1070. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1071. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1072. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1073. }
  1074. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1075. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1076. }
  1077. else if (fast_pump_vlv.Value)//开
  1078. {
  1079. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1080. {
  1081. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1082. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1083. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1084. }
  1085. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1086. {
  1087. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1088. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1089. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1090. }
  1091. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1092. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1093. }
  1094. else if (soft_pump_vlv.Value)
  1095. {
  1096. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1097. {
  1098. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1099. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1100. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1101. }
  1102. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1103. {
  1104. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1105. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1106. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1107. }
  1108. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1109. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1110. }
  1111. else if (turbo_pump_vlv.Value)
  1112. {
  1113. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1114. if ((getAiValue_ChamberPressure - 500) >= 0)
  1115. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1116. else
  1117. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1118. if ((getAiValue_ProcessPressure - 500) >= 0)
  1119. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1120. else
  1121. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1122. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1123. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1124. }
  1125. }
  1126. // fast vent & purge
  1127. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1128. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1129. //if (vent_vlv.Value || purge_vlv.Value)
  1130. //{
  1131. // if (vent_vlv.Value && purge_vlv.Value)
  1132. // {
  1133. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1134. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1135. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1136. // {
  1137. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1138. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1139. // }
  1140. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1141. // {
  1142. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1143. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1144. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1145. // }
  1146. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1147. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1148. // }
  1149. // else
  1150. //
  1151. if (vent_vlv.Value)
  1152. {
  1153. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1154. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1155. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1156. {
  1157. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1158. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1159. }
  1160. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1161. {
  1162. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1163. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1164. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1165. }
  1166. else
  1167. {
  1168. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1169. }
  1170. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1171. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1172. }
  1173. // Loadlock Pumping Valve
  1174. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1175. if (Loadlock_pump_vlv.Value)
  1176. {
  1177. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1178. }
  1179. // Loadlock vent
  1180. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1181. if (Loadlock_vent_vlv.Value)
  1182. {
  1183. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1184. }
  1185. // 压力值越界,复位
  1186. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1187. if (chamber_pressure1 > ATM_PRESSURE)
  1188. {
  1189. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1190. }
  1191. else if (chamber_pressure1 < 20)
  1192. {
  1193. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1194. }
  1195. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1196. if (process_pressure1 > PROCESS_GAUGE)
  1197. {
  1198. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1199. }
  1200. else if (process_pressure1 < 20)
  1201. {
  1202. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1203. }
  1204. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1205. if (foreline_pressure > 10000)
  1206. {
  1207. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1208. }
  1209. else if (foreline_pressure < 150)
  1210. {
  1211. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1212. }
  1213. // 模拟压力计漂移
  1214. //int p1 = (int)GetMockChamberPressure(mod);
  1215. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1216. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1217. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1218. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1219. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1220. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1221. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1222. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1223. // 根据当前压力值设定信号
  1224. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1225. // ATM switch
  1226. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1227. // VAC switch
  1228. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1229. // Throttle valve
  1230. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1231. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1232. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1233. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1234. // 压力值
  1235. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1236. //{
  1237. // short increase = (short)_rd.Next(20, 30);
  1238. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1239. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1240. // {
  1241. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1242. // }
  1243. //}
  1244. //else
  1245. //{
  1246. // short increase = (short)_rd.Next(20, 30);
  1247. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1248. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1249. // {
  1250. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1251. // }
  1252. //}
  1253. //// 位置值
  1254. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1255. //{
  1256. // short increase = (short)_rd.Next(20, 30);
  1257. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1258. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1259. // {
  1260. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1261. // }
  1262. //}
  1263. //else
  1264. //{
  1265. // short increase = (short)_rd.Next(20, 30);
  1266. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1267. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1268. // {
  1269. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1270. // }
  1271. //}
  1272. }
  1273. void MonitorSEPressure(ModuleName mod)
  1274. {
