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Framework
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 rok temu |
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RecipeEditorControl
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3a078d515d
1.修复ui灯闪烁错误bug
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2 lat temu |
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ThirdParty
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49d9d6dd18
1、fixed ControlState Data;
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1 rok temu |
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Venus_Core
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 rok temu |
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Venus_MainPages
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 rok temu |
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Venus_RT
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03770198be
Skip auto Vent/pump while ATM mode.
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1 rok temu |
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Venus_Setup
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76a22f462f
1.根据tps提供sequence 添加控压功能
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1 rok temu |
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Venus_Simulator
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 rok temu |
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Venus_Themes
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 rok temu |
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Venus_UI
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 rok temu |
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packages
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34b0a3fbfa
1.添加recipe模块功能
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2 lat temu |
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Venus.sln
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caba8d94c6
Duplicated Wafer UI显示
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1 rok temu |
sangwq
03770198be
Skip auto Vent/pump while ATM mode.