using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.OperationCenter; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using System.Collections.Generic; using Venus_Core; using Venus_RT.Modules; using System; using Aitex.Core.RT.SCCore; using System.Threading.Tasks; using Aitex.Core.RT.Log; namespace Venus_RT.Devices { abstract class JetPMBase : BaseDevice, IDevice { // 盖子的状态 public abstract bool IsLidClosed { get; } public virtual bool IsLidLoadlockClosed { get; } public abstract bool IsSlitDoorClosed { get; } public virtual bool IsLinerDoorClosed { get; } public virtual bool IsISOOpen { get; } public virtual bool IsPenVOpen { get; } public abstract bool IsPumpRunning { get; } public abstract bool IsTurboPumpRunning { get; } public abstract bool IsTurboPumpAtSpeed { get; } public abstract float TurboPumpSpeed { get; } public abstract bool HasPumpError { get; } public abstract bool HasTurboPumpError { get; } public abstract bool IsCDA_OK { get; } public abstract bool IsFastPumpOpened { get; } public abstract bool IsSoftPumpOpened { get; } public abstract bool IsMfc1ValveOpened { get; } public abstract bool IsMfc2ValveOpened { get; } public abstract bool IsMfc3ValveOpened { get; } public abstract bool IsMfc4ValveOpened { get; } public abstract bool IsMfc5ValveOpened { get; } public abstract bool IsMfc6ValveOpened { get; } public abstract bool IsMfc7ValveOpened { get; } public abstract bool IsMfc8ValveOpened { get; } public abstract bool IsGuageValveOpened { get; } public abstract bool IsATM { get; } public abstract bool PVN22ValveIsOpen { get; } public virtual bool LiftPinIsDown { get; } public virtual bool LiftPinIsUp { get; } //public abstract bool IsATMLoadlock { get; } //public abstract bool IsVACLoadLock { get; } public abstract bool IsVAC { get; } public abstract bool IsWaterFlowOk { get; } public abstract bool IsWLK { get; } public abstract bool IsRFGInterlockOn { get; } //public virtual bool PMLidClosed { get; } public abstract bool TurboPumpInterlock { get; } public virtual bool SourceRFFanInterlock { get; } public virtual bool SourceRFMatchInterlock { get; } public virtual bool SlitDoorClosed { get; } public virtual bool LinerDoorClosed { get; } //public virtual double ProcessLowPressure { get; } //public virtual double ProcessHighPressure { get; } public abstract double ProcessPressure { get; } public abstract double ChamberPressure { get; } public virtual double CalculationPressure { get; } public virtual double PenningGuagePressure { get; } public abstract double ForelinePressure { get; } public abstract double TargetPressure { get; } public virtual double ESCHePressure { get; } public virtual double ESCHeOutPressure { get; } public virtual int ESCOutputVoltage { get; } public virtual float MagnetIntensity { get; } public virtual double ESCPositiveOutputCurrent { get; }//R+ public virtual double ESCNegativeOutputCurrent { get; }//R- public virtual bool IsHVOn { get; } public virtual int ChamberWaferSize { get; } public virtual float CoolantInletTempFB { get; } public virtual float CoolantInletWallTempFB { get; } public virtual float CoolantOutletTempFB { get; } public virtual bool ChillerIsRunning { get; } //Loadlock_Arm public virtual bool IsLoadlockArmRetract { get; } public virtual bool IsLoadlockArmExtend { get; } //Loadlock_Arm DO public virtual bool LoadlockArmRetract { get; } public virtual bool LoadlockArmExtend { get; } public virtual bool IsAllowRobotTransfer { get; } public abstract float ReflectPower { get; } public virtual float BiasReflectPower { get; } public virtual float ForwardPower { get; } public virtual float BiasForwardPower { get; } public virtual bool BackSideHeOutOfRange { get; } public virtual bool BackSideOutHeOutOfRange { get; } public abstract float RFMatchC1 { get; } public abstract float RFMatchC2 { get; } public virtual float BiasRFMatchC1 { get; } public virtual float BiasRFMatchC2 { get; } public virtual float RFBoxC1 { get; } public virtual bool ScrubberIsOK => true; public new ModuleName Module; public virtual MovementPosition LiftPinPosition { get; } public virtual float ChamberTemperature { get; } //public virtual float WallTemperature { get; } //public virtual float ESCTemperature { get; } public virtual float HighTemperatureHeaterTemperature { get; } public virtual HighTemperatureHeaterPosition HighTemperatureHeaterPosition { get; } //public abstract bool CheckAtm(); public virtual bool CheckSlitDoorOpen() { return false; } public virtual bool CheckSlitDoorClose() { return true; } public virtual bool CheckLinerDoorOpen() { return true; } public virtual