JetEfem.cs 33 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using System.Collections;
  7. using Venus_Core;
  8. using Venus_RT.Modules;
  9. using MECF.Framework.Common.CommonData;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using Aitex.Sorter.Common;
  13. using Aitex.Core.Common;
  14. using Aitex.Core.RT.SCCore;
  15. using Aitex.Core.RT.Log;
  16. using Aitex.Core.Util;
  17. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  18. using Venus_RT.Devices.YASKAWA;
  19. namespace Venus_RT.Devices.EFEM
  20. {
  21. class JetEfem : EfemBase
  22. {
  23. private RState _status;
  24. private bool _IsHomed;
  25. private string _waferPresence;
  26. private bool _bIsUnloadClamp;
  27. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  28. private readonly Loadport[] _LPMs = new Loadport[3];
  29. private readonly SignalTower _signalT = new SignalTower();
  30. private readonly AsyncSocket _socket;
  31. private EfemMessage _currentMsg;
  32. private EfemMessage _backroundMsg;
  33. private EfemMessage _revMsg;
  34. private bool _LiftIsUp = false;
  35. private bool _LiftIsDown = false;
  36. public override RState Status { get { return _status; } }
  37. public override bool IsHomed { get { return _IsHomed; } }
  38. public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  39. public override ILoadport this[ModuleName mod]
  40. {
  41. get
  42. {
  43. if (!ModuleHelper.IsLoadPort(mod))
  44. throw new ApplicationException($"{mod} is NOT Loadport");
  45. return _LPMs[mod - ModuleName.LP1];
  46. }
  47. }
  48. public override bool LiftIsUp { get { return _LiftIsUp; } }
  49. public override bool LiftIsDown { get { return _LiftIsDown; } }
  50. public JetEfem()
  51. {
  52. _socket = new AsyncSocket("");
  53. _socket.Connect(SC.GetStringValue($"EFEM.IPAddress"));
  54. _socket.OnDataChanged += OnReceiveMessage;
  55. _socket.OnErrorHappened += OnErrorHappen;
  56. _status = RState.Init;
  57. _IsHomed = false;
  58. _LPMs[0] = new Loadport(ModuleName.LP1, this);
  59. _LPMs[1] = new Loadport(ModuleName.LP2, this);
  60. _LPMs[2] = new Loadport(ModuleName.LP3, this);
  61. CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
  62. CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
  63. CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);
  64. Action<ModuleName, int> _subscribeLoc = (ModuleName module, int waferCount) => {
  65. if (ModuleHelper.IsInstalled(module))
  66. {
  67. WaferManager.Instance.SubscribeLocation(module, waferCount);
  68. }
  69. };
  70. WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
  71. WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
  72. // _subscribeLoc(ModuleName.EfemRobot, 2);
  73. //_subscribeLoc(ModuleName.Aligner1, 1);
  74. _subscribeLoc(ModuleName.Aligner2, 1);
  75. _subscribeLoc(ModuleName.Cooling1, 1);
  76. _subscribeLoc(ModuleName.Cooling2, 1);
  77. _subscribeLoc(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  78. _subscribeLoc(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  79. _subscribeLoc(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  80. }
  81. public override void Monitor()
  82. {
  83. }
  84. public override void Terminate()
  85. {
  86. }
  87. public override void Reset()
  88. {
  89. _status = RState.End;
  90. }
  91. public override void SetOnline(bool online)
  92. {
  93. }
  94. public override void SetOnline(ModuleName mod, bool online)
  95. {
  96. }
  97. public override void SetBusy(ModuleName mod, bool online)
  98. {
  99. _status = RState.Running;
  100. }
  101. public override bool HomeAll()
  102. {
  103. _currentMsg = new EfemMessage
  104. {
  105. Port = ModuleName.EFEM,
  106. Operation = EfemOperation.Home,
