using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Sorter.Common; using Venus_RT.Devices; using MECF.Framework.Common.Routine; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using Venus_Core; using Aitex.Core.RT.Log; using Aitex.Core.Util; using Venus_RT.Modules.PMs; using MECF.Framework.Common.Schedulers; using System.Collections.Generic; namespace Venus_RT.Modules.TM { class MFPMPickRoutine : ModuleRoutineBase, IRoutine { private enum PickStep { WaitPMReady, PMPrepare, ArmExtend, DropDownWafer, PickDelay, ArmRetract, NotifyDone, } private readonly JetTM _JetTM; private readonly ITransferRobot _robot; private int _pickingTimeout = 120 * 1000; private int _pickDelayTime = 0; private ModuleName _targetModule; private PMEntity _pmModule; private int _targetSlot; private Hand _hand; public MFPMPickRoutine(JetTM tm, ITransferRobot robot) : base(ModuleName.TMRobot) { _JetTM = tm; _robot = robot; Name = "Pick from PM"; } public RState Start(params object[] objs) { if (!_robot.IsHomed) { LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first"); return RState.Failed; } var pickItem = (Queue)objs[0]; _targetModule = pickItem.Peek().SourceModule; _targetSlot = pickItem.Peek().SourceSlot; _hand = pickItem.Peek().RobotHand; if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule)) { _pmModule = Singleton.Instance.GetPM(_targetModule); } else { LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action"); return RState.Failed; } if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer"); return RState.Failed; } if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer"); return RState.Failed; } var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot); LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}"); Reset(); _pickingTimeout = SC.GetValue("TM.PickTimeout") * 1000; _pickDelayTime = SC.GetValue($"{_targetModule}.PickDelayTime"); return Runner.Start(Module, $"Pick from {_targetModule}"); } public RState Monitor() { Runner.Wait((int)PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s) .Run((int)PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady) .Run((int)PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone) .Run((int)PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown) .Delay((int)PickStep.PickDelay, _pickDelayTime) .Run((int)PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone) .End((int)PickStep.NotifyDone, NotifyPMDone, _delay_50ms); return Runner.Status; } private bool ModulePrepare() { _pmModule.PostMsg(PMEntity.MSG.PreparePick); return true; } private bool IsModulePrepareReady() { return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen; } private bool ArmExtend() { return _robot.PickExtend(_targetModule, _targetSlot, _hand); } private bool ArmRetract() { return _robot.PickRetract(_targetModule, _targetSlot, _hand); } private bool WaitRobotExtendDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand); return true; } else { Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}"); return true; } } private bool NotifyPMPickWafer() { _pmModule.PostMsg(PMEntity.MSG.DropDownWafer); return true; } private bool WaitPMWaferDropDown() { return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready; } private bool WaitRobotRetractDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}"); return true; } } private bool NotifyPMDone() { _pmModule.PostMsg(PMEntity.MSG.PickReady); return true; } public void Abort() { _robot.Halt(); } } }