using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Simulator.Core.Driver; using System; using System.Collections.Generic; using Venus_Simulator.Devices; using System.Threading; namespace Venus_Simulator.Instances { public class SimulatorSystem : Singleton { private PeriodicJob _thread; private Random _rd = new Random(); private RD_TRIG _trigATM = new RD_TRIG(); private RD_TRIG _trigVAC = new RD_TRIG(); private R_TRIG _trigLLExtend = new R_TRIG(); private R_TRIG _trigLLRetract = new R_TRIG(); private static int count = 0; private readonly float ATM_THRESHOLD = 750000; private readonly float ATM_PRESSURE = 760000; private readonly float ATM_LoadLock_PRESSURE = 760000; private readonly uint VAC_SW_PRESSURE = 9500; private readonly uint PROCESS_GAUGE = 10000; private Dictionary _MockDevices = new Dictionary(); public SimulatorSystem() { //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock()); //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock()); //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock()); // TODO } ~SimulatorSystem() { _thread?.Stop(); } public void Initialize() { SetDefaultValue(ModuleName.PMA); SetDefaultValue(ModuleName.PMB); SetTMDefaultValue(); Singleton.Instance.Initialize(false); _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true); } private void SetDefaultValue(ModuleName mod) { // chamber IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = false; IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = true; IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false; IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true; IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true; IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true; IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true; IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true; IO.DI[$"{mod}.DI_Process_VAC_Gauge_High_Alarm"].Value = false; IO.DI[$"{mod}.DI_Process_VAC_Gauge_Low_Alarm"].Value = false; IO.DI[$"{mod}.DI_Chamber_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Vacuum_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Loadlock_Vacuum_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_ESC_He_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false; IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false; IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true; IO.DI[$"{mod}.DI_ESC_He_VAC_Gauge_Alarm"].Value = false; IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true; IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false; IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true; IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false; IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true; IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true; //// pressure SetAiValue($"{mod}.AI_Foreline_Pressure", 5000); //SetAiValue($"{mod}.AI_Process_Pressure_High", 5000); SetAiValue($"{mod}.AI_Process_Pressure_Low", 1000); //SetAiValue($"{mod}.AI_Chamber_Pressure", ATM_PRESSURE); SetAiValue($"{mod}.AI_Process_Pressure", PROCESS_GAUGE); SetAiValue($"{mod}.AI_Chamber_Pressure", 5000); SetAiValue($"{mod}.AI_Loadlock_Pressure", ATM_LoadLock_PRESSURE); //// Temperature SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27); SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28); if (mod == ModuleName.PMA) { SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29); } else if (mod == ModuleName.PMB) { SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30); } // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); } private void SetTMDefaultValue() { ModuleName mod = ModuleName.TM; IO.DI[$"{mod}.DI_TM_Power_On"].Value = true; IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true; IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true; IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true; IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true; IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true; IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true; IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true; IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true; IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true; IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true; // Datetime SetAiValue($"{mod}.AI_Year", DateTime.Today.Year); SetAiValue($"{mod}.AI_Month", DateTime.Today.Month); SetAiValue($"{mod}.AI_Day", DateTime.Today.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); } private bool OnMonitor() { try { // PMA MonitorSlitDoor(ModuleName.PMA); MonitorPin(ModuleName.PMA); MonitorPressure(ModuleName.PMA); MonitorExtendAndRetract(ModuleName.PMA); //MonitorTemperature(ModuleName.PMA); MonitorGas(ModuleName.PMA); //MonitorRF(ModuleName.PMA); ChangeTime(ModuleName.PMA); //MonitorIOPumpCtrl(ModuleName.PMA); //// PMB //MonitorSlitDoor(ModuleName.PMB); //MonitorPin(ModuleName.PMB); //MonitorPressure(ModuleName.PMB); //MonitorTemperature(ModuleName.PMB); //MonitorGas(ModuleName.PMB); //MonitorRF(ModuleName.PMB); //ChangeTime(ModuleName.PMB); //MonitorIOPumpCtrl(ModuleName.PMB); MonitorMFSlitDoor(); ChangeTime(ModuleName.TM); } catch (Exception e) { LOG.WriteExeption(e); } return true; } private void ChangeTime(ModuleName mod) { // Heartbeat with PLC SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat")); SetAiValue($"{mod}.AI_Year", DateTime.Now.Year); SetAiValue($"{mod}.AI_Month", DateTime.Now.Month); SetAiValue($"{mod}.AI_Day", DateTime.Now.Day); SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour); SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute); SetAiValue($"{mod}.AI_Second", DateTime.Now.Second); } void MonitorSlitDoor(ModuleName mod) { // slit door open if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false; } // slit door close if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value) { IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false; IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true; } } void MonitorMFSlitDoor() { ModuleName mod = ModuleName.TM; // LLA