using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.OperationCenter; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using System.Collections.Generic; using Venus_Core; using Aitex.Core.RT.Device.Unit; using Venus_RT.Modules; using System; using FabConnect.SecsGemInterface.Application.Objects.ProcessManagement; using Aitex.Core.RT.SCCore; namespace Venus_RT.Devices { abstract class JetPMBase : BaseDevice, IDevice { // 盖子的状态 public abstract bool IsLidClosed { get; } public abstract bool IsLidLoadlockClosed { get; } public abstract bool IsSlitDoorClosed { get; } public abstract bool IsPumpRunning { get; } public abstract bool IsTurboPumpRunning { get; } public abstract bool IsTurboPumpAtSpeed { get; } public abstract float TurboPumpSpeed { get; } public abstract bool HasPumpError { get; } public abstract bool HasTurboPumpError { get; } public abstract bool IsCDA_OK { get; } public abstract bool IsFastPumpOpened { get; } public abstract bool IsSoftPumpOpened { get; } public abstract bool IsMfc1ValveOpened { get; } public abstract bool IsMfc2ValveOpened { get; } public abstract bool IsMfc3ValveOpened { get; } public abstract bool IsMfc4ValveOpened { get; } public abstract bool IsMfc5ValveOpened { get; } public abstract bool IsMfc6ValveOpened { get; } public abstract bool IsMfc7ValveOpened { get; } public abstract bool IsMfc8ValveOpened { get; } public abstract bool IsGuageValveOpened { get; } public abstract bool IsATM { get; } public abstract bool PVN22ValveIsOpen { get; } public abstract bool LiftPinIsDown { get; } public abstract bool LiftPinIsUp { get; } public abstract bool IsATMLoadlock { get; } public abstract bool IsVACLoadLock { get; } public abstract bool IsVAC { get; } public abstract bool IsWaterFlowOk { get; } public abstract bool IsWLK { get; } public abstract bool IsRFGInterlockOn { get; } public abstract bool PMLidClosed { get; } public abstract bool TurboPumpInterlock { get; } public abstract bool SourceRFFanInterlock { get; } public abstract bool SlitDoorClosed { get; } public abstract double ProcessLowPressure { get; } public abstract double ProcessHighPressure { get; } public abstract double ProcessPressure { get; } public abstract double ChamberPressure { get; } public abstract double ForelinePressure { get; } public abstract double TargetPressure { get; } public abstract double ESCHePressure { get; } public abstract int ESCOutputVoltage { get; } public abstract double ESCPositiveOutputCurrent { get; }//R+ public abstract double ESCNegativeOutputCurrent { get; }//R- public abstract bool IsHVOn { get; } public abstract float CoolantInletTempFB { get; } public abstract float CoolantOutletTempFB { get; } public abstract bool ChillerIsRunning { get; } //Loadlock_Arm public abstract bool IsLoadlockArmRetract { get; } public abstract bool IsLoadlockArmExtend { get; } //Loadlock_Arm DO public abstract bool LoadlockArmRetract { get; } public abstract bool LoadlockArmExtend { get; } public abstract float ReflectPower { get; } public abstract float BiasReflectPower { get; } public abstract bool BackSideHeOutOfRange { get; } public abstract float RFMatchC1 { get; } public abstract float RFMatchC2 { get; } public abstract float BiasRFMatchC1 { get; } public abstract float BiasRFMatchC2 { get; } public new ModuleName Module; public abstract MovementPosition LiftPinPosition { get; } public abstract bool CheckAtm(); public abstract bool CheckSlitDoorOpen(); public abstract bool CheckSlitDoorClose(); public abstract bool CheckLiftUp(); public abstract bool CheckLiftDown(); public abstract double TotalGasSetpoint { get; } public abstract bool HasGasOutOfRange { get; } public abstract bool PendulumValveIsOpen(); public abstract double LoadlockPressure { get; } public virtual bool WaferIsDown { get; } public double TMPressure { get { return Singleton<RouteManager>.Instance.TM.TMPressure; } } public bool IsTMATM { get { return Singleton<RouteManager>.Instance.TM.IsTMATM; } } public bool IsTMVAC { get { return Singleton<RouteManager>.Instance.TM.IsTMVac; } } // EndPoint private readonly JetEPDBase _epdClient; public List<string> EPDCfgList => _epdClient?.CFGFileList; //public List<string> EPDCfgList=new List<string>() { "1","2"}; public bool EPDCaptured => _epdClient.Captured; public bool EPDConnected => _epdClient.IsEPDConnected; public JetChamber ChamberType = JetChamber.None; public JetPMBase(ModuleName module) : base(module.ToString(), module.ToString(), module.ToString(), module.ToString()) { Module = module; _epdClient = DEVICE.GetDevice<JetEPDBase>($"{Module}.