using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Venus_RT.Devices; using MECF.Framework.Common.Routine; using Venus_Core; namespace Venus_RT.Modules.PMs { class LoadLockVentRoutine : PMRoutineBase, IRoutine { private enum VentStep { kCloseValves, kVent, kOverVent, kCloseVentValves, } private int _overVentTime = 2000; private int _checkATMTimeout = 90000; private int _ATMPressureLL = 720000; public LoadLockVentRoutine(JetPM chamber) : base(chamber) { Name = "Loadlock Vent"; } public RState Start(params object[] objs) { if (CheckLidLoadLock()&& CheckSlitDoor()&& CheckATMLoadLock()) { Reset(); _chamber.CloseValves(); _checkATMTimeout = SC.GetValue($"{Module}.CheckATMTimeout") * 1000; _overVentTime = SC.GetValue($"{Module}.OverVentTime"); return Runner.Start(Module, Name); } return RState.Failed; } public RState Monitor() { Runner.Delay((int)VentStep.kCloseValves, _delay_1s) .Run((int)VentStep.kVent, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, true), () => { return _chamber.LoadlockPressure >= _ATMPressureLL; }, _checkATMTimeout) .Delay((int)VentStep.kOverVent, _overVentTime) .End((int)VentStep.kCloseVentValves, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockVent, false), _delay_1s); return Runner.Status; } public void Abort() { CloseAllValves(); } public bool CheckATMLoadLock() { if (_chamber.IsATMLoadlock) { this.Stop("LoadLock 是ATM状态"); return false; } return true; } } }