using System; using System.Collections.Generic; //using System. using Venus_RT.Devices; using Aitex.Core.RT.Log; using Venus_Core; using Aitex.Core.RT.SCCore; using Aitex.Core.RT.Tolerance; using System.Diagnostics; //#pragma warning disable 0436 namespace Venus_RT.Modules.PMs { class ProcessHelper { protected JetPMBase Chamber; private string Module; public RecipeHead m_RecipeHead; private static Dictionary> startHelper = new Dictionary>(); private static Dictionary> checkerHelper = new Dictionary>(); private static Dictionary> endHelper = new Dictionary>(); private List rfMatchC1 = new List(); private List rfMatchC2 = new List(); private int rfMatchC1C2Index = 0; private List biasRfMatchC1 = new List(); private List biasRfMatchC2 = new List(); private int biasRfMatchC1C2Index = 0; public bool isLoop = false; public int loopsteps = 0; public int currentStepIndex = 0; private bool biasRFSetPointFlag = true; private double _scRFPowerAlarmTime; private double _scBiasRFPowerAlarmTime; private RecipeToleranceChecker _GasFlowToleranceChecker; private RecipeToleranceChecker _RFToleranceChecker; private RecipeToleranceChecker _BiasRFToleranceChecker; private RecipeToleranceChecker _HeliumToleranceChecker; private RecipeToleranceChecker _PressureToleranceChecker; private bool _isEnableMatchC1C2Offset; private int _matchC1C2OffsetValue; private bool _isEnableBiasMatchC1C2Offset; private int _biasMatchC1C2OffsetValue; private bool _isInstalledEPD; private Stopwatch _lastEPDStepTimeStopwatch; public ProcessHelper(JetPMBase pm) { Chamber = pm; Module = pm.Module.ToString(); Init(); _GasFlowToleranceChecker = new RecipeToleranceChecker(Module); _RFToleranceChecker = new RecipeToleranceChecker(Module); _BiasRFToleranceChecker = new RecipeToleranceChecker(Module); _HeliumToleranceChecker = new RecipeToleranceChecker(Module); _PressureToleranceChecker = new RecipeToleranceChecker(Module); if (Chamber.ChamberType == JetChamber.Kepler2300 || Chamber.ChamberType == JetChamber.VenusSE || Chamber.ChamberType == JetChamber.VenusDE) { _isInstalledEPD = SC.GetValue($"{Module}.EPD.IsEnabled"); } if (_isInstalledEPD) { _lastEPDStepTimeStopwatch = new Stopwatch(); } } private void Init() { startHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Start(unit, step); checkerHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Check(unit, step); endHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_End(unit, step); //startHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Start(unit, step); //checkerHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Check(unit, step); //endHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_End(unit, step); startHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Start(unit, step); checkerHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Check(unit, step); endHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_End(unit, step); startHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Start(unit, step); checkerHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Check(unit, step); endHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_End(unit, step); startHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Start(unit, step); checkerHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Check(unit, step); endHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_End(unit, step); startHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_Start(unit, step); checkerHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_Check(unit, step); endHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_End(unit, step); startHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Start(unit, step); checkerHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Check(unit, step); endHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_End(unit, step); //startHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_Start(unit, step); //checkerHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_Check(unit, step); //endHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_End(unit, step); startHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Start(unit, step); checkerHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Check(unit, step); endHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_End(unit, step); startHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Start(unit, step); checkerHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Check(unit, step); endHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_End(unit, step); startHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Start(unit, step); checkerHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Check(unit, step); endHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_End(unit, step); startHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_Start(unit, step); checkerHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_Check(unit, step); endHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_End(unit, step); } private RState PressureByPressureModeUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByPressureModeUnit; List toleranceObjects = new List(); if (ProcessUnit.ToleranceMode != ToleranceMode.None) { toleranceObjects.Add(new ToleranceObject("Pressure", ProcessUnit.StartValue, ProcessUnit.StartValueWarningRange, ProcessUnit.StartValueAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); _PressureToleranceChecker.Start(toleranceObjects); } if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure) { if (Chamber.SetPVPressure(ProcessUnit.StartValue)) { return RState.Running; } } else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve) { if (Chamber.SetPVPostion(ProcessUnit.StartValue)) { return RState.Running; } } return RState.Failed; } private RState PressureByPressureModeUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByPressureModeUnit; if (ProcessUnit.EnableRamp) { if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure) { if (Chamber.SetPVPressure(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor()))) return RState.Running; else return RState.Failed; } else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve) { if (Chamber.SetPVPostion(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor()))) return RState.Running; else return RState.Failed; } } if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure && ProcessUnit.ToleranceMode != ToleranceMode.None) { return _PressureToleranceChecker.Monitor(Chamber.PendulumPressure); } else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve && ProcessUnit.ToleranceMode != ToleranceMode.None) { return _PressureToleranceChecker.Monitor(Chamber.PendulumPosition); } return RState.Running; } private void PressureByPressureModeUnit_End(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as PressureByPressureModeUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { _PressureToleranceChecker.End(); } } private RState TCPUnit_Start(ProcessUnitBase unit, RecipeStep step) { _isEnableMatchC1C2Offset = SC.GetValue($"{Module}.Match.EnableC1C2StepOffset"); _matchC1C2OffsetValue = SC.GetValue($"{Module}.Match.C1C2StepOffsetValue"); var ProcessUnit = unit as TCPUnit; List toleranceObjects = new List(); if (ProcessUnit.ToleranceMode != ToleranceMode.None) { toleranceObjects.Add(new ToleranceObject("RF", ProcessUnit.RFPower, ProcessUnit.RFPowerWarningRange, ProcessUnit.RFPowerAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); _RFToleranceChecker.Start(toleranceObjects); } float p1; float p2; if (ProcessUnit.C1 > 0) { p1 = ProcessUnit.C1; } else { p1 = ProcessUnit.AutoC1; } if (ProcessUnit.C2 > 0) { p2 = ProcessUnit.C2; } else { p2 = ProcessUnit.AutoC2; } if (_isEnableMatchC1C2Offset = false || Math.Abs(Chamber.RFMatchC1 - p1) > _matchC1C2OffsetValue || Math.Abs(Chamber.RFMatchC2 - p2) > _matchC1C2OffsetValue) { Chamber.SetMatchPosition(p1, p2); } if (ProcessUnit.RFPower > 5) { Chamber.GeneratorSetpower(ProcessUnit.RFPower); Chamber.GeneratorPowerOn(true); } else { Chamber.GeneratorSetpower(0); Chamber.GeneratorPowerOn(false); } if (ProcessUnit.MatchWorkMode == MatchWorkMode.Auto) { Chamber.SetMatchWorkMode(MatchWorkMode.Auto); } else if (ProcessUnit.MatchWorkMode == MatchWorkMode.Manual) { Chamber.SetMatchWorkMode(MatchWorkMode.Manual); } _scRFPowerAlarmTime = SC.GetValue($"{Chamber.Name}.Rf.PowerAlarmTime"); rfMatchC1.Clear(); rfMatchC1.Clear(); rfMatchC1C2Index = 0; return RState.Running; } private RState TCPUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as TCPUnit; if (ProcessUnit.MaxReflectedPower > 0 && Chamber.ReflectPower > ProcessUnit.MaxReflectedPower && step.ElapsedTime() > _scRFPowerAlarmTime * 1000) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, RF Reflect Power:{Chamber.ReflectPower} exceeds the Max Limit:{ProcessUnit.MaxReflectedPower}"); return RState.Failed; } if (step.ElapsedTime() > m_RecipeHead.RFHoldTime * 1000) { Chamber.GeneratorSetpower(0); Chamber.GeneratorPowerOn(false); } if (step.ElapsedTime() > rfMatchC1C2Index * 1000) { rfMatchC1.Add(Chamber.RFMatchC1); rfMatchC2.Add(Chamber.RFMatchC2); rfMatchC1C2Index += 1; } if (ProcessUnit.ToleranceMode != ToleranceMode.None) { return _RFToleranceChecker.Monitor(Chamber.ForwardPower); } return RState.Running; } private void TCPUnit_End(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as TCPUnit; if (rfMatchC1.Count >= 6) { float allValue = 0; for (int i = 4; i < rfMatchC1.Count; i++) { allValue += rfMatchC1[i]; } var average = allValue / (rfMatchC1.Count - 4); ProcessUnit.AutoC1 = (int)average; } if (rfMatchC2.Count >= 6) { float allValue = 0; for (int i = 4; i < rfMatchC2.Count; i++) { allValue += rfMatchC2[i]; } var average = allValue / (rfMatchC2.Count - 4); ProcessUnit.AutoC2 = (int)average; } rfMatchC1.Clear(); rfMatchC2.Clear(); if (ProcessUnit.ToleranceMode != ToleranceMode.None) { _RFToleranceChecker.End(); } } private RState BiasUnit_Start(ProcessUnitBase unit, RecipeStep step) { _isEnableBiasMatchC1C2Offset = SC.GetValue($"{Module}.BiasMatch.EnableC1C2StepOffset"); _biasMatchC1C2OffsetValue = SC.GetValue($"{Module}.BiasMatch.C1C2StepOffsetValue"); var ProcessUnit = unit as BiasUnit; float p1; float p2; if (ProcessUnit.BiasC1 > 0) { p1 = ProcessUnit.BiasC1; } else { p1 = ProcessUnit.AutoBiasC1; } if (ProcessUnit.BiasC2 > 0) { p2 = ProcessUnit.BiasC2; } else { p2 = ProcessUnit.AutoBiasC2; } if (_isEnableBiasMatchC1C2Offset == false || Math.Abs(Chamber.BiasRFMatchC1 - p1) > _biasMatchC1C2OffsetValue || Math.Abs(Chamber.BiasRFMatchC2 - p2) > _biasMatchC1C2OffsetValue) { Chamber.SetBiasMatchPosition(p1, p2); } if (ProcessUnit.BiasRFPower > 5) { Chamber.GeneratorBiasPowerOn(true); if ((ProcessUnit.EnableRamp == false)) { Chamber.GeneratorBiasSetpower(ProcessUnit.BiasRFPower); } } else { Chamber.GeneratorBiasPowerOn(false); Chamber.GeneratorBiasSetpower(0); } if (ProcessUnit.BiasMatchWorkMode == MatchWorkMode.Auto) { Chamber.SetBiasMatchWorkMode(MatchWorkMode.Auto); } else if (ProcessUnit.BiasMatchWorkMode == MatchWorkMode.Manual) { Chamber.SetBiasMatchWorkMode(MatchWorkMode.Manual); } if (ProcessUnit.BiasGeneratorMode == GeneratorMode.Pulsing) { Chamber.SetBiasPulseMode(true); Chamber.SetBiasPulseRateFreq(ProcessUnit.PulseRateFreq); Chamber.SetDiasPulseDutyCycle(ProcessUnit.PulseDutyCycle); } else { Chamber.SetBiasPulseMode(false); } _scBiasRFPowerAlarmTime = SC.GetValue($"{Chamber.Name}.BiasRf.PowerAlarmTime"); biasRfMatchC1.Clear(); biasRfMatchC1.Clear(); biasRfMatchC1C2Index = 0; biasRFSetPointFlag = true; return RState.Running; } private RState BiasUnit_Check(ProcessUnitBase unit, RecipeStep step) { //var _scPowerAlarmTime = SC.GetValue($"{Chamber.Name}.BiasRf.PowerAlarmTime"); var ProcessUnit = unit as BiasUnit; if (ProcessUnit.BiasMaxReflectedPower > 0 && Chamber.BiasReflectPower > ProcessUnit.BiasMaxReflectedPower && step.ElapsedTime() > _scBiasRFPowerAlarmTime * 1000) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Bias Reflect Power:{Chamber.BiasReflectPower} exceeds the Max Limit:{ProcessUnit.BiasMaxReflectedPower}"); return RState.Failed; } if (step.ElapsedTime() > m_RecipeHead.BiasRFHoldTime * 1000) { Chamber.GeneratorBiasSetpower(0); Chamber.GeneratorBiasPowerOn(false); } if (step.ElapsedTime() > biasRfMatchC1C2Index * 1000) { biasRfMatchC1.Add(Chamber.BiasRFMatchC1); biasRfMatchC2.Add(Chamber.BiasRFMatchC2); biasRfMatchC1C2Index += 1; } if (ProcessUnit.EnableRamp) { //if (step.ElapsedTime() <= 500*cycleIndex) //{ // return RState.Running; //} //cycleIndex += 1; if (ProcessUnit.TargetMode == TargetMode.Cycle) { if (biasRFSetPointFlag == true) { biasRFSetPointFlag = false; Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower + (float)((float)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((float)(loopsteps - 1) / (float)(currentStepIndex)))))); } //float rampFactor = (float)currentStepIndex / (float)(loopsteps-1); //double rampFactor = step.RampFactor(); //Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower+ (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower)/(loopsteps)*currentStepIndex) + ((double)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((double)loopsteps)) * rampFactor)); } else { //double rampFactor = step.RampFactor(); //Chamber.GeneratorBiasSetpower((float)(ProcessUnit.BiasRFPower + (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) * rampFactor)); } } return RState.Running; } private void BiasUnit_End(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as BiasUnit; //Chamber.GeneratorBiasSetpower(0); //Chamber.GeneratorBiasPowerOn(false); if (biasRfMatchC1.Count >= 6) { float allValue = 0; for (int i = 4; i < biasRfMatchC1.Count; i++) { allValue += biasRfMatchC1[i]; } var average = allValue / (biasRfMatchC1.Count - 4); ProcessUnit.AutoBiasC1 = (int)average; } if (biasRfMatchC2.Count >= 6) { float allValue = 0; for (int i = 4; i < biasRfMatchC2.Count; i++) { allValue += biasRfMatchC2[i]; } var average = allValue / (biasRfMatchC2.Count - 4); ProcessUnit.AutoBiasC2 = (int)average; } biasRfMatchC1.Clear(); biasRfMatchC1.Clear(); biasRfMatchC1C2Index = 0; //cycleIndex = 0; biasRFSetPointFlag = true; } private RState GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step) { Chamber.OpenValve(ValveType.GasFinal, true); var ProcessUnit = unit as GasControlUnit; if (ProcessUnit.Gas1 >= 1) { Chamber.FlowGas(0, ProcessUnit.Gas1); } else { Chamber.FlowGas(0, 0); } if (ProcessUnit.Gas2 >= 1) { Chamber.FlowGas(1, ProcessUnit.Gas2); } else { Chamber.FlowGas(1, 0); } if (ProcessUnit.Gas3 >= 1) { Chamber.FlowGas(2, ProcessUnit.Gas3); } else { Chamber.FlowGas(2, 0); } if (ProcessUnit.Gas4 >= 1) { Chamber.FlowGas(3, ProcessUnit.Gas4); } else { Chamber.FlowGas(3, 0); } if (ProcessUnit.Gas5 >= 1) { Chamber.FlowGas(4, ProcessUnit.Gas5); } else { Chamber.FlowGas(4, 0); } if (ProcessUnit.Gas6 >= 1) { Chamber.FlowGas(5, ProcessUnit.Gas6); } else { Chamber.FlowGas(5, 0); } if (ProcessUnit.Gas7 >= 1) { Chamber.FlowGas(6, ProcessUnit.Gas7); } else { Chamber.FlowGas(6, 0); } if (ProcessUnit.Gas8 >= 1) { Chamber.FlowGas(7, ProcessUnit.Gas8); } else { Chamber.FlowGas(7, 0); } if (ProcessUnit.ToleranceMode != ToleranceMode.None) { List toleranceObjects = new