[ { "Id": 1, "Level": "Info", "LogEnum": "EV_LOGOFF_INFO", "GlobalDescription_zh": "用户'{0}'注销登录", "GlobalDescription_en": "", "Module": "System", "Note": "用户注销登录" }, { "Id": 2, "Level": "Info", "LogEnum": "EV_LOGOUT_INFO", "GlobalDescription_zh": "强制用户{0}登出，原因：{1}", "GlobalDescription_en": "Force user {0} logout system，reason:{1}。", "Module": "System", "Note": "" }, { "Id": 3, "Level": "Error", "LogEnum": "ERR_LOGOFF_ERROR", "GlobalDescription_zh": "注销用户{0}发生异常", "GlobalDescription_en": "", "Module": "System", "Note": "" }, { "Id": 4, "Level": "Error", "LogEnum": "ERR_UPDATE_PW_ERROR", "GlobalDescription_zh": "修改账号{0}的密码失败", "GlobalDescription_en": "", "Module": "System", "Note": "" }, { "Id": 5, "Level": "Error", "LogEnum": "ERR_DELETE_USER_ERROR", "GlobalDescription_zh": "删除账号{0}发生异常", "GlobalDescription_en": "", "Module": "System", "Note": "" }, { "Id": 6, "Level": "Error", "LogEnum": "ERR_UPDATE_USER_ERROR", "GlobalDescription_zh": "更新账号{0}资料发生异常", "GlobalDescription_en": "", "Module": "System", "Note": "" }, { "Id": 9, "Level": "Error", "LogEnum": "ERR_WCF_OPEN_ERROR", "GlobalDescription_zh": "WCF服务{0}未能打开,原因:{1}", "GlobalDescription_en": "WCF Service{0}can not open,reason:{1} ", "Module": "System", "Note": "wcf未能打开" }, { "Id": 10, "Level": "Info", "LogEnum": "EV_ROUTINE_NOTIFY", "GlobalDescription_zh": "[{0}] routine, {1}", "GlobalDescription_en": "[{0}] routine, {1}", "Module": "System", "Note": "Routine Notify" }, { "Id": 11, "Level": "Warning", "LogEnum": "WARN_DEFAULT_WARN", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Default Warning" }, { "Id": 12, "Level": "Error", "LogEnum": "ERR_ROUTINE_FAILED", "GlobalDescription_zh": "[{0}] routine failed, {1}", "GlobalDescription_en": "[{0}] routine failed, {1}", "Module": "System", "Note": "Routine Failed" }, { "Id": 13, "Level": "Error", "LogEnum": "ERR_SIGNAL_TOWER_UNDEFINE", "GlobalDescription_zh": "Undefined light： {0}", "GlobalDescription_en": "Undefined light： {0}", "Module": "System", "Note": "Undefined light： {0}" }, { "Id": 14, "Level": "Error", "LogEnum": "ERR_SIGNAL_TOWER_INVALID_CFG", "GlobalDescription_zh": "signal tower config file has invalid set, {0}", "GlobalDescription_en": "signal tower config file has invalid set, {0}", "Module": "System", "Note": "Invalid config" }, { "Id": 15, "Level": "Error", "LogEnum": "ERR_PLC_HEARTBEAT_FAIL", "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败，请检查PLC运行情况。", "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it", "Module": "System", "Note": "Invalid config" }, { "Id": 16, "Level": "Info", "LogEnum": "EV_DEVICE_INFO", "GlobalDescription_zh": "Device Info: {0}", "GlobalDescription_en": "Device Info: {0}", "Module": "System", "Note": "Device Info" }, { "Id": 17, "Level": "Error", "LogEnum": "ERR_DEVICE_INFO", "GlobalDescription_zh": "Device Error: {0}", "GlobalDescription_en": "Device Error: {0}", "Module": "System", "Note": "Device Error" }, { "Id": 18, "Level": "Error", "LogEnum": "ERR_EXCEPTION", "GlobalDescription_zh": "异常：{0}", "GlobalDescription_en": "Exception:{0}。", "Module": "System", "Note": "" }, { "Id": 19, "Level": "Warning", "LogEnum": "WARN_DEVICE_INFO", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Device Warning" }, { "Id": 20, "Level": "Info", "LogEnum": "EV_WAFER_MANAGER_NOTIFY", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Wafermanager Notify" }, { "Id": 21, "Level": "Warning", "LogEnum": "WARN_WAFER_MANAGER_WARN", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Wafermanager Warning" }, { "Id": 22, "Level": "Error", "LogEnum": "ERR_WAFER_MANAGER_FAILED", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Wafermanager Failed" }, { "Id": 23, "Level": "Info", "LogEnum": "EV_FSM_NOTIFY", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "FSM Notify" }, { "Id": 24, "Level": "Warning", "LogEnum": "WARN_FSM_WARN", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "FSM Warning" }, { "Id": 25, "Level": "Error", "LogEnum": "ERR_FSM_FAILED", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "FSM Failed" }, { "Id": 26, "Level": "Info", "LogEnum": "EV_ROUTER", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Router Notify" }, { "Id": 27, "Level": "Warning", "LogEnum": "WARN_ROUTER", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Router Warning" }, { "Id": 