using Aitex.Core.Common.DeviceData; using MECF.Framework.Common.DataCenter; using MECF.Framework.Common.OperationCenter; using Prism.Commands; using Prism.Mvvm; using System; using System.Collections.Generic; using System.Windows; using System.Windows.Threading; using Venus_Core; using Venus_MainPages.Views; using System.Linq; using System.Threading.Tasks; using System.IO; using Venus_Themes.CustomControls; using Venus_MainPages.Unity; using MECF.Framework.Common.CommonData.DeviceData; using Path = System.IO.Path; using Aitex.Core.RT.Log; using System.Windows.Controls; //using System.Drawing.Drawing2D; namespace Venus_MainPages.ViewModels { internal class OverKepler2300ViewModel : BindableBase { #region 私有字段 private List m_CurrentModuleRecipes = new List(); private bool m_PVN21ValveIsOpen; private bool m_PVN22ValveIsOpen; private bool m_N2ValveIsOpen; private bool m_PV11ValveIsOpen; private bool m_PV12ValveIsOpen; private bool m_PV21ValveIsOpen; private bool m_PV22ValveIsOpen; private bool m_PV31ValveIsOpen; private bool m_PV32ValveIsOpen; private bool m_PV41ValveIsOpen; private bool m_PV42ValveIsOpen; private bool m_MFC1ValveIsOpen; private bool m_MFC2ValveIsOpen; private bool m_MFC3ValveIsOpen; private bool m_MFC4ValveIsOpen; private bool m_MFC5ValveIsOpen; private bool m_MFC6ValveIsOpen; private bool m_MFC7ValveIsOpen; private bool m_MFC8ValveIsOpen; private bool m_GasFinalValveIsOpen; private bool m_SoftPumpValveIsOpen; private bool m_FastPumpValveIsOpen; private bool m_PVHe1ValveIsOpen; private bool m_PVHe2ValveIsOpen; private bool m_TurboPumpPumpingValveIsOpen; private bool m_TurboPumpPurgeValveIsOpen; private bool m_GuageValveIsOpen; private bool m_PendulumValveIsOpen; private double m_HeGasSetpoint; private int m_HePressureSetpoint; private float m_SRFFwdPowerSetpoint; private float m_BRFFwdPowerSetpoint; private float m_SRFMatchC1; private float m_SRFMatchC2; private float m_BRFMatchC1; private float m_BRFMatchC2; private double m_MFC1SetPoint; private double m_MFC2SetPoint; private double m_MFC3SetPoint; private double m_MFC4SetPoint; private double m_MFC5SetPoint; private double m_MFC6SetPoint; private double m_MFC7SetPoint; private double m_MFC8SetPoint; private double m_N2SetPoint; private AITMfcData m_MFC1Data; private AITMfcData m_MFC2Data; private AITMfcData m_MFC3Data; private AITMfcData m_MFC4Data; private AITMfcData m_MFC5Data; private AITMfcData m_MFC6Data; private AITMfcData m_MFC7Data; private AITMfcData m_MFC8Data; private AITMfcData m_MFCHeData; private AITMfcData m_MFCN2Data; private AITHeaterData m_ValveHeaterData; private AITHeaterData m_ForelineHeaterData; private AITHeaterData m_WallHeaterData; private AITHeaterData m_PendulumHeaterData; private AITRfData m_SRFData; private AITRfData m_BRFData; private AITMatchData m_SMatchData; private AITMatchData m_BMatchData; private AITPendulumValveData m_PendulumValveData; private PMState m_PMCurrentState; private bool m_SourceRFFanInterlock; private bool m_IsWLK; private bool m_IsWaterFlowOk; private bool m_IsTurboPumpInterlock; private bool m_IsCDAOK; private bool m_SensorGasBoxDoor; private bool m_SensorGasBoxPressure; private bool m_PumpIsOpen; private bool m_TurboIsOpen; private bool m_IsATM; private bool m_IsVAC; private List m_RtDataKeys; private Dictionary m_RtDataValues; private int m_PositionValue; private bool m_IsPositionMode; private int m_ESCVoltage; private bool m_GasIsFlowing; private bool m_IsProcessing; private bool m_IsAutoMode; private string m_SelectedRecipe; private float m_ChillerTempSetpoint; private float m_InnerChillerTempSetpoint; private float m_OuterChillerTempSetpoint; private float m_TopChillerTempSetpoint; private float m_WallTempSetpoint; private bool m_HeIsPressureMode = true; private bool m_ChillerIsOn; private bool m_InnerChillerIsOn; private bool m_OuterChillerIsOn; private bool m_TopChillerIsOn; private float m_ChamberPressure; private float m_ProcessPressure; private float m_ForelinePressurePressure; private float m_ESCHePressure; ButterflyValveView butterflyValveMessageBox; HeaterView heaterView; private int m_TurboPumpRotationalSpeed; private bool m_LiftPinIsUp; private bool m_IsSlitDoorClosed; private bool m_IsLidClosed; private float m_ChillerTemperature; private float m_InnerTemperature; private float m_OuterTemperature; private float m_TopTemperature; private int m_ESCHVOutputVoltage; //private float m_MatchC1; //private float m_MatchC2; //private float m_BiasMatchC1; //private float m_BiasMatchC2; private float m_PendulumValvePosition; private bool m_IsTurboPumpAtSpeed; private bool m_TurboPumpWaterFlowSwitch; private bool m_IsHasWafer; private Recipe m_CurrentRecipe = new Recipe(); private RecipeResult m_CurrentRecipeResult = new RecipeResult(); private RecipeStep m_CurrentRecipeStep = new RecipeStep(); private double m_ChamberPressureFeedBack; private double m_TurboN2FlowSetPoint; private string m_ModuleName; private string m_WaferID; private int? currentRecipeNumber; private bool m_IsInclude; private int m_SelectedRecipeIndex=-1; private ComboBoxItem m_SelectedRecipeType; #endregion #region 属性 public bool IsInclude { get { return m_IsInclude; } set { SetProperty(ref m_IsInclude, value); } } public List CurrentModuleRecipes { get { return m_CurrentModuleRecipes; } set { SetProperty(ref m_CurrentModuleRecipes, value); } } public Recipe CurrentRecipe { get { return m_CurrentRecipe; } set { SetProperty(ref m_CurrentRecipe, value); } } public RecipeResult CurrentRecipeResult { get { return m_CurrentRecipeResult; } set { SetProperty(ref m_CurrentRecipeResult, value); } } public RecipeStep CurrentRecipeStep { get { return