  1275. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1276. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1277. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1278. // Foreline
  1279. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1280. {
  1281. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1282. }
  1283. else
  1284. {
  1285. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1286. }
  1287. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1288. // soft pump & fast pump
  1289. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1290. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1291. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1292. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1293. {
  1294. //任意泵打开
  1295. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1296. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1297. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1298. {//开双泵
  1299. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1300. {
  1301. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1302. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1303. }
  1304. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1305. {
  1306. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1307. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1308. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1309. }
  1310. }
  1311. else if (fast_pump_vlv.Value)//开
  1312. {
  1313. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1314. {
  1315. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1316. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1317. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1318. }
  1319. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1320. {
  1321. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1322. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1323. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1324. }
  1325. }
  1326. else if (soft_pump_vlv.Value)
  1327. {
  1328. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1329. {
  1330. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1331. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1332. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1333. }
  1334. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1335. {
  1336. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1337. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1338. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1339. }
  1340. }
  1341. else if (turbo_pump_vlv.Value)
  1342. {
  1343. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1344. if ((getAiValue_ChamberPressure - 500) >= 0)
  1345. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1346. else
  1347. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1348. if ((getAiValue_ProcessPressure - 500) >= 0)
  1349. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1350. else
  1351. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1352. }
  1353. }
  1354. // fast vent & purge
  1355. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1356. if (vent_vlv.Value)
  1357. {
  1358. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1359. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1360. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1361. {
  1362. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1363. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1364. }
  1365. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1366. {
  1367. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1368. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1369. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1370. }
  1371. else
  1372. {
  1373. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1374. }
  1375. }
  1376. // Loadlock Pumping Valve
  1377. // 压力值越界,复位
  1378. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1379. if (chamber_pressure1 > ATM_PRESSURE)
  1380. {
  1381. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1382. }
  1383. else if (chamber_pressure1 < 20)
  1384. {
  1385. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1386. }
  1387. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1388. if (process_pressure1 > PROCESS_GAUGE)
  1389. {
  1390. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1391. }
  1392. else if (process_pressure1 < 20)
  1393. {
  1394. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1395. }
  1396. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1397. if (foreline_pressure > 1999)
  1398. {
  1399. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1400. }
  1401. else if (foreline_pressure < 150)
  1402. {
  1403. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1404. }
  1405. // ATM switch
  1406. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1407. // VAC switch
  1408. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1409. }
  1410. void MonitorDEPressure(ModuleName mod)
  1411. {
  1412. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1413. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1414. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1415. // Foreline
  1416. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1417. {
  1418. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1419. }
  1420. else
  1421. {
  1422. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1423. }
  1424. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1425. // soft pump & fast pump
  1426. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1427. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1428. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1429. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1430. {
  1431. //任意泵打开
  1432. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1433. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1434. if (fast_pump_vlv.Value)
  1435. {//开双泵
  1436. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1437. {
  1438. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1439. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1440. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1441. }
  1442. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1443. {
  1444. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1445. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1446. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1447. }
  1448. }
  1449. else if (turbo_pump_vlv.Value)
  1450. {
  1451. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1452. if ((getAiValue_ChamberPressure - 500) >= 0)
  1453. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1454. else
  1455. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1456. if ((getAiValue_ProcessPressure - 500) >= 0)
  1457. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1458. else
  1459. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1460. }
  1461. }
  1462. // fast vent & purge
  1463. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1464. if (vent_vlv.Value)
  1465. {
  1466. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1467. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1468. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1469. {
  1470. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1471. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1472. }
  1473. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1474. {
  1475. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1476. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1477. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1478. }
  1479. else
  1480. {
  1481. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1482. }
  1483. }
  1484. // Loadlock Pumping Valve
  1485. // 压力值越界,复位
  1486. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1487. if (chamber_pressure1 > ATM_PRESSURE)
