using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using MECF.Framework.Common.Communications; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.ModuleLibrary.VceModules; using System; using System.Collections.Generic; using System.IO.Ports; using System.Linq; using System.Text; using System.Text.RegularExpressions; using System.Threading.Tasks; using Venus_Core; using Venus_RT.Devices.EFEM; using Venus_RT.Devices.TM; namespace Venus_RT.Devices.VCE { //定义Vce动作 public enum VceCommand { Home, DoorClose, DoorOpen, CheckGoto, Goto, GotoLP, CheckStatus, Load, UnLoad, Map, ReadMap, ClearError, } public enum VceMessageHead { Action, Read, Set, Petrify } public sealed class VceMessage { private Dictionary _Command2Msg = new Dictionary() { //Action {VceCommand.Home, "HM" }, {VceCommand.Load, "LOAD" }, {VceCommand.UnLoad, "UNLOAD"}, {VceCommand.Map, "MP" }, {VceCommand.CheckGoto, "GC" }, {VceCommand.Goto, "GO" }, {VceCommand.GotoLP, "LP" }, {VceCommand.DoorOpen, "DO" }, {VceCommand.DoorClose, "DC" }, {VceCommand.CheckStatus,"OS" }, //Read {VceCommand.ReadMap, "MI" }, //Set {VceCommand.ClearError, "ER" }, }; private Dictionary _Type2Head = new Dictionary() { {VceMessageHead.Action, "A"}, {VceMessageHead.Read, "R"}, {VceMessageHead.Set, "S"}, {VceMessageHead.Petrify, "P"}, }; public VceMessageHead Head { get; set; } public VceCommand Command { get; set; } public string Param { get; set; } public string toString() { if (string.IsNullOrEmpty(Param))//含尾参 return $"00,{_Type2Head[Head]},{_Command2Msg[Command]}"; else//不含尾参 目前只允许一个 return $"00,{_Type2Head[Head]},{_Command2Msg[Command]},{Param}"; } } /// /// 泓浒Vce驱动 下发指令等 /// public class HongHuVce : VCEModuleBase { #region 私有变量 private AsyncSerialPort _serialport; private string _portname; private string _newline = "\r";//终止符 0D private object _locker = new object(); private bool _IsAsciiMode; private LinkedList _lstAsciiMsgs = new LinkedList(); private PeriodicJob _thread; private Regex _match_ReadMsg = new Regex(@"\d\d,X,.*"); private Regex _matchErrorCode = new Regex(@"(?<=_BKGERR )(.*)"); private ModuleName _moduleName; private RState _status; private string _currentMsg; private VceMessage _currentVceMessage; private bool _HasReceiveMsg; private bool _IsDashWaferError; private int _currentSlot = 0; public override int CurrentSlot => _currentSlot; private ModuleName _baseLPIndex => _moduleName == ModuleName.VCEA ? ModuleName.LP1 : ModuleName.LP2; private Loadport[] _LPMs = new Loadport[1]; public override ILoadport this[ModuleName mod] { get { if (!ModuleHelper.IsLoadPort(mod)) throw new ApplicationException($"{mod} is NOT Loadport"); return _LPMs[mod - _baseLPIndex]; } } //待补充 private Dictionary _ErrorCode2Reason = new Dictionary() { {"A1","Action Timeout" }, {"A3","Hardware (CAN or VCN) or configuration failed" }, {"A4","Open Door Prevented Motion" }, {"A5","Platform Action Time-out" }, {"A6","Door Action Timeout" }, {"A7","由于动作连锁导致的异常" }, {"A8","Wafer Slideout" }, {"A9","Door safety LED is blocked" }, {"A11","载台上没有料盒,看一下载台上是否有料盒" }, {"A12","Cassette present prior PICK" }, {"A13","Cassette NOT present during PICK" }, {"A14","Cassette NOT present prior PLACE" }, {"A15","Cassette present after PLACE" }, {"A16","Cassette Present on VCE platform (Servo Arm)" }, {"A17","No new cassette at station after Load" }, {"A18","Proximity sensor blocked but Cassette A not present" }, {"A19","载台上料盒没有取走,请把料盒取走" }, {"A20","Proximity sensor A is blocked (Fixed