28, "Level": "Error", "LogEnum": "ERR_ROUTER", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Router Failed" }, { "Id": 29, "Level": "Info", "LogEnum": "EV_WAFER_MOVED", "GlobalDescription_zh": "Wafer {0} moved from {1} {2} to {3} {4}", "GlobalDescription_en": "Wafer {0} moved from {1} {2} to {3} {4}", "Module": "System", "Note": "Wafer Moved" }, { "Id": 30, "Level": "Info", "LogEnum": "EV_WAFER_CREATE", "GlobalDescription_zh": "Wafer created at {0} slot {1}, status is {2}.", "GlobalDescription_en": "Wafer created at {0} slot {1}, status is {2}.", "Module": "System", "Note": "Wafer Created" }, { "Id": 31, "Level": "Info", "LogEnum": "EV_WAFER_DELETE", "GlobalDescription_zh": "Wafer deleted from {0} slot {1}.", "GlobalDescription_en": "Wafer deleted from {0} slot {1}.", "Module": "System", "Note": "Wafer Deleted" }, { "Id": 32, "Level": "Info", "LogEnum": "EV_SEQUENCE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Sequence Info" }, { "Id": 33, "Level": "Warning", "LogEnum": "WARN_SEQUENCE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Sequence Warning" }, { "Id": 34, "Level": "Error", "LogEnum": "ERR_SEQUENCE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Sequence Failed" }, { "Id": 35, "Level": "Error", "LogEnum": "ERR_INTERLOCK_FAIL", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Interlock Failed" }, { "Id": 36, "Level": "Info", "LogEnum": "EV_SYSTEM_CONFIG", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Configuration Info" }, { "Id": 37, "Level": "Warning", "LogEnum": "WARN_SYSTEM_CONFIG", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "Configuration Warning" }, { "Id": 38, "Level": "Info", "LogEnum": "EV_SCHEDULER", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "" }, { "Id": 39, "Level": "Warning", "LogEnum": "WARN_SCHEDULER", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "" }, { "Id": 40, "Level": "Warning", "LogEnum": "EXCEP_FSM", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "FSM Exception" }, { "Id": 41, "Level": "Warning", "LogEnum": "EV_WAFER_DUPLICATED", "GlobalDescription_zh": "Create duplicated wafer {0} at source: {1} {2} destination: {3} {4}, please carefully verify the real wafer position and delete the invalid position wafer", "GlobalDescription_en": "Create duplicated wafer {0} at source: {1} {2} destination: {3} {4}, please carefully verify the real wafer position and delete the invalid position wafer", "Module": "System", "Note": "Wafer Moved" }, { "Id": 42, "Level": "Info", "LogEnum": "INFO_DEVICE_ENTITY", "GlobalDescription_zh": "Device Entity Log： {0}", "GlobalDescription_en": "Device Entity Log： {0}", "Module": "System", "Note": "Device Entity Info" }, { "Id": 43, "Level": "Warning", "LogEnum": "WARN_DEVICE_ENTITY", "GlobalDescription_zh": "Device Entity Log： {0}", "GlobalDescription_en": "Device Entity Log： {0}", "Module": "System", "Note": "Device Entity Warning" }, { "Id": 44, "Level": "Error", "LogEnum": "ERR_DEVICE_ENTITY", "GlobalDescription_zh": "Device Entity Log： {0}", "GlobalDescription_en": "Device Entity Log： {0}", "Module": "System", "Note": "Device Entity ERR" }, { "Id": 45, "Level": "Info", "LogEnum": "INFO_WINRESOURCE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "System Notify" }, { "Id": 46, "Level": "Warning", "LogEnum": "WARN_WINRESOURCE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "System Failed" }, { "Id": 47, "Level": "Error", "LogEnum": "ERR_WINRESOURCE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "System Failed" }, { "Id": 48, "Level": "Error", "LogEnum": "ERR_PM_SCRUBBER_NOOK_STOPTRANSFER", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "System", "Note": "PM SCRUBBER Alarm,stop tranfer" }, { "Id": 49, "Level": "Warning", "LogEnum": "WARN_DATABASE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "System", "Note": "System DATABASE WARNING" }, { "Id": 50, "Level": "Error", "LogEnum": "ERR_TWINCAT", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "System", "Note": "TWINCAT ERROR" }, { "Id": 51, "Level": "Info", "LogEnum": "EV_TWINCAT", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "System", "Note": "TWINCAT Info" }, { "Id": 1000, "Level": "Info", "LogEnum": "INFO_DEVICE_IO_HEATER", "GlobalDescription_zh": "IO Heater Log： {0}", "GlobalDescription_en": "IO Heater Log： {0}", "Module": "PM", "Note": "IO Heater Info" }, { "Id": 