List(); toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); _GasFlowToleranceChecker.Start(toleranceObjects); } return RState.Running; } private RState GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as GasControlUnit; if (ProcessUnit.EnableRamp) { double rampFactor = step.RampFactor(); Chamber.FlowGas(0, ProcessUnit.Gas1 + (ProcessUnit.Gas1Target - ProcessUnit.Gas1) * rampFactor); Chamber.FlowGas(1, ProcessUnit.Gas2 + (ProcessUnit.Gas2Target - ProcessUnit.Gas2) * rampFactor); Chamber.FlowGas(2, ProcessUnit.Gas3 + (ProcessUnit.Gas3Target - ProcessUnit.Gas3) * rampFactor); Chamber.FlowGas(3, ProcessUnit.Gas4 + (ProcessUnit.Gas4Target - ProcessUnit.Gas4) * rampFactor); Chamber.FlowGas(4, ProcessUnit.Gas5 + (ProcessUnit.Gas5Target - ProcessUnit.Gas5) * rampFactor); Chamber.FlowGas(5, ProcessUnit.Gas6 + (ProcessUnit.Gas6Target - ProcessUnit.Gas6) * rampFactor); Chamber.FlowGas(6, ProcessUnit.Gas7 + (ProcessUnit.Gas7Target - ProcessUnit.Gas7) * rampFactor); Chamber.FlowGas(7, ProcessUnit.Gas8 + (ProcessUnit.Gas8Target - ProcessUnit.Gas8) * rampFactor); } if (ProcessUnit.ToleranceMode != ToleranceMode.None) { return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack, Chamber.MFC7FeedBack, Chamber.MFC8FeedBack); } return RState.Running; } private void GasControlUnit_End(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as GasControlUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { _GasFlowToleranceChecker.End(); } } private RState Kepler2200GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step) { List toleranceObjects = new List(); Chamber.OpenValve(ValveType.GasFinal, true); var ProcessUnit = unit as Kepler2200GasControlUnit; if (ProcessUnit.Gas1 >= 1) { Chamber.FlowGas(0, ProcessUnit.Gas1); } else { Chamber.FlowGas(0, 0); } if (ProcessUnit.Gas2 >= 1) { Chamber.FlowGas(1, ProcessUnit.Gas2); } else { Chamber.FlowGas(1, 0); } if (ProcessUnit.Gas3 >= 1) { Chamber.FlowGas(2, ProcessUnit.Gas3); } else { Chamber.FlowGas(2, 0); } if (ProcessUnit.Gas4 >= 1) { Chamber.FlowGas(3, ProcessUnit.Gas4); } else { Chamber.FlowGas(3, 0); } if (ProcessUnit.Gas5 >= 1) { Chamber.FlowGas(4, ProcessUnit.Gas5); } else { Chamber.FlowGas(4, 0); } if (ProcessUnit.Gas6 >= 1) { Chamber.FlowGas(5, ProcessUnit.Gas6); } else { Chamber.FlowGas(5, 0); } if (ProcessUnit.ToleranceMode != ToleranceMode.None) { toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); _GasFlowToleranceChecker.Start(toleranceObjects); } return RState.Running; } private RState Kepler2200GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as Kepler2200GasControlUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack); } return RState.Running; } private void Kepler2200GasControlUnit_End(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as Kepler2200GasControlUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { _GasFlowToleranceChecker.End(); } } private RState VenusSEGasControlUnit_Start(ProcessUnitBase unit, RecipeStep step) { Chamber.OpenValve(ValveType.GasFinal, true); var ProcessUnit = unit as VenusSEGasControlUnit; Chamber.FlowGas(0, ProcessUnit.Gas1); if (ProcessUnit.Gas1 >= 1) { Chamber.OpenValve(ValveType.PV11, true); } Chamber.FlowGas(1, ProcessUnit.Gas2); if (ProcessUnit.Gas2 >= 1) { Chamber.OpenValve(ValveType.PV21, true); } Chamber.FlowGas(2, ProcessUnit.Gas3); if (ProcessUnit.Gas3 >= 1) { Chamber.OpenValve(ValveType.PV31, true); } Chamber.FlowGas(3, ProcessUnit.Gas4); if (ProcessUnit.Gas4 >= 1) { Chamber.OpenValve(ValveType.PV41, true); } Chamber.FlowGas(4, ProcessUnit.Gas5); if (ProcessUnit.Gas5 >= 1) { Chamber.OpenValve(ValveType.PV51, true); } Chamber.FlowGas(5, ProcessUnit.Gas6); if (ProcessUnit.Gas6 >= 1) { Chamber.OpenValve(ValveType.PV61, true); } Chamber.FlowGas(6, ProcessUnit.Gas7); if (ProcessUnit.Gas7 >= 