using System; using System.Diagnostics; using System.Collections.Generic; using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Event; using Aitex.Core.RT.Fsm; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.SCCore; using Aitex.Core.Utilities; using Aitex.Core.Util; using Aitex.Core.RT.Log; using Aitex.Sorter.Common; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using Venus_Core; using Venus_RT; using Venus_RT.Devices; using Venus_RT.Devices.YASKAWA; using Venus_RT.Devices.EFEM; using Venus_RT.Modules.LPs; using Venus_RT.Modules.EFEM; namespace Venus_RT.Modules { class EfemEntity : Entity, IEntity, IModuleEntity { //private int _bigWafer = 0; //private int _midWafer = 0; //private int _smallWafer = 0; public enum STATE { Unknown, // 0 Initializing, // 1 Idle, // 2 Error, // 3 Picking, // 4 Placing, // 5 Aligning, // 6 Mapping, // 7 Init, // 8 Orgshing, // 9 Lifting, // 10 InitingAL, // 11 InitingRB, // 12 Extending, // 13 Retracting, // 14 //SettingLamp, // 15 Swapping, Gotoing, Gripping, Ungripping, Fliping, } public enum MSG { HomeAll, // 0 Pick, // 1 Place, // 2 Align, // 3 ActionDone, // 4 MoveCmd, // 6 Recover, // 8 Goto, // 9 Error, // 10 Online, // 11 CommReady, // 12 Lift, // 13 HomeAL, // 14 HomeRB, // 15 Extend, // 16 Retract, // 17 PMLiftPinUp, // 18 PMLiftPinDown, // 19 TurnOffBuzzer, Abort, Map, ToInit, Cool, Swap, Grip, Ungrip, Flip, LiftActionDone, Offline } public enum EfemType { FutureEfem = 1, JetEfem = 2, BrooksEFEM = 3, } public bool IsIdle { get { return fsm.State == (int)STATE.Idle; } } public bool IsError { get { return fsm.State == (int)STATE.Error; } } public bool IsInit { get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; } } public bool IsBusy { get { return !IsInit && !IsError && !IsIdle; } } public bool IsOnline { get; internal set; } public RState RobotStatus { get { if (_efem.Status != RState.Running) { if (_robotWatch.ElapsedMilliseconds < 200) return RState.Running; else return _efem.Status; } else return RState.Running; } } public bool Check(int msg, out string reason, params object[] args) { throw new NotImplementedException(); } // Fields // private readonly string Name; private readonly EfemBase _efem; private readonly LoadPortModule[] _lpms = new LoadPortModule[3]; private readonly EfemType _efemType; public EfemBase EfemDevice => _efem; public EfemType EFEMType => _efemType; // routine private readonly EfemPickRoutine _pickRoutine; private readonly EfemPlaceRoutine _placeRoutine; private readonly EfemSwapRoutine _swapRoutine; private readonly EfemHomeRoutine _homeRoutine; private readonly EFEMAlignRoutine _alignRoutine; private string LiftMessage; private Stopwatch _robotWatch = new Stopwatch(); private R_TRIG _robotIdleTrigger = new R_TRIG(); public LoadPortModule GetLoadportModule(int lpNumber) { if(lpNumber<=0) { return null; } if(_lpms.Length>=lpNumber) { return _lpms[lpNumber-1]; } return null; } // Constructor // public EfemEntity() { _efemType = (EfemType)SC.GetValue($"EFEM.EfemType"); _efem = new JetEfem(); Name = ModuleName.EFEM.ToString(); _homeRoutine = new EfemHomeRoutine(_efem); _pickRoutine = new EfemPickRoutine(_efem); _placeRoutine = new EfemPlaceRoutine(_efem); _swapRoutine = new EfemSwapRoutine(_efem); _alignRoutine = new EFEMAlignRoutine(_efem); InitFsmMap(); } public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg) { _lpms[mod - ModuleName.LP1].PostMsg(msg); } public void NotifyLPError(ModuleName mod ) { _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone); //_lpms[mod - ModuleName.LP1]..OnError(); } protected override bool Init() { _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem); _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem); _lpms[2] = new LoadPortModule(ModuleName.LP3, _efem); _lpms[0].Initialize(); _lpms[1].Initialize(); _lpms[2].Initialize(); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; }); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; }); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; }); //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; }); OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Swap}", (cmd, args) => { PostMsg(MSG.Swap, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) => { bool isGrip = ((string)args[0]).ToLower() == "on"; PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]); return true; }); //OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; }); OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; }); OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; }); OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0], args[1]); return true; }); OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2); return true; }); OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1); return