  107. Head = EfemMessage.MsgHead.MOV,
  108. Parameters = new List<string> { Constant.ModuleString[ModuleName.EFEM] }
  109. };
  110. _status = RState.Running;
  111. string data = _currentMsg.ToString();
  112. return _socket.Write(data);
  113. }
  114. public override bool Home(ModuleName mod)
  115. {
  116. if(ModuleHelper.IsLoadPort(mod))
  117. {
  118. _backroundMsg = new EfemMessage
  119. {
  120. Port = mod,
  121. Operation = EfemOperation.Home,
  122. Head = EfemMessage.MsgHead.MOV,
  123. Parameters = new List<string> { Constant.ModuleString[mod] }
  124. };
  125. return _socket.Write(_backroundMsg.ToString());
  126. }
  127. else
  128. {
  129. _currentMsg = new EfemMessage
  130. {
  131. Operation = EfemOperation.Home,
  132. Head = EfemMessage.MsgHead.MOV,
  133. Parameters = new List<string> { Constant.ModuleString[mod] }
  134. };
  135. _status = RState.Running;
  136. return _socket.Write(_currentMsg.ToString());
  137. }
  138. }
  139. public override bool OriginalSearch(ModuleName mod)
  140. {
  141. if (!CheckEfemStatus())
  142. return false;
  143. _currentMsg = new EfemMessage
  144. {
  145. Operation = EfemOperation.Orgsh,
  146. Head = EfemMessage.MsgHead.MOV,
  147. Parameters = new List<string>
  148. {
  149. Constant.ModuleString[mod]
  150. }
  151. };
  152. _status = RState.Running;
  153. return _socket.Write(_currentMsg.ToString());
  154. }
  155. public override bool CheckWaferPresence()
  156. {
  157. if (!CheckEfemStatus())
  158. return false;
  159. _currentMsg = new EfemMessage
  160. {
  161. Operation = EfemOperation.StateTrack,
  162. Head = EfemMessage.MsgHead.GET,
  163. Parameters = new List<string> { "TRACK" }
  164. };
  165. _waferPresence = string.Empty;
  166. _status = RState.Running;
  167. return _socket.Write(_currentMsg.ToString());
  168. }
  169. public override string GetWaferPresence()
  170. {
  171. return _waferPresence;
  172. }
  173. public override bool Halt()
  174. {
  175. _currentMsg = new EfemMessage
  176. {
  177. Operation = EfemOperation.EmsStop,
  178. Head = EfemMessage.MsgHead.MOV,
  179. };
  180. _status = RState.Running;
  181. return _socket.Write(_currentMsg.ToString());
  182. }
  183. public override bool ClearError()
  184. {
  185. _backroundMsg = new EfemMessage
  186. {
  187. Operation = EfemOperation.ClearError,
  188. Head = EfemMessage.MsgHead.SET,
  189. Parameters = new List<string> { "CLEAR" }
  190. };
  191. _status = RState.Running;
  192. return _socket.Write(_backroundMsg.ToString());
  193. }
  194. public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
  195. {
  196. if (!CheckEfemStatus())
  197. return false;
  198. _currentMsg = new EfemMessage
  199. {
  200. Operation = EfemOperation.Extend,
  201. Head = EfemMessage.MsgHead.MOV,
  202. Parameters = new List<string>
  203. {
  204. chamber.ToHWString(),
  205. ExtendPos.GB.ToString(),
  206. Constant.ArmString[hand],
  207. }
  208. };
  209. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  210. _status = RState.Running;
  211. return _socket.Write(_currentMsg.ToString());
  212. }
  213. public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
  214. {
  215. if (!CheckEfemStatus())
  216. return false;
  217. _currentMsg = new EfemMessage
  218. {
  219. Operation = EfemOperation.Extend,
  220. Head = EfemMessage.MsgHead.MOV,
  221. Parameters = new List<string>
  222. {
  223. chamber.ToHWString(),
  224. ExtendPos.G4.ToString(),
  225. Constant.ArmString[hand],
  226. }
  227. };
  228. _status = RState.Running;
  229. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  230. return _socket.Write(_currentMsg.ToString());
  231. }
  232. public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  233. {