bool CheckLinerDoorClose() { return true; } public virtual bool CheckLiftUp() { return false; } public virtual bool CheckLiftDown() { return false; } public abstract double TotalGasSetpoint { get; } public abstract bool HasGasOutOfRange { get; } public abstract bool PendulumValveIsOpen(); //public virtual double LoadlockPressure { get; } public virtual double MFC1FeedBack { get; } public virtual double MFC2FeedBack { get; } public virtual double MFC3FeedBack { get; } public virtual double MFC4FeedBack { get; } public virtual double MFC5FeedBack { get; } public virtual double MFC6FeedBack { get; } public virtual double MFC7FeedBack { get; } public virtual double MFC8FeedBack { get; } public virtual double MFC9FeedBack { get; } public virtual double MFC10FeedBack { get; } public virtual double MFC11FeedBack { get; } public virtual double MFC12FeedBack { get; } public virtual double HeliumFeedBack { get; } public virtual float PendulumPressure { get; } public virtual float PendulumPosition { get; } public double TMPressure { get { return Singleton.Instance.TM.TMPressure; } } public bool IsTMATM { get { //if (Singleton.Instance.TM != null) //{ // return Singleton.Instance.TM.IsTMATM; //} //else //{ // return Singleton.Instance.seTM.TMIsATM; //} return Singleton.Instance.TM.IsTMATM; } } public bool IsTMVAC { get { //if (Singleton.Instance.TM != null) //{ // return Singleton.Instance.TM.IsTMVac; //} //else //{ // return Singleton.Instance.seTM.TMIsVAC; //} return Singleton.Instance.TM.IsTMVac; } } // EndPoint private readonly JetEPDBase _epdClient; public List EPDCfgList => _epdClient?.CFGFileList; //public List EPDCfgList=new List() { "1","2"}; public bool EPDCaptured => _epdClient.Captured; public bool EPDConnected => _epdClient.IsEPDConnected; public JetChamber ChamberType = JetChamber.None; public JetPMBase(ModuleName module) : base(module.ToString(), module.ToString(), module.ToString(), module.ToString()) { Module = module; _epdClient = DEVICE.GetDevice($"{Module}.{VenusDevice.EndPoint}"); ChamberType = (JetChamber)SC.GetValue($"{Module}.ChamberType"); DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure); //DATA.Subscribe($"{Name}.ProcessHighPressure", () => ProcessHighPressure, SubscriptionAttribute.FLAG.IgnoreSaveDB); //DATA.Subscribe($"{Name}.ProcessLowPressure", () => ProcessLowPressure,SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.CalculationPressure", () => CalculationPressure, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure); DATA.Subscribe($"{Name}.ProcessPressure", () => ProcessPressure); //DATA.Subscribe($"{Name}.LoadlockPressure", () => LoadlockPressure); DATA.Subscribe($"{Name}.IsATM", () => IsATM, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsVAC", () => IsVAC, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.LiftPinIsUp", () => LiftPinIsUp, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.LiftPinIsDown", () => LiftPinIsDown, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.PumpIsRunning", () => IsPumpRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => IsTurboPumpRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsSlitDoorClosed", () => IsSlitDoorClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB); //DATA.Subscribe($"{Name}.IsLinerDoorClosed", () => IsLinerDoorClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsLidClosed", () => IsLidClosed, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.TurboPumpRotationalSpeed", () => TurboPumpSpeed); DATA.Subscribe($"{Name}.IsWaterFlowOk", () => IsWaterFlowOk, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsWLK", () => IsWLK, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsCDA_OK", () => IsCDA_OK, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.SourceRFFanInterlock", () => SourceRFFanInterlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.SourceRFMatchInterlock", () => SourceRFMatchInterlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsTurboPumpInterlock", () => TurboPumpInterlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); //DATA.Subscribe($"{Name}.IsATMLoadlock", () => IsATMLoadlock, SubscriptionAttribute.FLAG.IgnoreSaveDB); //DATA.Subscribe($"{Name}.IsVACLoadlock", () => IsVACLoadLock, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.GetPVPosition", () => GetPVPosition()); //DATA.Subscribe($"{Name}.WallChiller.Temp", () => CoolantInletWallTempFB,SubscriptionAttribute.FLAG.IgnoreSaveDB); //DATA.Subscribe($"{Name}.Chiller.IsOn", () => ChillerIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsTurboPumpAtSpeed", () => IsTurboPumpAtSpeed); DATA.Subscribe($"{Name}.EPDCfgList", () => EPDCfgList, SubscriptionAttribute.FLAG.IgnoreSaveDB); OP.Subscribe($"{Module}.SetLiftPin", (cmd, args) => { if ((bool)args[0] == true) { return SetLiftPin(MovementPosition.Up, out _); } else { return SetLiftPin(MovementPosition.Down, out _); } }); OP.Subscribe($"{Module}.SetSRf", (cmd, args) => { var ison = (bool)args[1]; if (ison == true) { GeneratorPowerOn(true); GeneratorSetpower((float)args[0]); } else { GeneratorPowerOn(false); } return true; }); OP.Subscribe($"{Module}.SetBRf", (cmd, args) => { var ison = (bool)args[1]; if (ison == true) { GeneratorBiasPowerOn(true); GeneratorBiasSetpower((float)args[0]); } else { GeneratorBiasPowerOn(false); } return true; }); OP.Subscribe($"{Module}.SetMagnet", (cmd, args) => { var ison = (bool)args[1]; MagnetSetpower((float)args[0]); return true; }); OP.Subscribe($"{Module}.SetSlitDoor", (cmd, args) => { SetSlitDoor((bool)args[0], out _); return true; }); OP.Subscribe($"{Module}.SetLinerDoor", (cmd, args) => { SetLinerDoor((bool)args[0], out _); return true; }); OP.Subscribe($"{Module}.SetESCHVIsOn", (cmd, args) => { OnOffSetESCHV((bool)args[0]); return true; }); OP.Subscribe($"{Module}.SetESCHV", (cmd, args) => { SetESCClampVoltage((int)args[0]); return true; }); OP.Subscribe($"{Module}.SetPVPostion", (cmd, args) => { SetPVPostion(Convert.ToSingle(args[0])); return true; }); OP.Subscribe($"{Module}.SetPVPressure", (cmd, args) => { SetPVPressure(Convert.ToSingle(args[0])); return true; }); OP.Subscribe($"{Module}.ClosePump", (cmd, args) => { TurnDryPump(false); return true; }); OP.Subscribe($"{Module}.CloseTurboPump", (cmd, args) => { TurnTurboPump(false); return true; }); OP.Subscribe($"{Module}.ControlValve", (cmd, args) => { if (Enum.TryParse(args[0].ToString(), out ValveType targetvalve)) { OpenValve(targetvalve, (bool)args[1]); } return true; }); OP.Subscribe($"{Module}.TurnPendulumValve", (cmd, args) => { TurnPendulumValve((bool)args[0]); return true; }); OP.Subscribe($"{Module}.HeatChiller", (cmd, args) => { var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), args[0].ToString()); HeatChiller(chillerType, (float)args[1], (float)args[2]); return true; }); OP.Subscribe($"{Module}.OnOffChiller", (cmd, args) => { var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), args[0].ToString()); var ison = Convert.ToBoolean(args[1]); OnOffChiller(chillerType, ison); return true; }); OP.Subscribe($"{Module}.WallChiller", (cmd, args) => { float value; float.TryParse(args[0].ToString(), out value); SetWallTCTemperature(value); return true; }); OP.Subscribe($"{Module}.SetBacksideHeFlow", (cmd, args) => { double value; double.TryParse(args[0].ToString(), out value); SetBacksideHeFlow(value); return true; }); OP.Subscribe($"{Module}.SetBacksideHePressure", (cmd, args) => { float value; float.TryParse(args[0].ToString(), out value); SetBacksideHePressure(value); return true; }); OP.Subscribe($"{Module}.SetBacksideOutHeFlow", (cmd, args) => { double value; double.TryParse(args[0].ToString(), out value); SetBacksideOutHeFlow(value); return true; }); OP.Subscribe($"{Module}.SetBacksideOutHePressure", (cmd, args) => { float value; float.TryParse(args[0].ToString(), out value); SetBacksideOutHePressure(value); return true; }); OP.Subscribe($"{Module}.EndPoint.SearchCfg", (cmd, args) => { _epdClient?.QueryConfigList(); return true; }); } public abstract void CloseValves(int? delayTime = null); public virtual bool CheckValve(ValveType vlvType) { return false; } public abstract void TurnDryPump(bool on); public abstract void TurnTurboPump(bool on); public abstract void OpenValve(ValveType vlvType, bool on); public virtual void Monitor() { } public virtual bool Initialize() { return true; } public virtual void Terminate() { } public virtual void Reset() { } public virtual bool OnOffSetESCHV(bool on) { return false; } public virtual bool IsRFAble() { return true; } public virtual bool IsBiasRFAble() { return true; } public abstract bool SetWallTCTemperature(float value); protected abstract void CheckPermanentInterlock(); public abstract void CheckIdleInterlock(int delaytime=0); public virtual void BuzzerBlinking(double time) { } public virtual void SwitchOnBuzzerAndRed() { } public abstract void Home(); public virtual bool HomeIsOK(out string reason) { reason = ""; return true; } public virtual bool SetLiftPin(MovementPosition dirt, out string reason) { reason = ""; return false; } public virtual bool SetSlitDoor(bool open, out string reason) { reason = ""; return false; } public virtual bool SetLinerDoor(bool open, out string reason) { reason = ""; return