using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Sorter.Common; using Venus_RT.Devices; using MECF.Framework.Common.Jobs; using MECF.Framework.Common.Routine; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using Venus_Core; using Aitex.Core.RT.Log; using Aitex.Core.Util; using MECF.Framework.Common.Schedulers; using System.Collections.Generic; using System; using MECF.Framework.Common.DBCore; using System.Runtime.InteropServices; namespace Venus_RT.Modules.TM { class MFPlaceRoutine : ModuleRoutineBase, IRoutine { private enum PlaceStep { WaitModuleReady, PreRotation, ModulePrepare, WaitPressreStable, OpenSlitDoor, Placing, QueryAwc, CloseSlitDoor, CheckAwc, NotifyDone, } private readonly JetTM _JetTM; private readonly ITransferRobot _robot; private int _placingTimeout = 20 * 1000; private ModuleName _targetModule; private LLEntity _llModule; int _targetSlot; Hand _hand; private DateTime _starttime; private bool _queryAwc; private int _autoVentOptInWafer = 0; private int _autoVentOptOutWafer = 4; private SequenceLLInOutPath _sequencePattern = SequenceLLInOutPath.DInDOut; private bool _bAutoMode = true; double maxPressureDifference; int awcAlarmRange; //private string _placeWaferId; public MFPlaceRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot) { _JetTM = tm; _robot = robot; Name = "Place"; if (SC.GetValue($"TM.QueryAWCOption") == 2 || SC.GetValue($"TM.QueryAWCOption") == 3) _queryAwc = true; else _queryAwc = false; } public RState Start(params object[] objs) { _starttime = DateTime.Now; if (!_robot.IsHomed) { LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first"); return RState.Failed; } var placeItem = (Queue)objs[0]; if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(placeItem)) return RState.Failed; _targetModule = placeItem.Peek().DestinationModule; _targetSlot = placeItem.Peek().DestinationSlot; _hand = placeItem.Peek().RobotHand; if (ModuleHelper.IsLoadLock(_targetModule) && ModuleHelper.IsInstalled(_targetModule)) { _llModule = Singleton.Instance.GetLL(_targetModule); } else { LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for place action"); return RState.Failed; } if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as TM Robot Arm: {_hand} has no wafer"); return RState.Failed; } //_placeWaferId= WaferManager.Instance.GetWaferID(ModuleName.TMRobot, (int)_hand); //var wafer = WaferManager.Instance.GetWafer(_placeWaferId); if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as {_targetModule} Slot {_targetSlot + 1} already has a wafer"); return RState.Failed; } Reset(); _placingTimeout = SC.GetValue($"TM.PlaceTimeout") * 1000; _autoVentOptInWafer = SC.GetValue("TM.LLAutoVentInWaferOpt"); _autoVentOptOutWafer = SC.GetValue("TM.LLAutoVentOutWaferOpt"); _sequencePattern = Singleton.Instance.LLInOutPath; _bAutoMode = Singleton.Instance.IsAutoMode; maxPressureDifference = SC.GetValue("System.TMLLMaxPressureDifference"); awcAlarmRange = SC.GetValue($"TM.EnterLLAWCAlarmLimit"); if (SC.GetValue($"TM.QueryAWCOption") == 2 || SC.GetValue($"TM.QueryAWCOption") == 3) _queryAwc = true; else _queryAwc = false; return Runner.Start(Module, $"Place to {_targetModule}"); } public RState Monitor() { Runner.Wait(PlaceStep.WaitModuleReady, () => _llModule.IsIdle, _delay_3m) .RunIf(PlaceStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone, _delay_30s) .Run(PlaceStep.ModulePrepare, ModulePrepare, IsModulePrepareReady) .Wait(PlaceStep.WaitPressreStable, TMLLPressureIsOK, _delay_60s) .Run(PlaceStep.OpenSlitDoor, OpenSlitDoor, IsSlitDoorOpen, _delay_30s) .Run(PlaceStep.Placing, Placing, WaitPlaceDone, _delay_60s) .RunIf(PlaceStep.QueryAwc, _queryAwc, QueryAwc, WaitQueryDoneAndRecord, _delay_30s) .Run(PlaceStep.CloseSlitDoor, CloseSlitDoor, IsSlitDoorClosed, _delay_30s) .RunIf(PlaceStep.CheckAwc, _queryAwc, CheckAwc) .End(PlaceStep.NotifyDone, NotifyLLDone, _delay_50ms); return