using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.SCCore; using Aitex.Core.RT.Log; using Aitex.Core.Util; using MECF.Framework.Common.Device.Bases; using MECF.Framework.Common.Equipment; using System; using System.Collections.Generic; using Venus_Core; using Venus_RT.Devices.IODevices; using Venus_RT.Devices.EPD; using MECF.Framework.Common.SubstrateTrackings; using IoMfc = Venus_RT.Devices.IODevices.IoMfc; using System.Threading.Tasks; using Aitex.Core.RT.DataCenter; using Venus_RT.Modules; using System.Windows.Media; namespace Venus_RT.Devices { class JetVenusPM : JetPMBase { private readonly IoLid _Lid; private readonly IoLid _LidLoadlock; private readonly IoCylinder _slitDoor; private readonly IoCylinder _LiftPin; private readonly IoCylinder _LoadLockArm; private readonly IoValve _PVN21Valve; private readonly IoValve _PVN22Valve; private readonly IoValve _PV11Valve; private readonly IoValve _PV12Valve; private readonly IoValve _PV21Valve; private readonly IoValve _PV22Valve; private readonly IoValve _PV31Valve; private readonly IoValve _PV32Valve; private readonly IoValve _PV41Valve; private readonly IoValve _PV42Valve; private readonly IoValve _N2Valve; private readonly IoValve _Mfc1Valve; private readonly IoValve _Mfc2Valve; private readonly IoValve _Mfc3Valve; private readonly IoValve _Mfc4Valve; private readonly IoValve _Mfc5Valve; private readonly IoValve _Mfc6Valve; private readonly IoValve _Mfc7Valve; private readonly IoValve _Mfc8Valve; private readonly IoValve _PVHe1Valve; private readonly IoValve _PVHe2Valve; private readonly IoValve _GasFinalValve; private readonly IoValve _SoftPumpValve; private readonly IoValve _FastPumpValve; private readonly IoValve _TurboPumpPumpingValve; private readonly IoValve _TurboPumpPurgeValve; private readonly IoValve _GuageValve; private readonly IoValve _LoadlockVentValve; private readonly IoValve _LoadlockPumpingValve; private readonly IoValve _PVHe3Valve; private readonly IoValve _HeISOValve; private readonly IoSensor _ATM_sw; private readonly IoSensor _CDAPressure; private readonly IoSensor _ATM_Loadlock_sw; private readonly IoSensor _N2Pressure_sw; private readonly IoSensor _VAC_sw; private readonly IoSensor _WLK_sw; private readonly IoSensor _Water_Flow; private readonly IoSensor _RFG_Interlock; private readonly IoSensor _PM_Lid_Closed; private readonly IoSensor _Source_RF_Fan; private readonly IoSensor _PM_SlitDoor_Closed; private readonly IoSensor _TurboPumpInterlock; private readonly IoSensor _GasBoxDoor; private readonly IoSensor _GasBoxPressure; private readonly PumpBase _MainPump; private readonly ESC5HighVoltage _ESCHV; private readonly AdixenTurboPump _TurboPump; private readonly PendulumValve _pendulumValve; private readonly ChillerBase _Chiller; private readonly RfPowerBase _Generator;//srf=>AdTecGenerator private readonly RfPowerBase _GeneratorBias;//brf=>CometRF private readonly RfMatchBase _Match; private readonly RfMatchBase _BiasMatch; private readonly IoSignalTower _SignalTower; private readonly IoHeater _ForelineTC; private readonly IoHeater _WallTC; private readonly IoPressureControl _pressureController; private readonly IoGasStick[] _gasLines; private readonly IoGasStick _gasLineN2; private readonly IoBacksideHe _backsideHe; private readonly IoMfc _heMfc; private readonly double _foreline_interlock_pressure = 750; // 盖子的状态 public override bool IsLidClosed => _Lid.OFFFeedback; public override bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback; public override bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback; public override bool IsPumpRunning => _MainPump.IsRunning; public override bool IsTurboPumpRunning => _TurboPump.IsRunning; public override bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed; public override float TurboPumpSpeed => _TurboPump.Speed; public override bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning; public override bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning; public override bool IsCDA_OK => _CDAPressure.Value; public override bool