using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.DBCore; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs; using System; using System.Collections.Generic; using System.Linq; using System.Reflection; using System.Text; using System.Threading.Tasks; using Venus_Core; using Venus_RT.Devices; using Venus_RT.Modules.PMs; namespace Venus_RT.Modules.TM.VenusEntity { public class SEMFPMPlaceRoutine : ModuleRoutineBase, IRoutine { private enum PlaceStep { WaitPMReady, PMPrepare, ArmExtend, QueryAWC, LiftUpWafer, PlaceDelay, ArmRetract, SavePlaceData, NotifyDone, } private readonly HongHuTM _TM; private readonly ITransferRobot _robot; private int _placingTimeout = 120 * 1000; private int _placeDelayTime = 0; private ModuleName _targetModule; private PMEntity _pmModule; private int _targetSlot; private Hand _hand; private DateTime _starttime; private bool _queryAwc; public SEMFPMPlaceRoutine(HongHuTM honghutm,ITransferRobot robot) : base(ModuleName.TMRobot) { _TM = honghutm; _robot = robot; Name = "Place to PM"; _queryAwc = false; } public RState Start(params object[] objs) { _starttime = DateTime.Now; if (!_robot.IsHomed) { LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first"); return RState.Failed; } var placeItem = (Queue)objs[0]; _targetModule = placeItem.Peek().DestinationModule; _targetSlot = placeItem.Peek().DestinationSlot; _hand = placeItem.Peek().RobotHand; if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule)) { _pmModule = Singleton.Instance.GetPM(_targetModule); } else { LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action"); return RState.Failed; } if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as TM Robot Arm: {_hand} has no wafer"); return RState.Failed; } if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot Place as {_targetModule} Slot {_targetSlot + 1} already has a wafer"); return RState.Failed; } var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, (int)_hand); LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from TM Robot {_hand} to {_targetModule} {_targetSlot + 1}"); Reset(); _placingTimeout = SC.GetValue("SETM.PlaceTimeout") * 1000; _placeDelayTime = SC.GetValue($"{_targetModule}.PlaceDelayTime"); return Runner.Start(Module, $"Place to {_targetModule}"); } public RState Monitor() { Runner.Wait(PlaceStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s) .Run(PlaceStep.PMPrepare, ModulePrepare, IsModulePrepareReady, _delay_60s) .Run(PlaceStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _placingTimeout) .Run(PlaceStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s) .Run(PlaceStep.LiftUpWafer, NotifyPMPlaceWafer, WaitPMWaferLiftUp, _delay_30s) .Delay(PlaceStep.PlaceDelay, _placeDelayTime) .Run(PlaceStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _delay_30s) .Run(PlaceStep.SavePlaceData, RecordAWCData, NullFun) .End(PlaceStep.NotifyDone, NotifyPMDone, _delay_50ms); return Runner.Status; } private bool ModulePrepare() { _pmModule.PostMsg(PMEntity.MSG.PreparePlace); _TM.TurnSlitDoor(_targetModule, true); return true; } private bool IsModulePrepareReady() { return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen; } private bool ArmExtend() { if (!_pmModule.IsSlitDoorOpen) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as {_targetModule} Door is not Open"); return false; } return _robot.PlaceExtend(_targetModule, _targetSlot, _hand); } private bool ArmRetract() { return _robot.PlaceRetract(_targetModule, _targetSlot, _hand); } private bool QueryAWC() { if (!_queryAwc) return true; else return _robot.QueryAwc(); } private bool WaitRobotExtendDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}"); return true; } } private bool RecordAWCData() { if (!_queryAwc) return true; //已经move后的数据 string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}"; int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot; //查询完毕 插入数据 OffsetDataRecorder.RecordOffsetData( Guid.NewGuid().ToString(), ModuleName.TMRobot, 0, _targetModule, _targetSlot, _origin_module, _origin_slot, _hand, RobotArmPan.None, _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D, _starttime, DateTime.Now); return true; } private bool WaitRobotQueryDone() { if (!_queryAwc) return true; if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}"); return true; } } private bool NotifyPMPlaceWafer() { _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer); return true; } private bool WaitPMWaferLiftUp() { return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready; } private bool WaitRobotRetractDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot); return true; } else { Runner.Stop($"TM Robot Place Retract failed, {_robot.Status}"); return true; } } private bool NotifyPMDone() { _pmModule.PostMsg(PMEntity.MSG.PlaceReady); _TM.TurnSlitDoor(_targetModule, false); return true; } public void Abort() { _robot.Halt(); } } }