  1488. {
  1489. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1490. }
  1491. else if (chamber_pressure1 < 20)
  1492. {
  1493. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1494. }
  1495. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1496. if (process_pressure1 > PROCESS_GAUGE)
  1497. {
  1498. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1499. }
  1500. else if (process_pressure1 < 20)
  1501. {
  1502. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1503. }
  1504. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1505. if (foreline_pressure > 10000)
  1506. {
  1507. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1508. }
  1509. else if (foreline_pressure < 150)
  1510. {
  1511. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1512. }
  1513. // ATM switch
  1514. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1515. // VAC switch
  1516. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1517. }
  1518. void MonitorPressure_Kepler(ModuleName mod)
  1519. {
  1520. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1521. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1522. {
  1523. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1524. }
  1525. else
  1526. {
  1527. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1528. }
  1529. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1530. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1531. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1532. //float chamber_pressure = GetMockChamberPressure(mod);
  1533. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1534. // soft pump & fast pump
  1535. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1536. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1537. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1538. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1539. {
  1540. //任意泵打开
  1541. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1542. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1543. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1544. {//开双泵
  1545. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1546. {
  1547. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1548. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1549. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1550. }
  1551. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1552. {
  1553. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1554. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1555. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1556. }
  1557. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1558. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1559. }
  1560. else if (fast_pump_vlv.Value)//开
  1561. {
  1562. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1563. {
  1564. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1565. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1566. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1567. }
  1568. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1569. {
  1570. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1571. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1572. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1573. }
  1574. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1575. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1576. }
  1577. else if (soft_pump_vlv.Value)
  1578. {
  1579. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1580. {
  1581. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1582. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1583. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1584. }
  1585. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1586. {
  1587. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1588. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1589. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1590. }
  1591. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1592. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1593. }
  1594. else if (turbo_pump_vlv.Value)
  1595. {
  1596. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1597. if ((getAiValue_ChamberPressure - 500) >= 0)
  1598. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1599. else
  1600. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1601. if ((getAiValue_ProcessPressure - 500) >= 0)
  1602. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1603. else
  1604. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1605. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1606. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1607. }
  1608. }
  1609. // fast vent & purge
  1610. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1611. if (vent_vlv.Value)
  1612. {
  1613. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1614. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1615. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1616. {
  1617. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1618. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1619. }
  1620. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1621. {
  1622. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1623. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1624. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1625. }
  1626. else
  1627. {
  1628. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1629. }
  1630. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1631. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1632. }
  1633. // Loadlock Pumping Valve
  1634. // 压力值越界,复位
  1635. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1636. if (chamber_pressure1 > ATM_PRESSURE)
  1637. {
  1638. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1639. }
  1640. else if (chamber_pressure1 < 20)
  1641. {
  1642. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1643. }
  1644. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1645. if (process_pressure1 > PROCESS_GAUGE)
  1646. {
  1647. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1648. }
  1649. else if (process_pressure1 < 20)
  1650. {
  1651. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1652. }
  1653. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1654. if (foreline_pressure > 10000)
  1655. {
  1656. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1657. }
  1658. else if (foreline_pressure < 150)
  1659. {
  1660. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1661. }
  1662. // ATM switch
  1663. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1664. // VAC switch
  1665. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1666. }
  1667. void MonitorPressure_Kepler2200(ModuleName mod)
  1668. {
  1669. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1670. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1671. {
  1672. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1673. }
  1674. else
  1675. {
  1676. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1677. }
  1678. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1679. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1680. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1681. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1682. //float chamber_pressure = GetMockChamberPressure(mod);
  1683. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1684. // soft pump & fast pump
  1685. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1686. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1687. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1688. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1689. {
  1690. //任意泵打开
  1691. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1692. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1693. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1694. {