1) { Chamber.OpenValve(ValveType.PV71, true); } Chamber.FlowGas(7, ProcessUnit.Gas8); if (ProcessUnit.Gas8 >= 1) { Chamber.OpenValve(ValveType.PV81, true); } Chamber.FlowGas(8, ProcessUnit.Gas9); if (ProcessUnit.Gas9 >= 1) { Chamber.OpenValve(ValveType.PV91, true); } Chamber.FlowGas(9, ProcessUnit.Gas10); if (ProcessUnit.Gas10 >= 1) { Chamber.OpenValve(ValveType.PVA1, true); } Chamber.FlowGas(10, ProcessUnit.Gas11); if (ProcessUnit.Gas11 >= 1) { Chamber.OpenValve(ValveType.PVB1, true); } Chamber.FlowGas(11, ProcessUnit.Gas12); if (ProcessUnit.Gas12 >= 1) { Chamber.OpenValve(ValveType.PVC1, true); } if (ProcessUnit.ToleranceMode != ToleranceMode.None) { List toleranceObjects = new List(); toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas9", ProcessUnit.Gas9, ProcessUnit.Gas9WarningRange, ProcessUnit.Gas9AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas10", ProcessUnit.Gas10, ProcessUnit.Gas10WarningRange, ProcessUnit.Gas10AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas11", ProcessUnit.Gas11, ProcessUnit.Gas11WarningRange, ProcessUnit.Gas11AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); toleranceObjects.Add(new ToleranceObject("Gas12", ProcessUnit.Gas12, ProcessUnit.Gas12WarningRange, ProcessUnit.Gas12AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); _GasFlowToleranceChecker.Start(toleranceObjects); } return RState.Running; } private RState VenusSEGasControlUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as VenusSEGasControlUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack, Chamber.MFC7FeedBack, Chamber.MFC8FeedBack, Chamber.MFC9FeedBack, Chamber.MFC10FeedBack, Chamber.MFC11FeedBack, Chamber.MFC12FeedBack); } return RState.Running; } private void VenusSEGasControlUnit_End(ProcessUnitBase unit, RecipeStep step) { Chamber.FlowGas(0, 0); Chamber.FlowGas(1, 0); Chamber.FlowGas(2, 0); Chamber.FlowGas(3, 0); Chamber.FlowGas(4, 0); Chamber.FlowGas(5, 0); Chamber.FlowGas(6, 0); Chamber.FlowGas(7, 0); Chamber.FlowGas(8, 0); Chamber.FlowGas(9, 0); Chamber.FlowGas(10, 0); Chamber.FlowGas(11, 0); Chamber.FlowGas(12, 0); var ProcessUnit = unit as VenusSEGasControlUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { _GasFlowToleranceChecker.End(); } } private RState ESCHVUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ESCHVUnit; if (ProcessUnit.ESCClampValtage > 0) { Chamber.SetESCClampVoltage(ProcessUnit.ESCClampValtage); } else { Chamber.SetESCClampVoltage(0); } Chamber.SetBacksideHePressure(ProcessUnit.BacksideHelium); List toleranceObjects = new List(); if (ProcessUnit.ToleranceMode != ToleranceMode.None) { toleranceObjects.Add(new ToleranceObject("BacksideHelium", ProcessUnit.BacksideHelium, ProcessUnit.HeliumWarningRange, ProcessUnit.HeliumAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode)); _HeliumToleranceChecker.Start(toleranceObjects); } return RState.Running; } private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ESCHVUnit; //if (Chamber.BackSideHeOutOfRange && step.ElapsedTime() > ProcessUnit.CheckDelay) //{ // LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range."); // return RState.Failed; //} if (ProcessUnit.ToleranceMode != ToleranceMode.None) { return _HeliumToleranceChecker.Monitor(Chamber.HeliumFeedBack); } return RState.Running; } private void ESCHVUnit_End(ProcessUnitBase unit, RecipeStep step) { //Chamber.SetESCClampVoltage(0); //Chamber.SetBacksideHeThreshold(0, 0); var ProcessUnit = unit as ESCHVUnit; if (ProcessUnit.ToleranceMode != ToleranceMode.None) { _HeliumToleranceChecker.End(); } } private RState ProcessKitUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ProcessKitUnit; if (Chamber.SetLiftPin(ProcessUnit.LiftPinPostion, out string reason)) { return RState.Running; } else { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed. Target