{VenusDevice.EndPoint}"); ChamberType = (JetChamber)SC.GetValue<int>($"{Module}.ChamberType"); DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure); DATA.Subscribe($"{Name}.ProcessHighPressure", () => ProcessHighPressure); DATA.Subscribe($"{Name}.ProcessLowPressure", () => ProcessLowPressure); DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure); DATA.Subscribe($"{Name}.LoadlockPressure", () => LoadlockPressure); DATA.Subscribe($"{Name}.IsATM", () => IsATM, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsVAC", () => IsVAC, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.LiftPinIsUp", () => LiftPinIsUp, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.LiftPinIsDown", () => LiftPinIsDown, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.PumpIsRunning", () => IsPumpRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => IsTurboPumpRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsSlitDoorClosed", () => IsSlitDoorClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsLidClosed", () => IsLidClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.TurboPumpRotationalSpeed", () => TurboPumpSpeed); DATA.Subscribe($"{Name}.IsWaterFlowOk", () => IsWaterFlowOk, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsWLK", () => IsWLK, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsCDA_OK", () => IsCDA_OK, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.SourceRFFanInterlock", () => SourceRFFanInterlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsTurboPumpInterlock", () => TurboPumpInterlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsATMLoadlock", () => IsATMLoadlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsVACLoadlock", () => IsVACLoadLock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.GetPVPosition", () => GetPVPosition()); DATA.Subscribe($"{Name}.ESCHV.Temp", () => CoolantOutletTempFB); DATA.Subscribe($"{Name}.Chiller.Temp", () => CoolantInletTempFB); //DATA.Subscribe($"{Name}.Chiller.IsOn", () => ChillerIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsTurboPumpAtSpeed", () => IsTurboPumpAtSpeed); DATA.Subscribe($"{Name}.EPDCfgList", () => EPDCfgList, SubscriptionAttribute.FLAG.IgnoreSaveDB); OP.Subscribe($"{Module}.SetLiftPin", (cmd, args) => { if ((bool)args[0] == true) { return SetLiftPin(MovementPosition.Up, out _); } else { return SetLiftPin(MovementPosition.Down, out _); } }); OP.Subscribe($"{Module}.SetSRf", (cmd, args) => { var ison = (bool)args[1]; if (ison == true) { GeneratorPowerOn(true); GeneratorSetpower((float)args[0]); } else { GeneratorPowerOn(false); } return true; }); OP.Subscribe($"{Module}.SetBRf", (cmd, args) => { var ison = (bool)args[1]; if (ison == true) { GeneratorBiasPowerOn(true); GeneratorBiasSetpower((float)args[0]); } else { GeneratorBiasPowerOn(false); } return true; }); OP.Subscribe($"{Module}.SetSlitDoor", (cmd, args) => { SetSlitDoor((bool)args[0], out _); return true; }); OP.Subscribe($"{Module}.SetESCHVIsOn", (cmd, args) => { OnOffSetESCHV((bool)args[0]); return true; }); OP.Subscribe($"{Module}.SetESCHV", (cmd, args) => { SetESCClampVoltage((int)args[0]); return true; }); OP.Subscribe($"{Module}.SetPVPostion", (cmd, args) => { SetPVPostion((int)args[0]); return true; }); OP.Subscribe($"{Module}.SetPVPressure", (cmd, args) => { SetPVPressure((int)args[0]); return true; }); OP.Subscribe($"{Module}.ClosePump", (cmd, args) => { TurnDryPump(false); return true; }); OP.Subscribe($"{Module}.CloseTurboPump", (cmd, args) => { TurnTurboPump(false); return true; }); OP.Subscribe($"{Module}.ControlValve", (cmd, args) => { OpenValve((ValveType)((int)args[0]), (bool)args[1]); return true; }); OP.Subscribe($"{Module}.TurnPendulumValve", (cmd, args) => { TurnPendulumValve((bool)args[0]); return true; }); OP.Subscribe($"{Module}.HeatChiller", (cmd, args) => { var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), args[0].ToString()); HeatChiller(chillerType, (float)args[1], (float)args[2]); return