<?xml version="1.0" encoding="utf-16"?>
<DeviceModelDefine type="Kepler2200B" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<IoValves>
<IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveN2" display="N2 valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Purge1_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Purge2_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveGuage" display="Guage valve" schematicId=""
unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gauge_Valve"
diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
<IoValve id="ValvePurge" display="Purge valve" schematicId="" unit="" isNc="true"
isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve" diCloseSensor="" diOpenSensor="" />
</IoValves>
<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
<IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC1_Pressure_SW"/>
<IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC2_Pressure_SW"/>
<IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC3_Pressure_SW"/>
<IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC4_Pressure_SW"/>
<IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC5_Pressure_SW"/>
<IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC6_Pressure_SW"/>
<IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC7_Pressure_SW"/>
<IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_MFC8_Pressure_SW"/>
<IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
aiFlow="AI_Turbo_Pump_N2_Flow" aoFlow="AO_Turbo_Pump_N2_Flow_Setpoint" diOffline="" aoRange=""
diPressureAlarm="DI_PN2_Pressure_SW"/>
</IoMfcs>
<IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
<IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
<IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
<IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
<IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
<IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
<IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
<IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
<IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
<IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
</IoGasSticks>
<IoBacksideHes assembly="Venus_RT" classType="Venus_RT.Devices.IoBacksideHe">
<IoBacksideHe id="BacksideHelium" display="" mfc="MfcHe" downvalve="ValvePVHe1" aoControlMode="AO_ESC_He_Control_Mode" aoPressureSP="AO_ESC_He_Pressure_Setpoint" />
</IoBacksideHes>
<IoSensors>
<IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
<IoSensor id="SensorPMLidClosed" display="PM Lid Closed" schematicId="" unit="" di="DI_Lid_Closed" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="" alarmText="" />
<IoSensor id="SensorLoadlockATMSwitch" display="Loadlock ATM Switch" schematicId="" unit="" di="DI_Loadlock_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
infoText="" warningText="" alarmText="" />
<IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_VAC_Switch" isLowAsNormal="" textOutTrigValue="true"
infoText="" warningText="" alarmText="" />
<IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="Sensor water leak" alarmText="" />
<IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
<IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="N2 Pressure Alarm" alarmText="" />
<IoSensor id="GeneratorInterlock" display="RFG hardware interlock" schematicId="" unit="" di="DI_Source_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false"
infoText="Generator interlock" warningText="" alarmText="" />
<IoSensor id="RFMatchInterlock" display="Source RF Match" schematicId="" unit="" di="DI_Source_RF_Match_Interlock" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="" alarmText="" />
<IoSensor id="SensorSlitDoorClosed" display="Slit Door Closed" schematicId="" unit="" di="DI_Slit_Door_Close_POS" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="" alarmText="" />
<IoSensor id="TurboPumpInterlock" display="Turbo Pump Interlock" schematicId="" unit="" di="DI_Turbo_Pump_Interlock" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="" alarmText="" />
<IoSensor id="GasBoxDoorSW" display="Gas Box Door SW" schematicId="" unit="" di="DI_Gas_Box_Door_Switch" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="" alarmText="Gas Box Door SW Alarm" />
<IoSensor id="GasBoxPressureSW" display="Gas Box Pressure SW" schematicId="" unit="" di="DI_Gas_Box_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
infoText="" warningText="" alarmText="Gas Box Pressure Alarm" />
<IoSensor id="CHBWallOTSWAlarm" display="CHB Wall OT SW Alarm" schematicId="" unit="" di="DI_CHB_Wall_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true"
infoText="" warningText="" alarmText="CHB Wall OT SW Alarm" />
<IoSensor id="SensorSmallWaferInPos" display="Small Wafer in Pos" schematicId="" unit="" di="DI_Small_Wafer_In_POS" isLowAsNormal="" textOutTrigValue="true"
infoText="" warningText="" alarmText="" />
</IoSensors>
<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
<IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
aiValue="AI_Process_Pressure_2t" diGaugeFail="" scPrecision="" scOffset=""/>
<IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
aiValue="AI_Chamber_Pressure_10t"
diGaugeFail=""
scPrecision="ChamberPressureGaugePrecision"
scOffset=""/>
<IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
aiValue="AI_Foreline_Pressure_10t" diGaugeFail="DI_Chamber_Pressure_760t_Gauge_Alarm" scPrecision="" scOffset=""/>
<IoPressureMeter id="ProcessPressureHigh" display="ProcessPressureHigh" schematicId="" unit="mTorr"