m_CurrentRecipeStep; } set { SetProperty(ref m_CurrentRecipeStep, value); } } public bool IsHasWafer { get { return m_IsHasWafer; } set { SetProperty(ref m_IsHasWafer, value); } } public bool IsTurboPumpAtSpeed { get { return m_IsTurboPumpAtSpeed; } set { SetProperty(ref m_IsTurboPumpAtSpeed, value); } } public bool TurboPumpWaterFlowSwitch { get { return m_TurboPumpWaterFlowSwitch; } set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); } } public float PendulumValvePosition { get { return m_PendulumValvePosition; } set { SetProperty(ref m_PendulumValvePosition, value); } } public AITMatchData BMatchData { get { return m_BMatchData; } set { SetProperty(ref m_BMatchData, value); } } public AITMatchData SMatchData { get { return m_SMatchData; } set { SetProperty(ref m_SMatchData, value); } } //public float BiasMatchC1 //{ // get { return m_BiasMatchC1; } // set // { // SetProperty(ref m_BiasMatchC1, value); // } //} //public float BiasMatchC2 //{ // get { return m_BiasMatchC2; } // set // { // SetProperty(ref m_BiasMatchC2, value); // } //} //public float MatchC1 //{ // get { return m_MatchC1; } // set // { // SetProperty(ref m_MatchC1, value); // } //} //public float MatchC2 //{ // get { return m_MatchC2; } // set // { // SetProperty(ref m_MatchC2, value); // } //} public AITPendulumValveData PendulumValveData { get { return m_PendulumValveData; } set { SetProperty(ref m_PendulumValveData, value); } } //public AITHVData ESCHVData //{ // get { return m_ESCHVData; } // set // { // SetProperty(ref m_ESCHVData, value); // } //} public int ESCHVOutputVoltage { get { return m_ESCHVOutputVoltage; } set { SetProperty(ref m_ESCHVOutputVoltage, value); } } public float ChillerTemperature { get { return m_ChillerTemperature; } set { SetProperty(ref m_ChillerTemperature, value); } } public float InnerTemperature { get { return m_InnerTemperature; } set { SetProperty(ref m_InnerTemperature, value); } } public float OuterTemperature { get { return m_OuterTemperature; } set { SetProperty(ref m_OuterTemperature, value); } } public float TopTemperature { get { return m_TopTemperature; } set { SetProperty(ref m_TopTemperature, value); } } //public float HVTemperature //{ // get { return m_HVTemperature; } // set // { // SetProperty(ref m_HVTemperature, value); // } //} public bool IsLidClosed { get { return m_IsLidClosed; } set { SetProperty(ref m_IsLidClosed, value); } } public bool IsSlitDoorClosed { get { return m_IsSlitDoorClosed; } set { SetProperty(ref m_IsSlitDoorClosed, value); } } public bool LiftPinIsUp { get { return m_LiftPinIsUp; } set { SetProperty(ref m_LiftPinIsUp, value); } } public int TurboPumpRotationalSpeed { get { return m_TurboPumpRotationalSpeed; } set { SetProperty(ref m_TurboPumpRotationalSpeed, value); } } public float ESCHePressure { get { return m_ESCHePressure; } set { SetProperty(ref m_ESCHePressure, value); } } public float ChamberPressure { get { return m_ChamberPressure; } set { SetProperty(ref m_ChamberPressure, value); } } public float ProcessPressure { get { return m_ProcessPressure; } set { SetProperty(ref m_ProcessPressure, value); } } public float ForelinePressure { get { return m_ForelinePressurePressure; } set { SetProperty(ref m_ForelinePressurePressure, value); } } public bool SourceRFFanInterlock { get { return m_SourceRFFanInterlock; } set { SetProperty(ref m_SourceRFFanInterlock, value); } } public bool IsWLK { get { return m_IsWLK; } set { SetProperty(ref m_IsWLK, value); } } public bool IsWaterFlowOk { get { return m_IsWaterFlowOk; } set { SetProperty(ref m_IsWaterFlowOk, value); } } public bool IsCDAOK { get { return m_IsCDAOK; } set { SetProperty(ref m_IsCDAOK, value); } } public bool SensorGasBoxDoor { get { return m_SensorGasBoxDoor; } set { SetProperty(ref m_SensorGasBoxDoor, value); } } public bool SensorGasBoxPressure { get { return m_SensorGasBoxPressure; } set { SetProperty(ref m_SensorGasBoxPressure, value); } } public bool IsTurboPumpInterlock { get { return m_IsTurboPumpInterlock; } set { SetProperty(ref m_IsTurboPumpInterlock, value); } } public string ModuleName { get { return m_ModuleName; } set { SetProperty(ref m_ModuleName, value); } } public double MFC1SetPoint { get { return m_MFC1SetPoint; } set { SetProperty(ref m_MFC1SetPoint, value); } } public double MFC2SetPoint { get { return m_MFC2SetPoint; } set { SetProperty(ref m_MFC2SetPoint, value); } } public double MFC3SetPoint { get { return m_MFC3SetPoint; } set { SetProperty(ref m_MFC3SetPoint, value); } } public double MFC4SetPoint { get { return m_MFC4SetPoint; } set { SetProperty(ref m_MFC4SetPoint, value); } } public double MFC5SetPoint { get { return m_MFC5SetPoint; } set { SetProperty(ref m_MFC5SetPoint, value); } } public double MFC6SetPoint { get { return m_MFC6SetPoint; } set { SetProperty(ref m_MFC6SetPoint, value); } } public double MFC7SetPoint { get { return m_MFC7SetPoint; } set { SetProperty(ref m_MFC7SetPoint, value); } } public double MFC8SetPoint { get { return m_MFC8SetPoint; } set { SetProperty(ref m_MFC8SetPoint, value); } } public double N2SetPoint { get { return m_N2SetPoint; } set { SetProperty(ref m_N2SetPoint, value); } } public double TurboN2FlowSetPoint { get { return m_TurboN2FlowSetPoint; } set { if (value != m_TurboN2FlowSetPoint) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value); } SetProperty(ref m_TurboN2FlowSetPoint, value); } } public AITMfcData MFC1Data { get { return m_MFC1Data; } set { SetProperty(ref m_MFC1Data, value); } } public AITMfcData MFC2Data { get { return m_MFC2Data; } set { SetProperty(ref m_MFC2Data, value); } } public AITMfcData MFC3Data { get { return m_MFC3Data; } set { SetProperty(ref m_MFC3Data, value); } } public AITMfcData MFC4Data { get { return m_MFC4Data; } set { SetProperty(ref m_MFC4Data, value); } } public AITMfcData MFC5Data { get { return m_MFC5Data; } set { SetProperty(ref m_MFC5Data, value); } } public AITMfcData MFC6Data { get { return m_MFC6Data; } set { SetProperty(ref m_MFC6Data, value); } } public AITMfcData MFC7Data { get { return m_MFC7Data; } set { SetProperty(ref m_MFC7Data, value); } } public AITMfcData MFC8Data { get { return m_MFC8Data; } set { SetProperty(ref m_MFC8Data, value); } } public AITMfcData MFCHeData { get { return m_MFCHeData; } set { SetProperty(ref m_MFCHeData, value); } } public AITMfcData MFCN2Data { get { return m_MFCN2Data; } set { SetProperty(ref m_MFCN2Data, value); } } public AITHeaterData ValveHeaterData { get { return m_ValveHeaterData; } set { SetProperty(ref m_ValveHeaterData, value); } } public AITHeaterData ForelineHeaterData { get { return m_ForelineHeaterData; } set { SetProperty(ref m_ForelineHeaterData, value); } } public AITHeaterData WallHeaterData { get { return m_WallHeaterData; } set { SetProperty(ref m_WallHeaterData, value); } } public AITHeaterData PendulumHeaterData { get { return m_PendulumHeaterData; } set { SetProperty(ref m_PendulumHeaterData, value); } } public AITRfData SRFData { get { return m_SRFData; } set { SetProperty(ref m_SRFData, value); } } public AITRfData BRFData { get { return m_BRFData; } set { SetProperty(ref m_BRFData, value); } } public PMState PMCurrentState { get { return m_PMCurrentState; } set { SetProperty(ref m_PMCurrentState, value); } } #region 阀 public bool GasFinalValveIsOpen { get { return m_GasFinalValveIsOpen; } set { SetProperty(ref m_GasFinalValveIsOpen, value); } } public bool PVN21ValveIsOpen { get { return m_PVN21ValveIsOpen; } set { SetProperty(ref m_PVN21ValveIsOpen, value); } } public bool PVN22ValveIsOpen { get { return m_PVN22ValveIsOpen; } set { SetProperty(ref m_PVN22ValveIsOpen, value); } } public bool N2ValveIsOpen { get { return m_N2ValveIsOpen; } set { SetProperty(ref m_N2ValveIsOpen, value); } } public bool PV11ValveIsOpen { get { return m_PV11ValveIsOpen; } set { SetProperty(ref m_PV11ValveIsOpen, value); } } public bool PV12ValveIsOpen { get { return m_PV12ValveIsOpen; } set { SetProperty(ref m_PV12ValveIsOpen, value); } } public bool MFC1ValveIsOpen { get { return m_MFC1ValveIsOpen; } set { SetProperty(ref m_MFC1ValveIsOpen, value); } } public bool PV21ValveIsOpen { get { return m_PV21ValveIsOpen; } set { SetProperty(ref m_PV21ValveIsOpen, value); } } public bool PV22ValveIsOpen { get { return m_PV22ValveIsOpen; } set { SetProperty(ref m_PV22ValveIsOpen, value); } } public bool MFC2ValveIsOpen { get { return m_MFC2ValveIsOpen; } set { SetProperty(ref m_MFC2ValveIsOpen, value); } } public bool PV31ValveIsOpen { get { return m_PV31ValveIsOpen; } set { SetProperty(ref m_PV31ValveIsOpen, value); } } public bool PV32ValveIsOpen { get { return m_PV32ValveIsOpen; } set { SetProperty(ref m_PV32ValveIsOpen, value); } } public bool MFC3ValveIsOpen { get { return m_MFC3ValveIsOpen; } set { SetProperty(ref m_MFC3ValveIsOpen, value); } } public bool PV41ValveIsOpen { get { return m_PV41ValveIsOpen; } set { SetProperty(ref m_PV41ValveIsOpen, value); } } public bool PV42ValveIsOpen { get { return m_PV42ValveIsOpen; } set { SetProperty(ref m_PV42ValveIsOpen, value); } } public bool MFC4ValveIsOpen { get { return m_MFC4ValveIsOpen; } set { SetProperty(ref m_MFC4ValveIsOpen, value); } } public bool MFC5ValveIsOpen { get { return m_MFC5ValveIsOpen; } set { SetProperty(ref m_MFC5ValveIsOpen, value); } } public bool MFC6ValveIsOpen { get { return m_MFC6ValveIsOpen; } set { SetProperty(ref m_MFC6ValveIsOpen, value); } } public bool MFC7ValveIsOpen { get { return m_MFC7ValveIsOpen; } set { SetProperty(ref m_MFC7ValveIsOpen, value); } } public bool MFC8ValveIsOpen { get { return m_MFC8ValveIsOpen; } set { SetProperty(ref m_MFC8ValveIsOpen, value); } } public bool PVHe1ValveIsOpen { get { return m_PVHe1ValveIsOpen; } set { SetProperty(ref m_PVHe1ValveIsOpen, value); } } public bool PVHe2ValveIsOpen { get { return m_PVHe2ValveIsOpen; } set { SetProperty(ref m_PVHe2ValveIsOpen, value); } } public bool TurboPumpPumpingValveIsOpen { get { return m_TurboPumpPumpingValveIsOpen; } set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); } } public bool TurboPumpPurgeValveIsOpen { get { return m_TurboPumpPurgeValveIsOpen; } set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); } } public bool SoftPumpValveIsOpen { get { return m_SoftPumpValveIsOpen; } set { SetProperty(ref m_SoftPumpValveIsOpen, value); } } public bool FastPumpValveIsOpen { get { return m_FastPumpValveIsOpen; } set { SetProperty(ref m_FastPumpValveIsOpen, value); } } public bool GuageValveIsOpen { get { return m_GuageValveIsOpen; } set { SetProperty(ref m_GuageValveIsOpen, value); } } #endregion public Dictionary RtDataValues { get { return m_RtDataValues; } set { SetProperty(ref m_RtDataValues, value); } } public bool PumpIsOpen { get { return m_PumpIsOpen; } set { SetProperty(ref m_PumpIsOpen, value); } } public bool PendulumValveIsOpen { get { return m_PendulumValveIsOpen; } set { SetProperty(ref m_PendulumValveIsOpen, value); } } public bool TurboIsOpen { get { return m_TurboIsOpen; } set { SetProperty(ref m_TurboIsOpen, value); } } public bool IsATM { get { return m_IsATM; } set { SetProperty(ref m_IsATM, value); } } public bool IsVAC { get { return m_IsVAC; } set { SetProperty(ref m_IsVAC, value); } } //public bool BRFIsOn //{ // get { return m_BRFIsOn; } // set { SetProperty(ref m_BRFIsOn, value); } //} //public bool SRFIsOn //{ // get { return m_SRFIsOn; } // set { SetProperty(ref m_SRFIsOn, value); } //} public int PositionValue { get { return m_PositionValue; } set { SetProperty(ref m_PositionValue, value); } } public bool IsPositionMode { get { return m_IsPositionMode; } set { SetProperty(ref m_IsPositionMode, value); } } public double HeGasSetpoint { get { return m_HeGasSetpoint; } set { SetProperty(ref m_HeGasSetpoint, value); } } public int HePressureSetpoint { get { return m_HePressureSetpoint; } set { SetProperty(ref m_HePressureSetpoint, value); } } public float SRFFwdPowerSetpoint { get { return m_SRFFwdPowerSetpoint; } set { SetProperty(ref m_SRFFwdPowerSetpoint, value); } } public float BRFFwdPowerSetpoint { get { return m_BRFFwdPowerSetpoint; } set { SetProperty(ref m_BRFFwdPowerSetpoint, value); } } public int ESCVoltage { get { return m_ESCVoltage; } set { SetProperty(ref m_ESCVoltage, value); } } public float SRFMatchC1 { get { return m_SRFMatchC1; } set { SetProperty(ref m_SRFMatchC1, value); } } public float SRFMatchC2 { get { return m_SRFMatchC2; } set { SetProperty(ref m_SRFMatchC2, value); } } public float BRFMatchC1 { get { return m_BRFMatchC1; } set { SetProperty(ref m_BRFMatchC1, value); } } public float BRFMatchC2 { get { return m_BRFMatchC2; } set { SetProperty(ref m_BRFMatchC2, value); } } public bool GasIsFlowing { get { return m_GasIsFlowing; } set { SetProperty(ref m_GasIsFlowing, value); } } public bool IsProcessing { get { return m_IsProcessing; } set { SetProperty(ref m_IsProcessing, value); } } public bool IsAutoMode { get { return m_IsAutoMode; } set { SetProperty(ref m_IsAutoMode, value); } } public string SelectedRecipe { get { return m_SelectedRecipe; } set { SetProperty(ref m_SelectedRecipe, value); } } public float ChillerTempSetpoint { get { return m_ChillerTempSetpoint; } set { SetProperty(ref m_ChillerTempSetpoint, value); } } public float InnerChillerTempSetpoint { get { return m_InnerChillerTempSetpoint; } set { SetProperty(ref m_InnerChillerTempSetpoint, value); } } public float OuterChillerTempSetpoint { get { return m_OuterChillerTempSetpoint; } set { SetProperty(ref m_OuterChillerTempSetpoint, value); } } public float TopChillerTempSetpoint { get { return m_TopChillerTempSetpoint; } set { SetProperty(ref m_TopChillerTempSetpoint, value); } } public float WallTempSetpoint { get { return m_WallTempSetpoint; } set { SetProperty(ref m_WallTempSetpoint, value); } } public bool HeIsPressureMode { get { return m_HeIsPressureMode; } set { SetProperty(ref m_HeIsPressureMode, value); } } public bool ChillerIsOn { get { return m_ChillerIsOn; } set { SetProperty(ref m_ChillerIsOn, value); } } public bool InnerChillerIsOn { get { return m_InnerChillerIsOn; } set { SetProperty(ref m_InnerChillerIsOn, value); } } public bool OuterChillerIsOn { get { return m_OuterChillerIsOn; } set { SetProperty(ref m_OuterChillerIsOn, value); } } public bool TopChillerIsOn { get { return m_TopChillerIsOn; } set { SetProperty(ref m_TopChillerIsOn, value); } } public double ChamberPressureFeedBack { get { return m_ChamberPressureFeedBack; } set { SetProperty(ref m_ChamberPressureFeedBack, value); } } public string WaferID { get { return m_WaferID; } set { SetProperty(ref m_WaferID, value); } } public int SelectedRecipeIndex { get { return m_SelectedRecipeIndex; } set { SetProperty(ref m_SelectedRecipeIndex, value); } } public ComboBoxItem SelectedRecipeType { get { return m_SelectedRecipeType; } set { SetProperty(ref m_SelectedRecipeType, value); } } #endregion #region 命令 private DelegateCommand _PMInitCommnad; public DelegateCommand PMInitCommnad => _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit)); private DelegateCommand _PMAbortCommnad; public DelegateCommand PMAbortCommnad => _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort)); private DelegateCommand _GasCommand; public DelegateCommand GasCommand => _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas)); private DelegateCommand _HeCommand; public DelegateCommand HeCommand => _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe)); private DelegateCommand _RfCommand; public DelegateCommand RfCommand => _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf)); private DelegateCommand _PurgeCommand; public DelegateCommand PurgeCommand => _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge)); private DelegateCommand _VentCommand; public DelegateCommand VentCommand => _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent)); private DelegateCommand _PumpCommand; public DelegateCommand PumpCommand => _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump)); private DelegateCommand _OpenPumpCommand; public DelegateCommand OpenPumpCommand => _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump)); private DelegateCommand _ClosePumpCommand; public DelegateCommand ClosePumpCommand => _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump)); private DelegateCommand _OpenTurboPumpCommand; public DelegateCommand OpenTurboPumpCommand => _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump)); private DelegateCommand _CloseTurboPumpCommand; public DelegateCommand CloseTurboPumpCommand => _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump)); private DelegateCommand _OpenPendulumValveCommand; public DelegateCommand OpenPendulumValveCommand => _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve)); private DelegateCommand _ClosePendulumValveCommand; public DelegateCommand ClosePendulumValveCommand => _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve)); private DelegateCommand _PinUpDownCommand; public DelegateCommand PinUpDownCommand => _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand(OnPinUpDown)); private DelegateCommand _LidUpDownCommand; public DelegateCommand LidUpDownCommand => _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand(OnLidUpDown)); private DelegateCommand _SetSRfCommand; public DelegateCommand SetSRfCommand => _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf)); private DelegateCommand _SetBRfCommand; public DelegateCommand SetBRfCommand => _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf)); private DelegateCommand _OpenButterflyValveViewCommand; public DelegateCommand OpenButterflyValveViewCommand => _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView)); //private DelegateCommand _HVCommand; //public DelegateCommand HVCommand => // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV)); //private DelegateCommand _HVSetCommand; //public DelegateCommand HVSetCommand => // _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet)); private DelegateCommand _LoadRecipeCommand; public DelegateCommand LoadRecipeCommand => _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe)); private DelegateCommand _ControlValveCommand; public DelegateCommand ControlValveCommand => _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand(OnControlValve)); private DelegateCommand _RunRecipeCommand; public DelegateCommand RunRecipeCommand => _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand(OnRunRecipe)); private DelegateCommand _SetChillerTempCommand; public DelegateCommand SetChillerTempCommand => _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp)); private DelegateCommand _OnOffChillerCommand; public DelegateCommand OnOffChillerCommand => _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller)); private DelegateCommand _HeaterCommand; public DelegateCommand HeaterCommand => _HeaterCommand ?? (_HeaterCommand = new DelegateCommand(OnHeater)); private DelegateCommand _EndStepCommand; public DelegateCommand EndStepCommand => _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep)); private DelegateCommand _OnlineCommand; public DelegateCommand OnlineCommand => _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline)); private DelegateCommand _OfflineCommand; public DelegateCommand OfflineCommand => _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline)); private DelegateCommand _AbortRecipeCommnad; public DelegateCommand AbortRecipeCommnad => _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand(OnAbortRecipe)); private DelegateCommand _IncludeCommand; public DelegateCommand IncludeCommand => _IncludeCommand ?? (_IncludeCommand = new DelegateCommand(OnInclude)); private DelegateCommand _SwitchTypeCommand; public DelegateCommand SwitchTypeCommand => _SwitchTypeCommand ?? (_SwitchTypeCommand = new DelegateCommand(OnSwitchType)); #endregion #region 构造函数 public OverKepler2300ViewModel() { m_RtDataKeys = new List(); m_IsATM = true; ModuleName = "PMA"; //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList(); DispatcherTimer timer = new DispatcherTimer(); timer.Interval = TimeSpan.FromSeconds(0.5); timer.Tick += timer_Tick; timer.Start(); } #endregion #region 命令方法 private void OnControlValve(object obj) { CommonValveControl commonValveControl = (CommonValveControl)obj; if (commonValveControl.IsCanEdit == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status); string operation = commonValveControl.Status ? "关闭" : "打开"; LOG.Info($"{ModuleName},{operation}{((ValveType)Convert.ToInt32(commonValveControl.Tag.ToString())).ToString()}阀"); } } private void OnPMInit() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home"); } private async void OnGas() { await Task.Run(async () => { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint); await Task.Delay(1000); object[] mfc = new object[8]; string[] mfcSetPoint = new string[8]; mfc[0] = MFC1Data.SetPoint; mfc[1] = MFC2Data.SetPoint; mfc[2] = MFC3Data.SetPoint; mfc[3] = MFC4Data.SetPoint; mfc[4] = MFC5Data.SetPoint; mfc[5] = MFC6Data.SetPoint; mfc[6] = MFC7Data.SetPoint; mfc[7] = MFC8Data.SetPoint; InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc); string operation = GasIsFlowing ? "关闭" : "打开"; LOG.Info($"{ModuleName},{operation}GasFlow({mfc[0]},{mfc[1]},{mfc[2]},{mfc[3]},{mfc[4]},{mfc[5]},{mfc[6]},{mfc[7]})"); }); } private void OnHe() { if (PVHe1ValveIsOpen == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0); } else { if (HeIsPressureMode) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint); } } } private void OnRf() { if (PMCurrentState == PMState.RfPowering) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}"); } } private void OnPurge() { if (PMCurrentState == PMState.Purging) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge"); } } private void OnVent() { if (PMCurrentState == PMState.Venting) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent"); } } private void OnPump() { if (PMCurrentState == PMState.Pumping) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); return; } string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString(); string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString(); // 设置底压 double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint); if (basePressure <= 0.01 || basePressure >= 1000) { MessageBox.Show($"基准压力设定值 {basePressure} 无效，应该在0到1000毫托之间"); return; } double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint); if (pumpLimit <= 0.01 || pumpLimit >= 1200) { MessageBox.Show($"抽气时间应该在0到1200之间，当前设定值{pumpLimit}"); return; } InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString()); InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString()); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump"); } private