 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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1 month ago |
|
lixiang
|
6ec37ea42c
1.与Venus分开，删除冗余代码
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3 months ago |
|
lixiang
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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6 months ago |
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lixiang
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a9d8e56970
1.扩展alarm list
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7 months ago |
 zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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11 months ago |
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zhouhr
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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11 months ago |
 hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
|
hecl
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ea59788c5a
Venuse DE routine update &fix config can't hide bugs
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
|
lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 year ago |
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lixiang
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c457973fa2
1.添加Revtech Match
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1 year ago |
 sangwq
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03063bae6a
Enhance the routine framework.
|
1 year ago |
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lixiang
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b5616b7378
解决冲突，合并代码
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1 year ago |
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sangwq
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6a29fad5f9
update for unload/PMleakcheck bugs
|
1 year ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
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1 year ago |
|
sangwq
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f211c4242f
Efem module raw design.
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1 year ago |
|
lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
|
lixiang
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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1 year ago |
|
lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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1 year ago |
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sangwq
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
|
sangwq
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847220c6ce
update for initial recipe design
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2 years ago |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 years ago |