IsFastPumpOpened => _FastPumpValve.Status; public override bool IsSoftPumpOpened => _SoftPumpValve.Status; public override bool IsMfc1ValveOpened => _Mfc1Valve.Status; public override bool IsMfc2ValveOpened => _Mfc2Valve.Status; public override bool IsMfc3ValveOpened => _Mfc3Valve.Status; public override bool IsMfc4ValveOpened => _Mfc4Valve.Status; public override bool IsMfc5ValveOpened => _Mfc5Valve.Status; public override bool IsMfc6ValveOpened => _Mfc6Valve.Status; public override bool IsMfc7ValveOpened => _Mfc7Valve.Status; public override bool IsMfc8ValveOpened => _Mfc8Valve.Status; public override bool IsGuageValveOpened => _GuageValve.Status; // 压力信号 public override bool IsATM => _ATM_sw.Value; public override bool PVN22ValveIsOpen => _PVN22Valve.Status; public override bool LiftPinIsDown => _LiftPin.OFFFeedback; public override bool LiftPinIsUp => _LiftPin.ONFeedback; public override bool IsATMLoadlock => _ATM_Loadlock_sw.Value; public override bool IsVACLoadLock => LoadlockPressure <= 1000; public override bool IsVAC => _VAC_sw.Value; public override bool IsWaterFlowOk => _Water_Flow.Value; public override bool IsWLK => _WLK_sw.Value; public override bool IsRFGInterlockOn => _RFG_Interlock.Value; public override bool PMLidClosed => _PM_Lid_Closed.Value; public override bool TurboPumpInterlock => _TurboPumpInterlock.Value; public override bool SourceRFFanInterlock => _Source_RF_Fan.Value; public override bool SlitDoorClosed => _PM_SlitDoor_Closed.Value; public override double ProcessLowPressure => _pressureController.ProcessLow.Value; public override double ProcessHighPressure => _pressureController.ProcessHigh.Value; public override double ProcessPressure => _pressureController.ProcessGauge.Value; public override double ChamberPressure => _pressureController.PressureGauge.Value; public override double ForelinePressure => _pressureController.ForelineGauge.Value; public override double TargetPressure => _pressureController.TargetPressure; public override double LoadlockPressure => _pressureController.LoadLockGauge.Value; public override double ESCHePressure => _pressureController.ESCHeGauge.Value; public override int ESCOutputVoltage => _ESCHV.OutputVoltage; public override double ESCPositiveOutputCurrent => _ESCHV.PositiveOutputCurrent; public override double ESCNegativeOutputCurrent => _ESCHV.NegativeOutputCurrent; public override bool IsHVOn => _ESCHV.IsOn; public override float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback; public override float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback; public override bool ChillerIsRunning => _Chiller.IsRunning; //Loadlock_Arm public override bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback; public override bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback; //Loadlock_Arm DO public override bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint; public override bool LoadlockArmExtend => _LoadLockArm.ONSetPoint; public override float ReflectPower => _Generator.ReflectPower; public override float BiasReflectPower => _GeneratorBias.ReflectPower; public override bool BackSideHeOutOfRange => _backsideHe.OutOfRange; public override float RFMatchC1 => _Match != null ? _Match.TunePosition1 : 0; public override float RFMatchC2 => _Match != null ? _Match.TunePosition2 : 0; public override float BiasRFMatchC1 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0; public override float BiasRFMatchC2 => _BiasMatch != null ? _BiasMatch.TunePosition1 : 0; public override bool WaferIsDown { get { return LiftPinPosition == MovementPosition.Down; } } public new ModuleName Module { get; } public override MovementPosition LiftPinPosition { get { MovementPosition pos = MovementPosition.Unknown; if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback) { pos = MovementPosition.Up; } else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback) { pos = MovementPosition.Down; } return pos; } } public override bool CheckAtm() { return _ATM_sw.Value && ChamberPressure > 700000; } public override bool