zhouhr 01f4eaa5de fix the bug in SEMFSwapRoutine пре 11 месеци
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LoadPrepareRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator пре 11 месеци
LoadRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator пре 11 месеци
LoadWithSMIFRoutine.cs 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM пре 11 месеци
UnloadRoutine.cs 6748e4b29b fix the bug in UnloadRoutine as the name of vce InnerDoor is fixed. пре 11 месеци
UnloadWithSMIFRoutine.cs 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM пре 11 месеци
VCEHomeRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator пре 11 месеци
VceEntity.cs 01f4eaa5de fix the bug in SEMFSwapRoutine пре 11 месеци