using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.SCCore; using Aitex.Core.RT.Log; using MECF.Framework.Common.Device.Bases; using MECF.Framework.Common.Equipment; using System; using Venus_Core; using Venus_RT.Devices.IODevices; using IoMfc = Venus_RT.Devices.IODevices.IoMfc; using System.Threading.Tasks; using Venus_RT.Modules; using Aitex.Core.RT.DataCenter; using System.Diagnostics; namespace Venus_RT.Devices { class JetKepler2200BPM : JetPMBase { private readonly IoLid _Lid; //private readonly IoLid _LidLoadlock; private readonly IoCylinder _slitDoor; //private readonly IoCylinder _LiftPin; //private readonly IoCylinder _LoadLockArm; private readonly IoValve _PVN21Valve; private readonly IoValve _PVN22Valve; private readonly IoValve _PV11Valve; private readonly IoValve _PV12Valve; private readonly IoValve _PV21Valve; private readonly IoValve _PV22Valve; private readonly IoValve _PV31Valve; private readonly IoValve _PV32Valve; private readonly IoValve _PV41Valve; private readonly IoValve _PV42Valve; private readonly IoValve _N2Valve; private readonly IoValve _PurgeValve; private readonly IoValve _Mfc1Valve; private readonly IoValve _Mfc2Valve; private readonly IoValve _Mfc3Valve; private readonly IoValve _Mfc4Valve; private readonly IoValve _Mfc5Valve; private readonly IoValve _Mfc6Valve; //private readonly IoValve _Mfc7Valve; //private readonly IoValve _Mfc8Valve; //private readonly IoValve _PVHe1Valve; //private readonly IoValve _PVHe2Valve; private readonly IoValve _GasFinalValve; private readonly IoValve _SoftPumpValve; private readonly IoValve _FastPumpValve; private readonly IoValve _TurboPumpPumpingValve; private readonly IoValve _TurboPumpPurgeValve; private readonly IoValve _GuageValve; private readonly IoValve _LoadlockVentValve; private readonly IoValve _LoadlockPumpingValve; private readonly IoSensor _ATM_sw; private readonly IoSensor _CDAPressure; private readonly IoSensor _ATM_Loadlock_sw; private readonly IoSensor _N2Pressure_sw; private readonly IoSensor _VAC_sw; private readonly IoSensor _WLK_sw; private readonly IoSensor _Water_Flow; private readonly IoSensor _RFG_Interlock; private readonly IoSensor _PM_Lid_Closed; private readonly IoSensor _Source_RF_Match_Interlock; private readonly IoSensor _PM_SlitDoor_Closed; private readonly IoSensor _TurboPumpInterlock; private readonly IoSensor _GasBoxDoor; private readonly IoSensor _GasBoxPressure; private readonly IoHighTemperatureHeater _highTemperatureHeater; private readonly PumpBase _MainPump; //private readonly ESC5HighVoltage _ESCHV; private readonly AdixenTurboPump _TurboPump; private readonly PendulumValve _pendulumValve; //private readonly ChillerBase _Chiller; private readonly RfPowerBase _Generator;//srf=>AdTecGenerator private readonly RfMatchBase _Match; //private readonly RfPowerBase _GeneratorBias;//brf=>CometRF private readonly RfMatchBase _RFBox; //private readonly IoSignalTower _SignalTower; private readonly IoHeater _ForelineTC; private readonly IoHeater _WallTC; private readonly IoPressureControl _pressureController; private readonly IoGasStick[] _gasLines; private readonly IoGasStick _gasLineN2; //private readonly IoBacksideHe _backsideHe; //private readonly IoMfc _heMfc; private readonly double _foreline_interlock_pressure = 750; private Stopwatch _GasRFStopWatch = new Stopwatch(); private bool _GasFlag = false; //private PressureType _PressureType; private double processPressureLimit; // 盖子的状态 public override bool IsLidClosed => _Lid.OFFFeedback; //public override bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback; public override bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback; public override bool IsPumpRunning => _MainPump.IsRunning; public override bool IsTurboPumpRunning => _TurboPump.IsRunning; public override bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed; public override bool IsISOOpen => _TurboPumpPumpingValve.Status; public override