CheckSlitDoorOpen() { return _slitDoor.State == CylinderState.Open; } public override bool CheckSlitDoorClose() { return _slitDoor.State == CylinderState.Close; } public override bool CheckLiftUp() { return _LiftPin.State == CylinderState.Open; } public override bool CheckLiftDown() { return _LiftPin.State == CylinderState.Close; } public override double TotalGasSetpoint { get { double sum = 0; foreach (var gas in _gasLines) { sum += gas.FlowSP; } return sum; } } public override bool HasGasOutOfRange { get { foreach (var gas in _gasLines) { if (!gas.IsOutOfRange) return false; } return true; } } public override bool PendulumValveIsOpen() { return _pendulumValve.IsOpen; } #region 构造函数 public JetVenusPM(ModuleName moduleName) : base(moduleName) { Module = moduleName; _Lid = DEVICE.GetDevice($"{Module}.{VenusDevice.Lid}"); _LidLoadlock = DEVICE.GetDevice($"{Module}.{VenusDevice.LidLoadlock}"); _slitDoor = DEVICE.GetDevice($"{Module}.{VenusDevice.SlitDoor}"); _LiftPin = DEVICE.GetDevice($"{Module}.{VenusDevice.LiftPin}"); _LoadLockArm = DEVICE.GetDevice($"{Module}.{VenusDevice.LoadLockArm}"); _PVN21Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVN21}"); _PVN22Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVN22}"); _PV11Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV11}"); _PV12Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV12}"); _PV21Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV21}"); _PV22Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV22}"); _PV31Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV31}"); _PV32Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV32}"); _PV41Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV41}"); _PV42Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV42}"); _N2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveN2}"); _Mfc1Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc1}"); _Mfc2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc3Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc3}"); _Mfc4Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc4}"); _Mfc5Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc5}"); _Mfc6Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc6}"); _Mfc7Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc7}"); _Mfc8Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc8}"); _PVHe1Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe1}"); _PVHe2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe2}"); _GasFinalValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveGasFinal}"); _SoftPumpValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveSoftPump}"); _FastPumpValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveFastPump}"); _TurboPumpPumpingValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveTurboPumpPumping}"); _TurboPumpPurgeValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveTurboPumpPurge}"); _GuageValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveGuage}"); _LoadlockVentValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveLoadlockVent}"); _LoadlockPumpingValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveLoadlockPumping}"); _PVHe3Valve= DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe3}"); _HeISOValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveHeISO}"); _heMfc = DEVICE.GetDevice($"{Module}.MfcHe"); _ATM_sw = DEVICE.GetDevice($"{Module}.SensorATMSwitch"); _ATM_Loadlock_sw = DEVICE.GetDevice($"{Module}.SensorLoadlockATMSwitch"); _N2Pressure_sw = DEVICE.GetDevice($"{Module}.N2PressureOk"); _VAC_sw = DEVICE.GetDevice($"{Module}.SensorVacSwitch"); _Water_Flow = DEVICE.GetDevice($"{Module}.SensorWaterFlowOk"); _WLK_sw = DEVICE.GetDevice($"{Module}.SensorWaterLeakOk"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _RFG_Interlock = DEVICE.GetDevice($"{Module}.GeneratorInterlock"); _PM_Lid_Closed = DEVICE.GetDevice($"{Module}.SensorPMLidClosed"); _Source_RF_Fan = DEVICE.GetDevice($"{Module}.SensorSourceRFFan"); _PM_SlitDoor_Closed = DEVICE.GetDevice($"{Module}.SensorSlitDoorClosed"); _TurboPumpInterlock = DEVICE.GetDevice($"{Module}.TurboPumpInterlock"); _GasBoxDoor = DEVICE.GetDevice($"{Module}.GasBoxDoorSW"); _GasBoxPressure = DEVICE.GetDevice($"{Module}.GasBoxPressureSW"); _ForelineTC = DEVICE.GetDevice($"{Module}.ForelineHeater"); _WallTC = DEVICE.GetDevice($"{Module}.WallHeater"); _SignalTower = DEVICE.GetDevice($"{Module}.SignalTower"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _pressureController = DEVICE.GetDevice($"{Module}.