  1695. //开双泵
  1696. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1697. {
  1698. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1699. }
  1700. else
  1701. {
  1702. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1703. }
  1704. //if (getAiValue_ChamberPressure > 1000)
  1705. //{
  1706. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1707. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1708. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1709. //}
  1710. //else if ( getAiValue_ChamberPressure <= 1000)
  1711. //{
  1712. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1713. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1714. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1715. //}
  1716. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1717. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1718. }
  1719. else if (fast_pump_vlv.Value)//开
  1720. {
  1721. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1722. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1723. else
  1724. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1725. }
  1726. else if (soft_pump_vlv.Value)
  1727. {
  1728. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1729. {
  1730. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1731. }
  1732. else
  1733. {
  1734. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1735. }
  1736. //if (getAiValue_ChamberPressure > 5000)
  1737. //{
  1738. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1739. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1740. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1741. //}
  1742. //else if (getAiValue_ChamberPressure <= 1000)
  1743. //{
  1744. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1745. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1746. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1747. //}
  1748. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1749. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1750. }
  1751. else if (turbo_pump_vlv.Value)
  1752. {
  1753. if ((getAiValue_ChamberPressure - 50) >= 0)
  1754. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1755. else
  1756. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1757. }
  1758. }
  1759. // fast vent & purge
  1760. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1761. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1762. if (vent_vlv.Value && gas_final_vlv.Value)
  1763. {
  1764. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1765. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1766. if (getAiValue_ChamberPressure > 1000)
  1767. {
  1768. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1769. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1770. }
  1771. else if (getAiValue_ChamberPressure <= 1000)
  1772. {
  1773. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1774. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1775. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1776. }
  1777. else
  1778. {
  1779. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1780. }
  1781. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1782. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1783. }
  1784. // Loadlock Pumping Valve
  1785. // 压力值越界,复位
  1786. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1787. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1788. {
  1789. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1790. }
  1791. else if (chamber_pressure1 < 20)
  1792. {
  1793. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1794. }
  1795. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1796. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1797. //{
  1798. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1799. //}
  1800. //else if (process_pressure1 < 20)
  1801. //{
  1802. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1803. //}
  1804. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1805. if (foreline_pressure > 1000)
  1806. {
  1807. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1808. }
  1809. else if (foreline_pressure < 15)
  1810. {
  1811. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1812. }
  1813. // ATM switch
  1814. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1815. // VAC switch
  1816. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1817. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1818. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1819. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1820. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1821. }
  1822. void MonitorSEMFPressure()
  1823. {
  1824. ModuleName mod = ModuleName.SETM;
  1825. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1826. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1827. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1828. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1829. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1830. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1831. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1832. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1833. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1834. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1835. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1836. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1837. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1838. {
  1839. if (getAiValue_TM_ChamberPressure > 10000)
  1840. {
  1841. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1842. }
  1843. else if (getAiValue_TM_ChamberPressure <= 10000)
  1844. {
  1845. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1846. }
  1847. }
  1848. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1849. {
  1850. if (getAiValue_TM_ChamberPressure > 10000)
  1851. {
  1852. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1853. }
  1854. else if (getAiValue_TM_ChamberPressure <= 10000)
  1855. {
  1856. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1857. }
  1858. }
  1859. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1860. {
  1861. if (getAiValue_VCE_ChamberPressure > 10000)
  1862. {
  1863. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1864. }
  1865. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1866. {
  1867. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1868. }
  1869. }
  1870. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1871. {
  1872. if (getAiValue_VCE_ChamberPressure > 10000)
  1873. {
  1874. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1875. }
  1876. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1877. {
  1878. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1879. }
  1880. }
  1881. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1882. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1883. {
  1884. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1885. }
  1886. else if (getAiValue_VCE_ChamberPressure < 20)
  1887. {
  1888. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1889. }
  1890. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1891. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1892. {
  1893. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1894. }
  1895. else if (getAiValue_TM_ChamberPressure < 20)
  1896. {
  1897. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1898. }
  1899. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1900. // VAC switch
  1901. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1902. }
  1903. void MonitorDEMFPressure()
  1904. {
  1905. ModuleName mod = ModuleName.DETM;