  234. if (!CheckEfemStatus())
  235. return false;
  236. _currentMsg = new EfemMessage
  237. {
  238. Operation = EfemOperation.Extend,
  239. Head = EfemMessage.MsgHead.MOV,
  240. Parameters = new List<string>
  241. {
  242. chamber.ToHWString(),
  243. ExtendPos.PB.ToString(),
  244. Constant.ArmString[hand],
  245. }
  246. };
  247. _status = RState.Running;
  248. SetRobotMovingInfo(RobotAction.Extending, hand, chamber);
  249. return _socket.Write(_currentMsg.ToString());
  250. }
  251. public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  252. {
  253. if (!CheckEfemStatus())
  254. return false;
  255. _currentMsg = new EfemMessage
  256. {
  257. Operation = EfemOperation.Extend,
  258. Head = EfemMessage.MsgHead.MOV,
  259. Parameters = new List<string>
  260. {
  261. chamber.ToHWString(),
  262. ExtendPos.P4.ToString(),
  263. Constant.ArmString[hand],
  264. }
  265. };
  266. _status = RState.Running;
  267. SetRobotMovingInfo(RobotAction.Retracting, hand, chamber);
  268. return _socket.Write(_currentMsg.ToString());
  269. }
  270. public override bool Pick(ModuleName station, int slot, Hand hand)
  271. {
  272. if (!CheckEfemStatus())
  273. return false;
  274. Position SrcPos = new Position { Module= station,Slot= (byte)slot };
  275. _currentMsg = new EfemMessage
  276. {
  277. Operation = EfemOperation.Pick,
  278. Head = EfemMessage.MsgHead.MOV,
  279. Parameters = new List<string>
  280. {
  281. SrcPos.ToHWString(),
  282. Constant.ArmString[hand],
  283. //WaferSize.WS12.ToString()
  284. }
  285. };
  286. _status = RState.Running;
  287. SetRobotMovingInfo(RobotAction.Picking, hand, station);
  288. return _socket.Write(_currentMsg.ToString());
  289. }
  290. public override bool Place(ModuleName station, int slot, Hand hand)
  291. {
  292. if (!CheckEfemStatus())
  293. return false;
  294. Position DestPos = new Position { Module = station, Slot = (byte)slot };
  295. _currentMsg = new EfemMessage
  296. {
  297. Operation = EfemOperation.Place,
  298. Head = EfemMessage.MsgHead.MOV,
  299. Parameters = new List<string>
  300. {
  301. DestPos.ToHWString(),
  302. Constant.ArmString[hand],
  303. //WaferSize.WS12.ToString()
  304. }
  305. };
  306. _status = RState.Running;
  307. SetRobotMovingInfo(RobotAction.Placing, hand, station);
  308. return _socket.Write(_currentMsg.ToString());
  309. }
  310. public override bool Goto(ModuleName station, Hand hand)
  311. {
  312. if (!CheckEfemStatus())
  313. return false;
  314. Position DestPos = new Position { Module = station, Slot = (byte)0 };
  315. _currentMsg = new EfemMessage
  316. {
  317. Operation = EfemOperation.Goto,
  318. Head = EfemMessage.MsgHead.MOV,
  319. Parameters = new List<string>
  320. {
  321. DestPos.ToHWString(),
  322. Constant.ArmString[hand],
  323. WaferSize.WS12.ToString()
  324. }
  325. };
  326. _status = RState.Running;
  327. return _socket.Write(_currentMsg.ToString());
  328. }
  329. public override bool Grip(Hand blade, bool isGrip)
  330. {
  331. if (!CheckEfemStatus())
  332. return false;
  333. _currentMsg = new EfemMessage
  334. {
  335. Operation = EfemOperation.Grip,
  336. Head = EfemMessage.MsgHead.SET,
  337. Parameters = new List<string>
  338. {
  339. isGrip ? "ON":"OFF",
  340. Constant.ArmString[blade]
  341. }
  342. };
  343. _status = RState.Running;
  344. return _socket.Write(_currentMsg.ToString());
  345. }
  346. public override bool Map(ModuleName mod)
  347. {
  348. if (!CheckEfemStatus())
  349. return false;
  350. _currentMsg = new EfemMessage
  351. {
  352. Operation = EfemOperation.Map,
  353. Head = EfemMessage.MsgHead.MOV,
  354. Parameters = new List<string> { Constant.ModuleString[mod] }