{VenusDevice.PressureControl}"); _gasLines = new IoGasStick[8]; for (int index = 0; index < 8; index++) { _gasLines[index] = DEVICE.GetDevice($"{Module}.GasStick{index + 1}"); } _gasLineN2 = DEVICE.GetDevice($"{Module}.GasStickN2"); _backsideHe = DEVICE.GetDevice($"{Module}.BacksideHelium"); _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); // RS232 Dry pump, SKY if (SC.GetValue($"{Module}.DryPump.CommunicationType") == (int)CommunicationType.RS232) { if (SC.GetValue($"{Module}.DryPump.MFG") == (int)DryPumpMFG.SKY) { _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); } else if (SC.GetValue($"{Module}.DryPump.MFG") == (int)DryPumpMFG.Edwards) { _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); } } _ESCHV = DEVICE.GetDevice($"{Module}.{VenusDevice.ESCHV}"); _TurboPump = DEVICE.GetDevice($"{Module}.{VenusDevice.TurboPump}"); _pendulumValve = DEVICE.GetDevice($"{Module}.{VenusDevice.PendulumValve}"); if (SC.GetValue($"{Module}.Chiller.EnableChiller") && SC.GetValue($"{Module}.Chiller.CommunicationType") == (int)CommunicationType.RS232) { if (SC.GetValue($"{Module}.Chiller.MFG") == (int)ChillerMFG.SMC) { _Chiller = DEVICE.GetDevice($"{Module}.{VenusDevice.Chiller}"); } else if (SC.GetValue($"{Module}.Chiller.MFG") == (int)ChillerMFG.AIRSYS) { _Chiller = DEVICE.GetDevice($"{Module}.{VenusDevice.Chiller}"); } } // RS223 AdTec Generator if (SC.GetValue($"{Module}.Rf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{Module}.Rf.MFG") == (int)GeneratorMFG.AdTec) { _Generator = DEVICE.GetDevice($"{Module}.{VenusDevice.Rf}"); } // Ethernet Comet Generator Bias if (SC.GetValue($"{Module}.BiasRf.EnableBiasRF")) { if (SC.GetValue($"{Module}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet && SC.GetValue($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.Comet) { _GeneratorBias = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasRf}"); } else if (SC.GetValue($"{Module}.BiasRf.MFG") == (int)GeneratorMFG.AdTec) { _GeneratorBias = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasRf}"); } } // RS232 AdTec match if (SC.GetValue($"{Module}.Match.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{Module}.Match.MFG") == (int)MatchMFG.AdTec) { _Match = DEVICE.GetDevice($"{Module}.{VenusDevice.Match}"); } // Bias Match if (SC.GetValue($"{Module}.BiasMatch.EnableBiasMatch") && SC.GetValue($"{Module}.BiasMatch.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{Module}.BiasMatch.MFG") == (int)MatchMFG.AdTec) { _BiasMatch = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasMatch}"); } _foreline_interlock_pressure = SC.GetValue($"{Module}.ForelineInterlockPressure"); } #endregion public override void CloseValves() { _PVN21Valve.TurnValve(false, out _); // _PVN22Valve.TurnValve(false, out _); _PV11Valve.TurnValve(false, out _); _PV12Valve.TurnValve(false, out _); _PV21Valve.TurnValve(false, out _); _PV22Valve.TurnValve(false, out _); _PV31Valve.TurnValve(false, out _); _PV32Valve.TurnValve(false, out _); _PV41Valve.TurnValve(false, out _); _PV42Valve.TurnValve(false, out _); _PVHe1Valve.TurnValve(false, out _); _PVHe2Valve.TurnValve(false, out _); _GasFinalValve.TurnValve(false, out _); _SoftPumpValve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _TurboPumpPumpingValve.TurnValve(false, out _); _TurboPumpPurgeValve.TurnValve(false, out _); _GuageValve.TurnValve(false, out _); _LoadlockVentValve.TurnValve(false, out _); _LoadlockPumpingValve.TurnValve(false, out _); _N2Valve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _Mfc1Valve.TurnValve(false, out _); _Mfc2Valve.TurnValve(false, out _); _Mfc3Valve.TurnValve(false, out _); _Mfc4Valve.TurnValve(false, out _); _Mfc5Valve.TurnValve(false, out _); _Mfc6Valve.TurnValve(false, out _); _Mfc7Valve.TurnValve(false, out _); _Mfc8Valve.TurnValve(false, out _); _PVHe3Valve.TurnValve(false, out _); _HeISOValve.TurnValve(false, out _); foreach (var stick in _gasLines) { stick.Stop(); } } public override void TurnDryPump(bool on) { //_pressureController.StartPump(on); _MainPump?.SetPumpOnOff(on); } public override void TurnTurboPump(bool on) { _TurboPump?.SetPumpOnOff(on); } public override void OpenValve(ValveType vlvType, bool on) { switch (vlvType) { case ValveType.PVN21: _PVN21Valve.TurnValve(on, out _); break; case ValveType.PVN22: _PVN22Valve.TurnValve(on, out _); LOG.Write(eEvent.EV_DEVICE_INFO, Module, $"{(on ? "打开" : "关闭")} 阀 {vlvType.ToString()}"); break; case ValveType.PV11: _PV11Valve.TurnValve(on, out _); break; case ValveType.PV12: _PV12Valve.TurnValve(on, out _); break; case ValveType.PV21: _PV21Valve.TurnValve(on, out _); break; case ValveType.PV22: _PV22Valve.TurnValve(on, out _); break; case ValveType.PV31: _PV31Valve.TurnValve(on, out _); break; case ValveType.PV32: _PV32Valve.TurnValve(on, out _); break; case ValveType.PV41: _PV41Valve.TurnValve(on, out _); break; case ValveType.PV42: _PV42Valve.TurnValve(on, out _); break; case ValveType.N2: _N2Valve.TurnValve(on, out _); break; case ValveType.PVHe1: _PVHe1Valve.TurnValve(on, out _); break; case ValveType.PVHe2: _PVHe2Valve.TurnValve(on, out _); break; case ValveType.GasFinal: _GasFinalValve.TurnValve(on, out _); break; case ValveType.SoftPump: _SoftPumpValve.TurnValve(on, out _); break; case ValveType.FastPump: _FastPumpValve.TurnValve(on, out _); break; case ValveType.TurboPumpPumping: _TurboPumpPumpingValve.TurnValve(on, out _); break; case ValveType.TurboPumpPurge: _TurboPumpPurgeValve.TurnValve(on, out _); break; case ValveType.Guage: _GuageValve.TurnValve(on, out _); break; case ValveType.LoadlockVent: _LoadlockVentValve.TurnValve(on, out _); break; case ValveType.LoadlockPumping: _LoadlockPumpingValve.TurnValve(on, out _); break; case ValveType.Mfc1: _Mfc1Valve.TurnValve(on, out _); break; case ValveType.Mfc2: _Mfc2Valve.TurnValve(on, out _); break; case ValveType.Mfc3: _Mfc3Valve.TurnValve(on, out _); break; case ValveType.Mfc4: _Mfc4Valve.TurnValve(on, out _); break; case ValveType.Mfc5: _Mfc5Valve.TurnValve(on, out _); break; case ValveType.Mfc6: _Mfc6Valve.TurnValve(on, out _); break; case ValveType.Mfc7: _Mfc7Valve.TurnValve(on, out _); break; case ValveType.Mfc8: _Mfc8Valve.TurnValve(on, out _); break; case ValveType.PVHe3: _PVHe3Valve.TurnValve(on, out _); break; case ValveType.HeISO: _HeISOValve.TurnValve(on, out _); break; default: throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}"); } } public override void Monitor() { foreach (var gas in _gasLines) { gas.Monitor(); } CheckPermanentInterlock(); } protected override void CheckPermanentInterlock() { if (ProcessPressure > 100 && _GuageValve.SetPoint) { _GuageValve.TurnValve(false, out _); LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ProcessPressure} exceed 100 mtorr, Guage Valve (DO-31) closed automaticlly."); } } public override void CheckIdleInterlock() { if (ForelinePressure > _foreline_interlock_pressure) { if (_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen) { _pendulumValve.TurnValve(false); _TurboPumpPurgeValve.TurnValve(false, out _); _TurboPumpPumpingValve.TurnValve(false, out _); LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} mtorr, Pendulum valve & PV6 & PV7 closed automaticlly."); } } } public override void BuzzerBlinking(double time) { _SignalTower.BuzzerBlinking(time); } public override void SwitchOnBuzzerAndRed() { _SignalTower.SwitchOnBuzzerAndRed("", null); } public override void Home() { // 与yp讨论过，PM 初始化不需要 SetLiftPin(MovementPosition.Down, out _); if (_slitDoor.State == CylinderState.Open) { SetSlitDoor(true, out _); } else { SetSlitDoor(false, out _); } SetSlitDoor(false, out _); //2023/03/08添加 OpenValve(ValveType.PVN22, true); //2023/04/25临时添加 //RetractWafer(); } public override bool SetLiftPin(MovementPosition dirt, out string reason) { reason = string.Empty; switch (dirt) { case MovementPosition.Down: return _LiftPin.SetCylinder(false, out reason); case MovementPosition.Up: return _LiftPin.SetCylinder(true, out reason); case MovementPosition.Left: case MovementPosition.Right: case MovementPosition.Middle: throw new ArgumentException("Movement argument error"); } return true; } public override bool SetSlitDoor(bool open, out string reason) { //2023/09/05 Venus无TM，暂时注释 //if (open) //{ // if (RouteManager.IsATMMode) // { // if (!IsATM) // { // reason = $"{Module} is not ATM, can not open slit door"; // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason); // return false; // } // if (!IsTMATM) // { // reason = $"LoadLock is not ATM, can not open slit door"; // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason); // return false; // } // } // else // { // double maxPressureDifference = SC.GetValue("System.PMTMMaxPressureDifference"); // if (Math.Abs(TMPressure - ChamberPressure) > maxPressureDifference) // { // reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{ChamberPressure}"; // LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason); // return false; // } // } //} return _slitDoor.SetCylinder(open, out reason); } public override bool RetractWafer() { return _LoadLockArm.SetCylinder(false, out _); } public override bool ExtendWafer() { return _LoadLockArm.SetCylinder(true, out _); } public override bool FlowGas(int gasNum, double val) { if (_gasLines.Length <= gasNum) return false; _gasLines[gasNum].Flow(val); return true; } public override bool StopGas(int gasNum) { if (_gasLines.Length <= gasNum) return false; _gasLines[gasNum].Stop(); return true; } public override bool FlowN2(double val) { _gasLineN2.Flow(val); return true; } public override bool StopN2() { _gasLineN2.Stop(); return true; } public override void StopAllGases() { foreach (var line in _gasLines) { line.Stop(); } } public override bool TurnPendulumValve(bool on) { return _pendulumValve.TurnValve(on); } public override bool SetPVPressure(int pressure) { return _pendulumValve.SetPressure(pressure); } public override bool SetPVPostion(int position) { return _pendulumValve.SetPosition(position); } public override int GetPVPosition() { return _pendulumValve.Position; } public override async void HeatChiller(ChillerType chillerType, double value, double offset) { //_Chiller?.SetChillerTemp((float)value, (float)offset); //await Task.Delay(1000); //_Chiller?.SetChillerOnOff(true); if (!ChillerIsRunning) { _Chiller?.SetChillerOnOff(true); await Task.Delay(1000); } _Chiller?.SetChillerTemp((float)value, (float)offset); } public override void OnOffChiller(ChillerType chillerType, bool onoff) { _Chiller?.SetChillerOnOff(onoff); } public override bool CheckChillerStatus() { return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError; } public override void SetGeneratorCommunicationMode(int mode) { _Generator?.SetCommunicationMode(mode); } public override bool GeneratorPowerOn(bool on) { if (_Generator == null) return false; if (on && !IsRFGInterlockOn) { LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足"); return false; } return _Generator.SetPowerOnOff(on, out _); } public override bool GeneratorSetpower(float val) { if (_Generator == null) return false; if (Math.Abs(val) > 0.01) _Generator.SetPower((ushort)val); return true; } public override bool GeneratorBiasPowerOn(bool on) { if (_GeneratorBias == null) return false; if (on && !IsRFGInterlockOn) { LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足"); return false; } return _GeneratorBias.SetPowerOnOff(on, out _); } public override bool GeneratorBiasSetpower(float val) { if (_GeneratorBias == null) return false; if (Math.Abs(val) > 0.01) _GeneratorBias.SetPower((ushort)val); return true; } public override bool OnOffSetESCHV(bool val) { return _ESCHV.SetPowerOnOff(val); } public override bool SetWallTCTemperature(float value) { return _WallTC.RampTemp(value); } public