float TurboPumpSpeed => _TurboPump.Speed; public override bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning; public override bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning; public override bool IsCDA_OK => _CDAPressure.Value; public override bool IsFastPumpOpened => _FastPumpValve.Status; public override bool IsSoftPumpOpened => _SoftPumpValve.Status; public override bool IsMfc1ValveOpened => _Mfc1Valve.Status; public override bool IsMfc2ValveOpened => _Mfc2Valve.Status; public override bool IsMfc3ValveOpened => _Mfc3Valve.Status; public override bool IsMfc4ValveOpened => _Mfc4Valve.Status; public override bool IsMfc5ValveOpened => _Mfc5Valve.Status; public override bool IsMfc6ValveOpened => _Mfc6Valve.Status; public override bool IsMfc7ValveOpened => false; public override bool IsMfc8ValveOpened => false; public override bool IsGuageValveOpened => _GuageValve.Status; // 压力信号 public override bool IsATM => _ATM_sw.Value; public override bool PVN22ValveIsOpen => _PVN22Valve.Status; public override bool LiftPinIsDown => false; public override bool LiftPinIsUp => false; public override bool IsATMLoadlock => _ATM_Loadlock_sw.Value; public override bool IsVACLoadLock => LoadlockPressure <= 1000; public override bool IsVAC => _VAC_sw.Value; public override bool IsWaterFlowOk => true; public override bool IsWLK => _WLK_sw.Value; public override bool IsRFGInterlockOn => _RFG_Interlock.Value; public override bool PMLidClosed => _PM_Lid_Closed.Value; public override bool TurboPumpInterlock => _TurboPumpInterlock.Value; public override bool SourceRFMatchInterlock => _Source_RF_Match_Interlock.Value; public override bool SlitDoorClosed => _PM_SlitDoor_Closed.Value; //public override double ProcessLowPressure => _pendulumValve.Pressure; //public override double ProcessHighPressure => _pressureController.ProcessHigh.Value; public override double CalculationPressure { get { if (ProcessPressure < ConvertPressureUnit.ConvertmTorrToPa(2000)) { return ProcessPressure; } else { return ChamberPressure; } } } public override double ProcessPressure => _pendulumValve.Pressure; public override double ChamberPressure => _pressureController.PressureGauge.Value; public override double ForelinePressure => _pressureController.ForelineGauge.Value; public override double TargetPressure => ChamberPressure; //public override double LoadlockPressure => 0; //public override double ESCHePressure => 0; //public override int ESCOutputVoltage => _ESCHV.OutputVoltage; //public override double ESCPositiveOutputCurrent => _ESCHV.PositiveOutputCurrent; //public override double ESCNegativeOutputCurrent => _ESCHV.NegativeOutputCurrent; //public override bool IsHVOn => _ESCHV.IsOn; //public override float CoolantInletTempFB => 0; //public override float CoolantOutletTempFB => 0; //public override bool ChillerIsRunning => false; //Loadlock_Arm //public override bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback; //public override bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback; ////Loadlock_Arm DO //public override bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint; //public override bool LoadlockArmExtend => _LoadLockArm.ONSetPoint; public override float ReflectPower => _Generator.ReflectPower; //public override float BiasReflectPower => _GeneratorBias.ReflectPower; public override float ForwardPower => _Generator.ForwardPower; //public override bool BackSideHeOutOfRange => _backsideHe.OutOfRange; public override float RFMatchC1 => _Match != null ? _Match.TunePosition1 : 0; public override float RFMatchC2 => _Match != null ? _Match.TunePosition2 : 0; public override float RFBoxC1 => _RFBox != null ? _RFBox.TunePosition1 : 0; //public override float BiasRFMatchC2 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0; public override double MFC1FeedBack => DEVICE.GetDevice($"{Module}.MfcGas1").FeedBack; public override double MFC2FeedBack => DEVICE.GetDevice($"{Module}.MfcGas2").FeedBack; public override double MFC3FeedBack => DEVICE.GetDevice($"{Module}.MfcGas3").FeedBack; public override double MFC4FeedBack => DEVICE.GetDevice($"{Module}.MfcGas4").FeedBack; public override double MFC5FeedBack => DEVICE.GetDevice($"{Module}.MfcGas5").FeedBack; public override double MFC6FeedBack => DEVICE.GetDevice($"{Module}.MfcGas6").FeedBack; public override float ChamberTemperature => _highTemperatureHeater.HighTemperatureHighHeaterTemperature; public override float PendulumPressure => _pendulumValve.Pressure; public override float PendulumPosition => _pendulumValve.Position; public new ModuleName Module { get; } //public override MovementPosition LiftPinPosition //{ // get // { // MovementPosition pos = MovementPosition.Unknown; // if (_LiftPin == null) // { // return MovementPosition.Down; // } // if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback) // { // pos = MovementPosition.Up; // } // else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback) // { // pos = MovementPosition.Down; // } // return pos; // } //} public override bool CheckAtm() { return _ATM_sw.Value && ChamberPressure > 700000; } public override bool CheckSlitDoorOpen() { return _slitDoor.State == CylinderState.Open; } public override bool CheckSlitDoorClose() { return _slitDoor.State == CylinderState.Close; } //public override bool CheckLiftUp() //{ // return _LiftPin.State == CylinderState.Open; //} //public override bool CheckLiftDown() //{ // return _LiftPin.State == CylinderState.Close; //} public override double TotalGasSetpoint { get { double sum = 0; foreach (var gas in _gasLines) { sum += gas.FlowSP; } return sum; } } public override bool HasGasOutOfRange { get { foreach (var gas in _gasLines) { if (!gas.IsOutOfRange) return false; } return true; } } public override bool PendulumValveIsOpen() { return _pendulumValve.IsOpen; } #region 构造函数 public JetKepler2200BPM(ModuleName moduleName) : base(moduleName) { Module = moduleName; _Lid = DEVICE.GetDevice($"{Module}.{VenusDevice.Lid}"); //_LidLoadlock = DEVICE.GetDevice($"{Module}.{VenusDevice.LidLoadlock}"); _slitDoor = DEVICE.GetDevice($"{Module}.{VenusDevice.SlitDoor}"); //_LiftPin = DEVICE.GetDevice($"{Module}.{VenusDevice.LiftPin}"); //_LoadLockArm = DEVICE.GetDevice($"{Module}.{VenusDevice.LoadLockArm}"); _PVN21Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVN21}"); _PVN22Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVN22}"); _PV11Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV11}"); _PV12Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV12}"); _PV21Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV21}"); _PV22Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV22}"); _PV31Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV31}"); _PV32Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV32}"); _PV41Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV41}"); _PV42Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV42}"); _N2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveN2}"); _PurgeValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePurge}"); _Mfc1Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc1}"); _Mfc2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc3Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc3}"); _Mfc4Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc4}"); _Mfc5Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc5}"); _Mfc6Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc6}"); //_Mfc7Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc7}"); //_Mfc8Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc8}"); //_PVHe1Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe1}"); //_PVHe2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe2}"); _GasFinalValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveGasFinal}"); _SoftPumpValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveSoftPump}"); _FastPumpValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveFastPump}"); _TurboPumpPumpingValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveTurboPumpPumping}"); _TurboPumpPurgeValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveTurboPumpPurge}"); _GuageValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveGuage}"); _LoadlockVentValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveLoadlockVent}"); _LoadlockPumpingValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveLoadlockPumping}"); //_heMfc = DEVICE.GetDevice($"{Module}.MfcHe"); _ATM_sw = DEVICE.GetDevice($"{Module}.SensorATMSwitch"); _ATM_Loadlock_sw = DEVICE.GetDevice($"{Module}.SensorLoadlockATMSwitch"); _N2Pressure_sw = DEVICE.GetDevice($"{Module}.N2PressureOk"); _VAC_sw = DEVICE.GetDevice($"{Module}.SensorVacSwitch"); _Water_Flow = DEVICE.GetDevice($"{Module}.SensorWaterFlowOk"); _WLK_sw = DEVICE.GetDevice($"{Module}.SensorWaterLeakOk"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _RFG_Interlock = DEVICE.GetDevice($"{Module}.GeneratorInterlock"); _PM_Lid_Closed = DEVICE.GetDevice($"{Module}.SensorPMLidClosed"); _Source_RF_Match_Interlock = DEVICE.GetDevice($"{Module}.RFMatchInterlock"); _PM_SlitDoor_Closed = DEVICE.GetDevice($"{Module}.SensorSlitDoorClosed"); _TurboPumpInterlock = DEVICE.GetDevice($"{Module}.TurboPumpInterlock"); _GasBoxDoor = DEVICE.GetDevice($"{Module}.GasBoxDoorSW"); _GasBoxPressure = DEVICE.GetDevice($"{Module}.GasBoxPressureSW"); _ForelineTC = DEVICE.GetDevice($"{Module}.ForelineHeater"); _WallTC = DEVICE.GetDevice($"{Module}.WallHeater"); //_SignalTower = DEVICE.GetDevice($"{Module}.SignalTower"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _pressureController = DEVICE.GetDevice($"{Module}.{VenusDevice.PressureControl}"); _gasLines = new IoGasStick[8]; for (int index = 0; index < 8; index++) { _gasLines[index] = DEVICE.GetDevice($"{Module}.GasStick{index + 1}"); } _gasLineN2 = DEVICE.GetDevice($"{Module}.GasStickN2"); //_backsideHe = DEVICE.GetDevice($"{Module}.BacksideHelium"); _highTemperatureHeater = DEVICE.GetDevice($"{Module}.HighTemperatureHeater"); _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); // RS232 Dry pump, SKY if (SC.GetValue($"{Module}.DryPump.CommunicationType") == (int)CommunicationType.RS232) { if (SC.GetValue($"{Module}.DryPump.MFG") == (int)DryPumpMFG.SKY) { _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); } else if (SC.GetValue($"{Module}.DryPump.MFG") == (int)DryPumpMFG.Edwards) { _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); } } //_ESCHV = DEVICE.GetDevice($"{Module}.{VenusDevice.ESCHV}"); _TurboPump = DEVICE.GetDevice($"{Module}.{VenusDevice.TurboPump}"); _pendulumValve = DEVICE.GetDevice($"{Module}.{VenusDevice.PendulumValve}"); //if (SC.GetValue($"{Module}.Chiller.EnableChiller") && // SC.GetValue($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232) //{ // if (SC.GetValue($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC) // { // _Chiller = DEVICE.GetDevice($"{Module}.{VenusDevice.Chiller}"); // } // else if (SC.GetValue($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS) // { // _Chiller = DEVICE.GetDevice($"{Module}.{VenusDevice.Chiller}"); // } //} // RS223 AdTec Generator if (SC.GetValue($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{Module}.Rf.MFG") == (int)GeneratorMFG.AdTec) { _Generator = DEVICE.GetDevice($"{Module}.{VenusDevice.Rf}"); } // Ethernet Comet Generator Bias //if (SC.GetValue($"{Module}.BiasRf.EnableBiasRF")) //{ // if (SC.GetValue($"{Module}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet && // SC.GetValue($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.Comet) // { // _GeneratorBias = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasRf}"); // } // else if (SC.GetValue($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.AdTec) // { // _GeneratorBias = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasRf}"); // } //} processPressureLimit = ConvertPressureUnit.ConvertmTorrToPa(1995); if (SC.GetValue($"{Module}.Match.