void OnOpenPump() { if (PMCurrentState == PMState.LaunchingPump) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); return; } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump"); } private void OnClosePump() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump"); } private void OnOpenTurboPump() { if (PMCurrentState == PMState.LaunchingTurboPump) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}"); return; } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump"); } private void OnCloseTurboPump() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump"); } private void OnOpenPendulumValve() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true); } private void OnClosePendulumValve() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false); } private void OnPinUpDown(object upDown) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown)); } private void OnLidUpDown(object upDown) { //var value = (bool)upDown; if (upDown.ToString() == "Up") { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}"); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}"); } } private void OnSetSRf() { if (SRFData.IsRfOn == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto"); } } private void OnSetBRf() { if (BRFData.IsRfOn == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false); } else { if (GasIsFlowing == true) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto"); } } } private void OnPMAbort() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort"); } private void OnOpenButterflyValveView() { var _mainWindow = Application.Current.Windows.Cast().FirstOrDefault(window => window is Window) as Window; if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false) { butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString()); butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual; butterflyValveMessageBox.Left = 700; butterflyValveMessageBox.Top = 600; butterflyValveMessageBox.Show(); butterflyValveMessageBox.Owner = _mainWindow; } } private void OnLoadRecipe() { string recipeType = SelectedRecipeType.Content.ToString(); CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType)).ToList(); } //private void OnHVSet() //{ // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage); //} private void OnSwitchType() { SelectedRecipeIndex = -1; } private void OnRunRecipe(object obj) { if (SelectedRecipeIndex == -1) { return; } string recipeName = CurrentModuleRecipes[SelectedRecipeIndex]; string recipeType = SelectedRecipeType.Content.ToString(); ClearData(); var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeType, recipeName + ".rcp"); CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath)); InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, recipeType); LOG.Info($"{ModuleName},Run Recipe {recipeName},"); } private void OnSetChillerTemp(object obj) { float offset; float setPoint; var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString()); switch (chillerType) { case ChillerType.Chiller: var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString()); float.TryParse(value, out offset); setPoint = ChillerTempSetpoint; break; case ChillerType.InnerChiller: var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString()); float.TryParse(Innervalue, out offset); setPoint = InnerChillerTempSetpoint; break; case ChillerType.OuterChiller: var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString()); float.TryParse(Outervalue, out offset); setPoint = OuterChillerTempSetpoint; break; case ChillerType.TopChiller: var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString()); float.TryParse(Topvalue, out offset); setPoint = TopChillerTempSetpoint; break; default: return; } InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset); } private void OnOffChiller(object obj) { var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString()); switch (chillerType) { case ChillerType.Chiller: InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn); break; case ChillerType.InnerChiller: InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn); break; case ChillerType.OuterChiller: InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn); break; case ChillerType.TopChiller: InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn); break; default: return; } } private void OnHeater(object obj) { if (IsAutoMode == true) { return; } AITHeaterData heaterData = obj as AITHeaterData; var _mainWindow = Application.Current.Windows.Cast().FirstOrDefault(window => window is Window) as Window; if (heaterView == null || heaterView.IsVisible == false) { heaterView = new HeaterView(heaterData, ModuleName); heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen; heaterView.Owner = _mainWindow; heaterView.Show(); } } private void OnEndStep() { //if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount) //{ // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep"); //} //else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount) //{ // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort"); //} if (CurrentRecipeResult?.RecipeStepNumber != null) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep"); } } private void OnOnline() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}"); } private void OnOffline() { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}"); } private async void OnAbortRecipe(object obj) { if (PMCurrentState != PMState.Processing) { return; } switch (obj.ToString()) { case "0": InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort"); break; case "1": InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort"); //if (ESCHVData.IsOn == true) //{ // await Task.Delay(3000); // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false); //} break; case "2": InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort"); await Task.Delay(3000); InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0); break; } } private void OnInclude() { if (IsInclude) { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Include}"); } else { InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Exclude}"); } } #endregion #region 私有方法 private void ClearData() { ESCVoltage = 0; SRFFwdPowerSetpoint = 0; SRFMatchC1 = 0; SRFMatchC2 = 0; BRFFwdPowerSetpoint = 0; BRFMatchC1 = 0; BRFMatchC2 = 0; HeGasSetpoint = 0; MFC1SetPoint = 0; MFC2SetPoint = 0; MFC3SetPoint = 0; MFC4SetPoint = 0; MFC5SetPoint = 0; MFC6SetPoint = 0; MFC7SetPoint = 0; MFC8SetPoint = 0; } private IEnumerable GetFilesNames(string path) { if (Directory.Exists(path)) { return Directory.GetFiles(path, "*.rcp")? .Select(Path.GetFileNameWithoutExtension); } else { return new List(); } } void timer_Tick(object sender, EventArgs e) { RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys); if (RtDataValues == null) { return; } TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint")); PVN21ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen"); GasFinalValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen"); PV11ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen"); PV12ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen"); PV21ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen"); PV22ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen"); PV31ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen"); PV32ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen"); PV41ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen"); PV42ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen"); MFC1ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen"); MFC2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen"); MFC3ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen"); MFC4ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen"); MFC5ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen"); MFC6ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen"); MFC7ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen"); MFC8ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen"); N2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveN2.IsOpen"); SoftPumpValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen"); FastPumpValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen"); GuageValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen"); PVHe1ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen"); PVHe2ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen"); PVN21ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen"); PVN22ValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen"); TurboPumpPumpingValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen"); TurboPumpPurgeValveIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen"); WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : ""; PumpIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.PumpIsRunning"); TurboIsOpen = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.TurboPumpIsRunning"); LiftPinIsUp = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.LiftPinIsUp"); IsSlitDoorClosed = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsSlitDoorClosed"); IsLidClosed = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsLidClosed"); PendulumValvePosition = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.GetPVPosition"); TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString()); PositionValue = -((int)((PendulumValvePosition) * 0.09)); PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString()); GasIsFlowing = PMCurrentState == PMState.GasFlowing; IsProcessing = PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean; MFC1Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas1"); MFC2Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas2"); MFC3Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas3"); MFC4Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas4"); MFC5Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas5"); MFC6Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas6"); MFC7Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas7"); MFC8Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcGas8"); MFCHeData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcHe"); MFCN2Data = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.MfcN2"); SRFData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData"); BRFData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData"); PendulumValveData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData"); //ESCHVData= CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData"); BMatchData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.DeviceData"); SMatchData = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.DeviceData"); ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"]; ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"]; WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"]; PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"]; ChamberPressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ChamberPressure"); ProcessPressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ProcessPressure"); ForelinePressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ForelinePressure"); ESCHePressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ESCHePressure"); //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString()); InnerTemperature = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ChillerInnerTemp"); OuterTemperature = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ChillerOuterTemp"); TopTemperature = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ChillerTopTemp"); InnerChillerIsOn = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.InnerChiller.IsOn"); OuterChillerIsOn = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.OuterChiller.IsOn"); TopChillerIsOn = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.TopChiller.IsOn"); SourceRFFanInterlock = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.SourceRFFanInterlock"); IsWLK = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsWLK"); IsWaterFlowOk = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsWaterFlowOk"); IsTurboPumpInterlock = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock"); IsCDAOK = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsCDA_OK"); SensorGasBoxDoor = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value"); SensorGasBoxPressure = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value"); IsATM = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsATM"); IsVAC = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsVAC"); ESCHVOutputVoltage = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage"); //MatchC1 = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1"); //MatchC2 = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2"); //BiasMatchC1 = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1"); //BiasMatchC2 = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2"); TurboPumpWaterFlowSwitch = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value"); IsTurboPumpAtSpeed = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed"); IsHasWafer = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.HasWafer"); if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean) { CurrentRecipeResult = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.CurrentRecipeResult"); if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber) { var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp"); CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath)); CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1]; } currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber; } //else //{ // CurrentRecipeResult = null; // CurrentRecipeStep = null; //} if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 100) { ChamberPressureFeedBack = ProcessPressure; } else { ChamberPressureFeedBack = ChamberPressure; } IsAutoMode= CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsOnline"); IsInclude = CommonFunction.GetValue(RtDataValues, $"{ModuleName}.IsInclude"); } public void addDataKeys() { m_RtDataKeys.Clear(); m_RtDataKeys.Add($"{ModuleName}.MfcGas1"); m_RtDataKeys.Add($"{ModuleName}.MfcGas2"); m_RtDataKeys.Add($"{ModuleName}.MfcGas3"); m_RtDataKeys.Add($"{ModuleName}.MfcGas4"); m_RtDataKeys.Add($"{ModuleName}.MfcGas5"); m_RtDataKeys.Add($"{ModuleName}.MfcGas6"); m_RtDataKeys.Add($"{ModuleName}.MfcGas7"); m_RtDataKeys.Add($"{ModuleName}.MfcGas8"); m_RtDataKeys.Add($"{ModuleName}.MfcHe"); m_RtDataKeys.Add($"{ModuleName}.MfcN2"); m_RtDataKeys.Add($"{ModuleName}.ForelinePressure"); m_RtDataKeys.Add($"{ModuleName}.ChamberPressure"); m_RtDataKeys.Add($"{ModuleName}.ProcessPressure"); m_RtDataKeys.Add($"{ModuleName}.ChamberPressure"); m_RtDataKeys.Add($"{ModuleName}.ESCHePressure"); m_RtDataKeys.Add($"{ModuleName}.IsATM"); m_RtDataKeys.Add($"{ModuleName}.IsVAC"); m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp"); m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen"); m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning"); m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning"); m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed"); m_RtDataKeys.Add($"{ModuleName}.IsLidClosed"); m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData"); //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1"); //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2"); // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode"); //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1"); //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2"); m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData"); //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed"); m_RtDataKeys.Add($"{ModuleName}.GetPVPosition"); m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk"); m_RtDataKeys.Add($"{ModuleName}.IsWLK"); m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK"); m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock"); m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock"); m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value"); m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value"); m_RtDataKeys.Add($"{ModuleName}.InnerChiller.IsOn"); m_RtDataKeys.Add($"{ModuleName}.OuterChiller.IsOn"); m_RtDataKeys.Add($"{ModuleName}.TopChiller.IsOn"); m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.DeviceData"); m_RtDataKeys.Add($"{ModuleName}.FsmState"); m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed"); m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value"); m_RtDataKeys.Add($"{ModuleName}.HasWafer"); m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult"); m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp"); m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp"); m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp"); m_RtDataKeys.Add($"{ModuleName}.IsOnline"); m_RtDataKeys.Add($"{ModuleName}.IsInclude"); } #endregion } }