using System;
using System.Collections.Generic;
//using System.
using Venus_RT.Devices;
using Venus_RT.Modules;
using Aitex.Core.RT.Log;
using Venus_Core;
using Aitex.Core.RT.SCCore;
using System.Reflection;
using System.Diagnostics;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
using Aitex.Core.Common.DeviceData;
//#pragma warning disable 0436
namespace Venus_RT.Modules.PMs
{
class ProcessHelper
{
protected JetPMBase Chamber;
private string Module;
public RecipeHead m_RecipeHead;
private static Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>> startHelper = new Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>>();
private static Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>> checkerHelper = new Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>>();
private static Dictionary<string, Action<ProcessUnitBase, RecipeStep>> endHelper = new Dictionary<string, Action<ProcessUnitBase, RecipeStep>>();
private List<float> rfMatchC1 = new List<float>();
private List<float> rfMatchC2 = new List<float>();
private int rfMatchC1C2Index = 0;
private List<float> biasRfMatchC1 = new List<float>();
private List<float> biasRfMatchC2 = new List<float>();
private int biasRfMatchC1C2Index = 0;
public bool isLoop = false;
public int loopsteps = 0;
public int currentStepIndex = 0;
//private int cycleIndex = 0;
private bool biasRFSetPointFlag = true;
public ProcessHelper(JetPMBase pm)
{
Chamber = pm;
Module = pm.Module.ToString();
Init();
}
private void Init()
{
startHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Start(unit, step);
checkerHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Check(unit, step);
endHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_End(unit, step);
//startHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Start(unit, step);
//checkerHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Check(unit, step);
//endHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_End(unit, step);
startHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Start(unit, step);
checkerHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Check(unit, step);
endHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_End(unit, step);
startHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Start(unit, step);
checkerHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Check(unit, step);
endHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_End(unit, step);
startHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Start(unit, step);
checkerHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Check(unit, step);
endHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_End(unit, step);
startHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Start(unit, step);
checkerHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Check(unit, step);
endHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_End(unit, step);
startHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Start(unit, step);
checkerHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Check(unit, step);
endHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_End(unit, step);
startHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Start(unit, step);
checkerHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Check(unit, step);
endHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_End(unit, step);
startHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Start(unit, step);
checkerHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Check(unit, step);
endHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_End(unit, step);
}
private RState PressureByPressureModeUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as PressureByPressureModeUnit;
if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
{
if (Chamber.SetPVPressure(ProcessUnit.StartValue))
{
return RState.Running;
}
}
else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
{
if (Chamber.SetPVPostion(ProcessUnit.StartValue))
{
return RState.Running;
}
}
return RState.Failed;
}
private RState PressureByPressureModeUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as PressureByPressureModeUnit;
if (ProcessUnit.EnableRamp)
{
if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
{
if (Chamber.SetPVPressure(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor())))
return RState.Running;
else