1001, "Level": "Warning", "LogEnum": "WARN_DEVICE_IO_HEATER", "GlobalDescription_zh": "IO Heater warning: {0}", "GlobalDescription_en": "IO Heater warning: {0}", "Module": "PM", "Note": "IO Heater Warning" }, { "Id": 1002, "Level": "Error", "LogEnum": "ERR_DEVICE_IO_HEATER", "GlobalDescription_zh": "IO Heater alarm: {0}", "GlobalDescription_en": "IO Heater alarm: {0}", "Module": "PM", "Note": "IO Heater Alarm" }, { "Id": 1003, "Level": "Error", "LogEnum": "ERR_DRY_PUMP", "GlobalDescription_zh": "Dry Pump alarm: {0}", "GlobalDescription_en": "Dry Pump alarm: {0}", "Module": "PM", "Note": "Dry Pump Alarm" }, { "Id": 1004, "Level": "Error", "LogEnum": "ERR_PENDULUM_VALVE", "GlobalDescription_zh": "Pendulum Valve alarm: {0}", "GlobalDescription_en": "Pendulum Valve alarm: {0}", "Module": "PM", "Note": "Pendulum Valve Alarm" }, { "Id": 1005, "Level": "Error", "LogEnum": "ERR_ESC_HV", "GlobalDescription_zh": "ESC HV alarm: {0}", "GlobalDescription_en": "ESC HV alarm: {0}", "Module": "PM", "Note": "ESC HV Alarm" }, { "Id": 1006, "Level": "Error", "LogEnum": "ERR_TURBO_PUMP", "GlobalDescription_zh": "Turbo Pump alarm: {0}", "GlobalDescription_en": "Turbo Pump alarm: {0}", "Module": "PM", "Note": "Turbo Pump Alarm" }, { "Id": 1007, "Level": "Error", "LogEnum": "ERR_RF", "GlobalDescription_zh": "RF error: {0}", "GlobalDescription_en": "RF error: {0}", "Module": "PM", "Note": "RF Alarm" }, { "Id": 1008, "Level": "Info", "LogEnum": "INFO_DEVICE_CHILLER", "GlobalDescription_zh": "Chiller： {0}", "GlobalDescription_en": "Chiller： {0}", "Module": "PM", "Note": "Chiller Info" }, { "Id": 1009, "Level": "Warning", "LogEnum": "WARN_DEVICE_CHILLER", "GlobalDescription_zh": "Chiller warning: {0}", "GlobalDescription_en": "Chiller warning: {0}", "Module": "PM", "Note": "Chiller Warning" }, { "Id": 1010, "Level": "Error", "LogEnum": "ERR_DEVICE_CHILLER", "GlobalDescription_zh": "Chiller alarm: {0}", "GlobalDescription_en": "Chiller alarm: {0}", "Module": "PM", "Note": "Chiller Alarm" }, { "Id": 1011, "Level": "Warning", "LogEnum": "WARN_RF", "GlobalDescription_zh": "RF warning: {0}", "GlobalDescription_en": "RF warning: {0}", "Module": "PM", "Note": "RF warning" }, { "Id": 1012, "Level": "Error", "LogEnum": "ERR_ENDPOINT", "GlobalDescription_zh": "EndPoint alarm: {0}", "GlobalDescription_en": "EndPoint alarm: {0}", "Module": "PM", "Note": "EndPoint Alarm" }, { "Id": 1013, "Level": "Info", "LogEnum": "INFO_ENDPOINT", "GlobalDescription_zh": "EndPoint log: {0}", "GlobalDescription_en": "EndPoint log: {0}", "Module": "PM", "Note": "EndPoint log" }, { "Id": 1014, "Level": "Warning", "LogEnum": "WARN_ENDPOINT", "GlobalDescription_zh": "EndPoint warning: {0}", "GlobalDescription_en": "EndPoint warning: {0}", "Module": "PM", "Note": "EndPoint warning" }, { "Id": 1015, "Level": "Error", "LogEnum": "ERR_BACKSIDE_HE", "GlobalDescription_zh": "BacksideHelium alarm: {0}", "GlobalDescription_en": "BacksideHelium alarm: {0}", "Module": "PM", "Note": "BacksideHelium Alarm" }, { "Id": 1016, "Level": "Info", "LogEnum": "INFO_BACKSIDE_HE", "GlobalDescription_zh": "BacksideHelium log: {0}", "GlobalDescription_en": "BacksideHelium log: {0}", "Module": "PM", "Note": "BacksideHelium log" }, { "Id": 1017, "Level": "Warning", "LogEnum": "WARN_BACKSIDE_HE", "GlobalDescription_zh": "BacksideHelium warning: {0}", "GlobalDescription_en": "BacksideHelium warning: {0}", "Module": "PM", "Note": "BacksideHelium warning" }, { "Id": 1018, "Level": "Error", "LogEnum": "ERR_PROCESS", "GlobalDescription_zh": "Process alarm: {0}", "GlobalDescription_en": "Process alarm: {0}", "Module": "PM", "Note": "Process Alarm" }, { "Id": 1019, "Level": "Info", "LogEnum": "INFO_PROCESS", "GlobalDescription_zh": "Process log: {0}", "GlobalDescription_en": "Process log: {0}", "Module": "PM", "Note": "Process log" }, { "Id": 1020, "Level": "Warning", "LogEnum": "WARN_PROCESS", "GlobalDescription_zh": "Process warning: {0}", "GlobalDescription_en": "Process warning: {0}", "Module": "PM", "Note": "Process warning" }, { "Id": 1021, "Level": "Error", "LogEnum": "ERR_IoGasValve", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "IoGasValve Error" }, { "Id": 1022, "Level": "Warning", "LogEnum": "WARN_State", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "State warning" }, { "Id": 1023, "Level": "Error", "LogEnum": "ERR_PM", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM Alarm" }, { "Id": 1024, "Level": "Info", "LogEnum": "INFO_PM", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM INFO" }, { "Id": 1025, "Level": "Warning", "LogEnum": "WARN_PM", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM warning" }, { "Id": 1026, "Level": "Info", "LogEnum": "INFO_Sensor", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Sensor log" }, { "Id": 1027, "Level": "Warning", "LogEnum": "WARN_Sensor", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Sensor warning" }, { "Id": 1028, "Level": "Error", "LogEnum": "ERR_Sensor", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Sensor Error" }, { "Id": 1029, "Level": "Info", "LogEnum": "INFO_FA", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "FA", "Note": "FA INFO" }, { "Id": 1030, "Level": "Info", "LogEnum": "INFO_IOCYLINDER", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Cylinder INFO" }, { "Id": 1031, "Level": "Info", "LogEnum": "INFO_IO_VALVE", "GlobalDescription_zh": "IO Valve: {0}", "GlobalDescription_en": "IO Valve: {0}", "Module": "PM", "Note": "IO Valve: Info" }, { "Id": 1032, "Level": "Warning", "LogEnum": "WARN_IO_VALVE", "GlobalDescription_zh": "IO Valve: {0}", "GlobalDescription_en": "IO Valve: {0}", "Module": "PM", "Note": "IO Valve: Warning" }, { "Id": 1033, "Level": "Error", "LogEnum": "ERR_IO_VALVE", "GlobalDescription_zh": "IO Valve: {0}", "GlobalDescription_en": "IO Valve: {0}", "Module": "PM", "Note": "IO Valve: Alarm" }, { "Id": 1034, "Level": "Error", "LogEnum": "ERR_MATCH", "GlobalDescription_zh": "MATCH error: {0}", "GlobalDescription_en": "MATCH error: {0}", "Module": "PM", "Note": "MATCH Alarm" }, { "Id": 1035, "Level": "Warning", "LogEnum": "WARN_MATCH", "GlobalDescription_zh": "MATCH warning: {0}", "GlobalDescription_en": "MATCH warning: {0}", "Module": "PM", "Note": "MATCH Alarm" }, { "Id": 1036, "Level": "Info", "LogEnum": "INFO_MATCH", "GlobalDescription_zh": "MATCH Info: {0}", "GlobalDescription_en": "MATCH Info: {0}", "Module": "PM", "Note": "MATCH Info" }, { "Id": 1037, "Level": "Info", "LogEnum": "INFO_RF", "GlobalDescription_zh": "RF info: {0}", "GlobalDescription_en": "RF info: {0}", "Module": "PM", "Note": "RF info" }, { "Id": 1038, "Level": "Info", "LogEnum": "INFO_RFBox", "GlobalDescription_zh": "RFBox Info: {0}", "GlobalDescription_en": "RFBox Info: {0}", "Module": "PM", "Note": "RFBox Info" }, { "Id": 1039, "Level": "Warning", "LogEnum": "WARN_RFBox", "GlobalDescription_zh": "RFBox Warning: {0}", "GlobalDescription_en": "RFBox Warning: {0}", "Module": "PM", "Note": "RFBox Warning" }, { "Id": 1040, "Level": "Error", "LogEnum": "ERR_RFBox", "GlobalDescription_zh": "RFBox Error: {0}", "GlobalDescription_en": "RFBox Error: {0}", "Module": "PM", "Note": "RFBox Error" }, { "Id": 1041, "Level": "Info", "LogEnum": "INFO_HighTemperatureHeater", "GlobalDescription_zh": "HighTemperatureHeater Info: {0}", "GlobalDescription_en": "HighTemperatureHeater Info: {0}", "Module": "PM", "Note": "HighTemperatureHeater Info" }, { "Id": 1042, "Level": "Warning", "LogEnum": "WARN_HighTemperatureHeater", "GlobalDescription_zh": "HighTemperatureHeater Warning: {0}", "GlobalDescription_en": "HighTemperatureHeater Warning: {0}", "Module": "PM", "Note": "HighTemperatureHeater Warning" }, { "Id": 1043, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1044, "Level": "Warning", "LogEnum": "WARN_PM_TOLERANCE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM Tolerance Warning" }, { "Id": 1045, "Level": "Error", "LogEnum": "ERR_PM_TOLERANCE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM Tolerance Error" }, { "Id": 1046, "Level": "Error", "LogEnum": "ERR_PM_PLC_HEARTBEAT_FAIL", "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败，请检查PLC运行情况。", "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it", "Module": "PM", "Note": "Invalid config" }, { "Id": 1050, "Level": "Error", "LogEnum": "ERR_PM_PROCESSNOWAFER", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM PROCESS NO WAFER" }, { "Id": 1051, "Level": "Error", "LogEnum": "ERR_PM_CLEANWITHWAFER", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM CLEAN WITH WAFER" }, { "Id": 1052, "Level": "Error", "LogEnum": "ERR_PM_SCRUBBER_NOOK_STOPPROCESS", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM SCRUBBER Alarm" }, { "Id": 1053, "Level": "Error", "LogEnum": "ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM SCRUBBER Alarm" }, { "Id": 1054, "Level": "Warning", "LogEnum": "WARN_PM_SCRUBBER_NOOK", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "PM SCRUBBER Warning" }, { "Id": 1100, "Level": "Info", "LogEnum": "INFO_RF_Connect", "GlobalDescription_zh": "{0} 连接成功，连接信息: {1}", "GlobalDescription_en": "{0} 连接成功，连接信息: {1}", "Module": "PM", "Note": "RF Connect Success" }, { "Id": 1101, "Level": "Error", "LogEnum": "ERR_RF_Connect", "GlobalDescription_zh": "{0} 连接失败，连接信息: {1}", "GlobalDescription_en": "{0} 连接失败，连接信息: {1}", "Module": "PM", "Note": "RF Connect Failed" }, { "Id": 1102, "Level": "Error", "LogEnum": "ERR_RF_WaterFlow", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "RF stop power" }, { "Id": 1103, "Level": "Error", "LogEnum": "ERR_RF_RFGInterlock", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "RF stop power" }, { "Id": 1104, "Level": "Error", "LogEnum": "ERR_RF_GASOFF", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "RF stop power" }, { "Id": 1180, "Level": "Error", "LogEnum": "ERR_PV_INTERLOCK_FORELINRPRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Pendulum Valve Error" }, { "Id": 1182, "Level": "Error", "LogEnum": "ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Pendulum Valve Error" }, { "Id": 1183, "Level": "Error", "LogEnum": "ERR_PV_PARITY", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "Pendulum Valve Error" }, { "Id": 1220, "Level": "Error", "LogEnum": "ERR_MFC_MFC1FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC1 FLOW OVER RANGE" }, { "Id": 1221, "Level": "Error", "LogEnum": "ERR_MFC_MFC2FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC2 FLOW OVER RANGE" }, { "Id": 1222, "Level": "Error", "LogEnum": "ERR_MFC_MFC3FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC3 FLOW OVER RANGE" }, { "Id": 1223, "Level": "Error", "LogEnum": "ERR_MFC_MFC4FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC4 FLOW OVER RANGE" }, { "Id": 1224, "Level": "Error", "LogEnum": "ERR_MFC_MFC5FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC5 FLOW OVER RANGE" }, { "Id": 1225, "Level": "Error", "LogEnum": "ERR_MFC_MFC6FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC6 FLOW OVER RANGE" }, { "Id": 1226, "Level": "Error", "LogEnum": "ERR_MFC_MFC7FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC7 FLOW OVER RANGE" }, { "Id": 1227, "Level": "Error", "LogEnum": "ERR_MFC_MFC8FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC8 FLOW OVER RANGE" }, { "Id": 1228, "Level": "Error", "LogEnum": "ERR_MFC_N2FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "N2 FLOW OVER RANGE" }, { "Id": 1229, "Level": "Error", "LogEnum": "ERR_MFC1_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC1 PRESSURE" }, { "Id": 1230, "Level": "Error", "LogEnum": "ERR_MFC2_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC2 PRESSURE" }, { "Id": 1231, "Level": "Error", "LogEnum": "ERR_MFC3_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC3 PRESSURE" }, { "Id": 1232, "Level": "Error", "LogEnum": "ERR_MFC4_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC4 PRESSURE" }, { "Id": 1233, "Level": "Error", "LogEnum": "ERR_MFC5_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC5 PRESSURE" }, { "Id": 1234, "Level": "Error", "LogEnum": "ERR_MFC6_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC6 PRESSURE" }, { "Id": 1235, "Level": "Error", "LogEnum": "ERR_MFC7_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC7 PRESSURE" }, { "Id": 1238, "Level": "Error", "LogEnum": "ERR_MFC8_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC8 PRESSURE" }, { "Id": 1239, "Level": "Error", "LogEnum": "ERR_N2_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "N2 PRESSURE" }, { "Id": 1240, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_SetRatio_OverRange", "GlobalDescription_zh": "HighTemperatureHeater Set Ratio Failed, {0} Over Range [{1}-{2}]", "GlobalDescription_en": "HighTemperatureHeater Set Ratio Failed, {0} Over Range [{1}-{2}]", "Module": "PM", "Note": "HighTemperatureHeater Set Ratio Failed" }, { "Id": 1241, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_SetTemperature_OverRange", "GlobalDescription_zh": "HighTemperatureHeater Set Temperature Failed, {0} Over Range [{1}-{2}]", "GlobalDescription_en": "HighTemperatureHeater Set Temperature Failed, {0} Over Range [{1}-{2}]", "Module": "PM", "Note": "HighTemperatureHeater Set Temperature Failed" }, { "Id": 1242, "Level": "Warning", "LogEnum": "WARN_HighTemperatureHeater_N2", "GlobalDescription_zh": "Gas Box N2 Flow Trigger Warning,HighTemperatureHeater Cool Down to {0} ℃,Current Purge N2 Flow {1} sccm", "GlobalDescription_en": "Gas Box N2 Flow Trigger Warning,HighTemperatureHeater Cool Down to {0} ℃,Current Purge N2 Flow {1} sccm", "Module": "PM", "Note": "HighTemperatureHeater N2 Warning" }, { "Id": 1246, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_GoPosition1TimeOut", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1247, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_GoPosition2TimeOut", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1248, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_GoPosition3TimeOut", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1249, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_GoPosition4TimeOut", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1250, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_GoPosition5TimeOut", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1251, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_TransferPosition", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1252, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_LiftDriverAlarm", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1253, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_LiftPosiModuleAlarm", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1254, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_LiftORGAlarm", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1255, "Level": "Error", "LogEnum": "ERR_HighTemperatureHeater_GoOriginTimeOut", "GlobalDescription_zh": "HighTemperatureHeater Error: {0}", "GlobalDescription_en": "HighTemperatureHeater Error: {0}", "Module": "PM", "Note": "HighTemperatureHeater Error" }, { "Id": 1260, "Level": "Info", "LogEnum": "INFO_DEVICE_IO_MAGNET", "GlobalDescription_zh": "IO Magnet Log： {0}", "GlobalDescription_en": "IO Magnet Log： {0}", "Module": "PM", "Note": "IO Magnet Info" }, { "Id": 1280, "Level": "Warning", "LogEnum": "WARNING_SENSOR_WATERLEAK", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1281, "Level": "Warning", "LogEnum": "WARNING_SENSOR_WATERFLOW", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1282, "Level": "Warning", "LogEnum": "WARNING_SENSOR_CDAPRESSURE", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1283, "Level": "Warning", "LogEnum": "WARNING_SENSOR_N2PRESSURE", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1284, "Level": "Warning", "LogEnum": "WARNING_SENSOR_GASBOXDOOR", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1285, "Level": "Warning", "LogEnum": "WARNING_SENSOR_GASBOXPRESSURE", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1286, "Level": "Warning", "LogEnum": "WARNING_SENSOR_CHBWALLOTSWALARM", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1287, "Level": "Warning", "LogEnum": "WARNING_SENSOR_GASBOXN2FLOW", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1288, "Level": "Warning", "LogEnum": "WARNING_SENSOR_PVPURGEPRESSUREALARM", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1289, "Level": "Warning", "LogEnum": "WARNING_SENSOR_N2PURGEPRESSURE", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1290, "Level": "Error", "LogEnum": "ERR_SENSOR_WATERFLOW_STOP_CURRENTPROCESS", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1291, "Level": "Error", "LogEnum": "ERR_SENSOR_WATERFLOW_STOP_NEXTPROCESS", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1292, "Level": "Warning", "LogEnum": "WARN_MFC1_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC1 PRESSURE" }, { "Id": 1293, "Level": "Warning", "LogEnum": "WARN_MFC2_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC2 PRESSURE" }, { "Id": 1294, "Level": "Warning", "LogEnum": "WARN_MFC3_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC3 PRESSURE" }, { "Id": 1295, "Level": "Warning", "LogEnum": "WARN_MFC4_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC4 PRESSURE" }, { "Id": 1296, "Level": "Warning", "LogEnum": "WARN_MFC5_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC5 PRESSURE" }, { "Id": 1297, "Level": "Warning", "LogEnum": "WARN_MFC6_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC6 