//using Aitex.Core.RT.Routine; //using Aitex.Core.RT.SCCore; //using Venus_RT.Devices; //using MECF.Framework.Common.Routine; //using Venus_Core; //namespace Venus_RT.Modules.PMs //{ // class LoadLockLeakCheckRoutine : PMRoutineBase, IRoutine // { // private enum LeakCheckStep // { // kCloseValves, // kPumpToBasePressure, // kPumpingDelay, // kLeakCheckDelay, // kLeakCheckCalc, // kPumpToBasePressure_2, // kEnd, // } // public double LeakRate { get; private set; } // private int _basePressureLL = 100; // private int _leakcheckPumpTimeLL = 180; // private int _leakcheckWaitTimeLL = 300; // private double _startPressure = 0; // private double _endPressure = 0; // private double _leakRate = 30.0; // public LoadLockLeakCheckRoutine(JetPMBase chamber) : base(chamber) // { // Name = "Loadlock Leakcheck"; // } // public RState Start(params object[] objs) // { // if (CheckLidLoadLock() && // CheckSlitDoor() && // CheckDryPump()) // { // Reset(); // _chamber.CloseValves(); // _basePressureLL = SC.GetValue($"{Module}.Pump.LoadLockPumpBasePressure"); // _leakcheckPumpTimeLL = SC.GetValue($"{Module}.Pump.LoadLockLeakCheckPumpTime"); // _leakcheckWaitTimeLL = SC.GetValue($"{Module}.Pump.LoadLockLeakCheckWaitTime"); // _leakRate = SC.GetValue($"{Module}.Pump.LoadLockLeakRate"); // return Runner.Start(Module, Name); // } // return RState.Failed; // } // public RState Monitor() // { // Runner.Delay(LeakCheckStep.kCloseValves, _delay_1s) // .Run(LeakCheckStep.kPumpToBasePressure, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure <= _basePressureLL; }) // .Delay(LeakCheckStep.kPumpingDelay, _leakcheckPumpTimeLL * 1000) // .Run(LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckWaitTimeLL * 1000) // .Run(LeakCheckStep.kLeakCheckCalc, CalcLeakCheckResult, _delay_50ms) // .Run(LeakCheckStep.kPumpToBasePressure_2, HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true), () => { return _chamber.LoadlockPressure <= _basePressureLL; }) // .End(LeakCheckStep.kEnd, LeakCheckEnd, _delay_50ms); // return Runner.Status; // } // public void Abort() // { // CloseAllValves(); // } // bool StartLeakCheck() // { // _chamber.OpenValve(ValveType.LoadlockPumping, false); // _startPressure = _chamber.LoadlockPressure; // Notify($"LoadLock压力开始值 {_startPressure} mt"); // return true; // } // bool CalcLeakCheckResult() // { // _endPressure = _chamber.LoadlockPressure; // LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckWaitTimeLL; // if(LeakRate < _leakRate) // { // Notify($"LoadLock Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min"); // } // else // { // Stop($"LoadLock Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min"); // } // return true; // } // bool LeakCheckEnd() // { // // 临时版试验机, 关Pumping Valve, 正式版保持 Pumping Valve 打开 // _chamber.OpenValve(ValveType.LoadlockPumping, false); // return true; // } // } //}