return RState.Failed;
}
else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
{
if (Chamber.SetPVPressure(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor())))
return RState.Running;
else
return RState.Failed;
}
}
if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
{
if (step.Type == StepType.Stable && Chamber.ChamberPressure == ProcessUnit.StartValue)
{
return RState.End;
}
}
else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
{
if (step.Type == StepType.Stable && Chamber.GetPVPosition() == ProcessUnit.StartValue)
{
return RState.End;
}
}
return RState.Running;
}
private void PressureByPressureModeUnit_End(ProcessUnitBase unit, RecipeStep step)
{
}
#region Valve Mode已取消,合并到压力模式
//private RState PressureByValveModeUnit_Start(ProcessUnitBase unit, RecipeStep step)
//{
// var ProcessUnit = unit as PressureByValveModeUnit;
// if (Chamber.SetPVPostion(ProcessUnit.StartPosition))
// {
// return RState.Running;
// }
// return RState.Failed;
//}
//private RState PressureByValveModeUnit_Check(ProcessUnitBase unit, RecipeStep step)
//{
// var ProcessUnit = unit as PressureByValveModeUnit;
// if (ProcessUnit.EnableRamp)
// {
// if (Chamber.SetPVPostion(ProcessUnit.StartPosition + (int)((ProcessUnit.TargetPosition - ProcessUnit.StartPosition) * step.RampFactor())))
// return RState.Running;
// else
// return RState.Failed;
// }
// return RState.Running;
//}
//private void PressureByValveModeUnit_End(ProcessUnitBase unit, RecipeStep step)
//{
//}
#endregion
private RState TCPUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as TCPUnit;
if (ProcessUnit.RFPower > 5)
{
Chamber.GeneratorSetpower(ProcessUnit.RFPower);
Chamber.GeneratorPowerOn(true);
}
else
{
Chamber.GeneratorSetpower(0);
Chamber.GeneratorPowerOn(false);
}
int p1;
int p2;
if (ProcessUnit.TuneCapPreset > 0)
{
p1 = ProcessUnit.TuneCapPreset;
}
else
{
p1 = ProcessUnit.AutoTuneCapPreset;
}
if (ProcessUnit.LoadCapPreset > 0)
{
p2 = ProcessUnit.LoadCapPreset;
}
else
{
p2 = ProcessUnit.AutoLoadCapPreset;
}
Chamber.SetMatchPosition(p1, p2);
rfMatchC1.Clear();
rfMatchC1.Clear();
rfMatchC1C2Index = 0;
return RState.Running;
}
private RState TCPUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
var _scPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.Rf.PowerAlarmTime");
var ProcessUnit = unit as TCPUnit;
if (ProcessUnit.MaxReflectedPower > 0 && Chamber.ReflectPower > ProcessUnit.MaxReflectedPower && step.ElapsedTime() > _scPowerAlarmTime * 1000)
{
LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, RF Reflect Power:{Chamber.ReflectPower} exceeds the Max Limit:{ProcessUnit.MaxReflectedPower}");
return RState.Failed;
}
if (step.ElapsedTime() > m_RecipeHead.RFHoldTime * 1000)
{
Chamber.GeneratorSetpower(0);
Chamber.GeneratorPowerOn(false);
}
if (step.ElapsedTime() > rfMatchC1C2Index * 1000)
{
rfMatchC1.Add(Chamber.RFMatchC1);
rfMatchC2.Add(Chamber.RFMatchC2);
rfMatchC1C2Index += 1;
}
return RState.Running;
}
private void TCPUnit_End(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as TCPUnit;
if (rfMatchC1.Count >= 6)
{
float allValue = 0;
for (int i = 4; i < rfMatchC1.Count; i++)
{
allValue += rfMatchC1[i];
}
var average = allValue / (rfMatchC1.Count - 4);
ProcessUnit.AutoTuneCapPreset = (int)average;
}
if (rfMatchC2.Count >= 6)
{
float allValue = 0;
for (int i = 4; i < rfMatchC2.Count; i++)
{
allValue += rfMatchC2[i];
}
var average = allValue / (rfMatchC2.Count - 4);
ProcessUnit.AutoLoadCapPreset = (int)average;
}
rfMatchC1.Clear();
rfMatchC2.Clear();
rfMatchC1C2Index = 0;
}
private RState BiasUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as BiasUnit;
if (ProcessUnit.BiasRFPower > 5)
{
Chamber.GeneratorBiasPowerOn(true);
if ((ProcessUnit.EnableRamp == false))
{
Chamber.GeneratorBiasSetpower(ProcessUnit.BiasRFPower);
}
}
int p1;
int p2;
if (ProcessUnit.BiasTuneCapPreset > 0)
{
p1 = ProcessUnit.BiasTuneCapPreset;
}
else
{
p1 = ProcessUnit.AutoBiasTuneCapPreset;
}
if (ProcessUnit.BiasLoadCapPreset > 0)
{
p2 = ProcessUnit.BiasLoadCapPreset;
}
else
{
p2 = ProcessUnit.AutoBiasLoadCapPreset;
}
Chamber.SetBiasMatchPosition(p1, p2);
if (ProcessUnit.BiasGeneratorMode == GeneratorMode.Pulsing)
{
Chamber.SetBiasPulseMode(true);
Chamber.SetBiasPulseRateFreq(ProcessUnit.PulseRateFreq);
Chamber.SetDiasPulseDutyCycle(ProcessUnit.PulseDutyCycle);
}
biasRfMatchC1.Clear();
biasRfMatchC1.Clear();