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{Module}.Match.MFG") == (int)MatchMFG.AdTec) { _Match = DEVICE.GetDevice($"{Module}.{VenusDevice.Match}"); } else if ( SC.GetValue($"{Module}.Match.MFG") == (int)MatchMFG.Revtech) { _Match = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasMatch}"); } _GasRFStopWatch.Stop(); if (SC.GetValue($"{Module}.RFBox.EnableMatch") && SC.GetValue($"{Module}.RFBox.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{Module}.RFBox.MFG") == (int)MatchMFG.AdTec) { _RFBox = DEVICE.GetDevice($"{Module}.{VenusDevice.RFBox}"); } else if (SC.GetValue($"{Module}.RFBox.EnableMatch") && SC.GetValue($"{Module}.RFBox.MFG") == (int)MatchMFG.Revtech) { _RFBox = DEVICE.GetDevice($"{Module}.{VenusDevice.RFBox}"); } _foreline_interlock_pressure = SC.GetValue($"{Module}.ForelineInterlockPressure"); //_PressureType = (PressureType)SC.GetValue("System.PressureUnitType"); DATA.Subscribe($"{Name}.SCR1", () => GetAiValue($"{Module}.AI_CHB_M-HT_SCR1_PWR_OUT")); DATA.Subscribe($"{Name}.SCR2", () => GetAiValue($"{Module}.AI_CHB_M-HT_SCR2_PWR_OUT")); DATA.Subscribe($"{Name}.AI_CHB_M-HT_Reference_Power_Output", () => GetAiValue($"{Module}.AI_CHB_M-HT_Reference_Power_Output")); DATA.Subscribe($"{Name}.AI_CHB_M-HT_Max_Power", () => GetAiValue($"{Module}.AI_CHB_M-HT_Max_Power")); DATA.Subscribe($"{Name}.AI_CHB_M-HT_Min_Power", () => GetAiValue($"{Module}.AI_CHB_M-HT_Min_Power")); DATA.Subscribe($"{Name}.AI_CHB_M-HT_Current_Speed", () => GetAiValue($"{Module}.AI_CHB_M-HT_Current_Speed")); } #endregion public async override void CloseValves(int? delayTime = null) { _PVN21Valve.TurnValve(false, out _); // _PVN22Valve.TurnValve(false, out _); _PV11Valve.TurnValve(false, out _); _PV12Valve.TurnValve(false, out _); _PV21Valve.TurnValve(false, out _); _PV22Valve.TurnValve(false, out _); _PV31Valve.TurnValve(false, out _); _PV32Valve.TurnValve(false, out _); _PV41Valve.TurnValve(false, out _); _PV42Valve.TurnValve(false, out _); //_PVHe1Valve.TurnValve(false, out _); //_PVHe2Valve.TurnValve(false, out _); _SoftPumpValve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _TurboPumpPumpingValve.TurnValve(false, out _); _TurboPumpPurgeValve.TurnValve(false, out _); _GuageValve.TurnValve(false, out _); _N2Valve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _Mfc1Valve.TurnValve(false, out _); _Mfc2Valve.TurnValve(false, out _); _Mfc3Valve.TurnValve(false, out _); _Mfc4Valve.TurnValve(false, out _); _Mfc5Valve.TurnValve(false, out _); _Mfc6Valve.TurnValve(false, out _); //_Mfc7Valve.TurnValve(false, out _); //_Mfc8Valve.TurnValve(false, out _); foreach (var stick in _gasLines) { stick.Stop(); } if (delayTime != null) { await Task.Delay((int)delayTime); } _GasFinalValve.TurnValve(false, out _); _PurgeValve.TurnValve(false, out _); } public override void TurnDryPump(bool on) { //_pressureController.StartPump(on); _MainPump?.SetPumpOnOff(on); } public override void TurnTurboPump(bool on) { _TurboPump?.SetPumpOnOff(on); } public override void OpenValve(ValveType vlvType, bool on) { switch (vlvType) { case ValveType.PVN21: _PVN21Valve.TurnValve(on, out _); break; case ValveType.PVN22: _PVN22Valve.TurnValve(on, out _); LOG.Write(eEvent.EV_DEVICE_INFO, Module, $"{(on ? "打开" : "关闭")} 阀 {vlvType.ToString()}"); break; case ValveType.PV11: _PV11Valve.TurnValve(on, out _); break; case ValveType.PV12: _PV12Valve.TurnValve(on, out _); break; case ValveType.PV21: _PV21Valve.TurnValve(on, out _); break; case ValveType.PV22: _PV22Valve.TurnValve(on, out _); break; case ValveType.PV31: _PV31Valve.TurnValve(on, out _); break; case ValveType.PV32: _PV32Valve.TurnValve(on, out _); break; case ValveType.PV41: _PV41Valve.TurnValve(on, out _); break; case ValveType.PV42: _PV42Valve.TurnValve(on, out _); break; case ValveType.N2: _N2Valve.TurnValve(on, out _); break; case ValveType.Purge: _PurgeValve.TurnValve(on, out _); break; //case ValveType.PVHe1: // _PVHe1Valve.TurnValve(on, out _); // break; //case ValveType.PVHe2: // _PVHe2Valve.TurnValve(on, out _); // break; case ValveType.GasFinal: _GasFinalValve.TurnValve(on, out _); break; case ValveType.SoftPump: _SoftPumpValve.TurnValve(on, out _); break; case ValveType.FastPump: _FastPumpValve.TurnValve(on, out _); break; case ValveType.TurboPumpPumping: _TurboPumpPumpingValve.TurnValve(on, out _); break; case ValveType.TurboPumpPurge: _TurboPumpPurgeValve.TurnValve(on, out _); break; case ValveType.Guage: _GuageValve.TurnValve(on, out _); break; case ValveType.LoadlockVent: _LoadlockVentValve.TurnValve(on, out _); break; case ValveType.LoadlockPumping: _LoadlockPumpingValve.TurnValve(on, out _); break; case ValveType.Mfc1: _Mfc1Valve.TurnValve(on, out _); break; case ValveType.Mfc2: _Mfc2Valve.TurnValve(on, out _); break; case ValveType.Mfc3: _Mfc3Valve.TurnValve(on, out _); break; case ValveType.Mfc4: _Mfc4Valve.TurnValve(on, out _); break; case ValveType.Mfc5: _Mfc5Valve.TurnValve(on, out _); break; case ValveType.Mfc6: _Mfc6Valve.TurnValve(on, out _); break; //case ValveType.Mfc7: // _Mfc7Valve.TurnValve(on, out _); // break; //case ValveType.Mfc8: // _Mfc8Valve.TurnValve(on, out _); // break; //default: // throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}"); } } public override void Monitor() { foreach (var gas in _gasLines) { gas.Monitor(); } CheckPermanentInterlock(); } protected override void CheckPermanentInterlock() { if (ProcessPressure >= processPressureLimit && _GuageValve.SetPoint) { _GuageValve.TurnValve(false, out _); LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ProcessPressure} exceed {processPressureLimit} Pa, Guage Valve (DO-31) closed automaticlly."); } } public override void CheckIdleInterlock() { if (ForelinePressure > _foreline_interlock_pressure) { if (_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen) { _pendulumValve.TurnValve(false); _TurboPumpPurgeValve.TurnValve(false, out _); _TurboPumpPumpingValve.TurnValve(false, out _); LOG.Write(eEvent.ERR_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} Pa, Pendulum valve & PV6 & PV7 closed automaticlly."); } } } public override void Home() { //if (_slitDoor.State == CylinderState.Open) //{ // SetSlitDoor(false, out _); //} //2023/03/08添加 OpenValve(ValveType.PVN22, true); } //public override bool SetSlitDoor(bool open, out string reason) //{ // if (open) // { // if (RouteManager.IsATMMode) // { // if (!IsATM) // { // reason = $"{Module} is not ATM, can not open slit door"; // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason); // return false; // } // if (!IsTMATM) // { // reason = $"LoadLock is not ATM, can not open slit door"; // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason); // return false; // } // } // else // { // double maxPressureDifference = SC.GetValue("System.PMTMMaxPressureDifference"); // if (Math.Abs(TMPressure - ChamberPressure) > maxPressureDifference) // { // reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{ChamberPressure}"; // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason); // return false; // } // } // } // return _slitDoor.SetCylinder(open, out reason); //} //public override bool RetractWafer() //{ // return _LoadLockArm.SetCylinder(false, out _); //} //public override bool ExtendWafer() //{ // return _LoadLockArm.SetCylinder(true, out _); //} public override bool FlowGas(int gasNum, double val) { if (_gasLines.Length <= gasNum) return false; //double value = (val / _gasLines[gasNum]._mfc.Scale) * 100; //double setPoint =Math.Round( value / 8000 * _gasLines[gasNum]._mfc.Scale,2); _gasLines[gasNum].Flow(val); return true; } public override bool StopGas(int gasNum) { if (_gasLines.Length <= gasNum) return false; _gasLines[gasNum].Stop(); return true; } public override bool FlowN2(double val) { _gasLineN2.Flow(val); return true; } public override