false; } public virtual bool RetractWafer() { return false; } public virtual bool ExtendWafer() { return false; } public abstract bool FlowGas(int gasNum, double val); public virtual bool FullMFC(int gasNum) { return false; } public virtual bool PumpGas(int gasNum) { return false; } public virtual bool PurgeGas(int gasNum) { return false; } public abstract bool StopGas(int gasNum); public abstract bool FlowN2(double val); public abstract bool StopN2(); public abstract void StopAllGases(); public abstract bool TurnPendulumValve(bool on); public abstract bool SetPVPressure(float pressure); public abstract bool SetPVPostion(float position); public abstract float GetPVPosition(); public virtual void HeatChiller(ChillerType chillerType, double value, double offset) { } public virtual void OnOffChiller(ChillerType chillerType, bool onoff) { } public virtual bool CheckChillerStatus() { return false; } public abstract void SetGeneratorCommunicationMode(int mode); public abstract bool GeneratorPowerOn(bool on); public abstract bool GeneratorSetpower(float val); public virtual bool GeneratorBiasPowerOn(bool on) { return false; } public virtual bool MagnetSetpower(float val) { return false; } public virtual bool SetFieldRatio(float val) { return false; } public virtual bool SetWaveform(int val) { return false; } public virtual bool GeneratorBiasSetpower(float val) { return false; } public virtual bool GeneratorBiasSetMatchMode(bool val) { return false; } public abstract bool SetMatchPosition(float c1, float c2); public virtual bool SetBiasMatchPosition(float c1, float c2) { return false; } public virtual bool SetMatchWorkMode(MatchWorkMode matchWorkMode) { return false; } public virtual bool SetBiasMatchWorkMode(MatchWorkMode matchWorkMode) { return false; } //public virtual async Task SetBiasMatchWorkMode2(MatchWorkMode matchWorkMode) //{ // await Task.Delay(1200); // return false; //} public virtual bool SetMatchC1Position(float c1) { return false; } public virtual bool SetBiasPulseMode(bool on) { return false; } public virtual bool SetBiasPulseRateFreq(int nFreq) { return false; } public virtual bool SetRFBoxC1Position(float c1) { return false; } public virtual bool SetDiasPulseDutyCycle(int percentage) { return false; } public virtual bool SetESCClampVoltage(int nVoltage) { return false; } public abstract bool CheckGeneratorAndHVInterlock(VenusDevice device); #region EndPoint public void EPDRecipeStart(string recipe) { try { _epdClient?.RecipeStart(recipe); } catch { } } public void EPDRecipeStop() { try { _epdClient?.RecipeStop(); } catch { } } public void EPDStepStart(string cfgName, int step) { try { _epdClient?.StepStart(cfgName, step); } catch { } } public void EPDStepStop() { try { _epdClient?.StepStop(); } catch { } } #endregion public virtual void SetBacksideHeFlow(double flow) { } public virtual bool SetBacksideHePressure(float mTorr) { return false; } public virtual void SetBacksideOutHeFlow(double flow) { } public virtual bool SetBacksideOutHePressure(float mTorr) { return false; } public virtual bool SetHeliumPump(bool On) { return false; } public virtual bool SetOutHeliumPump(bool On) { return false; } public virtual bool SetBacksideOutHeThreshold(float nMin, float nMax) { return true; } public virtual bool SetBacksideHeThreshold(float nMin, float nMax) { return true; } public virtual bool HighTemperatureHeaterGotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition) { return false; } public virtual bool SetHighTemperatureHeaterTemperature(int temperature) { return false; } public virtual bool SetHighTemperatureHeaterRatio(int ratio) { return false; } //public virtual bool SetHighTemperatureHeaterRate(int rate) //{ // return false; //} public virtual bool ResetHighTemperatureHeater() { return false; } public virtual bool StartControlPressure(int pressureSetpoint, int flowSetpoint) { return false; } public virtual async void AbortControlPressure() { await Task.Delay(0); //return false; } public virtual bool PreparePlace() { return false; } public virtual bool PreparePlaceIsOK() { return false; } public virtual bool PreparePick() { return false; } public virtual bool PreparePickIsOK() { return false; } public virtual bool EndPlace() { return false; } public virtual bool EndPlaceIsOK() { return false; } public virtual bool EndPick() { return false; } public virtual bool EndPickIsOK() { return false; } public virtual void RTCloseEvent() { } public virtual bool RFInterlock(VenusDevice device) { return true; } public abstract void PMInError(); public virtual bool SetLeakCheckMode(bool ison) { return true; } } }