biasRfMatchC1C2Index = 0;
biasRFSetPointFlag = true;
return RState.Running;
}
private RState BiasUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
var _scPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.BiasRf.PowerAlarmTime");
var ProcessUnit = unit as BiasUnit;
if (ProcessUnit.BiasMaxReflectedPower > 0 && Chamber.BiasReflectPower > ProcessUnit.BiasMaxReflectedPower && step.ElapsedTime() > _scPowerAlarmTime * 1000)
{
LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Bias Reflect Power:{Chamber.BiasReflectPower} exceeds the Max Limit:{ProcessUnit.BiasMaxReflectedPower}");
return RState.Failed;
}
if (step.ElapsedTime() > m_RecipeHead.BiasRFHoldTime * 1000)
{
Chamber.GeneratorBiasSetpower(0);
Chamber.GeneratorBiasPowerOn(false);
}
if (step.ElapsedTime() > biasRfMatchC1C2Index * 1000)
{
biasRfMatchC1.Add(Chamber.BiasRFMatchC1);
biasRfMatchC2.Add(Chamber.BiasRFMatchC2);
biasRfMatchC1C2Index += 1;
}
if (ProcessUnit.EnableRamp)
{
//if (step.ElapsedTime() <= 500*cycleIndex)
//{
// return RState.Running;
//}
//cycleIndex += 1;
if (ProcessUnit.TargetMode == TargetMode.Cycle)
{
if ( biasRFSetPointFlag==true)
{
biasRFSetPointFlag = false;
Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower + (float)((float)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((float)(loopsteps-1) / (float)(currentStepIndex))))));
}
//float rampFactor = (float)currentStepIndex / (float)(loopsteps-1);
//double rampFactor = step.RampFactor();
//Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower+ (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower)/(loopsteps)*currentStepIndex) + ((double)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((double)loopsteps)) * rampFactor));
}
else
{
//double rampFactor = step.RampFactor();
//Chamber.GeneratorBiasSetpower((float)(ProcessUnit.BiasRFPower + (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) * rampFactor));
}
}
return RState.Running;
}
private void BiasUnit_End(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as BiasUnit;
Chamber.GeneratorBiasSetpower(0);
Chamber.GeneratorBiasPowerOn(false);
if (biasRfMatchC1.Count >= 6)
{
float allValue = 0;
for (int i = 4; i < biasRfMatchC1.Count; i++)
{
allValue += biasRfMatchC1[i];
}
var average = allValue / (biasRfMatchC1.Count - 4);
ProcessUnit.AutoBiasTuneCapPreset = (int)average;
}
if (biasRfMatchC2.Count >= 6)
{
float allValue = 0;
for (int i = 4; i < biasRfMatchC2.Count; i++)
{
allValue += biasRfMatchC2[i];
}
var average = allValue / (biasRfMatchC2.Count - 4);
ProcessUnit.AutoBiasLoadCapPreset = (int)average;
}
biasRfMatchC1.Clear();
biasRfMatchC1.Clear();
biasRfMatchC1C2Index = 0;
//cycleIndex = 0;
biasRFSetPointFlag = true;
}
private RState GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
Chamber.OpenValve(ValveType.GasFinal, true);
var ProcessUnit = unit as GasControlUnit;
Chamber.FlowGas(0, ProcessUnit.Gas1);
if (ProcessUnit.Gas1 >= 1)
{
Chamber.OpenValve(ValveType.PV11, true);
}
Chamber.FlowGas(1, ProcessUnit.Gas2);
if (ProcessUnit.Gas2 >= 1)
{
Chamber.OpenValve(ValveType.PV21, true);
}
Chamber.FlowGas(2, ProcessUnit.Gas3);
if (ProcessUnit.Gas3 >= 1)
{
Chamber.OpenValve(ValveType.PV31, true);
}
Chamber.FlowGas(3, ProcessUnit.Gas4);
if (ProcessUnit.Gas4 >= 1)
{
Chamber.OpenValve(ValveType.PV41, true);
}
Chamber.FlowGas(4, ProcessUnit.Gas5);
Chamber.FlowGas(5, ProcessUnit.Gas6);
Chamber.FlowGas(6, ProcessUnit.Gas7);
Chamber.FlowGas(7, ProcessUnit.Gas8);
return RState.Running;
}
private RState GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as GasControlUnit;
if (ProcessUnit.EnableRamp)
{
double rampFactor = step.RampFactor();
Chamber.FlowGas(0, ProcessUnit.Gas1 + (ProcessUnit.Gas1Target - ProcessUnit.Gas1) * rampFactor);
Chamber.FlowGas(1, ProcessUnit.Gas2 + (ProcessUnit.Gas2Target - ProcessUnit.Gas2) * rampFactor);
Chamber.FlowGas(2, ProcessUnit.Gas3 + (ProcessUnit.Gas3Target - ProcessUnit.Gas3) * rampFactor);
Chamber.FlowGas(3, ProcessUnit.Gas4 + (ProcessUnit.Gas4Target - ProcessUnit.Gas4) * rampFactor);
Chamber.FlowGas(4, ProcessUnit.Gas5 + (ProcessUnit.Gas5Target - ProcessUnit.Gas5) * rampFactor);
Chamber.FlowGas(5, ProcessUnit.Gas6 + (ProcessUnit.Gas6Target - ProcessUnit.Gas6) * rampFactor);
Chamber.FlowGas(6, ProcessUnit.Gas7 + (ProcessUnit.Gas7Target - ProcessUnit.Gas7) * rampFactor);
