using System; using System.Collections.Generic; //using System. using Venus_RT.Devices; using Venus_RT.Modules; using Aitex.Core.RT.Log; using Venus_Core; //#pragma warning disable 0436 namespace Venus_RT.Modules.PMs { class ProcessHelper { static protected JetPM Chamber; private static Dictionary> startHelper = new Dictionary> { {"PressureByPressureModeUnit", PressureByPressureModeUnit_Start}, {"PressureByValveModeUnit", PressureByValveModeUnit_Start}, {"TCPUnit", TCPUnit_Start}, {"BiasUnit", BiasUnit_Start}, {"GasControlUnit", GasControlUnit_Start }, {"ESCHVUnit", ESCHVUnit_Start }, {"ProcessKitUnit", ProcessKitUnit_Start }, }; private static Dictionary> checkerHelper = new Dictionary> { {"PressureByPressureModeUnit", PressureByPressureModeUnit_Check}, {"PressureByValveModeUnit", PressureByValveModeUnit_Check}, {"TCPUnit", TCPUnit_Check}, {"BiasUnit", BiasUnit_Check}, {"GasControlUnit", GasControlUnit_Check}, {"ESCHVUnit", ESCHVUnit_Check}, {"ProcessKitUnit", ProcessKitUnit_Check} }; private static Dictionary> endHelper = new Dictionary> { {"PressureByPressureModeUnit", PressureByPressureModeUnit_End}, {"PressureByValveModeUnit", PressureByValveModeUnit_End}, {"TCPUnit", TCPUnit_End}, {"BiasUnit", BiasUnit_End}, {"GasControlUnit", GasControlUnit_End}, {"ESCHVUnit", ESCHVUnit_End}, {"ProcessKitUnit", ProcessKitUnit_End} }; public ProcessHelper(JetPM pm) { Chamber = pm; } static private RState PressureByPressureModeUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByPressureModeUnit; if (Chamber.SetPVPressure(ProcessUnit.StartPressure)) { return RState.Running; } return RState.Failed; } static private RState PressureByPressureModeUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByPressureModeUnit; if(ProcessUnit.EnableRamp) { if (Chamber.SetPVPressure(ProcessUnit.StartPressure + (int)((ProcessUnit.TargetPressure - ProcessUnit.StartPressure) * step.RampFactor()))) return RState.Running; else return RState.Failed; } if(step.Type == StepType.Stable && Chamber.ChamberPressure == ProcessUnit.StartPressure) { return RState.End; } return RState.Running; } static private void PressureByPressureModeUnit_End(ProcessUnitBase unit, RecipeStep step) { } static private RState PressureByValveModeUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByValveModeUnit; if(Chamber.SetPVPostion(ProcessUnit.StartPosition)) { return RState.Running; } return RState.Failed; } static private RState PressureByValveModeUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByValveModeUnit; if(ProcessUnit.EnableRamp) { if (Chamber.SetPVPostion(ProcessUnit.StartPosition + (int)((ProcessUnit.TargetPosition - ProcessUnit.StartPosition) * step.RampFactor()))) return RState.Running; else return RState.Failed; } return RState.Running; } static private void PressureByValveModeUnit_End(ProcessUnitBase unit, RecipeStep step) { } static private RState TCPUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as TCPUnit; Chamber.GeneratorSetpower(ProcessUnit.RFPower); Chamber.GeneratorPowerOn(true); Chamber.SetMatchPosition(ProcessUnit.TuneCapPreset, ProcessUnit.LoadCapPreset); return RState.Running; } static private RState TCPUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as TCPUnit; if(ProcessUnit.MaxReflectedPower > 0 && Chamber.ReflectPower > ProcessUnit.MaxReflectedPower) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, RF Reflect Power:{Chamber.ReflectPower} exceeds the Max Limit:{ProcessUnit.MaxReflectedPower}"); return RState.Failed; } if(step.ElapsedTime() > ProcessUnit.HoldTime * 1000) { Chamber.GeneratorSetpower(0); Chamber.GeneratorPowerOn(false); } return RState.Running; } static private void TCPUnit_End(ProcessUnitBase unit, RecipeStep step) { Chamber.GeneratorSetpower(0); Chamber.GeneratorPowerOn(false); } static private RState BiasUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as BiasUnit; Chamber.GeneratorBiasSetpower(ProcessUnit.BiasRFPower); Chamber.GeneratorBiasPowerOn(true); Chamber.SetBiasMatchPosition(ProcessUnit.BiasTuneCapPreset, ProcessUnit.BiasLoadCapPreset); if(ProcessUnit.BiasGeneratorMode == GeneratorMode.Pulsing) { Chamber.SetBiasPulseMode(true); Chamber.SetBiasPulseRateFreq(ProcessUnit.PulseRateFreq); Chamber.SetDiasPulseDutyCycle(ProcessUnit.PulseDutyCycle); } return RState.Running; } static private RState BiasUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as BiasUnit; if (ProcessUnit.BiasMaxReflectedPower > 0 && Chamber.BiasReflectPower > ProcessUnit.BiasMaxReflectedPower) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Bias Reflect