T door open if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value) { IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false; } // LLB T door open if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value) { IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false; } // LLA E door open if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value) { IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false; } // LLB E door open if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value) { IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false; } // LLA T door close if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value) { IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true; } // LLB T door close if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value) { IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true; } // LLA E door close if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value) { IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true; } // LLB E door close if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value) { IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false; IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true; } } void MonitorPin(ModuleName mod) { // lift pin up if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value) { IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value; IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value; } } void MonitorExtendAndRetract(ModuleName mod) { // Extend _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value; if (_trigLLExtend.Q) { _trigLLRetract.RST = true; Thread.Sleep(500); IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true; IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false; IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; } // Retract _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value; if (_trigLLRetract.Q) { count++; _trigLLExtend.RST = true; Thread.Sleep(500); IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false; IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true; if (count == 1) { IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; } else if (count == 2) { count = 0; IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true; IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false; } } } void MonitorPressure(ModuleName mod) { // pressure string sAI_Foreline = "AI_Foreline_Pressure"; // Loadlock pressure string sAI_LoadLockPressure = "AI_Loadlock_Pressure"; // Foreline if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open) { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600)); } else { SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600)); } // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr] string sAI_ChamberPressure = "AI_Chamber_Pressure"; string sAI_ProcessPressure = "AI_Process_Pressure"; //float chamber_pressure = GetMockChamberPressure(mod); //float process_pressure = GetAiValue($"{mod}.AI_Process_Pressure"); // soft pump & fast pump DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"]; DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"]; DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"]; if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value) { if (fast_pump_vlv.Value && soft_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160)); } else if (fast_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130)); } else if (soft_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110)); } else if (turbo_pump_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500); } } // fast vent & purge DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"]; //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"]; //if (vent_vlv.Value || purge_vlv.Value) //{ // if (vent_vlv.Value && purge_vlv.Value) // { // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) // { // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000); // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); // } // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) // { // getAiValue_ProcessPressure = getAiValue_ChamberPressure; // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500); // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500); // } // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000)); // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160)); // } // else // if (vent_vlv.Value) { float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}"); float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000) { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150); } else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000) { getAiValue_ProcessPressure = getAiValue_ChamberPressure; SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300); } else { SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000); } //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000)); //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150)); } // Loadlock Pumping Valve DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"]; if (Loadlock_pump_vlv.Value) { SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000); } // Loadlock vent DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"]; if (Loadlock_vent_vlv.Value) { SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000); } // 压力值越界,复位 float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}"); if (chamber_pressure1 > ATM_PRESSURE) { SetAiValue($"{mod}.AI_Chamber_Pressure", ATM_PRESSURE); } else if (chamber_pressure1 < 20) { SetAiValue($"{mod}.AI_Chamber_Pressure", 20); } float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}"); if (process_pressure1 > PROCESS_GAUGE) { SetAiValue($"{mod}.AI_Process_Pressure", PROCESS_GAUGE); } else if (process_pressure1 < 20) { SetAiValue($"{mod}.AI_Process_Pressure", 20); } float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}"); if (foreline_pressure > 10000) { SetAiValue($"{mod}.AI_Foreline_Pressure", 10000); } else if (foreline_pressure < 150) { SetAiValue($"{mod}.AI_Foreline_Pressure", 150); } // LoadLock压力值越界,复位 float LoadLock_pressure1 = GetAiValue($"{mod}.