Buffer)" }, {"A21","Cassette NOT at station A" }, {"A34","Door Clamped sensor is not ON after clamp (only VCE4!)" }, {"A36","Door Not Covered (sensor)" }, {"C0","Illegal Slot Number" }, {"C1","设备收到非法的操作指令" }, {"C2","Illegal pitch value (too big)" }, {"C3","Illegal Cassette type offset" }, {"C4","Illegal number of Slots" }, {"C5","Illegal Partial step size" }, {"C7","Illegal Find Bias" }, {"C8","Unknown Configuration" }, {"C9","Bad command: command cannot be executed with current HW configuration" }, {"C10","VCE is busy" }, {"C12","Bad Fixture Thickness" }, {"C13","Command is NOT executable (file's operation exception)" }, {"C19","VCEConfig.xml is corrupted" }, {"C20","VCEDefaultSettting.xml is corrupted" }, {"CAN1","CAN Error,Replace the board (MCC2B or MCC-GEN5 or MCC-GEN5 EN)" }, {"CAN2","CAN Abort,Replace the board (MCC2B or MCC-GEN5 or MCC-GEN5 EN)" }, {"CAN3","CAN Timeout,Replace the board (MCC2B or MCC-GEN5 or MCC-GEN5 EN)" }, {"H1","Two hand safety switch are not OFF before R-axis motion" }, {"H2","Two hands safety switch timeout" }, {"H3","One or both safety switches are release before R-axis motion is complete" }, {"M0","VCE is NOT Referenced" }, {"M1","Motion Timeout" }, {"M4","Door over speed" }, {"M10","设备中断,设备被外部停止" }, {"M11","FET over Temperature" }, {"M12","FET over Current" }, {"M13","Torque Limit" }, {"M14","Hard Track Error Codes" }, {"M16","Hardware (servo) Motion Error Codes" }, {"M17","Safety Motion Button was Pushed" }, {"M20","Z-brake request before ENABLE_Z_MOVE" }, {"M21","CPLD Detected a difference from the Dual Up Sensors" }, {"M22","Door Closed Error" }, {"M23","Z-brake chip U8 has an output fault" }, {"M24","Unsafe to move: See a safety node (ENABLE_Z_MOVE) or servo following error" }, {"M25","Servo Following Error" }, {"NO_ACT","No actions" }, {"P2","Map NOT Available" }, {"P3","SPS Excessive Offset" }, {"P4","SPS Excessive Thickness" }, {"P12","FB is too large to map" }, {"P13","FB is too small to map" }, {"R1","R-axis is not referenced" }, {"R2","Extended position is NOT defined" }, {"R3","Door NOT Opened" }, {"R4","Wrong Z-axis position: platform must be between UP and DOWN position" }, {"R5","R-axis Limit is exceeded" }, {"R6","R-axis is NOT Homed (it is not IN)" }, {"R7","R-axis Orientation is NOT set" }, {"R9","R-axis is NOT Extended" }, {"S0","Cannot configure Main VCN" }, {"S1","Cannot configure R-axis VCN" }, {"S4","Command String Error: Bad command or parameter, invalid value, etc." }, {"S5","Illegal data entry" }, {"S10","VCEDefaultSetting.XML file is corrupted. Configuration stop" }, {"S11","Not valid for current configuration" }, {"S20","MiscOutput is already in use" }, {"S21","MiscOutput is used by current configuration" }, {"S22","MiscOutput was deleted: it is used by current configuration" }, {"T5","VCN timeout" }, {"U1","USB not found or ‘Upgrade’ directory doesn’t exist" }, {"U2","Script file couldn't be opened" }, {"U3","Script file not found" }, {"U4","File from the list is not found" }, {"U5","Couldn’t create ‘Upgrade’ directory" }, {"U6","Couldn’t copy files" }, {"U10"," upgrade.txt file is missing" }, {"V2","Cannot disable VCN" }, {"230","Robot Extended" }, {"231","Front buffer extended" }, {"232","Valve drive fault" }, {"236","Door Safety LED is broken" }, {"250","FET Q10 is open circuit" }, {"251","FET Q10 is shorted" }, {"260","Atmospheric Robot is Extended" }, {"261","ERGO Obstructs the Door" }, {"262","Door drive fault" }, {"263","Vacuum Robot is