Chamber.FlowGas(7, ProcessUnit.Gas8 + (ProcessUnit.Gas8Target - ProcessUnit.Gas8) * rampFactor);
}
return RState.Running;
}
private void GasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
{
Chamber.FlowGas(0, 0);
Chamber.FlowGas(1, 0);
Chamber.FlowGas(2, 0);
Chamber.FlowGas(3, 0);
Chamber.FlowGas(4, 0);
Chamber.FlowGas(5, 0);
Chamber.FlowGas(6, 0);
Chamber.FlowGas(7, 0);
}
private RState ESCHVUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as ESCHVUnit;
Chamber.SetESCClampVoltage(ProcessUnit.ESCClampValtage);
Chamber.SetBacksideHePressure(ProcessUnit.BacksideHelum);
Chamber.SetBacksideHeThreshold(ProcessUnit.MinHeFlow, ProcessUnit.MaxHeFlow);
return RState.Running;
}
private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
if (Chamber.BackSideHeOutOfRange)
{
LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range.");
return RState.Failed;
}
return RState.Running;
}
private void ESCHVUnit_End(ProcessUnitBase unit, RecipeStep step)
{
Chamber.SetESCClampVoltage(0);
//Chamber.SetBacksideHePressure(0);
Chamber.SetBacksideHeThreshold(0, 0);
//Chamber.OnOffSetESCHV(false);
}
private RState ProcessKitUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as ProcessKitUnit;
return RState.Running;
}
private RState ProcessKitUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
var ProcessUnit = unit as ProcessKitUnit;
return RState.Running;
}
private void ProcessKitUnit_End(ProcessUnitBase unit, RecipeStep step)
{
}
private RState Kepler2200GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
Chamber.OpenValve(ValveType.GasFinal, true);
var ProcessUnit = unit as Kepler2200GasControlUnit;
Chamber.FlowGas(0, ProcessUnit.Gas1);
if (ProcessUnit.Gas1 >= 1)
{
Chamber.OpenValve(ValveType.PV11, true);
}
Chamber.FlowGas(1, ProcessUnit.Gas2);
if (ProcessUnit.Gas2 >= 1)
{
Chamber.OpenValve(ValveType.PV21, true);
}
Chamber.FlowGas(2, ProcessUnit.Gas3);
if (ProcessUnit.Gas3 >= 1)
{
Chamber.OpenValve(ValveType.PV31, true);
}
Chamber.FlowGas(3, ProcessUnit.Gas4);
if (ProcessUnit.Gas4 >= 1)
{
Chamber.OpenValve(ValveType.PV41, true);
}
Chamber.FlowGas(4, ProcessUnit.Gas5);
Chamber.FlowGas(5, ProcessUnit.Gas6);
return RState.Running;
}
private RState Kepler2200GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
return RState.Running;
}
private void Kepler2200GasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
{
Chamber.FlowGas(0, 0);
Chamber.FlowGas(1, 0);
Chamber.FlowGas(2, 0);
Chamber.FlowGas(3, 0);
Chamber.FlowGas(4, 0);
Chamber.FlowGas(5, 0);
}
private RState HeaterUnit_Start(ProcessUnitBase unit, RecipeStep step)
{
return RState.Running;
}
private RState HeaterUnit_Check(ProcessUnitBase unit, RecipeStep step)
{
return RState.Running;
}
private void HeaterUnit_End(ProcessUnitBase unit, RecipeStep step)
{
}
public bool LoadMethods(ProcessUnitBase unit)
{
var className = $"{Module}.{unit.GetType().Name}";
if (startHelper.ContainsKey(className) && checkerHelper.ContainsKey(className) && endHelper.ContainsKey(className))
{
unit.starter = startHelper[className];
unit.checker = checkerHelper[className];
unit.end = endHelper[className];
return true;
}
return false;
}
//public void loopStep(bool isloop,int loopCount,int loopIndex)
//{
// isLoop = isloop;
// loopsteps=loopCount;
// currentStepIndex = loopIndex;
//}
private RState stepStarter(RecipeStep step)
{
step.StartStepTimer();
switch (step.Type)
{
case StepType.EndPoint:
Chamber.EPDStepStart(step.EPDConfig, step.StepNo);
break;
}
return RState.Running;
}
private RState stepChecker(RecipeStep step)
{
switch (step.Type)
{
case StepType.Time:
return step.ElapsedTime() >= step.Time * 1000 ? RState.End : RState.Running;
case StepType.OverEtch:
return step.ElapsedTime() >= (step.GetLastEPDStepTime() * step.OverEtchPercent / 100) ? RState.End : RState.Running;
case StepType.EndPoint:
if (step.ElapsedTime() > step.MaxEndPointTime * 1000)
{
LOG.Write(eEvent.INFO_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not capture endpoint signal in {step.MaxEndPointTime} seconds");
return RState.End;
}
else
{
return Chamber.EPDCaptured ? RState.End : RState.Running;
}
}
return RState.Running;
}
private RState stepEnder(RecipeStep step)
{
if (step.Type == StepType.EndPoint)
{
Chamber.EPDStepStop();
}
return RState.End;
}
public bool LoadStepFuns(RecipeStep step)
{
step.starter = stepStarter;
step.checker = stepChecker;
step.ender = stepEnder;
return true;
}
}
}