using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.SCCore; using Aitex.RT.Device.Custom; using Aitex.Core.RT.Log; using MECF.Framework.Common.Device.Bases; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; using System; using Venus_Core; using Venus_RT.Devices.IODevices; namespace Venus_RT.Devices { enum ValveType { PVN21, PVN22, PV11, PV12, PV21, PV22, PV31, PV32, PV41, PV42, N2, Mfc1, Mfc2, Mfc3, Mfc4, Mfc5, Mfc6, Mfc7, Mfc8, PVHe1, PVHe2, GasFinal, SoftPump, FastPump, CHBPurge, TurboPumpPumping, TurboPumpPurge, Guage, LoadlockVent, LoadlockPumping } class JetPM : PM { private readonly IoLid _Lid; private readonly IoLid _LidLoadlock; private readonly IoCylinder _slitDoor; private readonly IoCylinder _LiftPin; private readonly IoCylinder _LoadLockArm; private readonly IoValve _PVN21Valve; private readonly IoValve _PVN22Valve; private readonly IoValve _PV11Valve; private readonly IoValve _PV12Valve; private readonly IoValve _PV21Valve; private readonly IoValve _PV22Valve; private readonly IoValve _PV31Valve; private readonly IoValve _PV32Valve; private readonly IoValve _PV41Valve; private readonly IoValve _PV42Valve; private readonly IoValve _N2Valve; private readonly IoValve _Mfc1Valve; private readonly IoValve _Mfc2Valve; private readonly IoValve _Mfc3Valve; private readonly IoValve _Mfc4Valve; private readonly IoValve _Mfc5Valve; private readonly IoValve _Mfc6Valve; private readonly IoValve _Mfc7Valve; private readonly IoValve _Mfc8Valve; private readonly IoValve _PVHe1Valve; private readonly IoValve _PVHe2Valve; private readonly IoValve _GasFinalValve; private readonly IoValve _SoftPumpValve; private readonly IoValve _FastPumpValve; private readonly IoValve _TurboPumpPumpingValve; private readonly IoValve _TurboPumpPurgeValve; private readonly IoValve _GuageValve; private readonly IoValve _LoadlockVentValve; private readonly IoValve _LoadlockPumpingValve; private readonly IoSensor _ATM_sw; private readonly IoSensor _CDAPressure; private readonly IoSensor _ATM_Loadlock_sw; private readonly IoSensor _N2Pressure_sw; private readonly IoSensor _VAC_sw; private readonly IoSensor _WLK_sw; private readonly IoSensor _Water_Flow; private readonly IoSensor _RFG_Interlock; private readonly IoSensor _PM_Lid_Closed; private readonly IoSensor _Source_RF_Fan; private readonly IoSensor _PM_SlitDoor_Closed; private readonly IoSensor _TurboPumpInterlock; private readonly PumpBase _MainPump; private readonly ESC5HighVoltage _ESCHV; private readonly AdixenTurboPump _TurboPump; private readonly PendulumValve _pendulumValve; private readonly SMCChiller _Chiller; private readonly RfPowerBase _Generator; private readonly RfPowerBase _GeneratorBias; private readonly RfMatchBase _Match; private readonly IoSignalTower _SignalTower; private readonly IoHeater _ForelineTC; private readonly IoPressureControl _pressureController; private readonly IoGasStick[] _gasLines; private readonly IoGasStick _gasLineN2; private readonly IoBacksideHe _backsideHe; // 盖子的状态 public bool IsLidClosed => _Lid.OFFFeedback; public bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback; public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback; public bool IsPumpRunning => _MainPump.IsRunning; public bool IsTurboPumpRunning => _TurboPump.IsRunning; public bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed; public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning; public bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning; public bool IsCDA_OK => _CDAPressure.Value; public bool IsFastPumpOpened => _FastPumpValve.Status; public bool IsSoftPumpOpened => _SoftPumpValve.Status; public bool IsMfc1ValveOpened => _Mfc1Valve.Status; public bool IsMfc2ValveOpened => _Mfc2Valve.Status; public bool IsMfc3ValveOpened => _Mfc3Valve.Status; public bool IsMfc4ValveOpened => _Mfc4Valve.Status; public bool IsMfc5ValveOpened => _Mfc5Valve.Status; public bool IsMfc6ValveOpened => _Mfc6Valve.Status; public bool IsMfc7ValveOpened => _Mfc7Valve.Status; public bool IsMfc8ValveOpened => _Mfc8Valve.Status; // 压力信号 public bool IsATM => _ATM_sw.Value; public bool IsATMLoadlock => _ATM_Loadlock_sw.Value; public bool IsVACLoadLock => LoadlockPressure <= 1000; public bool IsVAC => _VAC_sw.Value; public bool