Extended" }, {"264","User Misc Output Drive Fault" }, {"265","Safety Hub Output Fault" }, {"306","Illegal command ID number" }, {"309","Command ID is not supported in thatCOMM FLOW" }, {"390","Invalid Checksum" }, {"414","Command ID in use" }, {"673","GEN5 EN: inputs are in ERROR state" }, {"674","GEN5 EN: inputs are in HALT state" }, {"675","GEN5 EN: inputs are in illegal transition" }, {"L13","由于检测到突片,动作被禁止" }, {"L14","防夹光栅报警,检查舱门关闭路径上是否存在遮挡" }, {"K114","防夹光栅报警" }, {"K115","舱门上限报警" }, {"K116","舱门下限报警 " }, {"K117","急停报警 " }, {"K118","位置未被引用,对设备进行初始化" }, {"K119","Z 轴报警" }, {"K120","R 轴报警 " }, {"K121","Z 轴超限位报警" }, {"K122","机械手不在安全位" }, {"K123","Z 轴未使能" }, {"K124","R 轴未使能" }, {"K125","盒子状态互锁报警" }, {"K158","左凸片" }, {"K159","右凸片" }, {"K160","门没有关好" }, {"K161","盖板缺失" }, {"K162","R轴不在原位" }, {"K163","Z轴不在上下料位" }, {"K164","门未打开" }, }; // #endregion #region 暴露变量 public override bool IsConnected => _serialport.IsOpen(); public override RState Status => _status; public override bool IsReady => _status == RState.Init || _status == RState.End; public override bool IsError => _status == RState.Failed || _status == RState.Timeout; public override bool IsInit => _status == RState.Init; public override bool IsDashWaferError => _IsDashWaferError; private string[] _slotMap = new string[25]; public string SlotMap { get { WaferInfo[] wafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(Name)); string slot = ""; for (int i = 0; i < 25; i++) { slot += wafers[i].IsEmpty ? "0" : "1"; } return slot; } } private bool _OutDoorIsOpen { get { switch (_moduleName) { case ModuleName.VCE1: //2024-05-20 16:35:34 泓浒四边形硬件还未实现 //DEVICE.GetDevice("SETM").VCEACassPresent return true; case ModuleName.VCEA: if (DEVICE.GetDevice("DETM").VCEACassPresent) { _LPMs[0].HasCassette = true; } else { _LPMs[0].HasCassette = false; WaferManager.Instance.DeleteWafer(_LPMs[0].Module, 0, 25); } return !DEVICE.GetDevice("DETM").VCEALOCKED; case ModuleName.VCEB: if (DEVICE.GetDevice("DETM").VCEBCassPresent) { _LPMs[0].HasCassette = true; } else { _LPMs[0].HasCassette = false; WaferManager.Instance.DeleteWafer(_LPMs[0].Module, 0, 25); } return !DEVICE.GetDevice("DETM").VCEBLOCKED; default: return false; } } } public override bool OutDoorIsOpen => _OutDoorIsOpen; private bool _hasProtrusion { get { switch (_moduleName) { case ModuleName.VCE1: //2024-05-20 16:35:34 泓浒四边形硬件还未实现 //DEVICE.GetDevice("SETM").VCEProtrusion return true; case ModuleName.VCEA: if (DEVICE.GetDevice("DETM").VCEAProtrusion) { _LPMs[0].Protrusion = true; return true; } else { _LPMs[0].Protrusion = false; return false; } case ModuleName.VCEB: if (DEVICE.GetDevice("DETM").VCEBProtrusion) { _LPMs[0].Protrusion = true; return true; } else { _LPMs[0].Protrusion = false; return false; } default: return false; } } } #endregion //传入slot数量 public HongHuVce(int slot, ModuleName moduleName) : base(slot, moduleName) { _moduleName = moduleName; _IsAsciiMode = true; _portname = SC.GetStringValue($"{moduleName}.Port"); _serialport = new AsyncSerialPort(_portname, 9600, 8, Parity.None, StopBits.One, _newline, _IsAsciiMode); _serialport.Open(); _status = RState.Init; _serialport.OnDataChanged += onDataChange; _thread = new PeriodicJob(50, fnTimer, _moduleName.ToString(), true); if(moduleName == ModuleName.VCE1) _LPMs[0] = new Loadport(ModuleName.LP1); else _LPMs[0] = new Loadport((moduleName - ModuleName.VCEA) + ModuleName.LP1); CarrierManager.Instance.DeleteCarrier(_LPMs[0].Module.ToString()); WaferManager.Instance.DeleteWafer(_LPMs[0].Module, 