  1906. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1907. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1908. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1909. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1910. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1911. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1912. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1913. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1914. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1915. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1916. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1917. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1918. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1919. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1920. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1921. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1922. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1923. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1924. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1925. {
  1926. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1927. {
  1928. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1929. }
  1930. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1931. {
  1932. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1933. }
  1934. }
  1935. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1936. {
  1937. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1938. {
  1939. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1940. }
  1941. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1942. {
  1943. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1944. }
  1945. }
  1946. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1947. {
  1948. if (getAiValue_TM_ChamberPressure > 10000)
  1949. {
  1950. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1951. }
  1952. else if (getAiValue_TM_ChamberPressure <= 10000)
  1953. {
  1954. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1955. }
  1956. }
  1957. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1958. {
  1959. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1960. {
  1961. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1962. }
  1963. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1964. {
  1965. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1966. }
  1967. }
  1968. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1969. {
  1970. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1971. {
  1972. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1973. }
  1974. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1975. {
  1976. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1977. }
  1978. }
  1979. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1980. {
  1981. if (getAiValue_TM_ChamberPressure > 10000)
  1982. {
  1983. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1984. }
  1985. else if (getAiValue_TM_ChamberPressure <= 10000)
  1986. {
  1987. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1988. }
  1989. }
  1990. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1991. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1992. {
  1993. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1994. }
  1995. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  1996. {
  1997. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  1998. }
  1999. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2000. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2001. {
  2002. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2003. }
  2004. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2005. {
  2006. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2007. }
  2008. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2009. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2010. {
  2011. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2012. }
  2013. else if (getAiValue_TM_ChamberPressure < 20)
  2014. {
  2015. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2016. }
  2017. // ATM switch
  2018. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2019. // VAC switch
  2020. // ATM switch
  2021. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2022. // ATM switch
  2023. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2024. }
  2025. void MonitorMFKepler2200Pressure()
  2026. {
  2027. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2028. //{
  2029. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2030. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2031. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2032. ModuleName mod = ModuleName.TM;
  2033. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2034. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2035. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2036. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2037. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2038. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2039. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2040. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2041. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2042. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2043. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2044. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2045. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2046. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2047. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2048. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2049. {
  2050. if (getAiValue_LLA_ChamberPressure > 10000)
  2051. {
  2052. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2053. }
  2054. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2055. {
  2056. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2057. }
  2058. }
  2059. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2060. {
  2061. if (getAiValue_LLB_ChamberPressure > 10000)
  2062. {
  2063. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2064. }
  2065. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2066. {
  2067. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2068. }
  2069. }
  2070. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2071. {
  2072. if (getAiValue_TM_ChamberPressure > 10000)
  2073. {
  2074. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2075. }
  2076. else if (getAiValue_TM_ChamberPressure <= 10000)
  2077. {
  2078. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2079. }
  2080. }
  2081. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2082. {
  2083. if (getAiValue_LLA_ChamberPressure > 10000)
  2084. {
  2085. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2086. }
  2087. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2088. {
  2089. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2090. }
  2091. }
  2092. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2093. {
  2094. if (getAiValue_LLB_ChamberPressure > 10000)
  2095. {
  2096. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2097. }
  2098. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2099. {
  2100. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2101. }
  2102. }
  2103. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2104. {
  2105. if (getAiValue_TM_ChamberPressure > 10000)
  2106. {
  2107. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2108. }
  2109. else if (getAiValue_TM_ChamberPressure <= 10000)
  2110. {
  2111. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2112. }
  2113. }
  2114. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2115. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2116. {
  2117. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2118. }
  2119. else if (getAiValue_LLA_ChamberPressure < 3)
  2120. {