IsWaterFlowOk => _Water_Flow.Value; public bool IsWLK => _WLK_sw.Value; public bool IsRFGInterlockOn => _RFG_Interlock.Value; public bool PMLidClosed => _PM_Lid_Closed.Value; public bool TurboPumpInterlock => _TurboPumpInterlock.Value; public bool SourceRFFanInterlock => _Source_RF_Fan.Value; public bool SlitDoorClosed => _PM_SlitDoor_Closed.Value; public double ProcessPressure => _pressureController.ProcessGauge.Value; public override double ChamberPressure => _pressureController.PressureGauge.Value; public double ForelinePressure => _pressureController.ForelineGauge.Value; public double TargetPressure => _pressureController.TargetPressure; public double LoadlockPressure => _pressureController.LoadLockGauge.Value; public double ESCHePressure => _pressureController.ESCHeGauge.Value; public float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback; public float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback; //Loadlock_Arm public bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback; public bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback; //Loadlock_Arm DO public bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint; public bool LoadlockArmExtend => _LoadLockArm.ONSetPoint; public float ReflectPower => _Generator.ReflectPower; public float BiasReflectPower => _GeneratorBias.ReflectPower; public bool BackSideHeOutOfRange => _backsideHe.OutOfRange; public new ModuleName Module { get; } public MovementPosition LiftPinPosition { get { MovementPosition pos = MovementPosition.Unknown; if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback) { pos = MovementPosition.Up; } else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback) { pos = MovementPosition.Down; } return pos; } } public override bool CheckAtm() { return _ATM_sw.Value && ChamberPressure > 700000; } public bool CheckSlitDoorOpen() { return _slitDoor.State == CylinderState.Open; } public bool CheckSlitDoorClose() { return _slitDoor.State == CylinderState.Close; } public bool CheckLiftUp() { return _LiftPin.State == CylinderState.Open; } public bool CheckLiftDown() { return _LiftPin.State == CylinderState.Close; } public double TotalGasSetpoint { get { double sum = 0; foreach (var gas in _gasLines) { sum += gas.FlowSP; } return sum; } } public bool HasGasOutOfRange { get { foreach (var gas in _gasLines) { if (!gas.IsOutOfRange) return false; } return true; } } public JetPM(ModuleName mod) : base(mod.ToString()) { Module = mod; _Lid = DEVICE.GetDevice($"{Module}.{VenusDevice.Lid}"); _LidLoadlock = DEVICE.GetDevice($"{Module}.{VenusDevice.LidLoadlock}"); _slitDoor = DEVICE.GetDevice($"{Module}.{VenusDevice.SlitDoor}"); _LiftPin = DEVICE.GetDevice($"{Module}.{VenusDevice.LiftPin}"); _LoadLockArm = DEVICE.GetDevice($"{Module}.{VenusDevice.LoadLockArm}"); _PVN21Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVN21}"); _PVN22Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVN22}"); _PV11Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV11}"); _PV12Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV12}"); _PV21Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV21}"); _PV22Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV22}"); _PV31Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV31}"); _PV32Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV32}"); _PV41Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV41}"); _PV42Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePV42}"); _N2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveN2}"); _Mfc1Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc1}"); _Mfc2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc3Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc4Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc5Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc6Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc7Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _Mfc8Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveMfc2}"); _PVHe1Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe1}"); _PVHe2Valve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValvePVHe2}"); _GasFinalValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveGasFinal}"); _SoftPumpValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveSoftPump}"); _FastPumpValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveFastPump}"); _TurboPumpPumpingValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveTurboPumpPumping}"); _TurboPumpPurgeValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveTurboPumpPurge}"); _GuageValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveGuage}"); _LoadlockVentValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveLoadlockVent}"); _LoadlockPumpingValve = DEVICE.GetDevice($"{Module}.