aiValue="AI_Chamber_Pressure_10t" diGaugeFail="" scPrecision="" scOffset=""/>
<IoPressureMeter id="ProcessPressureLow" display="ProcessPressureLow" schematicId="" unit="mTorr"
aiValue="AI_Process_Pressure_2t" diGaugeFail="" scPrecision="" scOffset=""/>
</IoPressureMeters>
<IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
<IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
diBreakerState=""
diRunning="DI_Pump_Running"
diStart=""
diStop=""
diAlarm="DI_Pump_Alarm"
diWarning="DI_Pump_Warning"
diPumpTempAlarm=""
diN2Alarm="DI_Pump_N2_Purge_Alarm"
diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
doStart="DO_Pump_Start"
doStop="DO_Pump_Stop"
doWaterFlowAlarm=""
doN2PressureAlarm=""
aiWaterFlow=""
aiN2Pressure=""
aoN2PressureAlarmMaxValue=""
aoN2PressureAlarmMinValue=""
aoWaterFlowAlarmMaxValue=""
aoWaterFlowAlarmMinValue=""
scEnableDryPump="EnableDryPump"
scEnableWaterFlow="PumpEnableWaterFlow"
scWaterFlowMinValue="PumpWaterFlowMinValue"
scWaterFlowMaxValue="PumpWaterFlowMaxValue"
scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
scEnableN2Pressure="PumpEnableN2Pressure"
scN2PressureMinValue="PumpN2PressureMinValue"
scN2PressureMaxValue="PumpN2PressureMaxValue"
scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
</IoPumps>
<IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
<IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
diLogicProcessGasFlowing=""
scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
scIsIndependentControl="IsIndependentControl"
scIsBoostPumpInstalled="EnableBoosterPump"
scTvInstalled="EnableThrottleValve"
boost="" tv="ThrottleValve" drypump="MainPump"
pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" loadlockMeter="LoadlockGauge" processPressureHigh="ProcessPressureHigh" processPressureLow="ProcessPressureLow"/>
</IoPressureControls>
<IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
<IoHeater id="PendulumHeater" display="Pendulum Heater" schematicId="" unit="℃"
doPowerOn="DO_P_Valve_Heater_On"
diDeviation="DI_P_Valve_TC_Deviation_out_of_range"
diPowerOnFeedback="DI_P_Wall_Heater_On_FB"
diControlTcBroken="DI_P_Valve_Control_TC_Broken_Alarm"
diMonitorTcBroken="DI_P_Valve_Monitor_TC_Broken_Alarm"
aoSetPoint="AO_P_Valve_Temperature_Setpoint"
aoSetPointLimit="AO_P_Valve_Temp_Limit_Setpoint"
aiFeedback="AI_P_Valve_Control_TC_Temp"
aiMonitor=""
scSetPointLimit="PendulumHeaterSetPointLimit"
/>
</IoHeaters>
<IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
<IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
</IoHeartbeats>
<IoResets>
<IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
</IoResets>
<IoSetConfigs>
<IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
</IoSetConfigs>
<IoStatisticss>
<IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
diMonitorSignal="DI_Generator_Power_Status"
scLastPMTime="RfOnTimeLastPMTime"
scTimeFromLastPM="RfOnTimeFromLastPM"
scTimeTotal="RfOnTimeTotal"
scEnableAlarm="RfOnTimeEnableAlarm"
scPMInterval="RfOnTimePMInterval" />
<IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
diMonitorSignal="DI_Pump_Running"
scLastPMTime="PumpOnTimeLastPMTime"
scTimeFromLastPM="PumpOnTimeFromLastPM"
scTimeTotal="PumpOnTimeTotal"
scEnableAlarm="PumpOnTimeEnableAlarm"
scPMInterval="PumpOnTimePMInterval" />
</IoStatisticss>
<IoPlcDateTimes>
<IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
</IoPlcDateTimes>
<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
<IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />
</IoCylinders>
<IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
<IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="DO_Lid_Up" doOFF="DO_Lid_Down" diON="" diOFF="DI_Lid_Closed" />
</IoLids>
<IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
<IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
</IoMessages>
<IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
<IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
</IoPumpCtrls>
<IoHighTemperatureHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHighTemperatureHeater">
<IoHighTemperatureHeater id="HighTemperatureHeater" display="High Temperature Heater" schematicId="" unit="℃"
doPowerOn ="DO_CHB_M-HT_Heater_On"
diPowerOnFeedback ="DI_CHB_M-HT_Heater_On_FB"
aiTemperatureFeedback ="AI_CHB_M-HT_Control_TC_Temp"
aoTemperatureSetPoint ="AO_CHB_M-HT_Temperature_Setpoint"
diGoPosition1Feedback ="DI_Lift_Servo_Go_Position1_Complete"
doGoPosition1On ="DO_Lift_Servo_Go_Position1"
diGoPosition2Feedback ="DI_Lift_Servo_Go_Position2_Complete"
doGoPosition2On ="DO_Lift_Servo_Go_Position2"
diGoPosition3Feedback ="DI_Lift_Servo_Go_Position3_Complete"
doGoPosition3On ="DO_Lift_Servo_Go_Position3"
diGoPosition4Feedback ="DI_Lift_Servo_Go_Position4_Complete"
doGoPosition4On ="DO_Lift_Servo_Go_Position4"
diGoPosition5Feedback ="DI_Lift_Servo_Go_Position5_Complete"
doGoPosition5On ="DO_Lift_Servo_Go_Position5"
diGoOriginFeedback ="DI_Lift_Servo_with_origin"
doGoOriginOn ="DO_Lift_Servo_Origin"
aoLiftServoPosition1 ="AO_Lift_Servo_Position1"
aoLiftServoPosition2 ="AO_Lift_Servo_Position2"
aoLiftServoPosition3 ="AO_Lift_Servo_Position3"
aoLiftServoPosition4 ="AO_Lift_Servo_Position4"
aoLiftServoPosition5 ="AO_Lift_Servo_Position5"
aoOriginSearchHighSpeed ="AO_Origin_Search_High_Speed"
aoOriginSearchLowSpeed ="AO_Origin_Search_Low_Speed"
aoAbsMoveSpeed ="AO_Abs_Move_Speed"
aoMaximusMoveSpeed ="AO_Max_Move_Speed"
aoSoftDownLimit ="AO_Soft_Down_Limit"
aoSoftUpLimit ="AO_Soft_Up_Limit"
aoRate ="AO_CHB_H-HT_Power_Distribute_Percent"
/>
</IoHighTemperatureHeaters>
</DeviceModelDefine>