  2121. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 3);
  2122. }
  2123. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2124. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2125. {
  2126. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2127. }
  2128. else if (getAiValue_LLB_ChamberPressure < 3)
  2129. {
  2130. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3);
  2131. }
  2132. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2133. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2134. {
  2135. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2136. }
  2137. else if (getAiValue_TM_ChamberPressure < 3)
  2138. {
  2139. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2140. }
  2141. // ATM switch
  2142. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2143. // VAC switch
  2144. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2145. // ATM switch
  2146. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2147. // VAC switch
  2148. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2149. // ATM switch
  2150. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2151. // VAC switch
  2152. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa( VAC_SW_PRESSURE);
  2153. }
  2154. void MonitorMFKepler2300Pressure()
  2155. {
  2156. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2157. //{
  2158. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2159. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2160. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2161. ModuleName mod = ModuleName.TM;
  2162. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2163. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2164. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2165. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2166. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2167. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2168. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2169. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2170. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2171. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2172. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2173. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2174. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2175. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2176. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2177. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2178. {
  2179. if (getAiValue_LLA_ChamberPressure > 10000)
  2180. {
  2181. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2182. }
  2183. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2184. {
  2185. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2186. }
  2187. }
  2188. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2189. {
  2190. if (getAiValue_LLB_ChamberPressure > 10000)
  2191. {
  2192. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2193. }
  2194. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2195. {
  2196. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2197. }
  2198. }
  2199. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2200. {
  2201. if (getAiValue_TM_ChamberPressure > 10000)
  2202. {
  2203. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2204. }
  2205. else if (getAiValue_TM_ChamberPressure <= 10000)
  2206. {
  2207. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2208. }
  2209. }
  2210. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2211. {
  2212. if (getAiValue_LLA_ChamberPressure > 10000)
  2213. {
  2214. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2215. }
  2216. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2217. {
  2218. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2219. }
  2220. }
  2221. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2222. {
  2223. if (getAiValue_LLB_ChamberPressure > 10000)
  2224. {
  2225. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2226. }
  2227. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2228. {
  2229. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2230. }
  2231. }
  2232. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2233. {
  2234. if (getAiValue_TM_ChamberPressure > 10000)
  2235. {
  2236. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2237. }
  2238. else if (getAiValue_TM_ChamberPressure <= 10000)
  2239. {
  2240. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2241. }
  2242. }
  2243. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2244. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2245. {
  2246. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2247. }
  2248. else if (getAiValue_LLA_ChamberPressure < 20)
  2249. {
  2250. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2251. }
  2252. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2253. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2254. {
  2255. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2256. }
  2257. else if (getAiValue_LLB_ChamberPressure < 20)
  2258. {
  2259. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2260. }
  2261. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2262. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2263. {
  2264. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2265. }
  2266. else if (getAiValue_TM_ChamberPressure < 20)
  2267. {
  2268. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2269. }
  2270. // ATM switch
  2271. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2272. // VAC switch
  2273. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2274. // ATM switch
  2275. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2276. // VAC switch
  2277. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2278. // ATM switch
  2279. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2280. // VAC switch
  2281. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2282. // }
  2283. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2284. //{
  2285. // ModuleName mod = ModuleName.TM;
  2286. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2287. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2288. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2289. //}
  2290. }
  2291. void SetAiValue(string name, float value)
  2292. {
  2293. byte[] flow = BitConverter.GetBytes(value);
  2294. short high1 = BitConverter.ToInt16(flow, 0);
  2295. short low1 = BitConverter.ToInt16(flow, 2);
  2296. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2297. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2298. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2299. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2300. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2301. }
  2302. float GetAiValue(string name)
  2303. {
  2304. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2305. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2306. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2307. return flow;
  2308. }
  2309. float GetAoValue(string name)
  2310. {
  2311. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2312. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2313. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2314. return flow;
  2315. }
  2316. void MonitorTemperature(ModuleName mod)
  2317. {
  2318. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2319. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2320. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2321. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2322. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2323. // 底座
  2324. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2325. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2326. //{