PRESSURE" }, { "Id": 1298, "Level": "Warning", "LogEnum": "WARN_MFC7_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC7 PRESSURE" }, { "Id": 1299, "Level": "Warning", "LogEnum": "WARN_MFC8_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "MFC8 PRESSURE" }, { "Id": 1300, "Level": "Error", "LogEnum": "WARN_N2_PRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "N2 PRESSURE" }, { "Id": 1301, "Level": "Warning", "LogEnum": "WARN_GASBOX_N2_FLOW", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "PM", "Note": "GASBOX N2 FLOW" }, { "Id": 1302, "Level": "Warning", "LogEnum": "WARNING_SENSOR_TMP_WATERFLOW", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 1303, "Level": "Warning", "LogEnum": "WARNING_SENSOR_LID_WATERFLOW", "GlobalDescription_zh": "IO Sensor ： {0}", "GlobalDescription_en": "IO Sensor ： {0}", "Module": "PM", "Note": "IO Sensor" }, { "Id": 2000, "Level": "Error", "LogEnum": "ERR_TM", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2001, "Level": "Info", "LogEnum": "INFO_TM", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM INFO" }, { "Id": 2002, "Level": "Warning", "LogEnum": "WARN_TM", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM warning" }, { "Id": 2003, "Level": "Error", "LogEnum": "ERR_TM_MFC1FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2004, "Level": "Error", "LogEnum": "ERR_TM_MFCPRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2005, "Level": "Error", "LogEnum": "ERR_TM_PLC_HEARTBEAT_FAIL", "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败，请检查PLC运行情况。", "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it", "Module": "TM", "Note": "TM HEARTBEAT ERROR" }, { "Id": 2100, "Level": "Error", "LogEnum": "ERR_TM_ROBOT", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2101, "Level": "Info", "LogEnum": "INFO_TM_ROBOT", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Info" }, { "Id": 2102, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PICKSLOTOVERRANGE", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2103, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PLACESLOTOVERRange", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2104, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_SETINTLOCKWAF_SEN", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2105, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_SETINTLOCKRZ", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2106, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_SETINTLOCK", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2107, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_SETIOECHO", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2108, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_SETIOSTATE", "GlobalDescription_zh": "TM Robot receive an error:{0}", "GlobalDescription_en": "TM Robot receive an error:{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2109, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_LLA_PICK_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2110, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_LLB_PICK_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2111, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMA_PICK_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2112, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMB_PICK_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2113, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMC_PICK_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2114, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMD_PICK_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2115, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_LLA_PLACE_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2116, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_LLB_PLACE_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2117, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMA_PLACE_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2118, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMB_PLACE_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2119, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMC_PLACE_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2120, "Level": "Error", "LogEnum": "ERR_TM_ROBOT_PMD_PLACE_AWCOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2121, "Level": "Error", "LogEnum": "ERR_TM_LLA_PressureDifference", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2122, "Level": "Error", "LogEnum": "ERR_TM_LLB_PressureDifference", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2123, "Level": "Error", "LogEnum": "ERR_TM_PMA_PressureDifference", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2124, "Level": "Error", "LogEnum": "ERR_TM_PMB_PressureDifference", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2125, "Level": "Error", "LogEnum": "ERR_TM_PMC_PressureDifference", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 