  355. };
  356. _status = RState.Running;
  357. return _socket.Write(_currentMsg.ToString());
  358. }
  359. public override bool SetPinUp(ModuleName mod)
  360. {
  361. if (!CheckEfemStatus())
  362. return false;
  363. _currentMsg = new EfemMessage
  364. {
  365. Operation = EfemOperation.Lift,
  366. Head = EfemMessage.MsgHead.MOV,
  367. Parameters = new List<string> { Constant.ModuleString[mod], "UP" }
  368. };
  369. _status = RState.Running;
  370. return _socket.Write(_currentMsg.ToString());
  371. }
  372. public override bool SetPinDown(ModuleName mod)
  373. {
  374. if (!CheckEfemStatus())
  375. return false;
  376. _currentMsg = new EfemMessage
  377. {
  378. Operation = EfemOperation.Lift,
  379. Head = EfemMessage.MsgHead.MOV,
  380. Parameters = new List<string> { Constant.ModuleString[mod], "DOWN" }
  381. };
  382. _status = RState.Running;
  383. return _socket.Write(_currentMsg.ToString());
  384. }
  385. public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
  386. {
  387. if (!CheckEfemStatus())
  388. return false;
  389. _currentMsg = new EfemMessage
  390. {
  391. Operation = EfemOperation.Align,
  392. Head = EfemMessage.MsgHead.MOV,
  393. Parameters = new List<string> { $"A{angle.ToString("000.00")}" }
  394. };
  395. _status = RState.Running;
  396. return _socket.Write(_currentMsg.ToString());
  397. }
  398. public override bool SetLamp(LightType light, LightStatus status)
  399. {
  400. _backroundMsg = new EfemMessage
  401. {
  402. Operation = EfemOperation.Light,
  403. Head = EfemMessage.MsgHead.SET,
  404. Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
  405. };
  406. return _socket.Write(_backroundMsg.ToString());
  407. }
  408. public override bool Load(ModuleName mod)
  409. {
  410. _backroundMsg = new EfemMessage
  411. {
  412. Operation = EfemOperation.Load,
  413. Head = EfemMessage.MsgHead.MOV,
  414. Parameters = new List<string> { Constant.ModuleString[mod] }
  415. };
  416. return _socket.Write(_backroundMsg.ToString());
  417. }
  418. public override bool Unload(ModuleName mod)
  419. {
  420. _backroundMsg = new EfemMessage
  421. {
  422. Operation = EfemOperation.Unload,
  423. Head = EfemMessage.MsgHead.MOV,
  424. Parameters = new List<string> { Constant.ModuleString[mod] }
  425. };
  426. return _socket.Write(_backroundMsg.ToString());
  427. }
  428. public override bool ReadCarrierId(ModuleName mod)
  429. {
  430. _backroundMsg = new EfemMessage
  431. {
  432. Operation = EfemOperation.CarrierId,
  433. Head = EfemMessage.MsgHead.GET,
  434. Parameters = new List<string> { Constant.ModuleString[mod] }
  435. };
  436. return _socket.Write(_backroundMsg.ToString());
  437. }
  438. public override bool WriteCarrierId(ModuleName mod, string id)
  439. {
  440. _backroundMsg = new EfemMessage
  441. {
  442. Operation = EfemOperation.CarrierId,
  443. Head = EfemMessage.MsgHead.SET,
  444. Parameters = new List<string> { Constant.ModuleString[mod], id }
  445. };
  446. return _socket.Write(_backroundMsg.ToString());
  447. }
  448. public override bool ReadTagData(ModuleName mod)
  449. {
  450. _backroundMsg = new EfemMessage
  451. {
  452. Operation = EfemOperation.CarrierId,
  453. Head = EfemMessage.MsgHead.GET,
  454. Parameters = new List<string> { Constant.ModuleString[mod] }
  455. };
  456. return _socket.Write(_backroundMsg.ToString());
  457. }
  458. public override bool WriteTagData(ModuleName mod, string tagData)
  459. {
  460. _backroundMsg = new EfemMessage
  461. {
  462. Operation = EfemOperation.CarrierId,
  463. Head = EfemMessage.MsgHead.SET,
  464. Parameters = new List<string> { Constant.ModuleString[mod], tagData }
  465. };
