using MECF.Framework.Common.CommonData; using MECF.Framework.Common.DataCenter; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.OperationCenter; using OpenSEMI.ClientBase; using Prism.Commands; using Prism.Mvvm; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Windows; using System.Windows.Threading; using Venus_Core; using Venus_MainPages.Unity; using Venus_MainPages.Views; using Venus_Themes.CustomControls; using Venus_Themes.Unity; using static Venus_Themes.UserControls.EFEM; namespace Venus_MainPages.ViewModels { public class OperationOverViewModel : BindableBase { #region 私有字段 private bool m_TabIsChecked = true; private ModuleInfo m_LP1ModuleInfo; private ModuleInfo m_LP2ModuleInfo; private ModuleInfo m_LLAModuleInfo; private ModuleInfo m_LLBModuleInfo; private ModuleInfo m_LP3ModuleInfo; private ModuleInfo m_EFEMModuleInfo; private ModuleInfo m_TMModuleInfo; private WaferRobotTAction m_Robot1TAction; private WaferRobotXAction m_Robot1XAction; private WaferRobotTAction m_Robot2TAction; private WaferRobotXAction m_Robot2XAction; private WaferRobotTAction m_Robot3TAction; private WaferRobotXAction m_Robot3XAction; private WaferRobotTAction m_Robot4TAction; private WaferRobotXAction m_Robot4XAction; private RobotMoveInfo m_robotMoveInfo; private WaferInfo m_PMAWafer; private WaferInfo m_PMBWafer; private WaferInfo m_PMCWafer; private WaferInfo m_PMDWafer; private WaferInfo m_LLAWafer; private WaferInfo m_LLBWafer; private WaferInfo m_TMBladeAWafer; private WaferInfo m_TMBladeBWafer; private List m_RtDataKeys = new List(); private Dictionary m_RtDataValues; private bool m_PMAIsInstalled; private bool m_PMBIsInstalled; private bool m_PMCIsInstalled; private bool m_PMDIsInstalled; private bool m_LLAIsInstalled; private bool m_LLBIsInstalled; private bool m_TMIsInstalled; private bool m_EFEMIsInstalled; private WaferInfo m_EFEMBladeAWafer; private WaferInfo m_EFEMBladeBWafer; private WaferInfo m_Aligner1Wafer; private int m_LP1WaferCount; private int m_LP2WaferCount; private int m_LP3WaferCount; private WaferAssociationInfo _lp1WaferAssociation; private WaferAssociationInfo _lp2WaferAssociation; private WaferAssociationInfo _lp3WaferAssociation; private int m_CycledWafer; private int m_CycleCountDisplay; private RobotPosition m_CurrentRobotPosition; private WaferInfo m_BladeAWafer; private WaferInfo m_BladeBWafer; private RecipeResult m_PMARecipeResult; private RecipeResult m_PMBRecipeResult; private RecipeResult m_PMCRecipeResult; private RecipeResult m_PMDRecipeResult; private string m_ATMModeIsOn; private float m_TMPressure; private string m_RouteState; #endregion #region 属性 public bool TabIsChecked { get { return m_TabIsChecked; } set { SetProperty(ref m_TabIsChecked, value); } } public ModuleInfo LP1ModuleInfo { get { return m_LP1ModuleInfo; } set { SetProperty(ref m_LP1ModuleInfo, value); } } public ModuleInfo LLAModuleInfo { get { return m_LLAModuleInfo; } set { SetProperty(ref m_LLAModuleInfo, value); } } public ModuleInfo LLBModuleInfo { get { return m_LLBModuleInfo; } set { SetProperty(ref m_LLBModuleInfo, value); } } public ModuleInfo EFEMModuleInfo { get { return m_EFEMModuleInfo; } set { SetProperty(ref m_EFEMModuleInfo, value); } } public ModuleInfo TMModuleInfo { get { return m_TMModuleInfo; } set { SetProperty(ref m_TMModuleInfo, value); } } public ModuleInfo LP2ModuleInfo { get { return m_LP2ModuleInfo; } set { SetProperty(ref m_LP2ModuleInfo, value); } } public ModuleInfo LP3ModuleInfo { get { return m_LP3ModuleInfo; } set { SetProperty(ref m_LP3ModuleInfo, value); } } public WaferRobotTAction Robot1TAction { get { return m_Robot1TAction; } set { SetProperty(ref m_Robot1TAction, value); } } public WaferRobotXAction Robot1XAction { get { return m_Robot1XAction; } set { SetProperty(ref m_Robot1XAction, value); } } public WaferRobotTAction Robot2TAction { get { return m_Robot2TAction; } set { SetProperty(ref m_Robot2TAction, value); } } public WaferRobotXAction Robot2XAction { get { return m_Robot2XAction; } set { SetProperty(ref m_Robot2XAction, value); } } public WaferRobotTAction Robot3TAction { get { return m_Robot3TAction; } set { SetProperty(ref m_Robot3TAction, value); } } public WaferRobotXAction Robot3XAction { get { return m_Robot3XAction; } set { SetProperty(ref m_Robot3XAction, value); } } public WaferRobotTAction Robot4TAction { get { return m_Robot4TAction; } set { SetProperty(ref m_Robot4TAction, value); } } public WaferRobotXAction Robot4XAction { get { return m_Robot4XAction; } set { SetProperty(ref m_Robot4XAction, value); } } public RobotMoveInfo RobotMoveInfo { get { return m_robotMoveInfo; } set { RobotMoveInfoChanged(m_robotMoveInfo, value); //m_robotMoveInfo = value; SetProperty(ref m_robotMoveInfo, value); } } public WaferInfo LLAWafer { get { return m_LLAWafer; } set { SetProperty(ref m_LLAWafer, value); } } public WaferInfo LLBWafer { get { return m_LLBWafer; } set { SetProperty(ref m_LLBWafer, value); } } public WaferInfo PMAWafer { get { return m_PMAWafer; } set { SetProperty(ref m_PMAWafer, value); } } public WaferInfo PMBWafer { get { return m_PMBWafer; } set { SetProperty(ref m_PMBWafer, value); } } public WaferInfo PMCWafer { get { return m_PMCWafer; } set { SetProperty(ref m_PMCWafer, value); } } public WaferInfo PMDWafer { get { return m_PMDWafer; } set { SetProperty(ref m_PMDWafer, value); } } public WaferInfo TMBladeAWafer { get { return m_TMBladeAWafer; } set { SetProperty(ref m_TMBladeAWafer, value); } } public WaferInfo TMBladeBWafer { get { return m_TMBladeBWafer; } set { SetProperty(ref m_TMBladeBWafer, value); } } public Dictionary RtDataValues { get { return m_RtDataValues; } set { SetProperty(ref m_RtDataValues, value); } } public bool PMAIsInstalled { get { return m_PMAIsInstalled; } set { SetProperty(ref m_PMAIsInstalled, value); } } public bool PMBIsInstalled { get { return m_PMBIsInstalled; } set { SetProperty(ref m_PMBIsInstalled, value); } } public bool PMCIsInstalled { get { return m_PMCIsInstalled; } set { SetProperty(ref m_PMCIsInstalled, value); } } public bool PMDIsInstalled { get { return m_PMDIsInstalled; } set { SetProperty(ref m_PMDIsInstalled, value); } } public bool LLAIsInstalled { get { return m_LLAIsInstalled; } set { SetProperty(ref m_LLAIsInstalled, value); } } public bool LLBIsInstalled { get { return m_LLBIsInstalled; } set { SetProperty(ref m_LLBIsInstalled, value); } } public bool TMIsInstalled { get { return m_TMIsInstalled; } set { SetProperty(ref m_TMIsInstalled, value); } } public bool EFEMIsInstalled { get { return m_EFEMIsInstalled; } set { SetProperty(ref m_EFEMIsInstalled, value); } } public WaferInfo EFEMBladeAWafer { get { return m_EFEMBladeAWafer; } set { SetProperty(ref m_EFEMBladeAWafer, value); } } public WaferInfo EFEMBladeBWafer { get { return m_EFEMBladeBWafer; } set { SetProperty(ref m_EFEMBladeBWafer, value); } } public WaferInfo Aligner1Wafer { get { return m_Aligner1Wafer; } set { SetProperty(ref m_Aligner1Wafer, value); } } public int LP1WaferCount { get { return m_LP1WaferCount; } set { SetProperty(ref m_LP1WaferCount, value); } } public int LP2WaferCount { get { return m_LP2WaferCount; } set { SetProperty(ref m_LP2WaferCount, value); } } public int LP3WaferCount { get { return m_LP3WaferCount; } set { SetProperty(ref m_LP3WaferCount, value); } } public WaferAssociationInfo LP1WaferAssociation { get { return _lp1WaferAssociation; } set { SetProperty(ref _lp1WaferAssociation, value); } } public WaferAssociationInfo LP2WaferAssociation { get { return _lp2WaferAssociation; } set { SetProperty(ref _lp2WaferAssociation, value); } } public WaferAssociationInfo LP3WaferAssociation { get { return _lp3WaferAssociation; } set { SetProperty(ref _lp3WaferAssociation, value); } } public int CycledWafer { get { return m_CycledWafer; } set { SetProperty(ref m_CycledWafer, value); } } public int CycleCountDisplay { get { return m_CycleCountDisplay; } set { SetProperty(ref m_CycleCountDisplay, value); } } public RobotMoveInfo m_EfemRobotMoveInfo; public RobotMoveInfo EfemRobotMoveInfo { get { return m_EfemRobotMoveInfo; } set { EFEMRobotMoveInfoChanged(m_EfemRobotMoveInfo, value); //m_EfemRobotMoveInfo = value; SetProperty(ref m_EfemRobotMoveInfo, value); } } public RobotPosition CurrentRobotPosition { get { return m_CurrentRobotPosition; } set { SetProperty(ref m_CurrentRobotPosition, value); } } public WaferInfo BladeAWafer { get { return m_BladeAWafer; } set { SetProperty(ref m_BladeAWafer, value); } } public WaferInfo BladeBWafer { get { return m_BladeBWafer; } set { SetProperty(ref m_BladeBWafer, value); } } public RecipeResult PMARecipeResult { get { return m_PMARecipeResult; } set { SetProperty(ref m_PMARecipeResult, value); } } public RecipeResult PMBRecipeResult { get { return m_PMBRecipeResult; } set { SetProperty(ref m_PMBRecipeResult, value); } } public RecipeResult PMCRecipeResult { get { return m_PMCRecipeResult; } set { SetProperty(ref m_PMCRecipeResult, value); } } public RecipeResult PMDRecipeResult { get { return m_PMDRecipeResult; } set { SetProperty(ref m_PMDRecipeResult, value); } } public string ATMModeIsOn { get { return m_ATMModeIsOn; } set { SetProperty(ref m_ATMModeIsOn, value); } } public float TMPressure { get { return m_TMPressure; } set { SetProperty(ref m_TMPressure, value); } } public string RouteState { get { return m_RouteState; } set { SetProperty(ref m_RouteState, value); } } #endregion #region 命令 private DelegateCommand _LoadCommand; public DelegateCommand LoadCommand => _LoadCommand ?? (_LoadCommand = new DelegateCommand(OnLoad)); private DelegateCommand _LoadWaferCommand; public DelegateCommand LoadWaferCommand => _LoadWaferCommand ?? (_LoadWaferCommand = new DelegateCommand(OnLoadWafer)); private DelegateCommand _UnLoadWaferCommand; public DelegateCommand UnLoadWaferCommand => _UnLoadWaferCommand ?? (_UnLoadWaferCommand = new DelegateCommand(OnUnLoadWafer)); private DelegateCommand _SelectAllCommand; public DelegateCommand SelectAllCommand => _SelectAllCommand ?? (_SelectAllCommand = new DelegateCommand(OnSelectAll)); private DelegateCommand _UnSelectAllCommand; public DelegateCommand UnSelectAllCommand => _UnSelectAllCommand ?? (_UnSelectAllCommand = new DelegateCommand(OnUnSelectAll)); private DelegateCommand _StartCommand; public DelegateCommand StartCommand => _StartCommand ?? (_StartCommand = new DelegateCommand(OnStart)); private DelegateCommand _StopCommand; public DelegateCommand StopCommand => _StopCommand ?? (_StopCommand = new DelegateCommand(OnStop)); private DelegateCommand _AbortCommand; public DelegateCommand AbortCommand => _AbortCommand ?? (_AbortCommand = new DelegateCommand(OnAbort)); private DelegateCommand _HomeAllCommand; public DelegateCommand HomeAllCommand => _HomeAllCommand ?? (_HomeAllCommand = new DelegateCommand(OnHomeAll)); private DelegateCommand _ResumeAllJobCommand; public DelegateCommand ResumeAllJobCommand => _ResumeAllJobCommand ?? (_ResumeAllJobCommand = new DelegateCommand(OnResumeAllJob)); private DelegateCommand _AbortAllCommand; public DelegateCommand AbortAllCommand => _AbortAllCommand ?? (_AbortAllCommand = new DelegateCommand(OnAbortAll)); private DelegateCommand _ReturnAllWaferCommand; public DelegateCommand ReturnAllWaferCommand => _ReturnAllWaferCommand ?? (_ReturnAllWaferCommand = new DelegateCommand(OnReturnAllWafer)); private DelegateCommand _SetSequenceCommand; public DelegateCommand SetSequenceCommand => _SetSequenceCommand ?? (_SetSequenceCommand = new DelegateCommand(OnSetSequence)); private DelegateCommand _CreateJobCommand; public