{VenusDevice.ValveLoadlockPumping}"); _ATM_sw = DEVICE.GetDevice($"{Module}.SensorATMSwitch"); _ATM_Loadlock_sw = DEVICE.GetDevice($"{Module}.SensorLoadlockATMSwitch"); _N2Pressure_sw = DEVICE.GetDevice($"{Module}.N2PressureOk"); _VAC_sw = DEVICE.GetDevice($"{Module}.SensorVacSwitch"); _Water_Flow = DEVICE.GetDevice($"{Module}.SensorWaterFlowOk"); _WLK_sw = DEVICE.GetDevice($"{Module}.SensorWaterLeakOk"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _RFG_Interlock = DEVICE.GetDevice($"{Module}.GeneratorInterlock"); _PM_Lid_Closed = DEVICE.GetDevice($"{Module}.SensorPMLidClosed"); _Source_RF_Fan = DEVICE.GetDevice($"{Module}.SensorSourceRFFan"); _PM_SlitDoor_Closed = DEVICE.GetDevice($"{Module}.SensorSlitDoorClosed"); _TurboPumpInterlock = DEVICE.GetDevice($"{Module}.TurboPumpInterlock"); _ForelineTC = DEVICE.GetDevice($"{Module}.ForelineHeater"); _SignalTower = DEVICE.GetDevice($"{Module}.SignalTower"); _CDAPressure = DEVICE.GetDevice($"{Module}.SensorCDAPressureOk"); _pressureController = DEVICE.GetDevice($"{Module}.{VenusDevice.PressureControl}"); _gasLines = new IoGasStick[8]; for (int index = 0; index < 8; index++) { _gasLines[index] = DEVICE.GetDevice($"{Module}.GasStick{index + 1}"); } _gasLineN2 = DEVICE.GetDevice($"{Module}.GasStickN2"); _backsideHe = DEVICE.GetDevice($"{Module}.BacksideHelium"); _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); // RS232 Dry pump, SKY if (SC.GetValue($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232) { if (SC.GetValue($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY) { _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); } else if (SC.GetValue($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards) { _MainPump = DEVICE.GetDevice($"{Module}.{VenusDevice.MainPump}"); } } _ESCHV = DEVICE.GetDevice($"{Module}.{VenusDevice.ESCHV}"); _TurboPump = DEVICE.GetDevice($"{Module}.{VenusDevice.TurboPump}"); _pendulumValve = DEVICE.GetDevice($"{ Module}.{VenusDevice.PendulumValve}"); if (SC.GetValue($"{mod}.Chiller.EnableChiller") && SC.GetValue($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC) { _Chiller = DEVICE.GetDevice($"{Module}.{VenusDevice.Chiller}"); } // RS223 AdTec Generator if (SC.GetValue($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec) { _Generator = DEVICE.GetDevice($"{Module}.{VenusDevice.Rf}"); } // Ethernet Comet Generator Bias if (SC.GetValue($"{mod}.BiasRf.EnableBiasRF") && SC.GetValue($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet && SC.GetValue($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet) { _GeneratorBias = DEVICE.GetDevice($"{Module}.{VenusDevice.BiasRf}"); } // RS232 AdTec match if (SC.GetValue($"{mod}.match.CommunicationType") == (int)CommunicationType.RS232 && SC.GetValue($"{mod}.match.MFG") == (int)MatchMFG.AdTec) { _Match = DEVICE.GetDevice($"{Module}.{VenusDevice.Match}"); } } public void CloseValves() { _PVN21Valve.TurnValve(false, out _); _PVN22Valve.TurnValve(false, out _); _PV11Valve.TurnValve(false, out _); _PV12Valve.TurnValve(false, out _); _PV21Valve.TurnValve(false, out _); _PV22Valve.TurnValve(false, out _); _PV31Valve.TurnValve(false, out _); _PV32Valve.TurnValve(false, out _); _PV41Valve.TurnValve(false, out _); _PV42Valve.TurnValve(false, out _); _PVHe1Valve.TurnValve(false, out _); _PVHe2Valve.TurnValve(false, out _); _GasFinalValve.TurnValve(false, out _); _SoftPumpValve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _TurboPumpPumpingValve.TurnValve(false, out _); _TurboPumpPurgeValve.TurnValve(false, out _); _GuageValve.TurnValve(false, out _); _LoadlockVentValve.TurnValve(false, out _); _LoadlockPumpingValve.TurnValve(false, out _); _N2Valve.TurnValve(false, out _); _FastPumpValve.TurnValve(false, out _); _Mfc1Valve.TurnValve(false, out _); _Mfc2Valve.TurnValve(false, out _); _Mfc3Valve.TurnValve(false, out _); _Mfc4Valve.TurnValve(false, out _); _Mfc5Valve.TurnValve(false, out _); _Mfc6Valve.TurnValve(false, out _); _Mfc7Valve.TurnValve(false, out _); _Mfc8Valve.TurnValve(false, out _); foreach (var stick in _gasLines) { stick.Stop(); } } public void TurnDryPump(bool on) { //_pressureController.StartPump(on); _MainPump?.SetPumpOnOff(on); } public void TurnTurboPump(bool on) { _TurboPump?.SetPumpOnOff(on); } public void OpenValve(ValveType vlvType, bool on) { switch (vlvType) { case ValveType.PVN21: _PVN21Valve.TurnValve(on, out _); break; case ValveType.PVN22: _PVN22Valve.TurnValve(on, out _); break; case ValveType.PV11: _PV11Valve.TurnValve(on, out _); break; case ValveType.PV12: _PV12Valve.TurnValve(on, out _); break; case ValveType.PV21: _PV21Valve.TurnValve(on, out _); break; case ValveType.PV22: _PV22Valve.TurnValve(on, out _); break; case ValveType.PV31: _PV31Valve.TurnValve(on, out _); break; case ValveType.PV32: _PV32Valve.TurnValve(on, out _); break; case ValveType.PV41: _PV41Valve.TurnValve(on, out _); break; case ValveType.PV42: _PV42Valve.TurnValve(on, out _); break; case ValveType.N2: _N2Valve.TurnValve(on, out _); break; case ValveType.PVHe1: _PVHe1Valve.TurnValve(on, out _); break; case ValveType.PVHe2: _PVHe2Valve.TurnValve(on, out _); break; case ValveType.GasFinal: _GasFinalValve.TurnValve(on, out _); break; case ValveType.SoftPump: _SoftPumpValve.TurnValve(on, out _); break; case ValveType.FastPump: _FastPumpValve.TurnValve(on, out _); break; case ValveType.TurboPumpPumping: _TurboPumpPumpingValve.TurnValve(on, out _); break; case ValveType.TurboPumpPurge: _TurboPumpPurgeValve.TurnValve(on, out _); break; case ValveType.Guage: _GuageValve.TurnValve(on, out _); break; case ValveType.LoadlockVent: _LoadlockVentValve.TurnValve(on, out _); break; case ValveType.LoadlockPumping: _LoadlockPumpingValve.TurnValve(on, out _); break; case ValveType.Mfc1: _Mfc1Valve.TurnValve(on, out _); break; case ValveType.Mfc2: _Mfc2Valve.TurnValve(on, out _); break; case ValveType.Mfc3: _Mfc3Valve.TurnValve(on, out _); break; case ValveType.Mfc4: _Mfc4Valve.TurnValve(on, out _); break; case ValveType.Mfc5: _Mfc5Valve.TurnValve(on, out _); break; case ValveType.Mfc6: _Mfc6Valve.TurnValve(on, out _); break; case ValveType.Mfc7: _Mfc7Valve.TurnValve(on, out _); break; case ValveType.Mfc8: _Mfc8Valve.TurnValve(on, out _); break; default: throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}"); } } public override void Monitor() { foreach (var gas in _gasLines) { gas.Monitor(); } } public void BuzzerBlinking(double time) { _SignalTower.BuzzerBlinking(time); } public void SwitchOnBuzzerAndRed() { _SignalTower.SwitchOnBuzzerAndRed("", null); } public override void Home() { // 与yp讨论过，PM 初始化不需要 SetLiftPin(MovementPosition.Down, out _); SetSlitDoor(false, out _); } public bool SetLiftPin(MovementPosition dirt, out string reason) { reason = string.Empty; switch (dirt) { case MovementPosition.Down: return _LiftPin.SetCylinder(false, out reason); case MovementPosition.Up: return _LiftPin.SetCylinder(true, out reason); case MovementPosition.Left: case MovementPosition.Right: case MovementPosition.Middle: throw new ArgumentException("Movement argument error"); } return true; } public void SetSlitDoor(bool open, out string reason) { reason = string.Empty; _slitDoor.SetCylinder(open, out reason); } public bool RetractWafer() { return _LoadLockArm.SetCylinder(false, out _); } public bool ExtendWafer() { return _LoadLockArm.SetCylinder(true, out _); } public bool FlowGas(int gasNum, double val) { if (_gasLines.Length <= gasNum) return false; _gasLines[gasNum].Flow(val); return true; } public bool StopGas(int gasNum) { if (_gasLines.Length <= gasNum) return false; _gasLines[gasNum].Stop(); return true; } public void StopAllGases() { foreach (var line in _gasLines) { line.Stop(); } } public bool TurnPendulumValve(bool on) { return _pendulumValve.TurnValve(on); } public bool SetPVPressure(int pressure) { return _pendulumValve.SetPressure(pressure); } public bool SetPVPostion(int position) { return _pendulumValve.SetPosition(position); } public void HeatChiller(double value, double