using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.DBCore; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Windows; using System.Windows.Interop; using Venus_Core; using Venus_RT.Devices; using Venus_RT.Devices.IODevices; using Venus_RT.Devices.TM; using Venus_RT.Modules.PMs; namespace Venus_RT.Modules.TM.VenusEntity { public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine { private enum PickStep { WaitPMReady, OpenMFSlitDoor, PMPrepare, ArmExtend, QueryAWC, DropDownWafer, PickDelay, PickDelay1, PickDelay2, ArmRetract, SavePickeData, NotifyDone, CloseSlitDoor, EndDelay } private readonly TMBase _tm; private readonly ITransferRobot _robot; private int _pickdelay = 0; private ModuleName _targetModule; private Hand _hand; private int _targetSlot; private PMEntity _pmModule; private int _ExtendTimeout = 120 * 1000; private int _RetractTimeout = 120 * 1000; private int _controlPressureSetPoint = 90; private int _controlFlowSetPoint = 10; //private DateTime _starttime; private bool _queryAwc; private bool havelinerdoor; public SEMFPMPickRoutine(TMBase honghutm, ITransferRobot robot, ModuleName module) : base(module) { _tm = honghutm; _robot = robot; _queryAwc = false; } public RState Start(params object[] objs) { //_starttime = DateTime.Now; if (!_robot.IsHomed) { LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first"); return RState.Failed; } var pickItem = (Queue<MoveItem>)objs[0]; _targetModule = pickItem.Peek().SourceModule; _targetSlot = pickItem.Peek().SourceSlot; _hand = pickItem.Peek().RobotHand; if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule)) { _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule); } else { LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action"); return RState.Failed; } if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer"); return RState.Failed; } if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot)) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer"); return RState.Failed; } var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot); LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}"); _ExtendTimeout = SC.GetValue<int>($"{Module}.ExtendTimeout") * 1000; _RetractTimeout = SC.GetValue<int>($"{Module}.RetractTimeout") * 1000; _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime"); Reset(); return Runner.Start(Module, $"Pick from {_targetModule}"); } public RState Monitor() { Runner.Wait(PickStep.WaitPMReady, PMPrepare, _delay_60s) .Run(PickStep.OpenMFSlitDoor, OpenSlitDoor, CheckSlitDoorOpen) .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady, _delay_60s) .Delay(PickStep.PickDelay, _pickdelay) .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout) .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s) .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown) .Delay(PickStep.PickDelay1, _pickdelay) .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout) .Run(PickStep.SavePickeData, RecordAWCData, NullFun) .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose) .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms) .Delay(PickStep.PickDelay2, _delay_50ms) .End(PickStep.EndDelay, NullFun, _delay_50ms); return Runner.Status; } private bool PMPrepare() { return IsPressureReady(_targetModule) && _pmModule.IsIdle; } private bool IsPressureReady(ModuleName _targetModule) { if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline) { double PMPressure = _pmModule.ChamberPressure; double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint"); double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset"); if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range))) { return true; } else return false; } else return true; } private bool OpenSlitDoor() { return _tm.TurnSlitDoor(_targetModule,true); } private bool CheckSlitDoorOpen() { return _tm.CheckSlitValveOpen(_targetModule); } private bool ModulePrepare() { _pmModule.PostMsg(PMEntity.MSG.PreparePick); return true; } private bool IsModulePrepareReady() { return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick; } private bool ArmExtend() { if (!_pmModule.IsSlitDoorOpen) { LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open"); return false; } return _robot.PickExtend(_targetModule, _targetSlot, _hand); } private bool ArmRetract() { return _robot.PickRetract(_targetModule, _targetSlot, _hand); } private bool WaitRobotExtendDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand); return true; } else { Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}"); Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error); return true; } } private bool QueryAWC() { if (!_queryAwc) return true; else return _robot.QueryAwc(); ; } private bool WaitRobotQueryDone() { if (!_queryAwc) return true; if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}"); Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error); return true; } } private bool RecordAWCData() { if (!_queryAwc) return true; return true; } private bool NotifyPMPickWafer() { _pmModule.PostMsg(PMEntity.MSG.DropDownWafer); return true; } private bool WaitPMWaferDropDown() { return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready; } private bool WaitRobotRetractDone() { if (_robot.Status == RState.Running) { return false; } else if (_robot.Status == RState.End) { return true; } else { Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}"); Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error); return true; } } private bool NotifyPMDone() { _pmModule.PostMsg(PMEntity.MSG.PickReady); return true; } private bool PMDoorClose() { LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again"); return _tm.TurnSlitDoor(_targetModule, false); } private bool WaitPMDoorClose() { if (_tm.CheckSlitValveClose(_targetModule)) { LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close"); return true; } else { LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door"); return false; } } public void Abort() { _robot.Halt(); } } }