Runner.Status; } private bool ModulePrepare() { _llModule.PostMsg(LLEntity.MSG.Prepare_TM); return true; } private bool IsModulePrepareReady() { return _llModule.Status == LLEntity.LLStatus.Ready_For_TM; } private bool OpenSlitDoor() { return _JetTM.TurnMFSlitDoor(_targetModule, true, out _); } private bool TMLLPressureIsOK() { if (RouteManager.IsATMMode) { return _JetTM.IsTMATM && _JetTM.IsModuleATM(_targetModule); } else { double llPressure = 0; if (_targetModule == ModuleName.LLA) { llPressure = _JetTM.LLAPressure; } else if (_targetModule == ModuleName.LLB) { llPressure = _JetTM.LLBPressure; } if (Math.Abs((llPressure - _JetTM.ChamberPressure)) < maxPressureDifference - 2) { return true; } else { return false; } } } private bool CloseSlitDoor() { return _JetTM.TurnMFSlitDoor(_targetModule, false, out _); } private bool IsSlitDoorOpen() { if (_targetModule == ModuleName.LLA) return _JetTM.IsLLASlitDoorOpen; else return _JetTM.IsLLBSlitDoorOpen; } private bool IsSlitDoorClosed() { if (_targetModule == ModuleName.LLA) return _JetTM.IsLLASlitDoorClosed; else return _JetTM.IsLLBSlitDoorClosed; } private bool Placing() { return _robot.Place(_targetModule, _targetSlot, _hand); } private bool WaitPlaceDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { //if (ModuleHelper.IsLoadLock(_targetModule)) //{ // _llModule.PostMsg(LLEntity.MSG.Transfer_TM_SlotInfo, _targetSlot); //} WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); return true; } else { Runner.Stop($"TM Robot Place failed, {_robot.Status}"); return true; } } private bool RotateArm() { _llModule.PostMsg(LLEntity.MSG.Prepare_TM); // Notify Loadlock to Serv pressure in advance for throughput enhancement return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _hand); } private bool WaitRotateDone() { if (_robot.Status == RState.Running) { if (Runner.StepElapsedMS > _placingTimeout) { WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); Runner.Stop($"TM Robot place wafer to {_targetModule}.{_targetSlot + 1} timeout, {_placingTimeout}ms"); return true; } return false; } else if (_robot.Status == RState.End) { return true; } else { WaferManager.Instance.CreateDuplicatedWafer(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}"); return true; } } private bool QueryAwc() { if (!_queryAwc) return true; if (_robot.QueryAwc()) return true; else return false; } private bool WaitQueryDoneAndRecord() { if (!_queryAwc) return true; if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { //已经move后的数据 string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}"; int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot; //查询完毕 插入数据 OffsetDataRecorder.RecordOffsetData( Guid.NewGuid().ToString(), ModuleName.TMRobot, 0, _targetModule, _targetSlot, _origin_module, _origin_slot, _hand, RobotArmPan.None, _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D, _starttime, DateTime.Now); return true; } else { Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}"); return true; } } private bool NotifyLLDone() { _llModule.PostMsg(LLEntity.MSG.TM_Exchange_Ready, false); return true; } private bool CheckAwc() { if (Math.Abs(_robot.Offset_X) > awcAlarmRange) { Stop($"Check AWC 失败, 当前 X AWC [{_robot.Offset_X}]um, 高于Alarm最大值: [{awcAlarmRange}]um"); return false; } if (Math.Abs(_robot.Offset_Y) > awcAlarmRange) { Stop($"Check AWC 失败, 当前 Y AWC [{_robot.Offset_Y}]um, 高于Alarm最大值: [{awcAlarmRange}]um"); return false; } return true; } public void Abort() { //_robot.Halt(); } } }