offset) { _Chiller?.SetChillerTemp((float)value, (float)offset); _Chiller?.SetChillerOnOff(true); } public bool CheckChillerStatus() { return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError; } public void SetGeneratorCommunicationMode(int mode) { _Generator?.SetCommunicationMode(mode); } public bool GeneratorPowerOn(bool on) { if (_Generator == null) return false; if (on && !IsRFGInterlockOn) { EV.PostAlarmLog(Module.ToString(), "射频电源 Interlock条件不满足"); return false; } return _Generator.SetPowerOnOff(on, out _); } public bool GeneratorSetpower(float val) { if (_Generator == null) return false; if (Math.Abs(val) > 0.01) _Generator.SetPower((ushort)val); return true; } public bool GeneratorBiasPowerOn(bool on) { if (_GeneratorBias == null) return false; if (on && !IsRFGInterlockOn) { EV.PostAlarmLog(Module.ToString(), "Bias射频电源 Interlock条件不满足"); return false; } return _GeneratorBias.SetPowerOnOff(on, out _); } public bool GeneratorBiasSetpower(float val) { if (_GeneratorBias == null) return false; if (Math.Abs(val) > 0.01) _GeneratorBias.SetPower((ushort)val); return true; } public bool GeneratorBiasSetMatchMode(bool val) { if (_GeneratorBias == null) return false; string reason = string.Empty; _GeneratorBias.SetMatchingAutoMode(val, out reason); return true; } public bool SetMatchPosition(float c1, float c2) { if (_Match == null) return false; string reason = string.Empty; _Match.SetMatchPosition(c1, c2, out reason); return true; } public bool SetBiasMatchPosition(float c1, float c2) { if (_GeneratorBias == null) return false; string reason = string.Empty; _GeneratorBias.SetMatchPosition(c1, c2, out reason); return true; } public bool SetBiasPulseMode(bool on) { if (_GeneratorBias == null) return false; _GeneratorBias.SetPulseMode(on); return true; } public bool SetBiasPulseRateFreq(int nFreq) { if (_GeneratorBias == null) return false; _GeneratorBias.SetPulseRateFreq(nFreq); return true; } public bool SetDiasPulseDutyCycle(int percentage) { if (_GeneratorBias == null) return false; _GeneratorBias.SetPulseDutyCycle(percentage); return true; } public bool SetESCClampVoltage(int nVoltage) { if (_ESCHV == null) return false; return _ESCHV.SetOutputVoltage(nVoltage); } public bool CheckGeneratorAndHVInterlock(VenusDevice device) { eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV; string deviceName = device == VenusDevice.Rf ? "RF Generator" : "ESC HV"; if (!PMLidClosed) { LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as PM Lid is Open."); return false; } if (!IsVAC) { LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as PM is not Vacuum."); return false; } if(!IsWaterFlowOk) { LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Water Flow is OFF."); return false; } if(!IsRFGInterlockOn) { LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Generator Interlock is OFF."); return false; } if(!SourceRFFanInterlock) { LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Source RF Fan is OFF."); return false; } if(!SlitDoorClosed) { LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Slit Door is open."); return false; } return true; } #region EndPoint public bool CheckEndPoint() { EPDDevice epd = DEVICE.GetDevice($"{Module}.EPD"); if (epd == null) return false; return epd.IsEnd; } public void StartEndPoint(string config, int index) { EPDDevice epd = DEVICE.GetDevice($"{Module}.EPD"); if (epd == null) return; epd.StepStart(config, index); } public void StopEndPoint() { EPDDevice epd = DEVICE.GetDevice($"{Module}.EPD"); if (epd == null) return; epd.StepStop(); } public void EndPointRecipeStop() { EPDDevice epd = DEVICE.GetDevice($"{Module}.EPD"); if (epd == null) return; epd.RecipeStop(); } public void EndPointRecipeStart(string recipeName) { EPDDevice epd = DEVICE.GetDevice($"{Module}.EPD"); if (epd == null) return; epd.RecipeStart(recipeName); } #endregion public void SetBacksideHeFlow(double flow) { if (_backsideHe == null) return ; _backsideHe.Flow(flow); } public bool SetBacksideHePressure(int mTorr) { if (_backsideHe == null) return false; return _backsideHe.SetBacksideHelium(mTorr); } public bool SetBacksideHeThreshold(int nMin, int nMax) { if (_backsideHe == null) return false; return _backsideHe.SetFlowThreshold(nMin, nMax); } } }