{sAI_LoadLockPressure}"); if (LoadLock_pressure1 > ATM_LoadLock_PRESSURE) { SetAiValue($"{mod}.AI_Loadlock_Pressure", ATM_LoadLock_PRESSURE); } else if (LoadLock_pressure1 < 20) { SetAiValue($"{mod}.AI_Loadlock_Pressure", 20); } // 模拟压力计漂移 //int p1 = (int)GetMockChamberPressure(mod); //int new_p1 = _rd.Next(p1 - 2, p1 + 2); //SetAiValue($"{mod}.AI_Chamber_Pressure", new_p1); //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure"); //int new_p2 = _rd.Next(p2 - 1, p2 + 1); //SetAiValue($"{mod}.AI_Foreline_Pressure", new_p2); //int p3 = (int)GetAiValue($"{mod}.AI_Process_Pressure"); //int new_p3 = _rd.Next(p3 - 1, p3 + 1); //SetAiValue($"{mod}.AI_Process_Pressure", new_p3); // 根据当前压力值设定信号 //float chamber_pressure2 = GetMockChamberPressure(mod); // ATM switch IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD; // VAC switch IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE; // Throttle valve //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value; //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2); ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb; //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb); // 压力值 //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")); // } //} //else //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint")); // } //} //// 位置值 //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")); // } //} //else //{ // short increase = (short)_rd.Next(20, 30); // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase); // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")) // { // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint")); // } //} } //float GetMockChamberPressure(ModuleName mod) //{ // return GetAiValue($"{mod}.AI_Chamber_Pressure"); //} //void SetMockChamberPressure(ModuleName mod, float val) //{ // SetAiValue($"{mod}.AI_Chamber_Pressure", val); //} void SetAiValue(string name, float value) { byte[] flow = BitConverter.GetBytes(value); short high1 = BitConverter.ToInt16(flow, 0); short low1 = BitConverter.ToInt16(flow, 2); IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0); IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2); byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]); byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]); float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); } float GetAiValue(string name) { byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]); byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]); float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); return flow; } float GetAoValue(string name) { byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]); byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]); float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0); return flow; } void MonitorTemperature(ModuleName mod) { //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value; IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value; IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value; IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false; IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false; // 底座 //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value && // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint")) //{ // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2)); // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2)); //} //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value && // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint")) //{ // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2)); // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2)); //} // Foreline if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value && GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value && GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2)); } // Wall if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value && GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2)); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2)); } else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value && GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint")) { SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2)); SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2)); } } void MonitorGas(ModuleName mod) { // gas this.SimulateMFC(ModuleName.PMA, 1); this.SimulateMFC(ModuleName.PMA, 2); this.SimulateMFC(ModuleName.PMA, 3); this.SimulateMFC(ModuleName.PMA, 4); this.SimulateMFC(ModuleName.PMA, 5); this.SimulateMFC(ModuleName.PMA, 6); this.SimulateMFC(ModuleName.PMA, 7); this.SimulateMFC(ModuleName.PMA, 8); this.SimulateN2(ModuleName.PMA); this.SimulateHe(ModuleName.PMA); } private void SimulateMFC(ModuleName mod, byte gasNum) { var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint"); if (gasNum == 3) { sp = Math.Max(0, sp - 150); } var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb); } private void SimulateN2(ModuleName mod) { var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb); } private void SimulateHe(ModuleName mod) { var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb); } void MonitorRF(ModuleName mod) { // RF generator var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint"); var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble(); //var mock_sp = _rd.Next(sp - 3, sp + 3); SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb); //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value; } void MonitorIOPumpCtrl(ModuleName mod) { if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true; if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false; } public void Terminate() { _thread.Stop(); } //////////////////////////////////////////////////////////////////////// //////////////////////////////////////////////////////////////////////// public void SetCoolantOutletTemp(string module, int Temp) { SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp); } } }