  466. return _socket.Write(_backroundMsg.ToString());
  467. }
  468. public override bool Dock(ModuleName mod)
  469. {
  470. _backroundMsg = new EfemMessage
  471. {
  472. Operation = EfemOperation.Dock,
  473. Head = EfemMessage.MsgHead.MOV,
  474. Parameters = new List<string> { Constant.ModuleString[mod]}
  475. };
  476. return _socket.Write(_backroundMsg.ToString());
  477. }
  478. public override bool Undock(ModuleName mod)
  479. {
  480. _backroundMsg = new EfemMessage
  481. {
  482. Operation = EfemOperation.Undock,
  483. Head = EfemMessage.MsgHead.MOV,
  484. Parameters = new List<string> { Constant.ModuleString[mod]}
  485. };
  486. return _socket.Write(_backroundMsg.ToString());
  487. }
  488. public override bool Clamp(ModuleName mod, bool isUnloadClamp)
  489. {
  490. _backroundMsg = new EfemMessage
  491. {
  492. Operation = EfemOperation.Clamp,
  493. Head = EfemMessage.MsgHead.MOV,
  494. Parameters = new List<string> { Constant.ModuleString[mod] }
  495. };
  496. _bIsUnloadClamp = isUnloadClamp;
  497. return _socket.Write(_backroundMsg.ToString());
  498. }
  499. public override bool Unclamp(ModuleName mod)
  500. {
  501. _backroundMsg = new EfemMessage
  502. {
  503. Operation = EfemOperation.Unclamp,
  504. Head = EfemMessage.MsgHead.MOV,
  505. Parameters = new List<string> { Constant.ModuleString[mod] }
  506. };
  507. return _socket.Write(_backroundMsg.ToString());
  508. }
  509. public override bool SetThickness(ModuleName mod, string thickness)
  510. {
  511. _backroundMsg = new EfemMessage
  512. {
  513. Operation = EfemOperation.SetThickness,
  514. Head = EfemMessage.MsgHead.SET,
  515. Parameters = new List<string> { Constant.ModuleString[mod], thickness.ToUpper() }
  516. };
  517. return _socket.Write(_backroundMsg.ToString());
  518. }
  519. public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  520. {
  521. _robotMoveInfo.Action = action;
  522. _robotMoveInfo.ArmTarget = hand == Hand.Blade1 ? RobotArm.ArmA : (hand == Hand.Both ? RobotArm.Both : RobotArm.ArmB);
  523. _robotMoveInfo.BladeTarget = $"{_robotMoveInfo.ArmTarget}.{target}";
  524. }
  525. private void OnReceiveMessage(string RevMsg)
  526. {
  527. string[] msgs = RevMsg.Split('\r');
  528. foreach (var msg in msgs)
  529. {
  530. if (string.IsNullOrWhiteSpace(msg)) continue;
  531. EfemMessage rec_msg = msg.ToMessage();
  532. switch (rec_msg.Head)
  533. {
  534. case EfemMessage.MsgHead.ACK:
  535. if (msg.Contains("ERROR"))
  536. {
  537. _status = RState.End;
  538. _revMsg = rec_msg;
  539. }
  540. break;
  541. case EfemMessage.MsgHead.INF:
  542. // 收到INF之后发送ACK确认
  543. string strACK = rec_msg.RawString.Replace("INF", "ACK");
  544. SendBack(strACK);
  545. EfemMessage ack_msg = strACK.ToMessage();
  546. ack_msg.Direct = MsgDirection.To;
  547. _revMsg = rec_msg;
  548. OnCommandUpdated(rec_msg);
  549. SetRobotMovingInfo(RobotAction.None, Hand.Both, ModuleName.EfemRobot);
  550. break;
  551. case EfemMessage.MsgHead.EVT:
  552. OnEventUpdated(new EfemEventArgs
  553. {
  554. EvtStr = rec_msg.ToParamString(),
  555. Module = rec_msg.Port,
  556. CommandType = rec_msg.Operation,
  557. DataList = rec_msg.Data
  558. });
  559. break;
  560. case EfemMessage.MsgHead.NAK:
  561. case EfemMessage.MsgHead.CAN:
  562. case EfemMessage.MsgHead.ABS:
  563. OnErrorOccurred(rec_msg);
  564. break;
  565. }
  566. }
  567. }
  568. private void OnErrorHappen(ErrorEventArgs args)
  569. {
  570. _status = RState.Failed;
  571. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  572. }
  573. private void OnErrorOccurred(EfemMessage message)
  574. {
  575. string description = string.Empty;
  576. switch(message.Head)
  577. {