2126, "Level": "Error", "LogEnum": "ERR_TM_PMD_PressureDifference", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "TM", "Note": "TM Alarm" }, { "Id": 4000, "Level": "Info", "LogEnum": "EV_EFEM_COMMON_INFO", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM Notify" }, { "Id": 4001, "Level": "Warning", "LogEnum": "WARN_EFEM_COMMON_WARN", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM Warning" }, { "Id": 4002, "Level": "Error", "LogEnum": "ERR_EFEM_COMMON_FAILED", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM Failed" }, { "Id": 4003, "Level": "Error", "LogEnum": "ERR_EFEM_VAC_SOURCE_PRESSURE_LOW", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4004, "Level": "Error", "LogEnum": "ERR_EFEM_IONIZER_COMPRESSED_AIR", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4005, "Level": "Error", "LogEnum": "ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4006, "Level": "Error", "LogEnum": "ERR_EFEM_FLOW_GUAGE_SENSOR", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4007, "Level": "Error", "LogEnum": "ERR_EFEM_LEAKAGE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4008, "Level": "Error", "LogEnum": "ERR_EFEM_IONIZER", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4009, "Level": "Error", "LogEnum": "ERR_EFEM_FFU", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4010, "Level": "Error", "LogEnum": "ERR_EFEM_SWITCH_TO_MAINTAIN_MODE", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM SYSTEM Failed" }, { "Id": 4100, "Level": "Info", "LogEnum": "EV_EFEM_ROBOT", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM Notify" }, { "Id": 4101, "Level": "Warning", "LogEnum": "WARN_EFEM_ROBOT", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM Warning" }, { "Id": 4102, "Level": "Error", "LogEnum": "ERR_EFEM_ROBOT", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "EFEM", "Note": "EFEM Failed" }, { "Id": 4200, "Level": "Info", "LogEnum": "EV_VCE_COMMON_INFO", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "VCE", "Note": "VCE Notify" }, { "Id": 4201, "Level": "Warning", "LogEnum": "WARN_VCE_COMMON_WARN", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "VCE", "Note": "VCE Warning" }, { "Id": 4202, "Level": "Error", "LogEnum": "ERR_VCE_COMMON_Failed", "GlobalDescription_zh": "{0}。", "GlobalDescription_en": "{0}.", "Module": "VCE", "Note": "VCE Failed" }, { "Id": 5003, "Level": "Error", "LogEnum": "ERR_FA", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "FA", "Note": "FA Alarm" }, { "Id": 5004, "Level": "Warning", "LogEnum": "WARN_FA", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "FA", "Note": "FA warning" }, { "Id": 6000, "Level": "Error", "LogEnum": "ERR_LL", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LL Alarm" }, { "Id": 6001, "Level": "Info", "LogEnum": "INFO_LL", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LL INFO" }, { "Id": 6002, "Level": "Warning", "LogEnum": "WARN_LL", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LL warning" }, { "Id": 6003, "Level": "Error", "LogEnum": "ERR_LLA_MFC1FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LLA Alarm" }, { "Id": 6004, "Level": "Error", "LogEnum": "ERR_LLB_MFC1FLOWOVERRANGE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LLB Alarm" }, { "Id": 6005, "Level": "Error", "LogEnum": "ERR_LLA_MFCPRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LLA Alarm" }, { "Id": 6006, "Level": "Error", "LogEnum": "ERR_LLB_MFCPRESSURE", "GlobalDescription_zh": "{0}", "GlobalDescription_en": "{0}", "Module": "LL", "Note": "LLB Alarm" }, { "Id": 8888, "Level": "Info", "LogEnum": "INFO_TROUGHPUT_ENHANCE_TRACE", "GlobalDescription_zh": "Throughput enhancement: {0}", "GlobalDescription_en": "Throughput enhancement: {0}", "Module": "System", "Note": "Throughput enhancement: " } ]