override bool GeneratorBiasSetMatchMode(bool val) { if (_GeneratorBias == null) return false; string reason = string.Empty; _GeneratorBias.SetMatchingAutoMode(val, out reason); return true; } public override bool SetMatchPosition(float c1, float c2) { if (_Match == null) return false; string reason = string.Empty; _Match.SetMatchPosition(c1, c2, out reason); return true; } public override bool SetBiasMatchPosition(float c1, float c2) { if (_BiasMatch == null) return false; string reason = string.Empty; _BiasMatch.SetMatchPosition(c1, c2, out reason); return true; } public override bool SetBiasPulseMode(bool on) { if (_GeneratorBias == null) return false; _GeneratorBias.SetPulseMode(on); return true; } public override bool SetBiasPulseRateFreq(int nFreq) { if (_GeneratorBias == null) return false; _GeneratorBias.SetPulseRateFreq(nFreq); return true; } public override bool SetDiasPulseDutyCycle(int percentage) { if (_GeneratorBias == null) return false; _GeneratorBias.SetPulseDutyCycle(percentage); return true; } public override bool SetESCClampVoltage(int nVoltage) { if (_ESCHV == null) return false; return _ESCHV.SetOutputVoltage(nVoltage); } public override bool CheckGeneratorAndHVInterlock(VenusDevice device) { eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV; if (!PMLidClosed) { LOG.Write(evt, Module, $"Cannot Power ON {device} as PM Lid is Open."); return false; } if (!IsVAC) { LOG.Write(evt, Module, $"Cannot Power ON {device} as PM is not Vacuum."); return false; } if (!IsWaterFlowOk) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Water Flow is OFF."); return false; } if (!IsRFGInterlockOn) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Generator Interlock is OFF."); return false; } if (!SourceRFFanInterlock) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Source RF Fan is OFF."); return false; } if (!SlitDoorClosed) { LOG.Write(evt, Module, $"Cannot Power ON {device} as Slit Door is open."); return false; } if ((device == VenusDevice.ESCHV || device == VenusDevice.BiasRf) && WaferManager.Instance.CheckNoWafer(Module, 0)) { LOG.Write(evt, Module, $"Cannot Power ON {device} as {Module} has no wafer"); return false; } return true; } public override void SetBacksideHeFlow(double flow) { if (_backsideHe == null) return; _backsideHe.Flow(flow); } public override bool SetBacksideHePressure(float mTorr) { if (_backsideHe == null) return false; return _backsideHe.SetBacksideHelium(mTorr); } public override bool SetBacksideHeThreshold(int nMin, int nMax) { if (_backsideHe == null) return false; return _backsideHe.SetFlowThreshold(nMin, nMax); } public override bool PreparePlace() { if (!SetSlitDoor(true, out string reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Open failed:{reason}"); return false; } if (!SetLiftPin(MovementPosition.Down, out reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin down failed:{reason}"); return false; } return true; } public override bool PreparePick() { if (!SetSlitDoor(true, out string reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Open failed:{reason}"); return false; } if (!SetLiftPin(MovementPosition.Up, out reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin down failed:{reason}"); return false; } return true; } public override bool PreparePlaceIsOK() { return CheckSlitDoorOpen() && LiftPinIsDown; } public override bool PreparePickIsOK() { return CheckSlitDoorOpen() && LiftPinIsUp; } public override bool EndPlace() { if (!SetLiftPin(MovementPosition.Down, out string reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Down failed:{reason}"); return false; } if (!SetSlitDoor(false, out reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}"); return false; } return true; } public override bool EndPick() { if (!SetSlitDoor(false, out string reason)) { LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}"); return false; } return true; } public override bool EndPlaceIsOK() { return CheckSlitDoorClose() && LiftPinIsDown; } public override bool EndPickIsOK() { return CheckSlitDoorClose(); } } }