Position:{ProcessUnit.LiftPinPostion}"); return RState.Failed; } } private RState ProcessKitUnit_Check(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as ProcessKitUnit; return RState.Running; } private void ProcessKitUnit_End(ProcessUnitBase unit, RecipeStep step) { } private RState RFBoxUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as RFBoxUnit; Chamber.SetRFBoxC1Position(ProcessUnit.C1); return RState.Running; } private RState RFBoxUnit_Check(ProcessUnitBase unit, RecipeStep step) { return RState.Running; } private void RFBoxUnit_End(ProcessUnitBase unit, RecipeStep step) { } private RState HeaterUnit_Start(ProcessUnitBase unit, RecipeStep step) { var ProcessUnit = unit as HeaterUnit; var position = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), ProcessUnit.SuspectPosition.ToString()); Chamber.HighTemperatureHeaterGotoPosition(position); if (ProcessUnit.HeaterTemp > 0) { Chamber.SetHighTemperatureHeaterTemperature(ProcessUnit.HeaterTemp); } Chamber.SetHighTemperatureHeaterRatio(ProcessUnit.HeaterRatio); return RState.Running; } private RState HeaterUnit_Check(ProcessUnitBase unit, RecipeStep step) { return RState.Running; } private void HeaterUnit_End(ProcessUnitBase unit, RecipeStep step) { } public bool LoadMethods(ProcessUnitBase unit) { var className = $"{Module}.{unit.GetType().Name}"; if (startHelper.ContainsKey(className) && checkerHelper.ContainsKey(className) && endHelper.ContainsKey(className)) { unit.starter = startHelper[className]; unit.checker = checkerHelper[className]; unit.end = endHelper[className]; return true; } return false; } //public void loopStep(bool isloop,int loopCount,int loopIndex) //{ // isLoop = isloop; // loopsteps=loopCount; // currentStepIndex = loopIndex; //} private RState stepStarter(RecipeStep step) { step.StartStepTimer(); //switch (step.Type) //{ // case StepType.EndPoint: // Chamber.EPDStepStart(step.EPDConfig, step.StepNo); // break; //} if (_isInstalledEPD) { Chamber.EPDStepStart(step.EPDConfig, step.StepNo); if (step.Type == StepType.EndPoint) { _lastEPDStepTimeStopwatch.Restart(); } } return RState.Running; } private RState stepChecker(RecipeStep step) { switch (step.Type) { case StepType.Time: return step.ElapsedTime() >= step.Time * 1000 ? RState.End : RState.Running; case StepType.OverEtch: var time = _lastEPDStepTimeStopwatch.ElapsedMilliseconds; return step.ElapsedTime() >= (time * step.OverEtchPercent / 100) ? RState.End : RState.Running; case StepType.EndPoint: if (step.ElapsedTime() > step.MaxEndPointTime * 1000) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not capture endpoint signal in {step.MaxEndPointTime} seconds"); return RState.Failed; } else { if (Chamber.EPDCaptured) { if (step.ElapsedTime() < step.MinEndPointTime * 1000) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, capture endpoint signal less than {step.MinEndPointTime} seconds"); return RState.Failed; } else { return RState.End; } } else { return RState.Running; } //return Chamber.EPDCaptured ? RState.End : RState.Running; } case StepType.Stable: if (step.ElapsedTime() >= step.Time * 1000) { LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not Stable in {step.Time} seconds"); return RState.Failed; } else { if (_GasFlowToleranceChecker.IsStable && _PressureToleranceChecker.IsStable && _HeliumToleranceChecker.IsStable) { return RState.End; } } return RState.Running; } return RState.Running; } private RState stepEnder(RecipeStep step) { //if (step.Type == StepType.EndPoint) //{ // Chamber.EPDStepStop(); //} if (_isInstalledEPD) { Chamber.EPDStepStop(); if (step.Type == StepType.EndPoint) { _lastEPDStepTimeStopwatch.Stop(); } } return RState.End; } public bool LoadStepFuns(RecipeStep step) { step.starter = stepStarter; step.checker = stepChecker; step.ender = stepEnder; return true; } } }