using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Venus_RT.Devices; using MECF.Framework.Common.Routine; using Venus_Core; namespace Venus_RT.Modules.PMs { class PMPurgeRoutine : PMRoutineBase, IRoutine { private enum PurgeStep { kCloseValvesExceptN2Purge, kPurgeVent, kStopVent, kCloseISOValve, kSoftPump, kFastPump, kOpenISOValve, kRoughPump, kCloseFastPump, kPurgeDelay, kEnd, } private readonly int _forelinePressure = 200; private int _purgeVentPressure = 1000; private int _roughPumpDownPressure = 75; private int _purgePumpTime = 60; private int _purgeCycleCount = 30; public PMPurgeRoutine(JetPM chamber) : base(chamber) { Name = "PM Purge"; } public RState Start(params object[] objs) { if (CheckLidLoadLock() && CheckSlitDoor() && CheckDryPump() && CheckTurboPump()) { _purgeVentPressure = SC.GetValue($"{Module}.Purge.PurgeVentPressure"); _roughPumpDownPressure = SC.GetValue($"{Module}.Purge.PurgePumpPressure"); _purgePumpTime = SC.GetValue($"{Module}.Purge.PurgePumpTime"); _purgeCycleCount = SC.GetValue($"{Module}.Purge.PurgeCycleCount"); Reset(); CloseValvesExceptN2Purge(); return Runner.Start(Module, Name); } return RState.Failed; } public RState Monitor() { Runner.Delay((int)PurgeStep.kCloseValvesExceptN2Purge, _delay_1s) .LoopStart((int)PurgeStep.kPurgeVent, "Purge Cycle", _purgeCycleCount, OpenVentValves, () => { return _chamber.ChamberPressure >= _purgeVentPressure; }) .LoopRun((int)PurgeStep.kStopVent, CloseVentValves, _delay_1s) .LoopRun((int)PurgeStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_1s) .LoopRun((int)PurgeStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure <= _roughPumpDownPressure; }) .LoopRun((int)PurgeStep.kFastPump, StartFastPump, () => { return _chamber.ForelinePressure <= _forelinePressure; }) .LoopRun((int)PurgeStep.kOpenISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, true), _delay_1s) .LoopRun((int)PurgeStep.kRoughPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPurge, true), _purgePumpTime * 1000) .LoopEnd((int)PurgeStep.kCloseFastPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.FastPump, false), _delay_1s) .Delay((int)PurgeStep.kPurgeDelay, _delay_1s) .End((int)PurgeStep.kEnd, FinalStep, _delay_1s); return Runner.Status; } public void Abort() { CloseAllValves(); } private void CloseValvesExceptN2Purge() { _chamber.OpenValve(ValveType.Guage, false); _chamber.OpenValve(ValveType.SoftPump, false); _chamber.OpenValve(ValveType.FastPump, false); _chamber.TurnPendulumValve(false); _chamber.OpenValve(ValveType.GasFinal, false); _chamber.OpenValve(ValveType.N2, false); _chamber.OpenValve(ValveType.PVN22, false); _chamber.OpenValve(ValveType.TurboPumpPumping, true); _chamber.OpenValve(ValveType.TurboPumpPurge, true); } private bool OpenVentValves() { _chamber.OpenValve(ValveType.GasFinal, true); _chamber.OpenValve(ValveType.N2, true); _chamber.OpenValve(ValveType.PVN22, true); return true; } private bool CloseVentValves() { _chamber.OpenValve(ValveType.GasFinal, false); _chamber.OpenValve(ValveType.N2, false); _chamber.OpenValve(ValveType.PVN22, false); _chamber.OpenValve(ValveType.TurboPumpPurge, false); return true; } private bool StartFastPump() { _chamber.OpenValve(ValveType.SoftPump, false); _chamber.OpenValve(ValveType.FastPump, true); return true; } private bool FinalStep() { _chamber.OpenValve(ValveType.Guage, true); _chamber.TurnPendulumValve(true); return true; } } }