DelegateCommand CreateJobCommand => _CreateJobCommand ?? (_CreateJobCommand = new DelegateCommand(OnCreateJob)); private DelegateCommand _EnableAutoCommand; public DelegateCommand EnableAutoCommand => _EnableAutoCommand ?? (_EnableAutoCommand = new DelegateCommand(OnEnableAuto)); private DelegateCommand _EnableManualCommand; public DelegateCommand EnableManualCommand => _EnableManualCommand ?? (_EnableManualCommand = new DelegateCommand(OnEnableManual)); public bool SwitchFlag; #endregion #region 构造函数 public OperationOverViewModel() { DispatcherTimer timer = new DispatcherTimer(); timer.Interval = TimeSpan.FromSeconds(0.1); timer.Tick += Timer_Tick; timer.Start(); string allModules = QueryDataClient.Instance.Service.GetConfig($"System.InstalledModules").ToString(); PMAIsInstalled = allModules.Contains("PMA"); PMBIsInstalled = allModules.Contains("PMB"); PMCIsInstalled = allModules.Contains("PMC"); PMDIsInstalled = allModules.Contains("PMD"); LLAIsInstalled = allModules.Contains("LLA"); LLBIsInstalled = allModules.Contains("LLB"); EFEMIsInstalled = allModules.Contains("EFEM"); TMIsInstalled = allModules.Contains("TM"); addDataKeys(); SwitchFlag = false; ATMModeIsOn = Convert.ToBoolean(QueryDataClient.Instance.Service.GetConfig("System.IsATMMode")) == true ? "ATM Mode On" : "ATM Mode Off"; } #endregion #region 命令方法 private void OnLoad() { if (!SwitchFlag) { LP1WaferAssociation = new WaferAssociationInfo(); LP3WaferAssociation = new WaferAssociationInfo(); LP2WaferAssociation = new WaferAssociationInfo(); LP1WaferAssociation.ModuleData = ModuleManager.ModuleInfos["LP1"]; LP2WaferAssociation.ModuleData = ModuleManager.ModuleInfos["LP2"]; LP3WaferAssociation.ModuleData = ModuleManager.ModuleInfos["LP3"]; SwitchFlag = true; } } private void OnLoadWafer(object obj) { InvokeClient.Instance.Service.DoOperation($"{obj.ToString()}.Load", ModuleManager.ModuleInfos[obj.ToString()].ModuleID); } private void OnUnLoadWafer(object obj) { InvokeClient.Instance.Service.DoOperation($"{obj.ToString()}.Unload", ModuleManager.ModuleInfos[obj.ToString()].ModuleID); } private void OnSelectAll(object obj) { var info = obj as WaferAssociationInfo; info.SlotFrom = 1; info.SlotTo = 25; AssociateSequence(info, true); } private void OnUnSelectAll(object obj) { var info = obj as WaferAssociationInfo; info.SlotFrom = 1; info.SlotTo = 25; AssociateSequence(info, false); } private void OnStart(object obj) { var info = obj as WaferAssociationInfo; InvokeClient.Instance.Service.DoOperation("System.StartJob", info.LotId); } private void OnStop(object obj) { var info = obj as WaferAssociationInfo; InvokeClient.Instance.Service.DoOperation("System.PauseJob", info.JobID); } private void OnAbort(object obj) { var info = obj as WaferAssociationInfo; InvokeClient.Instance.Service.DoOperation("System.ResumeJob", info.JobID); } private void OnHomeAll() { InvokeClient.Instance.Service.DoOperation("System.HomeAll"); } private void OnResumeAllJob() { var t = CommonFunction.GetValue>(RtDataValues, "Scheduler.PjNameList"); if (t == null && t.Count == 0) { return; } if (CommonFunction.GetValue(RtDataValues, "EquipmentStatus") == 4) { t.ForEach(x => { InvokeClient.Instance.Service.DoOperation("System.ResumeJob", x); }); } else { t.ForEach(x => { InvokeClient.Instance.Service.DoOperation("System.PauseJob", x); }); } } private void OnAbortAll() { InvokeClient.Instance.Service.DoOperation("System.Abort"); } private void OnReturnAllWafer() { //Dialog WaferDialogView dialog = new WaferDialogView() { Owner = Application.Current.MainWindow, }; dialog.Height = 300; dialog.Width = 400; double angel = 0; double coolingtime = 0; string message = "Please Confirm Return Wafer"; WaferDialogViewModel vm = new WaferDialogViewModel(); vm.ConfirmText = message; dialog.DataContext = vm; if (dialog.ShowDialog() == true) { if ((bool)dialog.AlignFlag == true && !string.IsNullOrEmpty(dialog.Angle)) { angel = Convert.ToDouble(dialog.Angle); } if ((bool)dialog.CoolingFlag == true && !string.IsNullOrEmpty(dialog.CoolingTime)) { coolingtime = Convert.ToDouble(dialog.CoolingTime); } InvokeClient.Instance.Service.DoOperation("System.ReturnAllWafer", dialog.CoolingFlag, coolingtime, dialog.AlignFlag, angel); } } private void OnSetSequence(object obj) { var info = obj as WaferInfo; bool flag = info.SequenceName != "" ? false : true; if (info.ModuleID == "LP1") { AssociateSequence(LP1WaferAssociation, flag, info.SlotID); } else if (info.ModuleID == "LP2") { AssociateSequence(LP2WaferAssociation, flag, info.SlotID); } else if (info.ModuleID == "LP3") { AssociateSequence(LP3WaferAssociation, flag, info.SlotID); } } private void OnCreateJob(object obj) { var info = obj as WaferAssociationInfo; List slotSequence = new List(); info.ModuleData.WaferManager.Wafers.ForEach(key => { slotSequence.Insert(0, key.SequenceName); }); string jobId = info.LotId.Trim(); if (string.IsNullOrEmpty(jobId)) jobId = "CJ_Local_" + info.ModuleData.ModuleID; info.LotId = jobId; info.JobID = jobId; info.JobStatus = "WaitingForStart"; info.LotIdSaved = true; Dictionary param = new Dictionary() { {"JobId", jobId}, {"Module", info.ModuleData.ModuleID}, {"SlotSequence", slotSequence.ToArray()}, {"AutoStart", true}, { "PreCleanRecipeName",info.PreCleanRecipeName}, { "PostCleanRecipeName",info.PostCleanRecipeName} }; InvokeClient.Instance.Service.DoOperation("System.CreateJob", param); } private void OnEnableAuto() { InvokeClient.Instance.Service.DoOperation("System.SetAutoMode"); } private void OnEnableManual() { InvokeClient.Instance.Service.DoOperation("System.SetManualMode"); } #endregion #region 私有方法 private void Timer_Tick(object sender, EventArgs e) { LP1ModuleInfo = ModuleManager.ModuleInfos["LP1"]; LP2ModuleInfo = ModuleManager.ModuleInfos["LP2"]; LP3ModuleInfo = ModuleManager.ModuleInfos["LP3"]; EFEMModuleInfo = ModuleManager.ModuleInfos["EfemRobot"]; TMModuleInfo = ModuleManager.ModuleInfos["TMRobot"]; BladeAWafer = ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[0]; BladeBWafer = ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[1]; RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys); if (LLAIsInstalled == true) { LLAModuleInfo = ModuleManager.ModuleInfos["LLA"]; LLAWafer = ModuleManager.ModuleInfos["LLA"].WaferManager.Wafers.FirstOrDefault(x => x.WaferStatus != 0); } if (LLBIsInstalled == true) { LLBModuleInfo = ModuleManager.ModuleInfos["LLB"]; LLBWafer = ModuleManager.ModuleInfos["LLB"].WaferManager.Wafers.FirstOrDefault(x => x.WaferStatus != 0); } if (PMAIsInstalled == true) { PMAWafer = ModuleManager.ModuleInfos["PMA"].WaferManager.Wafers[0]; PMARecipeResult = CommonFunction.GetValue(RtDataValues, $"PMA.CurrentRecipeResult"); } if (PMBIsInstalled == true) { PMBWafer = ModuleManager.ModuleInfos["PMB"].WaferManager.Wafers[0]; PMBRecipeResult = CommonFunction.GetValue(RtDataValues, $"PMB.CurrentRecipeResult"); } if (PMCIsInstalled == true) { PMCWafer = ModuleManager.ModuleInfos["PMC"].WaferManager.Wafers[0]; PMCRecipeResult = CommonFunction.GetValue(RtDataValues, $"PMC.CurrentRecipeResult"); } if (PMDIsInstalled == true) { PMDWafer = ModuleManager.ModuleInfos["PMD"].WaferManager.Wafers[0]; PMDRecipeResult = CommonFunction.GetValue(RtDataValues, $"PMD.CurrentRecipeResult"); } if (TMIsInstalled == true) { TMBladeAWafer = ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0]; TMBladeBWafer = ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1]; TMPressure= CommonFunction.GetValue(RtDataValues, $"TM.TMProcessGauge.Value"); } if (EFEMIsInstalled == true) { EFEMBladeAWafer = ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[0]; EFEMBladeBWafer = ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[1]; Aligner1Wafer = ModuleManager.ModuleInfos["Aligner1"].WaferManager.Wafers[0]; } RobotMoveInfo = (RobotMoveInfo)QueryDataClient.Instance.Service.GetData("TM.RobotMoveAction"); EfemRobotMoveInfo = (RobotMoveInfo)QueryDataClient.Instance.Service.GetData("EFEM.RobotMoveAction"); LP1WaferCount = LP1ModuleInfo.WaferManager.Wafers.Where(x => x.WaferStatus != 0).Count(); LP2WaferCount = LP2ModuleInfo.WaferManager.Wafers.Where(x => x.WaferStatus != 0).Count(); LP3WaferCount = LP3ModuleInfo.WaferManager.Wafers.Where(x => x.WaferStatus != 0).Count(); if (CommonFunction.GetValue(RtDataValues, "EquipmentStatus") == 4) { RouteState = "Resume"; } else { RouteState = "Pause"; } } private async void RobotMoveInfoChanged(RobotMoveInfo oldValue, RobotMoveInfo newValue) { string RobotTarget; if (oldValue == null || newValue == null) { return; } #region Rotating if ((oldValue.Action == RobotAction.None || oldValue.ArmTarget != newValue.ArmTarget) && (newValue.Action == RobotAction.Rotating)) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; var module = values[1]; if (arm == "ArmA") { Robot1TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); } else if (arm == "ArmB") { Robot2TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); } } #endregion #region pick 和 place LL else if ((oldValue.Action == RobotAction.None || oldValue.ArmTarget != newValue.ArmTarget) && (newValue.Action == RobotAction.Placing || newValue.Action == RobotAction.Picking)) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; var module = values[1]; if (arm == "ArmA") { var waferRobotTAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); if (waferRobotTAction != Robot1TAction) { Robot1TAction = waferRobotTAction; } else { //await Task.Delay(100); } await Task.Delay(600); //Robot1TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); //await Task.Delay(600); Robot1XAction = WaferRobotXAction.Extend; while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0].WaferStatus == 0)) { await Task.Delay(100); } Robot1XAction = WaferRobotXAction.Retract; } else if (arm == "ArmB") { var waferRobotTAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); if (waferRobotTAction != Robot2TAction) { Robot2TAction = waferRobotTAction; } else { //await Task.Delay(100); } await Task.Delay(600); //Robot2TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); //await Task.Delay(600); Robot2XAction = WaferRobotXAction.Extend; while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1].WaferStatus == 0)) { await Task.Delay(100); } Robot2XAction = WaferRobotXAction.Retract; } } #endregion #region pick 和 place pm else if ((oldValue.Action == RobotAction.None || oldValue.ArmTarget != newValue.ArmTarget) && newValue.Action == RobotAction.Extending) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; var module = values[1]; if (arm == "ArmA") { var waferRobotTAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); if (waferRobotTAction != Robot1TAction) { Robot1TAction = waferRobotTAction; } else { // await Task.Delay(100); } await Task.Delay(600); Robot1XAction = WaferRobotXAction.Extend; } else if (arm == "ArmB") { var waferRobotTAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); if (waferRobotTAction != Robot2TAction) { Robot2TAction = waferRobotTAction; } else { // await Task.Delay(100); } await Task.Delay(600); Robot2XAction = WaferRobotXAction.Extend; } } else if ((oldValue.Action == RobotAction.None || oldValue.ArmTarget != newValue.ArmTarget) && newValue.Action == RobotAction.Retracting) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; if (arm == "ArmA") { Robot1XAction = WaferRobotXAction.Retract; } else if (arm == "ArmB") { Robot2XAction = WaferRobotXAction.Retract; } } #endregion #region Home else if (oldValue.Action == RobotAction.None && newValue.Action == RobotAction.Homing) { if (Robot1XAction == WaferRobotXAction.Extend) { Robot1XAction = WaferRobotXAction.Retract; } if (Robot2XAction == WaferRobotXAction.Extend) { Robot2XAction = WaferRobotXAction.Retract; } await Task.Delay(2000); if (Robot1TAction != WaferRobotTAction.T_Origin) { Robot1TAction = WaferRobotTAction.T_Origin; } if (Robot2TAction != WaferRobotTAction.T_Origin) { Robot2TAction = WaferRobotTAction.T_Origin; } } #endregion } private async void EFEMRobotMoveInfoChanged(RobotMoveInfo oldValue, RobotMoveInfo newValue) { string RobotTarget; if (oldValue == null || newValue == null) { return; } #region pick 和 place LL if ((oldValue.Action == RobotAction.None || oldValue.ArmTarget != newValue.ArmTarget) && (newValue.Action == RobotAction.Placing || newValue.Action == RobotAction.Picking)) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; var module = values[1]; if (arm == "ArmA") { var robot3Robot3TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); //await Task.Delay(1000); await ChangePosition(robot3Robot3TAction); if (Robot3TAction != robot3Robot3TAction) { Robot3TAction = robot3Robot3TAction; await Task.Delay(600); } Robot3XAction = WaferRobotXAction.Extend; while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[0].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[0].WaferStatus == 0)) { await Task.Delay(100); } Robot3XAction = WaferRobotXAction.Retract; } else if (arm == "ArmB") { var robot4Robot4TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); //await Task.Delay(1000); await ChangePosition(robot4Robot4TAction); if (Robot4TAction != robot4Robot4TAction) { Robot4TAction = robot4Robot4TAction; await Task.Delay(600); } //ChangePosition(Robot4TAction); //await Task.Delay(2000); Robot4XAction = WaferRobotXAction.Extend; while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[1].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["EfemRobot"].WaferManager.Wafers[1].WaferStatus == 0)) { await Task.Delay(100); } Robot4XAction = WaferRobotXAction.Retract; } } #endregion #region pick 和 place pm if (oldValue.Action == RobotAction.None && newValue.Action == RobotAction.Extending) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; var module = values[1]; if (arm == "ArmA") { Robot3TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); await Task.Delay(1500); //ChangePosition(Robot3TAction); //await Task.Delay(2000); Robot3XAction = WaferRobotXAction.Extend; } else if (arm == "ArmB") { Robot4TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true); await Task.Delay(1500); //ChangePosition(Robot4TAction); //await Task.Delay(2000); Robot4XAction = WaferRobotXAction.Extend; } } if (oldValue.Action == RobotAction.None && newValue.Action == RobotAction.Retracting) { var TMRobotMoveActionBladeTarget = newValue.BladeTarget; if (TMRobotMoveActionBladeTarget != null) { RobotTarget = TMRobotMoveActionBladeTarget.ToString(); } else { return; } var values = RobotTarget.Split('.'); var arm = values[0]; if (arm == "ArmA") { Robot3XAction = WaferRobotXAction.Retract; await Task.Delay(3000); //ChangePosition(Robot3TAction); //await Task.Delay(2000); } else if (arm == "ArmB") { Robot4XAction = WaferRobotXAction.Retract; await Task.Delay(3000); //ChangePosition(Robot3TAction); //await Task.Delay(2000); } } #endregion #region Home else if (oldValue.Action == RobotAction.None && newValue.Action == RobotAction.Homing) { if (Robot3XAction == WaferRobotXAction.Extend) { Robot3XAction = WaferRobotXAction.Retract; } if (Robot4XAction == WaferRobotXAction.Extend) { Robot4XAction = WaferRobotXAction.Retract; } if (Robot3TAction != WaferRobotTAction.T_Origin) { Robot3TAction = WaferRobotTAction.T_Origin; } if (Robot4TAction != WaferRobotTAction.T_Origin) { Robot4TAction = WaferRobotTAction.T_Origin; } await Task.Delay(1000); await ChangePosition(WaferRobotTAction.T_Origin); } #endregion } private void addDataKeys() { if (PMAIsInstalled == true) { m_RtDataKeys.Add("PMA.IsSlitDoorClosed"); m_RtDataKeys.Add("PMA.CurrentRecipeResult"); m_RtDataKeys.Add("PMA.IsOnline"); m_RtDataKeys.Add("PMA.CalculationPressure"); } if (PMBIsInstalled == true) { m_RtDataKeys.Add("PMB.IsSlitDoorClosed"); m_RtDataKeys.Add("PMB.CurrentRecipeResult"); m_RtDataKeys.Add("PMB.IsOnline"); m_RtDataKeys.Add("PMB.CalculationPressure"); } if (PMCIsInstalled == true) { m_RtDataKeys.Add("PMC.IsSlitDoorClosed"); m_RtDataKeys.Add("PMC.CurrentRecipeResult"); m_RtDataKeys.Add("PMC.IsOnline"); m_RtDataKeys.Add("PMC.CalculationPressure"); } if (PMDIsInstalled == true) { m_RtDataKeys.Add("PMD.IsSlitDoorClosed"); m_RtDataKeys.Add("PMD.CurrentRecipeResult"); m_RtDataKeys.Add("PMD.IsOnline"); m_RtDataKeys.Add("PMD.CalculationPressure"); } if (TMIsInstalled == true) { m_RtDataKeys.Add("TM.LLATSlitDoor.IsClosed"); m_RtDataKeys.Add("TM.LLBTSlitDoor.IsClosed"); m_RtDataKeys.Add("TM.LLAESlitDoor.IsClosed"); m_RtDataKeys.Add("TM.LLBESlitDoor.IsClosed"); m_RtDataKeys.Add("TM.IsOnline"); m_RtDataKeys.Add("TM.TMProcessGauge.Value"); m_RtDataKeys.Add("TM.TMATMSwitch.Value"); m_RtDataKeys.Add("TM.TMVacSwitch.Value"); m_RtDataKeys.Add("TM.TMProcessGauge.Value"); m_RtDataKeys.Add("TM.TMLidClosed"); m_RtDataKeys.Add("TM.LLALidClosed"); m_RtDataKeys.Add("TM.LLBLidClosed"); } if (LLAIsInstalled == true) { m_RtDataKeys.Add("LLA.IsOnline"); m_RtDataKeys.Add($"TM.LLAPressureGauge.Value"); m_RtDataKeys.Add($"TM.LLAVacSwitch.Value"); m_RtDataKeys.Add($"TM.LLAATMSwitch.Value"); } if (LLBIsInstalled == true) { m_RtDataKeys.Add("LLB.IsOnline"); m_RtDataKeys.Add($"TM.LLBPressureGauge.Value"); m_RtDataKeys.Add($"TM.LLBVacSwitch.Value"); m_RtDataKeys.Add($"TM.LLBATMSwitch.Value"); } if (EFEMIsInstalled == true) { m_RtDataKeys.Add("LP1.IsLoaded"); m_RtDataKeys.Add("LP2.IsLoaded"); m_RtDataKeys.Add("LP3.IsLoaded"); m_RtDataKeys.Add("LP1.CassettePlaced"); m_RtDataKeys.Add("LP2.CassettePlaced"); m_RtDataKeys.Add("LP3.CassettePlaced"); m_RtDataKeys.Add("EFEM.IsOnline"); } m_RtDataKeys.Add("System.IsAutoMode"); m_RtDataKeys.Add("System.IsBusy"); m_RtDataKeys.Add("Scheduler.CycledCount"); m_RtDataKeys.Add("Scheduler.CycledWafer"); m_RtDataKeys.Add("Scheduler.CycleSetPoint"); m_RtDataKeys.Add("Scheduler.Throughput"); m_RtDataKeys.Add("EquipmentStatus"); m_RtDataKeys.Add("Scheduler.PjNameList"); } private void AssociateSequence(WaferAssociationInfo info, bool flag, int slot = -1) { List wafers = info.ModuleData.WaferManager.Wafers; if (slot >= 0) //by wafer { int index = wafers.Count - slot - 1; if (index < wafers.Count) { if (flag && HasWaferOnSlot(wafers, index)) wafers[index].SequenceName = info.SequenceName; else wafers[index].SequenceName = string.Empty; } } else //by from-to { for (int i = info.SlotFrom - 1; i < info.SlotTo; i++) { int index = wafers.Count - i - 1; if (index < wafers.Count) { if (flag && HasWaferOnSlot(wafers, index)) wafers[index].SequenceName = info.SequenceName; else wafers[index].SequenceName = string.Empty; } } } switch (info.ModuleData.ModuleID) { case "LP1": LP1WaferAssociation = info; break; case "LP2": LP2WaferAssociation = info; break; case "LP3": LP3WaferAssociation = info; break; } } private bool HasWaferOnSlot(List wafers, int index) { if (wafers[index].WaferStatus == 0) return false; return true; } private async Task ChangePosition(WaferRobotTAction waferRobotTAction) { await Task.Delay(500); int delay = 500; if (waferRobotTAction == WaferRobotTAction.LP1) { CurrentRobotPosition = RobotPosition.Left; await Task.Delay(delay); } else if (waferRobotTAction == WaferRobotTAction.LP3) { CurrentRobotPosition = RobotPosition.Right; await Task.Delay(delay); } else if (waferRobotTAction == WaferRobotTAction.LP2) { CurrentRobotPosition = RobotPosition.Middle; await Task.Delay(delay); } else { CurrentRobotPosition = RobotPosition.Origin; await Task.Delay(delay); } } #endregion } }