  578. case EfemMessage.MsgHead.NAK:
  579. description = Constant.FactorString[message.Factor];
  580. break;
  581. case EfemMessage.MsgHead.CAN:
  582. description = Constant.FactorString.ContainsKey(message.Factor) ? Constant.FactorString[message.Factor] : message.Factor;
  583. break;
  584. case EfemMessage.MsgHead.ABS:
  585. description = $"{message.Data[0]}, {message.Data[1]}";
  586. break;
  587. }
  588. _status = RState.Failed;
  589. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{message.Data[0]}], [{message.Factor}]");
  590. }
  591. private void OnEventUpdated(EfemEventArgs eArg)
  592. {
  593. switch (eArg.CommandType)
  594. {
  595. case EfemOperation.SigStatus:
  596. // EVT:SIGSTAT/Parameter/DATA1/DATA2;
  597. string sParam = eArg.DataList[0]; // "SYSTEM" or "Pn"
  598. // DATA1 & DATA2
  599. int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
  600. int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
  601. BitArray baData1 = new BitArray(new int[] { nData1 });
  602. BitArray baData2 = new BitArray(new int[] { nData2 });
  603. if (0 == string.Compare(sParam, Constant.SYS, true))
  604. {
  605. // EVT:SIGSTAT/System/00000000/00000004;
  606. // DATA1
  607. // Post warning and alarm
  608. if (!baData1[0]) // Bit[0] ON=Normal, OFF=Abnormal
  609. {
  610. //EV.Notify(EFEMVacuumPressureError);
  611. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM System vacuum source pressure low");
  612. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  613. }
  614. if (!baData1[1]) // Bit[1] ON=Normal, OFF=Abnormal
  615. {
  616. //EV.Notify(EFEMIonizerAlarm);
  617. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Ionizer compressed air error");
  618. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  619. }
  620. if (!baData1[2]) // Bit[2] ON=Normal, OFF=Abnormal
  621. {
  622. //EV.Notify(EFEMCDAError);
  623. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM System compressed air pressure low");
  624. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  625. }
  626. if (!baData1[4]) // Bit[4] ON=Normal, OFF=Abnormal
  627. {
  628. //EV.Notify(EFEMFlowGaugeSensorError);
  629. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Flow gauge sensor error");
  630. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  631. }
  632. if (!baData1[5]) // Bit[5] ON=Normal, OFF=Abnormal
  633. {
  634. //EV.Notify(EFEMLeakageAlarm);
  635. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Leakage alarm");
  636. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  637. }
  638. if (!baData1[10]) // Bit[10] ON=Normal, OFF=Abnormal
  639. {
  640. //EV.Notify(EFEMIonizerAlarm);
  641. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Ionizer alarm");
  642. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  643. }
  644. if (!baData1[11]) // Bit[11] ON=Normal, OFF=Abnormal
  645. {
  646. //EV.Notify(EFEMFFUAlarm);
  647. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "FFU alarm");
  648. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  649. }
  650. if (!baData1[13]) // Bit[13] ON=RUN, OFF=Maintain
  651. {
  652. //EV.Notify(EFEMOffline);
  653. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM switch to Maintain mode, HomeAll to recover");
  654. }
  655. // DATA2
  656. _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
  657. _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
  658. _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
  659. _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
  660. _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
  661. _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
  662. /* EFEM 程序中目前没有实现
  663. _RobotErr.CLK = baData2[27]; // bit 27