bool StopN2() { _gasLineN2.Stop(); return true; } public override void StopAllGases() { foreach (var line in _gasLines) { line.Stop(); } } public override bool TurnPendulumValve(bool on) { return _pendulumValve.TurnValve(on); } public override bool SetPVPressure(float pressure) { return _pendulumValve.SetPressure(pressure); } public override bool SetPVPostion(float position) { return _pendulumValve.SetPosition(position); } public override float GetPVPosition() { return _pendulumValve.Position; } //public override async void HeatChiller(ChillerType chillerType, double value, double offset) //{ // _Chiller?.SetChillerTemp((float)value, (float)offset); // await Task.Delay(1000); // _Chiller?.SetChillerOnOff(true); //} //public override void OnOffChiller(ChillerType chillerType, bool onoff) //{ // _Chiller?.SetChillerOnOff(onoff); //} //public override bool CheckChillerStatus() //{ // return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError; //} public override void SetGeneratorCommunicationMode(int mode) { _Generator?.SetCommunicationMode(mode); } public override bool GeneratorPowerOn(bool on) { if (_Generator == null) return false; if (on && !IsRFGInterlockOn) { LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足"); return false; } return _Generator.SetPowerOnOff(on, out _); } public override bool GeneratorSetpower(float val) { if (_Generator == null) return false; if (Math.Abs(val) > 0.01) _Generator.SetPower((ushort)val); return true; } public override bool SetRFBoxC1Position(float c1) { if (_RFBox == null) return false; _RFBox.SetMatchPositionC1(c1, out _); return true; } //public override bool GeneratorBiasPowerOn(bool on) //{ // if (_GeneratorBias == null) return false; // if (on && !IsRFGInterlockOn) // { // LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足"); // return false; // } // return _GeneratorBias.SetPowerOnOff(on, out _); //} //public override bool GeneratorBiasSetpower(float val) //{ // if (_GeneratorBias == null) return false; // if (Math.Abs(val) > 0.01) // _GeneratorBias.SetPower((ushort)val); // return true; //} //public override bool OnOffSetESCHV(bool val) //{ // return _ESCHV.SetPowerOnOff(val); //} public override bool SetWallTCTemperature(float value) { return _WallTC.RampTemp(value); } //public override bool GeneratorBiasSetMatchMode(bool val) //{ // if (_GeneratorBias == null) return false; // string reason = string.Empty; // _GeneratorBias.SetMatchingAutoMode(val, out reason); // return true; //} public override bool SetMatchPosition(float c1, float c2) { if (_Match == null) return false; string reason = string.Empty; _Match.SetMatchPosition(c1, c2, out reason); return true; } public override bool SetMatchWorkMode(MatchWorkMode matchWorkMode) { if (_Match == null) return false; if (matchWorkMode == MatchWorkMode.Auto) { return _Match.SetMatchMode(EnumRfMatchTuneMode.Auto, out _); } else if (matchWorkMode == MatchWorkMode.Manual) { return _Match.SetMatchMode(EnumRfMatchTuneMode.Manual, out _); } return false; } public override bool CheckGeneratorAndHVInterlock(VenusDevice device) { eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV; if (!PMLidClosed) { LOG.Write(evt, Module, $"Cannot Power ON {device} as PM Lid is Open."); return false; } if (!IsVAC) { LOG.Write(evt, Module, $"Cannot Power ON {device} as PM is not Vacuum."); return false; } if (!IsWaterFlowOk) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF."); return false; } if (!IsRFGInterlockOn) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF."); return false; } if (!SlitDoorClosed) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Slit Door is open."); return false; } return true; } //public override bool SetBacksideHeThreshold(int nMin, int nMax) //{ // if (_backsideHe == null) return false; // return _backsideHe.SetFlowThreshold(nMin, nMax); //} public override bool StartControlPressure(int pressureSetpoint, int