  2327. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2328. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2329. //}
  2330. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2331. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2332. //{
  2333. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2334. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2335. //}
  2336. // Foreline
  2337. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2338. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2339. {
  2340. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2341. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2342. }
  2343. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2344. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2345. {
  2346. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2347. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2348. }
  2349. // Wall
  2350. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2351. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2352. {
  2353. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2354. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2355. }
  2356. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2357. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2358. {
  2359. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2360. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2361. }
  2362. }
  2363. void MonitorGas(ModuleName mod)
  2364. {
  2365. // gas
  2366. this.SimulateMFC(mod, 1);
  2367. this.SimulateMFC(mod, 2);
  2368. this.SimulateMFC(mod, 3);
  2369. this.SimulateMFC(mod, 4);
  2370. this.SimulateMFC(mod, 5);
  2371. this.SimulateMFC(mod, 6);
  2372. this.SimulateMFC(mod, 7);
  2373. this.SimulateMFC(mod, 8);
  2374. this.SimulateN2(mod);
  2375. }
  2376. void MonitorSEGas(ModuleName mod)
  2377. {
  2378. SimulateMFC(mod, 1);
  2379. SimulateMFC(mod, 2);
  2380. SimulateMFC(mod, 3);
  2381. SimulateMFC(mod, 4);
  2382. SimulateMFC(mod, 5);
  2383. SimulateMFC(mod, 6);
  2384. SimulateMFC(mod, 7);
  2385. SimulateMFC(mod, 8);
  2386. SimulateMFC(mod, 9);
  2387. SimulateMFC(mod, 10);
  2388. SimulateMFC(mod, 11);
  2389. SimulateMFC(mod, 12);
  2390. }
  2391. void MonitorDEGas(ModuleName mod)
  2392. {
  2393. SimulateMFC(mod, 1);
  2394. SimulateMFC(mod, 2);
  2395. SimulateMFC(mod, 3);
  2396. SimulateMFC(mod, 4);
  2397. SimulateMFC(mod, 5);
  2398. SimulateMFC(mod, 6);
  2399. SimulateMFC(mod, 7);
  2400. SimulateMFC(mod, 8);
  2401. SimulateMFC(mod, 9);
  2402. SimulateMFC(mod, 10);
  2403. SimulateMFC(mod, 11);
  2404. SimulateMFC(mod, 12);
  2405. }
  2406. private void SimulateMFC(ModuleName mod, byte gasNum)
  2407. {
  2408. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2409. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2410. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2411. }
  2412. private void SimulateN2(ModuleName mod)
  2413. {
  2414. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2415. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2416. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2417. }
  2418. private void SimulateSEHe(ModuleName mod)
  2419. {
  2420. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2421. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2422. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2423. }
  2424. private void SimulateDEHe(ModuleName mod)
  2425. {
  2426. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2427. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2428. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2429. }
  2430. private void SimulateHe(ModuleName mod)
  2431. {
  2432. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2433. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2434. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2435. }
  2436. void MonitorRF(ModuleName mod)
  2437. {
  2438. // RF generator
  2439. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2440. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2441. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2442. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2443. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2444. }
  2445. void MonitorIOPumpCtrl(ModuleName mod)
  2446. {
  2447. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2448. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2449. }
  2450. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2451. {
  2452. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2453. {
  2454. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2455. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2456. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2457. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2458. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2459. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2460. }
  2461. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2462. {
  2463. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2464. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2465. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2466. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2467. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2468. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2469. }
  2470. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2471. {
  2472. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2473. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2474. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2475. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2476. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2477. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2478. }
  2479. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2480. {
  2481. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2482. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2483. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2484. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2485. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2486. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2487. }
  2488. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2489. {
  2490. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2491. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2492. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2493. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2494. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2495. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2496. }
  2497. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2498. {
  2499. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2500. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2501. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2502. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2503. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2504. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2505. }
  2506. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2507. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2508. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2509. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2510. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2511. }
  2512. void MonitorKepler2200Heater(ModuleName mod)
  2513. {
  2514. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2515. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2516. }
  2517. public void Terminate()
  2518. {
  2519. _thread.Stop();
  2520. }
  2521. public void SetCoolantOutletTemp(string module, int Temp)
  2522. {
  2523. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2524. //{
  2525. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2526. //}
  2527. }
  2528. }
  2529. }