using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.DBCore; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using Venus_Core; using Venus_RT.Devices; using Venus_RT.Modules.PMs; namespace Venus_RT.Modules.TM.VenusEntity { public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine { private enum PickStep { WaitPMReady, PMPrepare, ArmExtend, QueryAWC, DropDownWafer, PickDelay, ArmRetract, SavePickeData, NotifyDone, } private readonly HongHuTM _tm; private readonly ITransferRobot _robot; private int _picktimeout = 60 * 1000;//1 min private int _pickdelay = 0; private ModuleName _targetModule; private Hand _hand; private int _targetSlot; private PMEntity _pmModule; //private JetChamber _chamber; //private DateTime _starttime; private bool _queryAwc; public SEMFPMPickRoutine(HongHuTM honghutm,ITransferRobot robot) : base(ModuleName.TMRobot) { _tm = honghutm; _robot = robot; _queryAwc = false; } public RState Start(params object[] objs) { //_starttime = DateTime.Now; if (!_robot.IsHomed) { LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first"); return RState.Failed; } var pickItem = (Queue)objs[0]; _targetModule = pickItem.Peek().SourceModule; _targetSlot = pickItem.Peek().SourceSlot; _hand = pickItem.Peek().RobotHand; //_chamber = (JetChamber)SC.GetValue($"{_targetModule}.ChamberType"); if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule)) { _pmModule = Singleton.Instance.GetPM(_targetModule); } else { LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action"); return RState.Failed; } if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer"); return RState.Failed; } if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer"); return RState.Failed; } var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot); LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}"); _picktimeout = SC.GetValue("SETM.PickTimeout") * 1000; _pickdelay = SC.GetValue($"{_targetModule}.PickDelayTime"); Reset(); return Runner.Start(Module, $"Pick from {_targetModule}"); } public RState Monitor() { //switch (_chamber) //{ // case JetChamber.Kepler2200A: // break; // case JetChamber.VenusDE: // break; // default: // break; //} Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s) .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady) .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone) .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s) .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown) .Delay(PickStep.PickDelay, _pickdelay) .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone) .Run(PickStep.SavePickeData, RecordAWCData, NullFun) .End(PickStep.NotifyDone, NotifyPMDone, _delay_50ms); return Runner.Status; } private bool ModulePrepare() { _pmModule.PostMsg(PMEntity.MSG.PreparePick); _tm.TurnSlitDoor(_targetModule, true); return true; } private bool IsModulePrepareReady() { return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen; } private bool ArmExtend() { if (!_pmModule.IsSlitDoorOpen) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open"); return false; } return _robot.PickExtend(_targetModule, _targetSlot, _hand); } private bool ArmRetract() { return _robot.PickRetract(_targetModule, _targetSlot, _hand); } private bool WaitRobotExtendDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand); return true; } else { Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}"); return true; } } private bool QueryAWC() { if (!_queryAwc) return true; else return _robot.QueryAwc(); ; } private bool WaitRobotQueryDone() { if (!_queryAwc) return true; if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}"); return true; } } private bool RecordAWCData() { if (!_queryAwc) return true; return true; } private bool NotifyPMPickWafer() { _pmModule.PostMsg(PMEntity.MSG.DropDownWafer); return true; } private bool WaitPMWaferDropDown() { return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready; } private bool WaitRobotRetractDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}"); return true; } } private bool NotifyPMDone() { _pmModule.PostMsg(PMEntity.MSG.PickReady); _tm.TurnSlitDoor(_targetModule, false); return true; } public void Abort() { _robot.Halt(); } } }