Power:{Chamber.BiasReflectPower} exceeds the Max Limit:{ProcessUnit.BiasMaxReflectedPower}"); return RState.Failed; } if (step.ElapsedTime() > ProcessUnit.BiasRFHoldTime * 1000) { Chamber.GeneratorBiasSetpower(0); Chamber.GeneratorBiasPowerOn(false); } return RState.Running; } static private void BiasUnit_End(ProcessUnitBase unit, RecipeStep step) { Chamber.GeneratorBiasSetpower(0); Chamber.GeneratorBiasPowerOn(false); } static private RState GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as GasControlUnit; Chamber.FlowGas(0, ProcessUnit.Gas1); Chamber.FlowGas(1, ProcessUnit.Gas2); Chamber.FlowGas(2, ProcessUnit.Gas3); Chamber.FlowGas(3, ProcessUnit.Gas4); Chamber.FlowGas(4, ProcessUnit.Gas5); Chamber.FlowGas(5, ProcessUnit.Gas6); Chamber.FlowGas(6, ProcessUnit.Gas7); Chamber.FlowGas(7, ProcessUnit.Gas8); return RState.Running; } static private RState GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as GasControlUnit; if(ProcessUnit.EnableRamp) { double rampFactor = step.RampFactor(); Chamber.FlowGas(0, ProcessUnit.Gas1 + (ProcessUnit.Gas1Target - ProcessUnit.Gas1) * rampFactor); Chamber.FlowGas(1, ProcessUnit.Gas2 + (ProcessUnit.Gas2Target - ProcessUnit.Gas2) * rampFactor); Chamber.FlowGas(2, ProcessUnit.Gas3 + (ProcessUnit.Gas3Target - ProcessUnit.Gas3) * rampFactor); Chamber.FlowGas(3, ProcessUnit.Gas4 + (ProcessUnit.Gas4Target - ProcessUnit.Gas4) * rampFactor); Chamber.FlowGas(4, ProcessUnit.Gas5 + (ProcessUnit.Gas5Target - ProcessUnit.Gas5) * rampFactor); Chamber.FlowGas(5, ProcessUnit.Gas6 + (ProcessUnit.Gas6Target - ProcessUnit.Gas6) * rampFactor); Chamber.FlowGas(6, ProcessUnit.Gas7 + (ProcessUnit.Gas7Target - ProcessUnit.Gas7) * rampFactor); Chamber.FlowGas(7, ProcessUnit.Gas8 + (ProcessUnit.Gas8Target - ProcessUnit.Gas8) * rampFactor); } return RState.Running; } static private void GasControlUnit_End(ProcessUnitBase unit, RecipeStep step) { Chamber.FlowGas(0, 0); Chamber.FlowGas(1, 0); Chamber.FlowGas(2, 0); Chamber.FlowGas(3, 0); Chamber.FlowGas(4, 0); Chamber.FlowGas(5, 0); Chamber.FlowGas(6, 0); Chamber.FlowGas(7, 0); } static private RState ESCHVUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ESCHVUnit; Chamber.SetESCClampVoltage(ProcessUnit.ESCClampValtage); Chamber.SetBacksideHePressure(ProcessUnit.BacksideHelum * 1000); Chamber.SetBacksideHeThreshold(ProcessUnit.MinHeFlow, ProcessUnit.MaxHeFlow); return RState.Running; } static private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step) { if(Chamber.BackSideHeOutOfRange) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range."); return RState.Failed; } return RState.Running; } static private void ESCHVUnit_End(ProcessUnitBase unit, RecipeStep step) { Chamber.SetESCClampVoltage(0); //Chamber.SetBacksideHePressure(0); Chamber.SetBacksideHeThreshold(0, 0); } static private RState ProcessKitUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ProcessKitUnit; return RState.Running; } static private RState ProcessKitUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ProcessKitUnit; return RState.Running; } static private void ProcessKitUnit_End(ProcessUnitBase unit, RecipeStep step) { } public static bool LoadMethods(ProcessUnitBase unit) { var className = unit.GetType().Name; if(startHelper.ContainsKey(className) && checkerHelper.ContainsKey(className) && endHelper.ContainsKey(className)) { unit.starter = startHelper[className]; unit.checker = checkerHelper[className]; unit.end = endHelper[className]; return true; } return false; } private static RState stepStarter(RecipeStep step) { step.StartStepTimer(); switch (step.Type) { case StepType.EndPoint: Chamber.EPDStepStart(step.EPDConfigName); break; } return RState.Running; } private static RState stepChecker(RecipeStep step) { switch(step.Type) { case StepType.Time: return step.ElapsedTime() >= step.Time * 1000 ? RState.End : RState.Running; case StepType.OverEtch: return step.ElapsedTime() >= (step.GetLastEPDStepTime() * step.OverEtchPercent / 100) ? RState.End : RState.Running; case StepType.EndPoint: if (step.ElapsedTime() > step.MaxEndPointTime * 1000) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not capture endpoint signal in {step.MaxEndPointTime} seconds"); return RState.Timeout; } else return Chamber.EPDCaptured ? RState.End : RState.Running; } return RState.Running; } private static RState stepEnder(RecipeStep step) { if(step.Type == StepType.EndPoint) { Chamber.EPDStepStop(); } return RState.End; } public static bool LoadStepFuns(RecipeStep step) { step.starter = stepStarter; step.checker = stepChecker; step.ender = stepEnder; return true; } } }