MFHomeRoutine.cs 4.3 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using MECF.Framework.Common.Equipment;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. using Venus_RT.Modules.PMs;
  9. namespace Venus_RT.Modules.TM
  10. {
  11. class MFHomeRoutine : ModuleRoutineBase, IRoutine
  12. {
  13. private enum HomeStep
  14. {
  15. kLidDelay,
  16. kRobot,
  17. kRobotDelay,
  18. kSlitDoor,
  19. kSlitDoorDelay,
  20. kPump,
  21. kPumpDelay,
  22. kATMSwitch,
  23. kEnd,
  24. }
  25. private int _robotHomingTimeout = 120*1000;
  26. private int _slitDoorHomingTimeout = 20 * 1000;
  27. private int _pumpHomingTimeout = 120 * 1000;
  28. private int _pumpDownHomingTimeout = 600 * 1000;
  29. private readonly JetTM _JetTM;
  30. private readonly ITransferRobot _robot;
  31. private readonly MFPumpRoutine _pumpDownRoutine;
  32. public int currentStepNo;
  33. public MFHomeRoutine(JetTM jetTM, ITransferRobot robot, MFPumpRoutine pumpDownRoutine) : base(ModuleName.TM)
  34. {
  35. _JetTM = jetTM;
  36. _robot = robot;
  37. _pumpDownRoutine= pumpDownRoutine;
  38. Name = "TM Home";
  39. }
  40. public RState Start(params object[] objs)
  41. {
  42. currentStepNo = 0;
  43. if (!_JetTM.CheckLidClosed(Module))
  44. {
  45. Stop($"TM Lid Not Closed");
  46. return RState.Failed;
  47. }
  48. Reset();
  49. _robotHomingTimeout = SC.GetValue<int>($"{Module}.HomeTimeout") * 1000;
  50. return Runner.Start(Module, Name);
  51. }
  52. public RState Monitor()
  53. {
  54. Runner.Delay((int)HomeStep.kLidDelay,500)
  55. .Run((int)HomeStep.kRobot, HomeRobot, CheckRobotReady, _robotHomingTimeout)
  56. .Delay((int)HomeStep.kRobotDelay,500)
  57. .Run((int)HomeStep.kSlitDoor, HomeSlitDoor, CheckSlitDoorReady, _slitDoorHomingTimeout)
  58. .Delay((int)HomeStep.kSlitDoorDelay,500)
  59. .Run((int)HomeStep.kPump, HomePump, CheckPumpReady, _pumpHomingTimeout)
  60. .Delay((int)HomeStep.kPumpDelay,500)
  61. .Run((int)HomeStep.kATMSwitch, HomePumpDown, CheckATMSwitchReady, _pumpDownHomingTimeout)
  62. .End((int)HomeStep.kEnd, NullFun, _delay_50ms);
  63. return Runner.Status;
  64. }
  65. private bool HomeRobot()
  66. {
  67. currentStepNo = 1;
  68. if (_robot.Status == RState.End)
  69. {
  70. return true;
  71. }
  72. return _robot.Home();
  73. }
  74. private bool CheckRobotReady()
  75. {
  76. return _robot.Status == RState.End;
  77. }
  78. private bool HomeSlitDoor()
  79. {
  80. currentStepNo = 2;
  81. return _JetTM.CloseAllSlitDoor();
  82. }
  83. private bool CheckSlitDoorReady()
  84. {
  85. if (_JetTM.AllPMSlitDoorClosed && _JetTM.IsLLASlitDoorClosed && _JetTM.IsLLBSlitDoorClosed)
  86. {
  87. return true;
  88. }
  89. else
  90. {
  91. return false;
  92. }
  93. }
  94. private bool HomePump()
  95. {
  96. currentStepNo = 3;
  97. if ((bool)_JetTM.TMPumpIsRunning)
  98. {
  99. return true;
  100. }
  101. return _JetTM.TurnTMPump(true);
  102. }
  103. private bool CheckPumpReady()
  104. {
  105. if ((bool)_JetTM.TMPumpIsRunning)
  106. {
  107. return true;
  108. }
  109. else
  110. {
  111. return false;
  112. }
  113. }
  114. private bool HomePumpDown()
  115. {
  116. currentStepNo = 4;
  117. return _pumpDownRoutine.Start() == RState.Running;
  118. }
  119. private bool CheckATMSwitchReady()
  120. {
  121. var status = _pumpDownRoutine.Monitor();
  122. if (_JetTM.IsTMVac && status == RState.End)
  123. {
  124. _JetTM.TurnSoftPumpValve(ModuleName.TM, false);
  125. _JetTM.TurnFastPumpValve(ModuleName.TM, false);
  126. return true;
  127. }
  128. else
  129. {
  130. //_pumpDownRoutine.Monitor();
  131. return false;
  132. }
  133. }
  134. public void Abort()
  135. {
  136. }
  137. }
  138. }