0, 25); CarrierManager.Instance.SubscribeLocation(_LPMs[0].Module.ToString(), 1); Action _subscribeLoc = (ModuleName module, int waferCount) => { if (ModuleHelper.IsInstalled(module)) { WaferManager.Instance.SubscribeLocation(module, waferCount); } }; _subscribeLoc(_LPMs[0].Module, slot); } /// /// 对处理过的数据list进行处理 /// 将每条数据进行解析 /// /// private bool fnTimer() { lock (_locker) { //采用ascii传输 if (_IsAsciiMode) { //有数据尚未处理 while (_lstAsciiMsgs.Count > 0) { string _needHandle = _lstAsciiMsgs.First.Value; HandleSingleMsg(_needHandle); _lstAsciiMsgs.RemoveFirst(); } } //采用binary else { } } return true; } /// /// 处理单条信息的函数 /// 1、判断结束 2、判断错误 /// /// 需要处理的单条回复 private void HandleSingleMsg(string rawmsgs) { string[] msgs = rawmsgs.Split('\r'); foreach (var Msg in msgs) { string msg = Msg.Trim(); LOG.Write(eEvent.EV_VCE_COMMON_INFO, _moduleName, $"{_moduleName} Receive msg=>{msg}"); if (!string.IsNullOrEmpty(msg)) { //action set petrify _BKGRDY结束 switch (_currentVceMessage.Head) { case VceMessageHead.Action: case VceMessageHead.Set: case VceMessageHead.Petrify: switch (msg) { //设备收到 开始运行 目前状态在下发 case "_RDY": LOG.Write(eEvent.EV_VCE_COMMON_INFO, _moduleName, $"vce start {_currentVceMessage.Head}"); break; //设备执行完毕 case "_BKGRDY": LOG.Write(eEvent.EV_VCE_COMMON_INFO, _moduleName, $"vce {_currentVceMessage.Head} over"); switch (_currentVceMessage.Command) { case VceCommand.Home: case VceCommand.Map: case VceCommand.GotoLP: _currentSlot = 0; break; } _status = RState.End; break; //异常处理 default: _status = RState.Failed; string reason; Errorhandle(msg, out reason); LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, reason); break; } break; case VceMessageHead.Read: //如果收到的信息符合 if (_match_ReadMsg.IsMatch(msg)) { //收到消息 用于结束 _HasReceiveMsg = true; switch (_currentVceMessage.Command) { //处理wafer 信息为map数据 case VceCommand.ReadMap: ReadMapData(msg); break; case VceCommand.CheckStatus: ReadStatus(msg); break; } } //_RDY查询结束 else { if (msg == "_RDY") { if (_HasReceiveMsg) { _status = RState.End; } else { LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Read Message is over but not receive msg! raw message:{_currentMsg}"); _status = RState.Failed; } } else { _status = RState.Failed; LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Read Message is invalid: receive message {msg} and send message {_currentMsg}"); } } break; } } } } private void ReadStatus(string msg) { try { //BRa,SLbb,CPc,WPd,ERe string[] status = msg.Split(','); _currentSlot = Convert.ToInt32(status[4].Substring(2, 2)); } catch (Exception ex) { LOG.Write(eEvent.ERR_VCE_COMMON_Failed,_moduleName, $"illegal msg:{msg}, {ex.Message}"); } } private void ReadMapData(string msg) { string waferinfo = ""; string[] waferitems = msg.Split(','); //智能模式 可以识别叠片 for (int i = 3; i < waferitems.Length - 1; ++i) { //如果包含只需要逐个检查 if (waferitems[i].Contains('?')) { foreach (char j in waferitems[i]) { if (waferinfo.Length >= 25) break; else waferinfo += j; } } else waferinfo += waferitems[i]; } for (int i = 0; i < waferinfo.Length; ++i) { int slotnum = i; if (slotnum < 25) { switch (waferinfo[i]) { case '0': WaferManager.Instance.DeleteWafer(_LPMs[0].Module, slotnum); break; case 'X': WaferManager.Instance.CreateWafer(_LPMs[0].Module, slotnum, WaferStatus.Normal); break; case 'C': LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Slot {i+1}:double or dummy wafer."); WaferManager.Instance.CreateWafer(_LPMs[0].Module, slotnum, WaferStatus.Double); break; case '?': LOG.Write(eEvent.ERR_VCE_COMMON_Failed, _moduleName, $"Slot {i + 1}:Crossed wafer."); WaferManager.Instance.CreateWafer(_LPMs[0].Module, slotnum, WaferStatus.Crossed); break; } } } _LPMs[0].IsMapped = true; } private void Errorhandle(string msg,out string reason) { if (_matchErrorCode.IsMatch(msg)) { //若是匹配 //包含原因 string errorcode = _matchErrorCode.Match(msg).Value; if (_ErrorCode2Reason.ContainsKey(errorcode)) { if(errorcode == "L13") _IsDashWaferError = true; reason = _ErrorCode2Reason[errorcode]; } else { reason = "未找到相关Error Code"; } } else { //若不匹配 reason = "回复消息不符合标准格式"; } } /// /// 处理新到的数据 /// 利用linkedlist处理拆包 粘包情况 /// /// 新到数据 private void onDataChange(string oneLineMessage) { lock (_locker) { if (string.IsNullOrEmpty(_newline))//没有CR { _lstAsciiMsgs.AddLast(oneLineMessage);//将消息添加到最后 return; } string[] array = oneLineMessage.Split(_newline.ToCharArray());//按照cr分开通讯数据 foreach (string text in array) { if (!string.IsNullOrEmpty(text)) { _lstAsciiMsgs.AddLast(text + _newline);//存进list中等待处理 } } } } public override bool HomeALL() { _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Home ,Param = "ALL" }; _currentMsg = _currentVceMessage.toString() + _newline ; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool Home(string axis) { _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Home, Param = axis }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool CheckStatus() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Read, Command = VceCommand.CheckStatus }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool CloseDoor() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.DoorClose }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } /// /// 开门提示 /// 在honghuVCE中没有ATM信号的内部卡控 可能会导致开门的压差 /// 因此每一次都要增加判断,只要引用此处功能的,前面都需要有判断 /// /// /// public override bool OpenDoor() { //如果其他指令正在执行 且 //if (!CheckVceStatus()) // return false; if (_IsDashWaferError) _IsDashWaferError = false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.DoorOpen }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool Load() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Load }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool UnLoad() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.UnLoad }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool Map() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Map }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool ReadMap() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Read, Command = VceCommand.ReadMap, Param = "S" }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; _HasReceiveMsg = false; return _serialport.Write(_currentMsg); } public override bool Goto(int Targetslot) { if (!CheckVceStatus()) return false; LOG.Write(eEvent.EV_VCE_COMMON_INFO,_moduleName, $"SlotNum:{Targetslot}"); _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.Goto, Param = (Targetslot+1).ToString().PadLeft(2,'0') }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool GotoLP() { if (!CheckVceStatus()) return false; _currentVceMessage = new VceMessage { Head = VceMessageHead.Action, Command = VceCommand.GotoLP }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } public override bool ClearError() { _currentVceMessage = new VceMessage { Head = VceMessageHead.Set, Command = VceCommand.ClearError }; _currentMsg = _currentVceMessage.toString() + _newline; _status = RState.Running; return _serialport.Write(_currentMsg); } } }