//using Aitex.Core.RT.Routine; //using Aitex.Core.RT.SCCore; //using MECF.Framework.Common.Equipment; //using System; //using System.Collections.Generic; //using System.Linq; //using System.Text; //using System.Threading.Tasks; //using Venus_Core; //using Venus_RT.Devices; //using Venus_RT.Modules.PMs; //namespace Venus_RT.Modules.PMs //{ // class PMControlPressureRoutine : PMRoutineBase, IRoutine // { // private enum ControlPressureStep // { // Delay1s, // StartControlPressure, // End // } // private readonly JetPMBase _chamber; // private int _controlPressureSetPoint = 90; // private int _controlFlowSetPoint = 90; // public PMControlPressureRoutine(JetPMBase chamber) : base(chamber) // { // _chamber = chamber; // } // public RState Start(params object[] objs) // { // if (!CheckTurboPump()) // { // return RState.Failed; // } // if (_chamber.GetPVPosition() == 0) // { // Stop("钟摆阀没有打开"); // return RState.Failed; // } // Reset(); // // open process final valve and flow // Notify("Open valve and flow mfc"); // _chamber.OpenValve(ValveType.GasFinal, true); // _controlPressureSetPoint = SC.GetValue($"{Module}.ControlPressureSetPoint"); // _controlFlowSetPoint= SC.GetValue($"{Module}.ControlPressureN2FlowSetPoint"); // return Runner.Start(Module, Name); // } // public RState Monitor() // { // Runner.Delay(ControlPressureStep.Delay1s, _delay_1s) // .Run(ControlPressureStep.StartControlPressure, StartControlPressure) // .End(ControlPressureStep.End, End); // return Runner.Status; // } // private bool StartControlPressure() // { // _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint); // return true; // } // private bool End() // { // return true; // } // public void Abort() // { // _chamber.AbortControlPressure(); // } // } //}