flowSetpoint) { OpenValve(ValveType.Purge, true); OpenValve(ValveType.N2, true); OpenValve(ValveType.PVN22, true); OpenValve(ValveType.GasFinal, false); OpenValve(ValveType.TurboPumpPumping, true); TurnPendulumValve(true); SetPVPressure(pressureSetpoint); return true; } public async override Task AbortControlPressure() { OpenValve(ValveType.N2, false); //OpenValve(ValveType.PVN22, false); await Task.Delay(500); OpenValve(ValveType.Purge, false); return true; } public override bool HighTemperatureHeaterGotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition) { return _highTemperatureHeater.GotoPosition(highTemperatureHeaterPosition); } public override bool SetHighTemperatureHeaterTemperature(int temperature) { _highTemperatureHeater.HighTemperatureHighHeaterTemperature = temperature; return true; } public override bool SetHighTemperatureHeaterRatio(int ratio) { _highTemperatureHeater.HighTemperatureHeaterRatio = ratio; return true; } public override bool PreparePlace() { //if (!SetSlitDoor(true, out string reason)) //{ // LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Open failed:{reason}"); // return false; //} return _highTemperatureHeater.GotoPosition(HighTemperatureHeaterPosition.Position1); } public override bool PreparePick() { //if (!SetSlitDoor(true, out string reason)) //{ // LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Open failed:{reason}"); // return false; //} return _highTemperatureHeater.GotoPosition(HighTemperatureHeaterPosition.Position1); } public override bool PreparePlaceIsOK() { return _highTemperatureHeater.CurrentPosition == HighTemperatureHeaterPosition.Position1; } public override bool PreparePickIsOK() { return _highTemperatureHeater.CurrentPosition == HighTemperatureHeaterPosition.Position1; } public override bool EndPlace() { //if (!SetSlitDoor(false, out string reason)) //{ // LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}"); // return false; //} if (!_highTemperatureHeater.GotoPosition(HighTemperatureHeaterPosition.Position2)) { LOG.Write(eEvent.ERR_PM, Module, $"Set High Temperature Heater To Posotion2 failed"); return false; } return true; } public override bool EndPick() { //if (!SetSlitDoor(false, out string reason)) //{ // LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}"); // return false; //} return true; } public override bool EndPlaceIsOK() { return _highTemperatureHeater.CurrentPosition == HighTemperatureHeaterPosition.Position2; } public override bool EndPickIsOK() { return CheckSlitDoorClose(); } public override void RTCloseEvent() { if (_Generator.IsPowerOn) { GeneratorPowerOn(false); } if (PendulumValveIsOpen()) { TurnPendulumValve(false); } } public override bool RFInterlock(VenusDevice device) { eEvent evt = eEvent.ERR_RF; if (!IsWaterFlowOk) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF."); return false; } if (!IsRFGInterlockOn) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF."); return false; } if (GasIsOff()) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Gas is OFF."); return false; } return true; } private bool GasIsOff() { if ((IsMfc1ValveOpened == false && IsMfc2ValveOpened == false && IsMfc3ValveOpened == false && IsMfc4ValveOpened == false && IsMfc5ValveOpened == false && IsMfc6ValveOpened == false && _GasFlag == false) || (MFC1FeedBack < 1 && MFC2FeedBack < 1 && MFC3FeedBack < 1 && MFC4FeedBack < 1 && MFC5FeedBack < 1 && MFC6FeedBack < 1 && _GasFlag == false)) { if (_GasRFStopWatch.IsRunning == false) { _GasRFStopWatch.Start(); } if (_GasRFStopWatch.ElapsedMilliseconds > 1500 && _GasRFStopWatch.ElapsedMilliseconds < 2500) { var item = _GasRFStopWatch.ElapsedMilliseconds; _GasRFStopWatch.Reset(); _GasFlag = true; return true; } } else { _GasRFStopWatch.Reset(); _GasFlag = false; } return false; } public override void PMInError() { CloseValves(); GeneratorPowerOn(false); GeneratorBiasPowerOn(false); OpenValve(ValveType.TurboPumpPumping, true); OpenValve(ValveType.TurboPumpPurge, true); } } }