  664. bool bArmNotExtendLLA = baData2[30]; // bit 30
  665. bool bArmNotExtendLLB = baData2[31]; // bit 31
  666. */
  667. } // system event
  668. else
  669. {
  670. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  671. } // FOUP EVENT
  672. break;
  673. case EfemOperation.GetWaferInfo:
  674. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  675. break;
  676. default:
  677. break;
  678. }
  679. }
  680. private void OnCommandUpdated(EfemMessage message)
  681. {
  682. if(message.Operation != EfemOperation.ClearError &&
  683. message.Operation != EfemOperation.Ready &&
  684. _currentMsg?.Operation != message.Operation &&
  685. _backroundMsg.Operation != message.Operation &&
  686. message.Operation != EfemOperation.Home &&
  687. message.Operation != EfemOperation.Orgsh
  688. )
  689. {
  690. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EfemRobot, $"OnCommandUpdated() unexpected return: {message.Operation}, backround: {_backroundMsg.Operation}");
  691. return;
  692. }
  693. switch(message.Operation)
  694. {
  695. case EfemOperation.ClearError:
  696. case EfemOperation.Align:
  697. case EfemOperation.Map:
  698. case EfemOperation.Pick:
  699. case EfemOperation.Place:
  700. case EfemOperation.Extend:
  701. case EfemOperation.Goto:
  702. case EfemOperation.Orgsh:
  703. case EfemOperation.EmsStop:
  704. _status = RState.End;
  705. break;
  706. case EfemOperation.StateTrack:
  707. {
  708. _waferPresence = message.Data.Count >= 1 ? message.Data.First() : string.Empty;
  709. _IsHomed = true;
  710. _status = RState.End;
  711. }
  712. break;
  713. case EfemOperation.Home:
  714. {
  715. if(_currentMsg.Port == ModuleName.EFEM)
  716. {
  717. _LPMs[0].OnHomed();
  718. _LPMs[1].OnHomed();
  719. _LPMs[2].OnHomed();
  720. }
  721. else if(ModuleHelper.IsLoadPort(_currentMsg.Port))
  722. {
  723. _LPMs[_currentMsg.Port - ModuleName.LP1].OnHomed();
  724. }
  725. _status = RState.End;
  726. }
  727. break;
  728. case EfemOperation.Load:
  729. {
  730. _LPMs[message.Port - ModuleName.LP1].OnLoaded();
  731. }
  732. break;
  733. case EfemOperation.Unload:
  734. {
  735. _LPMs[message.Port - ModuleName.LP1].OnUnloaded();
  736. }
  737. break;
  738. case EfemOperation.CarrierId:
  739. {
  740. if(message.Head == EfemMessage.MsgHead.GET)
  741. {
  742. _LPMs[message.Port - ModuleName.LP1].OnCarrierIDRead(message.Data.First());
  743. }
  744. else
  745. {
  746. _LPMs[message.Port - ModuleName.LP1].OnCarrierIDWrite(message.Data.First());
  747. }
  748. }
  749. break;
  750. case EfemOperation.Clamp:
  751. {
  752. _LPMs[message.Port - ModuleName.LP1].OnClamped(_bIsUnloadClamp);
  753. }
  754. break;
  755. case EfemOperation.Unclamp:
  756. {
  757. _LPMs[message.Port - ModuleName.LP1].OnUnclamped();
  758. }
  759. break;
  760. case EfemOperation.Grip:
  761. {
  762. if (_currentMsg.Parameters[1] == "ARM2")
  763. {
  764. GripStateBlade1 = _currentMsg.Parameters[0];
  765. }
  766. else
  767. {
  768. GripStateBlade2 = _currentMsg.Parameters[0];
  769. }
  770. }
  771. break;
  772. case EfemOperation.Ready:
  773. {
  774. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
  775. }
  776. break;
  777. case EfemOperation.Lift:
  778. {
  779. if (_currentMsg.Parameters[1] == "UP")
  780. {
  781. _LiftIsUp = true;
  782. _LiftIsDown = false;
  783. _status = RState.End;
  784. }
  785. else if (_currentMsg.Parameters[1] == "DOWN")
  786. {
  787. _LiftIsUp = false;
  788. _LiftIsDown = true;
  789. _status = RState.End;
  790. }
  791. }
  792. break;
  793. }
  794. }
  795. async void SendBack(string data)
  796. {
  797. await Task.Run(()=> _socket.Write(data + '\r'));
  798. }
  799. }
  800. }