true; }); OP.Subscribe($"{Module}.OnOffChiller", (cmd, args) => { var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), args[0].ToString()); var ison = Convert.ToBoolean(args[1]); OnOffChiller(chillerType, ison); return true; }); OP.Subscribe($"{Module}.WallChiller", (cmd, args) => { float value; float.TryParse(args[0].ToString(), out value); SetWallTCTemperature(value); return true; }); OP.Subscribe($"{Module}.SetBacksideHeFlow", (cmd, args) => { double value; double.TryParse(args[0].ToString(), out value); SetBacksideHeFlow(value); return true; }); OP.Subscribe($"{Module}.SetBacksideHePressure", (cmd, args) => { float value; float.TryParse(args[0].ToString(), out value); SetBacksideHePressure(value); return true; }); OP.Subscribe($"{Module}.EndPoint.SearchCfg", (cmd, args) => { _epdClient?.QueryConfigList(); return true; }); } public abstract void CloseValves(); public abstract void TurnDryPump(bool on); public abstract void TurnTurboPump(bool on); public abstract void OpenValve(ValveType vlvType, bool on); public virtual void Monitor() { } public virtual bool Initialize() { return true; } public virtual void Terminate() { } public virtual void Reset() { } public abstract bool OnOffSetESCHV(bool on); public abstract bool SetWallTCTemperature(float value); protected abstract void CheckPermanentInterlock(); public abstract void CheckIdleInterlock(); public abstract void BuzzerBlinking(double time); public abstract void SwitchOnBuzzerAndRed(); public abstract void Home(); public virtual bool SetLiftPin(MovementPosition dirt, out string reason) { reason = ""; return false; } public abstract bool SetSlitDoor(bool open, out string reason); public abstract bool RetractWafer(); public abstract bool ExtendWafer(); public abstract bool FlowGas(int gasNum, double val); public abstract bool StopGas(int gasNum); public abstract bool FlowN2(double val); public abstract bool StopN2(); public abstract void StopAllGases(); public abstract bool TurnPendulumValve(bool on); public abstract bool SetPVPressure(int pressure); public abstract bool SetPVPostion(int position); public abstract int GetPVPosition(); public abstract void HeatChiller(ChillerType chillerType, double value, double offset); public abstract void OnOffChiller(ChillerType chillerType, bool onoff); public abstract bool CheckChillerStatus(); public abstract void SetGeneratorCommunicationMode(int mode); public abstract bool GeneratorPowerOn(bool on); public abstract bool GeneratorSetpower(float val); public abstract bool GeneratorBiasPowerOn(bool on); public abstract bool GeneratorBiasSetpower(float val); public abstract bool GeneratorBiasSetMatchMode(bool val); public abstract bool SetMatchPosition(float c1, float c2); public abstract bool SetBiasMatchPosition(float c1, float c2); public abstract bool SetBiasPulseMode(bool on); public abstract bool SetBiasPulseRateFreq(int nFreq); public abstract bool SetDiasPulseDutyCycle(int percentage); public abstract bool SetESCClampVoltage(int nVoltage); public abstract bool CheckGeneratorAndHVInterlock(VenusDevice device); #region EndPoint public void EPDRecipeStart(string recipe) { try { _epdClient?.RecipeStart(recipe); } catch { } } public void EPDRecipeStop() { try { _epdClient?.RecipeStop(); } catch { } } public void EPDStepStart(string cfgName, int step) { try { _epdClient?.StepStart(cfgName, step); } catch { } } public void EPDStepStop() { try { _epdClient?.StepStop(); } catch { } } #endregion public abstract void SetBacksideHeFlow(double flow); public abstract bool SetBacksideHePressure(float mTorr); public abstract bool SetBacksideHeThreshold(int nMin, int nMax); public virtual bool PreparePlace() { return false; } public virtual bool PreparePick() { return false; } public virtual bool PreparePlaceIsOK() { return false; } public virtual bool PreparePickIsOK() { return false; } public virtual bool EndPlace() { return false; } public virtual bool EndPlaceIsOK() { return false; } public virtual bool EndPick() { return false; } public virtual bool EndPickIsOK() { return false; } public virtual bool HighTemperatureHeaterGotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition) { return false; } } }