true; }); OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; }); OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; }); OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; }); OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; }); DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString(),Aitex.Core.Util.SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString(), Aitex.Core.Util.SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage, Aitex.Core.Util.SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.RobotMoveAction", () => (_efem.TMRobotMoveInfo), Aitex.Core.Util.SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsOnline", () => (IsOnline), Aitex.Core.Util.SubscriptionAttribute.FLAG.IgnoreSaveDB); _robotWatch.Restart(); return true; } private void InitFsmMap() { fsm = new StateMachine("EFEM", (int)STATE.Unknown, 50); fsm.EnableRepeatedMsg(true); AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME); AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME); AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle); AnyStateTransition(MSG.Error, fnError, STATE.Error); AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME); AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle); AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init); AnyStateTransition(MSG.CommReady, fnCommReady, STATE.Init); Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init); Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle); Transition(STATE.Error, FSM_MSG.TIMER, fnMonitor, STATE.Error); // Home Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Initializing, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle); // Home Robot Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB); Transition(STATE.InitingRB, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle); // Home Aligner Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL); Transition(STATE.InitingAL, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle); // Pick wafer Transition(STATE.Idle, MSG.Pick, FnStartPick, STATE.Picking); Transition(STATE.Picking, FSM_MSG.TIMER, FnPickTimeout, STATE.Idle); Transition(STATE.Picking, MSG.Abort, FnAbortPick, STATE.Idle); // Place wafer Transition(STATE.Idle, MSG.Place, FnStartPlace, STATE.Placing); Transition(STATE.Placing, FSM_MSG.TIMER, FnPlaceTimeout, STATE.Idle); Transition(STATE.Placing, MSG.Abort, FnAbortPlace, STATE.Idle); // Swap wafer with LL sequence Transition(STATE.Idle, MSG.Swap, FnStartSwap, STATE.Swapping); Transition(STATE.Swapping, FSM_MSG.TIMER, FnSwapTimeout, STATE.Idle); Transition(STATE.Swapping, MSG.Abort, FnAbortSwap, STATE.Idle); // Goto Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing); Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle); // Map Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping); Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle); // Grip Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping); Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle); // Ungrip Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping); Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle); // Aligner Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting); //Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle); Transition(STATE.Lifting, FSM_MSG.TIMER, fnLiftTimeout, STATE.Idle); Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning); Transition(STATE.Aligning, FSM_MSG.TIMER, fnAlignTimeout, STATE.Idle); Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle); EnumLoop.ForEach((item) => { fsm.MapState((int)item, item.ToString()); }); EnumLoop.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); }); Running = true; } private bool fnCommReady(object[] param) { return true; } private bool fnHomeAll(object[] param) { return _homeRoutine.Start(ModuleName.EFEM) == RState.Running; } private bool fnHomingTimeout(object[] param) { RState ret = _homeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } return ret == RState.End; } private bool fnHomeRobot(object[] param) { return _homeRoutine.Start(ModuleName.EfemRobot) == RState.Running; } private bool fnHomeAligner(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); return _homeRoutine.Start(unit) == RState.Running; } private bool fnActionDone(object[] param) { return false; } public bool CheckToPostMessage(int msg, params object[] args) { if (!fsm.FindTransition(fsm.State, msg)) { LOG.Write(eEvent.WARN_EFEM_COMMON_WARN, ModuleName.EFEM, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}"); return false; } Running = true; fsm.PostMsg(msg, args); return true; } private bool fnMonitor(object[] param) { // robot idle check _robotIdleTrigger.CLK = _efem.Status != RState.Running; if (_robotIdleTrigger.Q) { _robotWatch.Restart(); } _efem.Monitor(); return true; } private bool fnOnline(object[] param) { bool bOnlineFlag = (bool)param[0]; if (_efem is EfemBase efem) { efem.SetOnline(bOnlineFlag); } IsOnline = bOnlineFlag; return true; } private string GetFsmLastMessage() { int msg = fsm.LastMsg; if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error) return ((MSG)msg).ToString(); if (msg == (int)FSM_MSG.TIMER) return "Timer"; return msg.ToString(); } private bool fnError(object[] param) { return true; } private bool fnToInit(object[] param) { return true; } private bool fnRecover(object[] param) { _efem.ClearError(); //_efem.ExecuteAction(); return true; } private bool fnAbortRobot(object[] param) { //_efem.ExecuteAction(); return true; } private bool fnSetLED(object[] param) { LightType light = (LightType)param[0]; LightStatus st = (LightStatus)param[1]; _efem.SetLamp(light, st); return true; } private bool fnTurnOffBuzzer(object[] param) { return false; } private bool FnStartPick(object[] param) { return _pickRoutine.Start(param) == RState.Running; } private bool FnPickTimeout(object[] param) { RState ret = _pickRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); Singleton.Instance.InvokeAbort(new object[] { ModuleName.EFEM }); return false; } return ret == RState.End; } private bool FnAbortPick(object[] param) { _pickRoutine.Abort(); return true; } private bool FnStartPlace(object[] param) { return _placeRoutine.Start(param) == RState.Running; } private bool FnPlaceTimeout(object[] param) { RState ret = _placeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); Singleton.Instance.InvokeAbort(new object[] { ModuleName.EFEM }); return false; } return ret == RState.End; } private bool FnAbortPlace(object[] param) { _placeRoutine.Abort(); return true; } private bool FnStartSwap(object[] param) { return _swapRoutine.Start(param) == RState.Running; } private bool FnSwapTimeout(object[] param) { RState ret = _swapRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); Singleton.Instance.InvokeAbort(new object[] { ModuleName.EFEM }); return false; } return ret == RState.End; } private bool FnAbortSwap(object[] param) { _swapRoutine.Abort(); return true; } private bool fnGoto(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); _efem.Goto(unit, Hand.Blade1); return true; } private bool fnLift(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); bool isUp = true; if (param.Length > 1) { isUp = (bool) param[1]; } if (isUp) { if (!_efem.SetPinUp(unit)) return false; } else { if (!_efem.SetPinDown(unit)) return false; } LiftMessage = isUp ? "Up" : "Down"; return true; } private bool fnLiftTimeout(object[] param) { if (LiftMessage == "Up") { return _efem.LiftIsDown == false && _efem.LiftIsUp == true; } else if (LiftMessage == "Down") { return _efem.LiftIsDown == true && _efem.LiftIsUp == false; } return false; } private bool fnAlign(object[] param) { return _alignRoutine.Start(param) == RState.Running; } private bool fnAlignTimeout(object[] param) { RState ret = _alignRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } return ret == RState.End; } private bool fnMap(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); if (!_efem.Map(unit)) return false; return true; } private bool fnGrip(object[] param) { Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]); if (!_efem.Grip(arm, true)) return false; return true; } private bool fnUngrip(object[] param) { Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]); if (!_efem.Grip(arm, false)) return false; return true; } public int Invoke(string function, params object[] args) { switch (function) { case "Home": CheckToPostMessage((int)MSG.HomeAll); return (int)MSG.HomeAll; } return (int)FSM_MSG.NONE; } public bool CheckAcked(int msg) { return fsm.CheckExecuted(msg); } internal void InvokeReset() { if (fsm.State == (int) STATE.Error) { PostMsg((int)MSG.Recover); } } public int InvokeAlign(string module, int reserv, float angle) { if (CheckToPostMessage((int)MSG.Align, module, reserv, angle)) return (int)MSG.Align; return (int)FSM_MSG.NONE; } public int InvokeLiftDown(string module) { if (CheckToPostMessage((int)MSG.Lift, module, false)) return (int)MSG.Lift; return (int)FSM_MSG.NONE; } public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size) { if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size)) return (int)MSG.Pick; return (int)FSM_MSG.NONE; } public int InvokeGoto(ModuleName source, int slot) { if (CheckToPostMessage((int)MSG.Goto, source, slot)) return (int)MSG.Goto; return (int)FSM_MSG.NONE; } public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size) { if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size)) return (int)MSG.Place; return (int)FSM_MSG.NONE; } public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size) { if (CheckToPostMessage((int)MSG.Swap, targetModule, pickSlot, pickHand, placeHand, placeSlot, size)) return (int)MSG.Swap; return (int)FSM_MSG.NONE; } public int InvokeMap(string target ) { if (CheckToPostMessage((int)MSG.Map, target )) return (int)MSG.Map; return (int)FSM_MSG.NONE; } public int InvokeFlip(Hand hand) { if (CheckToPostMessage((int)MSG.Flip, hand)) return (int)MSG.Flip; return (int)FSM_MSG.NONE; } public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot) { //if (type == EnumTransferType.Pick) //{ // //需要补充:判断LP 放好了,而且已经map过。 // return _efem[module].HasCassette && _efem[module].IsMapped; //} //else if (type == EnumTransferType.Place) //{ // //需要补充:判断LP 放好了,而且已经map过。 // return _efem[module].HasCassette && _efem[module].IsMapped; //} return false; } internal bool CheckReadyRunNewJob(ModuleName module) { //??? return true; } internal bool CheckReadyTransfer(ModuleName module) { //return _efem[module].HasCassette && _efem[module].IsMapped; return true; } internal bool CheckPlaced(ModuleName module) { //return _efem[module].HasCassette; return true; } internal void NoteJobStart(ModuleName module) { //_efem[module].NoteJobStart(); } internal void NoteJobComplete(ModuleName module) { //_efem[module].NoteJobComplete(); } private void _debugRoutine() { int flag = 0; // Test Home routine if (flag == 1) { PostMsg(MSG.HomeAll); } else if (flag == 2) { WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal); WaferManager.Instance.DeleteWafer(ModuleName.EfemRobot, 0); var item = new MoveItem(ModuleName.Aligner1, 0, ModuleName.EfemRobot, 0, Hand.Blade1); var items = new Queue(); items.Enqueue(item); PostMsg(MSG.Pick, items); } else if (flag == 3) { var item = new MoveItem( ModuleName.EfemRobot, 0, ModuleName.Aligner1, 0, Hand.Blade1); var items = new Queue(); items.Enqueue(item); PostMsg(MSG.Place, items); } else if (flag == 4) { WaferManager.Instance.CreateWafer(ModuleName.LLA, 0, WaferStatus.Normal); WaferManager.Instance.CreateWafer(ModuleName.LLA, 1, WaferStatus.Normal); WaferManager.Instance.DeleteWafer(ModuleName.LLA, 2); WaferManager.Instance.DeleteWafer(ModuleName.LLA, 3); WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal); WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal); var item = new MoveItem(ModuleName.EfemRobot, 0, ModuleName.LLA, 2, Hand.Blade1); var items = new Queue(); items.Enqueue(item); item = new MoveItem(ModuleName.EfemRobot, 1, ModuleName.LLA, 3, Hand.Blade2); items.Enqueue(item); item = new MoveItem(ModuleName.LLA, 0, ModuleName.EfemRobot, 0, Hand.Blade1); items.Enqueue(item); item = new MoveItem(ModuleName.LLA, 1, ModuleName.EfemRobot, 1, Hand.Blade2); items.Enqueue(item); PostMsg(MSG.Swap, items); } else if (flag == 5) { PostMsg(MSG.HomeRB); } else if (flag == 6) { PostMsg(MSG.HomeAL, ModuleName.Aligner1); } else if (flag == 8) { OP.DoOperation("LP1.Load"); } else if(flag == 9) { OP.DoOperation("LP1.Unload"); } } } /// /// LP entity /// class LoadportEntity : Entity, IEntity { private enum STATE { Unknown, Idle, // 1 Initializing, // 2 Initialized, // 3 Mapping, // 4 Mapped, // 5 } public enum MSG { Home, // 0 Map, // 1 ActionDone, // 2 RecHwMsg, // 3 Recover, // 4 Abort, // 5 Online, // 6 Error // 7 } private readonly EfemBase _efem; private ModuleName Module { get; } public LoadportEntity(ModuleName mod, EfemBase efem) { this.Module = mod; _efem = efem; InitFsmMap(); OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; }); OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; }); //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; }); OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; }); DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString()); DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString()); DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString()); DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage); } private string GetFsmLastMessage() { int msg = fsm.LastMsg; if (msg >= (int)MSG.Home && msg <= (int)MSG.Error) return ((MSG)msg).ToString(); if (msg == (int)FSM_MSG.TIMER) return "Timer"; return msg.ToString(); } private void InitFsmMap() { fsm = new StateMachine($"LPM_{Module}", (int)STATE.Idle, 500); AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME); //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME); AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME); AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle); AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle); EnterExitTransition(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute); // Home AnyStateTransition(MSG.Home, fnHome, STATE.Initializing); Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle); } private bool fnOnline(object[] param) { bool online = (bool)param[0]; //_efem.SetOnline(Module, online); return true; } private bool fnRecover(object[] param) { return true; } private bool fnMonitor(object[] param) { STATE curSt = (STATE)fsm.State; if (curSt == STATE.Initializing || curSt == STATE.Mapping) { if (fsm.ElapsedTime > 20 * 1000) { PostMsg(MSG.Recover); } } return true; } private bool fnEnterExecute(object[] param) { return true; } private bool fnExitExecute(object[] param) { return true; } private bool fnActionDone(object[] param) { return true; } private bool fnHome(object[] param) { _efem.Home(Module); return true; } public bool Check(int msg, out string reason, params object[] args) { throw new NotImplementedException(); } } }